Screw Dry Pump SDE Series - PolVac Corp All Pumps… · Energy-saving features combine with the...
Transcript of Screw Dry Pump SDE Series - PolVac Corp All Pumps… · Energy-saving features combine with the...
e-catalog�SDEJ�Ver2.1/06.6
Dry pumps reliable for all applications.Energy-saving features combine with the reliability, SDE Seriesachieved lower running cost.
- Advanced screw technology allows longer life operation under hard applications.- Anti-corrosion material construction allows pumping of corrosive gasses.- Upgraded screw design and driving system realized 40% reduction in energy
consumption, compared to conventional models.
SDE
SDE SeriesScrew Dry Pump
SCREWDRYPUMPSDESERIES
SCREWDRYPUMPSDESERIES
Specification TableModelSpecification SDE90 SDE120 SDE303 SDE603 SDE1203 SDE2003
Maximum Pumping Speed (L/min) 30,000Ultimate Pressure (Pa)Maximum Inlet Pressure (Pa)Inlet Flange NW40 NW50 NW100 NW160Outlet FlangeWeight(Approx.) (kg) 150 151 260 260 310 470Electric Power SupplyPower in normal operation (kW)* 2.8 3.2 3.0 3.1 3.6 4.0Electric Power Capacity (kVA) 6.5 10.5 13.0 17.6Cooling Water SupplyPurge N2 Gas Supply 0-60SLM
NW80NW40
3 phase AC200-220V 50/60Hz
4L/min and over
20,0001.3 0.5
Atmospheric pressure
1,300 2,000 5,000 10,000
* Power at ultimate pressure.
KASHIYAMA IND., LTD.
Pumping Curve(SP)
Pump Schematics (SDE90,SDE120)
Pump Schematics (SDE303,SDE603,SDE1203,SDE2003)
Note 1) Because we are constantly working to improve performance and upgrade ourproducts, specifications and diagrammatic representations in this catalog may changewithout notice.Note 2) Products displayed in this catalog must be approved for export in accordance withthe Foreign Exchange and Foreign Trade Control Act. Before placing an export order,please contact our Business Department.
-Dry vacuum Pump-Mechanical Booster Pump-Air Discharge System
URL:www.kashiyama.co.jp/mail address for inquiries:[email protected]
KASHIYAMA IND., LTD.
e-catalog�SDEJ�Ver2.1/06.6SDE
SCREWDRYPUMPSDESERIES
SCREWDRYPUMPSDESERIES
N W 50N W 40Inle tMode l
S D E 120S D E 90 551
560
HD ime ns ion: mm
E L C BN 2 pre s s ure ga uge
P owe r conne c tor
C a s te r with P IP E -F IT T IN G 1 /4 s tra ight
C ooling wa te r inle t R c3 /8
with s e lf-s e a l couple r
with s e lf-s e a l couple r
N 2 s upply portC ooling wa te r outle t R c3 /8
D uc t O D 50
O utle t N W 40
Inle t
N 2 control va lve
R e gula tor
E MO
R e mote control conne c tor
C ontrol pa ne l
C ommunica tion ca ble(L =2000mm)
170*80*30
540
(Out
let)
501
H(I
nlet
)
(50)
4244
143
1350
690
54
55 205
370
65 185
N 2 control va lve
O utle t N W 40 C a s te r
C ooling wa te r outle t R c3 /8C ooling wa te r inle t R c3 /8
N 2 s upply port
with s e lf-s e a l couple r
with P IP E -F IT T IN G 1 /4 s tra ight
with s e lf-s e a l couple r
N 2 pre s s ure ga ugeR e gula tor
P owe r conne c tor
O utle t N W 40
D uc t
Inle t
( O P T IO N )
( O P T IO N )S ile nce r
C he ck va lve
C ontrol pa ne l170*80*30
E L C B
R e mote control conne c tor
E MO
H
B(O
utle
t)
A(I
nlet
)
D
C(O
utle
t)
(28) g 42
f
(8)
(90)
5013
(c)
60
ba(89)
(163)
ed
W
10
100
1000
10000
100000
0.1 1 10 100 1000 10000 100000Pressure(Pa)
Pum
ping
Spee
d(L/
1000Pressure (Torr)
1001010.10.010.001
SDE90SDE120SDE303SDE603SDE1203SDE2003
Mode l Inle t D uc t D W H A B C a b c d e f gS D E 303 N W 50S D E 603 N W 80S D E 1203 N W 100 O D 50 900 400 906 945 841 352 195 155 550 200 115 200 59S D E 2003 N W 160 O D 75 1000 500 1090 1165 850 360 155 195 650 250 135 208 108
200 59155 472 200 115O D 50 760 400 906 945 841 352 133
KASHIYAMA IND., LTD.
e-catalog�RDJ�Ver2.1/06.6
New lower running cost pump for light to medium applications.RD achieves significant improvements in environmental performance byinnovative power-saving technology.
- Multistage configuration optimizes pumping efficiency, minimizes power consumption.- Applicable from light processes such as load rock and transfer, to etching and other medium
processes.- Upgraded roots element and driving system realized 70% reduction in energy consumption,
compared to conventional models.(RD90)
RD
RD SeriesRoots Dry Pump
Specification TableModel RD90(RDE90) RD120 RD303 RD603 RD1203
Maximum Pumping Speed (L/min) 1,300 2,000 5,000 10,000 20,000Ultimate Pressure (Pa)Maximum Inlet Pressure (Pa)Inlet Flange NW40 NW80 NW100Outlet FlangeWeight(Approx.) (kg) 130 140 240 300Electric Power SupplyPower in normal operation (kW)* 1.3 (0.65) 1.7 1.5 1.6 1.7Electric Power Capacity (kVA) 4.0 8.0 10.5
RD200330,000
NW160
475
2.115.1
Cooling Water SupplyPurge N2 Gas Supply
2.7 2.0 0.5Atmospheric pressure
NW40
3 phase AC200-220V 50/60Hz
3.5L/min and over0-50SLM
Specification
ROOTSDRYPUMPRDSERIES
ROOTSDRYPUMPRDSERIES
*Power at ultimate pressure.
Pumping Curve(SP)
Pump Schematics (RD90,RD120)
Pump Schematics (RD303,RD603,RD1203,RD2003)
Note 1) Because we are constantly working to improve performance and upgrade ourproducts, specifications and diagrammatic representations in this catalog may changewithout notice.Note 2) Products displayed in this catalog must be approved for export in accordance withthe Foreign Exchange and Foreign Trade Control Act. Before placing an export order,please contact our Business Department.
-Dry vacuum Pump-Mechanical Booster Pump-Air Discharge System
URL:www.kashiyama.co.jp/mail address for inquiries:[email protected]
KASHIYAMA IND., LTD.
e-catalog�RDJ�Ver2.1/06.6RD
ROOTSDRYPUMPRDSERIES
ROOTSDRYPUMPRDSERIES
735R D 90785R D 120
Mode l LD ime ns ion: mm
E L C B
N 2 pre s s ure ga uge
N 2 s upply port
C a s te r
with s e lf-s e a l couple r with s e lf-s e a l couple rC ooling wa te r inle t R c3 /8
P owe r conne c tor
C ooling wa te r outle t R c3 /8
Inle t N W 40
D uc t O D 50
O utle t N W 40
R e mote controlconne c tor
E MOR e gula tor
N 2 control va lve
with P IP E -F IT T IN G 1 /4 s tra ight
C ommunica tion ca ble(L =2000mm)
170*80*30C ontrol pa ne l
33
(35)
415
437
(Inl
et)
515
(Out
let)
125
432822
50
230
L
80 197
50
50
380
65 140
N 2 control va lve
S ile nce r
O utle t N W 40 C a s te r
C ooling wa te r outle t R c3 /8C ooling wa te r inle t R c3 /8
N 2 s upply port
with s e lf-s e a l couple r
with P IP E -F IT T IN G 1 /4 s tra ight
with s e lf-s e a l couple r
N 2 pre s s ure ga ugeR e gula tor
P owe r conne c tor
O utle t N W 40
D uc t
Inle t
( O P T IO N )
( O P T IO N )
C he ck va lve
C ontrol pa ne l170*80*30
E L C B
R e mote control conne ctor
E MO
H
(163)
B(O
utle
t)A(I
nlet
)
D
C(O
utle
t)
(28) g 42
f
(8)
(90)
5013
(c)
60
ba(89)
ed
W
10
100
1000
10000
100000
0.1 1 10 100 1000 10000 100000Pressure(Pa)
RD90RD120RD303RD603RD1203RD2003
1000Pressure (Torr)
1001010.10.010.001
Pum
ping
Spee
d(L/
min
)
Mode l Inle t D uc t D W H A B C a b c d e f gR D 303 N W 50R D 603 N W 80R D 1203 N W 100 O D 50 900 400 906 945 705 206 195 155 550 200 115 200 59R D 2003 N W 160 O D 75 1000 500 1090 1165 704 214 155 195 650 250 135 208 108
200 59155 472 200 115O D 50 760 400 906 945 705 206 133
e-catalog�SDLJ�Ver2.1/06.6
- Maximized the pumping speed in the atmospheric side to achieve higherthroughput.
- The combination with large booster pump allows higher pumping speed up to35,000L/min.
- Applicable for clean processes.
SDL
SDL SeriesHigh Throughput Dry Pump
SCREWDRYPUMPSDESERIES
SCREWDRYPUMPSDESERIES
Higher pumping speed.Support larger diameter wafer and larger FPD substrate applications.Higher pumping speed minimizes the tact time for large load lockchamber.
Specification TableModelSpecification
Maximum Pumping Speed (L/min)(Upper 50Hz / Lower 60Hz)Ultimate Pressure (Pa) 50/60HzMaximum Inlet Pressure (Pa)Inlet FlangeOutlet FlangeWeight(Approx.) (kg)Electric Power SupplyPower in normal operation (kW)Electric Power Capacity (kVA)Cooling Water SupplyPurge N2 Gas Supply
5L/min and over0-50SLM0 or 8SLM
Atmospheric pressure
3 phase AC200 50/60Hz AC220V 60Hz
KASHIYAMA IND., LTD.
6L/min and over
3 phase AC200-220V 50/60Hz
SD150L SD220L SDL25K SDL40K2,000 3,100
25,0002,400 3,700
4/2 4/3 0.5
NW50 NW100 NW160
325 450 620 910
3.6 5.06.1 8.3
NW40
SDL60K
40,000 55,000
6.917.0
7.023.6
7.428.1
NW50750
Pumping Curve(SP)
Pump Schematics
e-catalog�SDLJ�Ver2.1/06.6SDL
*1: T he pre s s ure re gula tor la yout va rie s from the dia gra m in the S D 150L a nd S D 220L mode ls .
W 2S D 150LS D 220L
Mode l950960
L 1492606 72
60H 1 H 2
661626
518630
H 3 H 4432402
L 34341
L 2440524
4345
W 1177217
4362
W 3 W 46774
3557
a b184152
135130
c d109143
3515
e fD ime ns ion: mm
E MO
R e mote control conne ctor
P owe r conne c torD uc t O D 50
Inle t N W 50
O utle t N W 40
C a s te r
C ooling wa te r outle t R c3 /8N 2 pre s s ure ga uge
C ooling wa te r inle t R c3 /8with s e lf-s e a l couple r
N 2 s upply portwith P IP E -F IT T IN G 1 /4 s tra ight
E L C B
with s e lf-s e a l couple rR e gula tor
170*80*30C ontrol pa ne l
C ommunica tion ca ble(L =2000mm)
(46)
L 3
H2
L 2
L 1
H3
(Inl
et)
H4
(Out
let)
H1
e
a b
d
c
f
85
W2
W1
W4
W3
* 1
Note 1) Because we are constantly working to improve performance and upgrade ourproducts, specifications and diagrammatic representations in this catalog may changewithout notice.Note 2) Products displayed in this catalog must be approved for export in accordance withthe Foreign Exchange and Foreign Trade Control Act. Before placing an export order,please contact our Business Department.
-Dry vacuum Pump-Mechanical Booster Pump-Air Discharge System
URL:www.kashiyama.co.jp/mail address for inquiries:[email protected]
KASHIYAMA IND., LTD.
10
100
1000
10000
100000
0.1 1 10 100 1000 10000 100000Pressure(Pa)
Pum
ping
Spee
d(L/
min
SD150L(50Hz)SD150L(60Hz)SD220L(50Hz)SD220L(60Hz)SDL25KSDL40KSDL60K
Pressure (Torr)1001010.10.010.001 1000
SD150L,SD220L
EMO
Inle t N W 100
1000
Inle
t111
0
27
Out
let6
33
C a s te r
O utle t N W 50
D uc t port O D 50
60
355155
C ontrol pa ne l
E L C B
1050
N 2 s upply port
C ooling wa te r Inle t R c1 /2
C ooling wa te r O utle tR c1 /2
5080
182
13
(44)
P ipe fitting 1 /4
with s e lf-s e a l couple r
170*80*30
40
E MO
R e gula torN 2 pre s s ure ga uge
N 2 control va lve
R e mote control conne c tor
P owe r conne c tor
520
260 140
with s e lf-s e a l couple r
30
P ipe fitting 1 /4
with s e lf-s e a l couple r
C ooling wa te r O utle t R c1 /2
C ooling wa te r Inle t R c1 /2
1250
Inle
t131
5
1200
C a s te r
65
Out
let6
33
O utle t N W 50
(72)
424
D uc t port O D 50
141Inle t N W 160
60
R e mote control conne c tor
C ontrol pa ne l
E L C B
E MO
P owe r conne c tor30
100 70
30
N 2 s upply port
N 2 pre s s ure ga uge
N 2 control va lve
207
R e gula tor
170
700
170*80*30
180
with s e lf-s e a l couple r
E MO
C ooling wa te r Inle t R c1 /2with s e lf-s e a l couple r
C ontrol pa ne l
1660
Inle
t172
0
1180
Out
let6
33
C a s te r
O utle t N W 50
D uc t port O D 50
355255Inle t N W 160
60
E MO
R e mote control conne c tor
P owe r conne c tor
E L C B
P ipe fitting 1 /4N 2 s upply port80
182
N 2 control va lve
N 2 pre s s ure ga ugeR e gula tor
170*80*30
375
750
140
C ooling wa te r O utle t R c1 /2with s e lf-s e a l couple r
13
30
80
50
40
SDL25K
SDL40K SDL60K
KASHIYAMA IND., LTD.
e-catalog HCJ Ver1.1/06.6
All-purpose dry pump.High performance and low cost together in a compact, lightweightpackage.Smaller footprint enables easy installation anywhere.
- Innovative horizontal screw configuration in a compact design- Lightweight aluminum construction.- Applicable from light processes such as load rock and transfer, tolight etching processes.
HC
HC SeriesLight Conpact Dry Pump
LIGHTCONPACTDRYPUMPHCSERIES
LIGHTCONPACTDRYPUMPHCSERIES
Specification TableSpecification HC60A/B HC250 HC450Maximum Pumping Speed (L/min) 900 3,300 6,300(Upper 50Hz / Lower 60Hz) 1,100 4,000 7,600Ultimate Pressure (Pa) 1Maximum Inlet Pressure (Pa)Inlet Flange NW50 NW80Outlet FlangeWeight(Approx.) (kg) 77 160 195Electric Power SupplyPower in normal operation (kW)Electric Power Capacity (kVA) 3.0 5.1 5.8
2.1 2.5 2.9
Cooling Water SupplyPurge N2 Gas Supply (Type B only) 0-12SLM12SLM
NW40
3 phase AC200 50/60Hz AC220V 60Hz
3.5L/min and over
0.5Atmospheric pressure 1,300
NW40
Model
Pumping Curve(SP)
Pump Schematics (HC60)
Pump Schematics (HC250,HC450)
Note 1) Because we are constantly working to improve performance and upgrade ourproducts, specifications and diagrammatic representations in this catalog may changewithout notice.Note 2) Products displayed in this catalog must be approved for export in accordance withthe Foreign Exchange and Foreign Trade Control Act. Before placing an export order,please contact our Business Department.
-Dry vacuum Pump-Mechanical Booster Pump-Air Discharge System
URL:www.kashiyama.co.jp/mail address for inquiries:[email protected]
KASHIYAMA IND., LTD.
e-catalog HCJ Ver1.1/06.6HC
LIGHTCONPACTDRYPUMPHCSERIES
LIGHTCONPACTDRYPUMPHCSERIES
Dimension:mm
Inlet L3L1 L2Model
NW80HC 450
HC 250 NW50
120860 358
105750 265
W3W2W1
340190430
160400 315
C ooling water flow meter
N2 flow meter
C aster C ooling water inlet R c3/8
C ooling water outlet R c3/8R emote control connector
P ower connector N2 supply port R c1/4
N2 pressure gauge
R egulator
Duct OD50Inlet Outlet NW40
E LC B
C ontrol panel
720
750
(Inl
et)
778
750
(Out
let)
673540
104
L1
L365 L2
W1
W3
W2 155
745
170
C ontroller P C 100
20
11
222
240
90 6
2050
22010 10
5
2
204 78
Outlet NW40
(OP T ION)
S ilencer
Inlet NW40
Duct OD50
C ooling water flow meter
C oolin water outlet R c3/8R egulator for N2
C ooling water inlet R c3/8
S ignal connector
P ower connector
(attached to T ype B )
N2 supply port R c1/4
(attached to T ype B )
(63)
328
(Out
let)
497
(Out
let)
304
40
320
(Inl
et)
150
58
285
142.5142.5
(28)
25 23
5010
0
(63)
10
100
1000
10000
0.1 1 10 100 1000 10000 100000Pressure(Pa)
Pum
ping
Speed(L/min)
HC60(50Hz)HC60(60Hz)HC250(50Hz)HC250(60Hz)HC450(50Hz)
HC450(60Hz)
1000Pressure (Torr)
1001010.10.010.001
e-catalog KMBJ Ver2.0/04.6
- High efficiency motor and driving system realized significant downsize compare toconventional models.
- Canned motor is adapted to improve reliability.- Improvements of the driving system and mechanical efficiency allow minimizing the power.- Rotation speed control achieves continuous operation under the atmospheric pressure.- Synchronous motor enables consistent pumping performance at any power supply
frequency. (03 series)
KMB
KMB SeriesBooster Pump
BOOSTERPUMPKMBSERIES
BOOSTERPUMPKMBSERIES
Can be used in combination with the dry pumps to enhance pumpingcapacity.Rotational speed control enables operation from atmosphericpressure.
Specification TableKMB603 KMB1203 KMB2003
Maximum Pumping Speed (L/min)* 30,000Ultimate Pressure (Pa)*Maximum Inlet Pressure (Pa)Inlet Flange VG80 VG100 VG150Outlet Flange VF65 VF100 VF150Weight(Approx.) (kg) 85 110 230Electric Power SupplyPower in normal operation (kW)** 0.3 0.4 0.8Electric Power Capacity (kVA) 6.5 11.1Cooling Water SupplyPurge N2 Gas Supply
*The values shown here represent operation in combination with the dry pump as recommended by Kashiyama.
10,000 20,0000.5
0 or 20SCCM
Atmospheric pressure
3 phase AC200-220V 50/60Hz
4.03L/min and over
Specification Model
**Power at ultimate pressure.
KASHIYAMA IND., LTD.
Pumping Curve(SP)
Pump Schematics (KMB603,KMB1203)
Pump Schematics (KMB2003)
e-catalog KMBJ Ver2.0/04.6KMB
BOOSTERPUMPKMBSERIES
BOOSTERPUMPKMBSERIES
D ime ns ion: mm
V F 100 607 . 5 305746K MB 1203 V G 100
V G 80
Inle t
K MB 603
Mode l
V F 65
O utle t
596 457 . 5
L 1 L 2
230
L 3
O il dra in plug
Inle t
with P IP E -F IT T IN G 3 /8
C ooling wa te r O utle t
with P IP E -F IT T IN G 3 /8
C ooling wa te r inle tO utle t
O il le ve l ga uge
O il s upply plugwith P IP E -F IT T IN G 1 /4
N 2 s upply port
32
230
114
(Inl
et)
L 3
L 2
L 1
116
113
(Out
let)
27
7272
Note 1) Because we are constantly working to improve performance and upgrade ourproducts, specifications and diagrammatic representations in this catalog may changewithout notice.Note 2) Products displayed in this catalog must be approved for export in accordance withthe Foreign Exchange and Foreign Trade Control Act. Before placing an export order,please contact our Business Department.
-Dry vacuum Pump-Mechanical Booster Pump-Air Discharge System
URL:www.kashiyama.co.jp/mail address for inquiries:[email protected]
KASHIYAMA IND., LTD.
344
150 150
330
229 100 100
329
842
C ooling wa te r fe e d wa te r F IN E L O K 3 /8
O il le ve l che ck
172(
Inle
t)16
5(O
utle
t)
C ooling wa te r dra in outle t F IN E L O K 3 /8 O utle t V F 150
Inle t V G 150F lle r ne ck
10
100
1000
10000
100000
0.1 1 10 100 1000 10000 100000Pressure(Pa
Pum
ping
Spee
d(L/
mi
KMB603 (DP:SDE90)KMB1203(DP : SDE120)KMB2003(DP : SDE120)
1000 1000Pressure (Torr)
1001010.10.010.001
KASHIYAMA IND., LTD.
e-catalog MUJ Ver1.0/04.6
The world smallest and least power consumption.You can integrate into any equipment easily.
- Kashiyama ultimate space save design has realized the pumping speed of1660l/min with the small body 230 mm x 450 mm.
- The MU series are perfect for load locks, clean exhaust for transfer rooms andany light process application of semiconductor manufacturing.
MU
MU Series / For Tool Mount /
Micro Dry Pump
MU100 MU3001,660 5,000
NW50
60 100
1.5 0.5
NW25
MICRODRYPUMPMUSERIES
MICRODRYPUMPMUSERIES
2.2 2.2+2.20.7 0.9
Specification TableModelSpecification
Maximum Pumping Speed (L/min)Ultimate Pressure (Pa)Maximum Inlet Pressure (Pa)
Inlet FlangeOutlet FlangeWeight(Approx.) (kg)
Power in normal operation (kW)Electric Power Capacity(kW)
Atmospheric pressure
Pump Schematics (MU100)
Pump Schematics (MU300)
Note 1) Because we are constantly working to improve performance and upgrade ourproducts, specifications and diagrammatic representations in this catalog may changewithout notice.Note 2) Products displayed in this catalog must be approved for export in accordance withthe Foreign Exchange and Foreign Trade Control Act. Before placing an export order,please contact our Business Department.
-Dry vacuum Pump-Mechanical Booster Pump-Air Discharge System
URL:www.kashiyama.co.jp/mail address for inquiries:[email protected]
KASHIYAMA IND., LTD.
e-catalog MUJ Ver1.0/04.6MU
MICRODRYPUMPMUSERIES
MICRODRYPUMPMUSERIES
520 55
0
199
62.5
22
115
96 . 540
14
25
150 150
50
40 40
2-M8 2-M8
85 . 5 25219 413
202 202
230
N 2 C ontrol V a lve
279450
109
(99)(102) 89
125
26
4293
35
4042
194194
P owe r S upply L E D (L E D 1 /gre e n)R un L E D (L E D 2 /gre e n)
E rror W a rning L E D (L E D 3 /ora nge )E rror A la rm L E D (L E D 4 /re d)
H a ndhe ld controlle rC a ble
N 2 pre s s ure ga uge
N 2 R e gula torP owe r inputconne c tor(C N 1)
R e mote controlconne c tor(C N 2)
H a ndhe ld controlle rconne c tor(C N 3)
C ooling wa te r inle t R c3 /8( with s e lf-s e a l couple r)
C ooling wa te r outle t R c3 /8( with s e lf-s e a l couple r)
N 2 G a s inle t( with T ube F itting 1 /4 s tra ight)
Ma in s witch
(for ca s e purge )
R igid C a s te r( O D 40*4)
A djus te r( O D 24*4)
O utle t N W 25
Inle t N W 50B ox D uc t ( O D 50)
L ifting B olt(M8*4)
Ma in s witch
P owe r input
Inle t N W 50
O utle t N W 25
N 2 G a s inle t
R e gula torN 2 pre s s ure ga uge
H a ndhe ld controlle r
conne c tor(C N 1)R e mote controlconne c tor(C N 2)
( with T ube F itting 1 /4 s tra ight)
C a ble
H a ndhe ld controlle rconne c tor(C N 3)
230
275
450
R igid C a s te r ( O D 40*4)
6 25217 414
22
185
64 27
131
A djus te r ( O D 24*4)
C ooling wa te r inle t R c1 /4( with s e lf-s e a l couple r)
C ooling wa te r outle t R c1 /4( with s e lf-s e a l couple r)
22
(115) 11585
43
190202
818
33
90
33
902-M6
2-M6
76
P owe r S upply L E D (L E D 1 /gre e n)R un L E D (L E D 2 /gre e n)
E rror W a rning L E D (L E D 3 /ora nge )E rror A la rm L E D (L E D 4 /re d)
L ifting B ra cke t(*2)
a fte r ins ta lling the pump)(R e moving the bra cke ts is pos s ible
52
6637
13
60
(29)
(a tta che d to MU 100N )
(a tta che d to MU 100N )
89
125
26