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SEMI F47-0706 Compliance Certificate EPRI PQ Starsm Test Program

Certification Date: 10/06/05 PQ Star Reference Number SEMIF47.119

Manufacturer: Siemens Product: DC Contactor Model Numbers: 3RT1033-1BB40,-3BB40 3RT1034-1BB40,-3BB40 3RT1035-1BB40,-3BB40 3RT1036-1BB40,-3BB40 Serial Number (Units Tested): 3RT1033-1BB40: 4011209375871 3RT1036-1BB40: 4011209294349 See Attachments for SEMI F47 Description and Detailed Test Results.

Test Configuration: The DC Contactors were tested using SEMI F42 compliant voltage sag generator equipment. See Attachment B for details. Test Date: 09/28/05 Test Location: EPRI Solutions, Inc 942 Corridor Park Blvd Knoxville, TN 37932 Electrical Environment: 24 VDC (See Attachment A for details.)

This letter and subsequent documentation certifies that the Siemens 3RT103 series 24VDC contactors have been voltage sag tested per SEMI F42 test protocol and was found to comply with the SEMI F47 voltage sag immunity standard. This certification remains valid for the models tested and that are specified in this document as long as no component substitutions are made.

Certified by,

Baskar Vairamohan PQ Star Certification Specialist EPRI Solutions, Incorporated

Siemens 3RT103 series DC Contactors

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Attachment A – SEMI F47 Test Results

Testing was performed at EPRI Solutions Power Quality Laboratory in Knoxville, TN. The test protocol followed was SEMI F42 Test Method for Semiconductor Processing Equipment Voltage Sag Immunity. To ensure maximum accuracy the dc voltage at the contactors was set to 24Vdc and was verified with a qualified meter. Figure A-1 and A-2 shows the results tested per SEMI F42 test method and the SEMI F47 ride-through curve for the dc contactors. The dc contactor was tested at points below the curve to fully characterize the components. During the testing of SEMI F47 test points (1s at 80%, 0.5s at 70%, 0.2s at 50%, and 0.05s at 50%) the contactors did not trip. The contactors passed the SEMIF47 tests at 24 Vdc. The 3RT1034 and 3RT1035 series contactors that are included in this certification letter were not specifically tested. The units are identical to 3RT103 series with the exception that the contact tips are of a different size and/or a different material. It is our judgement that these units will match the results of the 3RT103 series contactors.

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Figure A-1 SEMI F47 test results for Siemens 3RT103 Series DC Contactors

24 VDC

19% 80% Passed SEMI F47 Test Point19% 80% Passed SEMI F47 Test Point19% 70% Passed SEMI F47 Test Point16% 70% Passed SEMI F47 Test Point16% 50% Passed SEMI F47 Test Point

0% 50% Passed SEMI F47 Test Point0% 50% Passed SEMI F47 Test Point

Results24 VDC SEMI F47

0.05

Seconds

0.500.200.200.05

4011209375871

Unit Passed Semi F47 TestsNotes:Duration

Serial No:

Percent of Nominal

1.000.50

BASKAR VAIRAMOHAN

Siemens 3RT1033-1BB40DC

9/28/200/5

Coil TypeTest Voltage

Date/Time:Test Engineer/Technician:

Semi F-47 Ride Through Curves

0

0.2

0.4

0.6

0.8

1

0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1

Duration (in seconds)

Vol

tage

(%

of

Nom

inal

)

SEMI F47 24 VDC

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Figure A-2 SEMI F47 test results for Siemens 3RT103 Series DC Contactors

24VDC

17% 80% Passed SEMI F47 Test Point17% 80% Passed SEMI F47 Test Point17% 70% Passed SEMI F47 Test Point15% 70% Passed SEMI F47 Test Point15% 50% Passed SEMI F47 Test Point

0% 50% Passed SEMI F47 Test Point0% 50% Passed SEMI F47 Test Point

Results24 VDC SEMI F47

0.05

Seconds

0.500.200.200.05

Baskar Vairamohan

Siemens 3RT1036-1BB40DC

9/27/2005

Coil TypeTest Voltage

Date/Time:Test Engineer/Technician:

4011209294349

Unit Passed Semi F47 TestsNotes:Duration

Serial No:

Percent of Nominal

1.000.50

Semi F-47 Ride Through Curves

0

0.2

0.4

0.6

0.8

1

0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1

Duration (in seconds)

Vol

tage

(%

of

Nom

inal

)

SEMI F47 24 VDC

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Attachment B - Test Configuration Test Configuration The dc voltage sag was created using the schematic shown in Figure B-1 and the actual test setup is shown in Figure B-2. Two dc power supplies, a 24Vdc power supply and a variable dc power supply, were connected to the input of the relays Q1 and Q2, which is controlled by the PLC. The diodes are used in the circuit prevent the power supplies from potential short circuit damage. The relay in the PLC switches between the two inputs based on the time interval set in the PLC. By adjusting the PLC timer and the voltage of the variable power supply, desired dc voltage sags could be created.

Figure B-1 – DC Voltage Sag Test Configuration Schematic

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Figure B-2 - Photo of Test Setup

Variable Dc Power Supply

Dc Contactor under test

PLC Controller

24 Vdc Power Supply

Oscilloscope

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Attachment C - SEMI F47 Abstract The SEMI F47 “Specification for Semiconductor Processing Equipment Voltage Sag Immunity” document defines the threshold that a semiconductor tool must operate without interruption (per SEMI F42) and it also provides a target for the facility and utility systems. The Recognizing semiconductor factories require high levels of power quality due to the sensitivity of equipment and process controls and that Semiconductor processing equipment is especially vulnerable to voltage sags, this document defines the voltage sag ride-through capability required for semiconductor processing, metrology, and automated test equipment. The requirements in this international standard were developed to satisfy semiconductor industry needs. While more stringent than existing generic standards, this industry-specific specification is not in conflict with known generic equipment regulations from other regions or generic equipment standards from other organizations. It is the intent of this standard to provide specifications for semiconductor processing equipment that will lead to improved selection criteria for sub-components and improvements in equipment systems design. While it is recognized that in certain extreme cases or for specific functions battery storage devices may be appropriate, it is not the intent of this standard to increase the size or use of battery storage devices provided with equipment. Focus on improvements in equipment component and system design should lead to a reduction or elimination in the use of battery storage devices to achieve equipment reliability during voltage sag events. The SEMI F47 document specifies the minimum voltage sag ride-through capability design requirements for equipment used in the semiconductor industry. The expected equipment performance capability is shown graphically on a chart representing voltage sag duration and percent deviation of equipment nominal voltage. The primary focus for this specification is semiconductor processing equipment including but not limited to the following tool types:

Etch equipment (Dry & Wet) Film deposition equipment (CVD & PVD) Thermal equipment Surface prep and clean Photolithography equipment (Stepper & Tracks) Chemical Mechanical Polishing equipment Ion Implant equipment Metrology equipment Automated test equipment

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The actual SEMI F47 ride-through curve is shown below.

Per

cen

t o

f E

qu

ipm

ent

No

min

al

Vo

lta

ge

0.2 0.50.1 1.00.05

D uration o f Vo ltag e S ag in Seconds

100

90

80

70

60

50

40

30

20

10

0 Figure C-1. The SEMI F47 Voltage Sag Ride-Through Curve The specification states that Semiconductor processing, metrology, and automated test equipment must be designed and built to conform to the voltage sag ride-through capability per the defined curve. Equipment must continue to operate without interrupt (per SEMI E10 ) during conditions identified in the area above the defined line. In the context of SEMI F47, interrupt means any assist or failure. An assist is defined as an unplanned interruption that occurs during an equipment cycle where all three of the following conditions apply:

The interrupted equipment cycle is resumed through external intervention (e.g., by an operator or user, either human or host computer).

There is no replacement of a part, other than specified consumables. There is no further variation from specification of equipment operation.

Furthermore, a failure is any unplanned interruption or variance from the specifications of equipment operation other than assists. Although no variation in the tool’s process is the goal, this standard addresses these issues as related to the equipment operation only.

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PQ Star Certification for the Semiconductor Industry

Having conducted power quality tests on hundreds of devices and electrical equipment since 1992, EPRI Solutions, Incorporated Power Delivery Unit (Formerly EPRI PEAC Corporation) is known worldwide for power quality testing expertise. Since April 1997, ESI has conducted voltage sag testing on semiconductor processing tools. In order to serve the semiconductor industry, ESI has established a certification program to test manufacturer equipment per established power quality standards. PQ Star certification for the SEMI F47 standard (Specification for semiconductor Processing Equipment Voltage Sag Immunity) is now available for semiconductor equipment suppliers. ESI utilizes the SEMI F42 test standard (Test Method for Semiconductor Processing Equipment Voltage Sag Immunity). With the PQ Star certification, ESI offers a third party verification that the equipment tested meets this important new power quality standard. For more information about the PQ Star test program for the semiconductor industry or inquire about testing see www.F47testing.com or call us at 865-218-8000.