Ramboss-500i · UV-VIS-NIR Micro Raman + ATR UV VIS NIR Micro Raman mapping ATR Measurement system...

www.toptical.com.tw 02-2346-1510 [email protected]

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Lasers·Light Sources

Solar Cells·Lighting

CCD Cameras

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SpectroscopesTests·Instruments

Semiconductors·Communications

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Detection·Sensors

Ramboss-500iMicro Raman Measurement system

• Highperformanceconfocalspectroscopicmicrosamplechamber• 1umbeamspotsizeand1umstepmappingresolution• Ramanshiftresolution:[email protected],1800gr/mmgrating• Lownoise,lowdarkcurrent,highquantumefficiencyTEcooledCCD

• Ramanspectroscopy• ChemicalSystems&processing• Pharmaceuticals• Biological&medicalsystems• food&forensicapplications

2. Microscope Raman sample Chamber• HighperformanceSpectroscopicMicroSampleChamber• Beamspotresolution:approx.1um@100xObjectivelens@TEMooMode(TFS:TheoreticalFocalSpotsize)

• MicroscopicbodyandXYstageforMicroRaman.1)100x,M-PlanObjectivelensW.D:6mm2)50x,S-PlanObjectivelensW.D:20mm

• HighreflectanceMirrorsforexcitationwavelength,UV-VIS-NIR• Max.1600xCCDcameraSampleMonitoringsystem• RamanEdgefiltersetfor632.8nm• systemintegrationandtestevaluationwithSiwafer

1. 632.8nm He-Ne Excitation Laser set• outputpower:20mWHe-Nelaserset

Features

Application

Specifications

HeNeLasers

• 266nmDPSS,325nmHe-Cdlasers,488,514nmArlaserset,532nmDPSS,632.8nmHe-Ne,785nmLDlasers*Itcanbechangedabovespecificationsforsystemupgradewithoutnotice

• Ramboss-500i:Laser+RamanChamber+MonoRa500i+TECooledCCDDetector+Mappingstage

• Ramboss-T500i:Laser+RamanChamber+TripleMonoRa500i+TECooledCCDDetector+Mappingstage

4. High performance, TE cooled CCD detection set• Back-illuminatedtypeCCD• Pixelformat:1024x128pixels,• Pixelsize:26umpixelsize• DarkCurrent:0.01e-/pix/sec• MinimumoperatingTemp:-70°C/TEcooled,withwatercirculator

• SpectralRange:200-1050nm• Includes16bits,100KHz,USBinterface• includesDataacquisitionprocessor,WindowXPVer.&19"TFT-LCDmonitor

3. High resolution spectrograph, MonoRa500i• Focallength:500mm.• Resolution:[email protected](1200gr/mmgrating)with10umslits

• Opticalpath:f/6.5imagingCzerny-Turnerspectrometer• GratingTurret:triplegrating(68mmx68mm)turret,• Interface:USB&RS232Standard• Accuracy:+/-0.2nm• Amicrometercontrolledadjustableslitassemblyforentrance,0to5mm(10micrometerstep)

• includesGratings;1)3-180-450H,HolographicGrating,1800G/mm,300nm-900nmwavelengthspectralcoverage:28nm2)3-300-500,RuledGrating,300G/mm,500nmblazed,300nm-1000nmrangespectralcoverage :128nm,

Available Lasers

Ordering Information

MonoRa500i

iDUS.CCDDetector

DPSSGreenLaserArlaser

DPSSBlueLaser


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1.I0785MM0350M,785nmUserConfigurable,Spectrum,-StabilizedLaserModulewith350mWofoutputpowerand

2.MonoRa151i,150mmfocallengthmonochromator-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:150mm,-Interface:RS232&USBstandard-Includedfiberalignholder

3.HighperformanceTEcooledCCDdetectionset-Back-illuminatedtypeCCD-Pixelformat:1024x128pixels,-MinimumoperatingTemp:-70°C/TEcooled.-SpectralRange:200-1050nm

4.FiberopticRamanProbestationandsampleholderforSolidandLiquid-100umexcitation fiber,200umcollection fiberwith filteringandsteeringMicro-opticswithSMAtypecoupling-Stainless-steel,cylindricalprobehead,0.5”dia.X4”lengthwithintegratedFiberoptic,2meters-Spectralrange:300-3900cm-1(Stokes)-Workingdistance:7.5mm-Outputbeamspotsize:8-10mmdia.

System 1 Compact Vis-NIR Raman W/raman probe

Macro Probe Raman Measurement system

System 2 UV-VIS-NIR Micro Raman

UV-VIS-NIR Micro Raman system

1.ExcitationLasersourceA.LDM830100CWA830nmSolidStateLaserSet-Outputpower:[email protected]:[email protected],325nmHeCdlaserset-outputpower:50mW@325nmTEM00mode

2.Ramboss-500i,MicroRamansamplechamber-HighperformanceSpectroscopicMicroSampleChamber-UsingtheWideapertureandLongWorkingDistanceM-planObjectiveLens-Beamspotresolution:approx.1um@100xObjectivelens@TEMooMode(TFS:TheoreticalFocalSpotsize)-microscopicbodyandmotorizedXYstageforMicroRamanmapping3-5umbacklash,UV-NIRobjectivelens-HighreflectanceMirrorsforexcitationwavelength,UV-VIS-NIR-Max.10000xCCDcameraSampleMonitoringsystem-RamanEdgefilter&bandpassfilter

3.MonoRa-512iMonochromator/Spectrograph-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:500mm,-Ramanshiftfrom100Cm-1to567Cm-1with1200gr/mm@830nmwith41nmcoverage(Theoreticalvalue)-Ramanshiftsystemresolution:<1.8cm-1@830nm,1200gr/mm(Theoreticalvalue)



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System 3 UV-VIS-NIR Micro Raman + PL

UV-VIS-NIR Micro Raman+PL measurement system

1.ExcitationLasersourceA.LDM830100CWA830nmSolidStateLaserSet-Outputpower:100mW/Mode:TEM00B.FKL532.50.CWA.L532nmSolidStateLaserSet-Outputpower:50mW/Mode:TEM00C.IK3501R-G,325nmHeCdlaserset-outputpower:50mW

2.Ramboss-500i,MicroRamansamplechamber-HighperformanceSpectroscopicMicroSampleChamber-UsingtheWideapertureandLongWorkingDistanceM-planObjectiveLens-Beamspotresolution:approx.1um@100xObjective lens@TEMooMode(TFS:TheoreticalFocalSpotsize)-microscopicbodyandmotorizedXYstageforMicroRamanmapping3-5umbacklash,UV-NIRobjectivelens-HighreflectanceMirrorsforexcitationwavelength,UV-VIS-NIR-Max.10000xCCDcameraSampleMonitoringsystem-RamanEdgefilter&bandpassfilter



System 4 UV-VIS-NIR Micro Raman + ATR

UV VIS NIR Micro Raman mapping ATR Measurement system

1.A.532nmDPSSExcitationLasersource-100mW,TEMooModeB.LDM830100CWA830nmSolidStateLaserSet-Outputpower:100mW,TEM00C.IK3202R-D,25mW,325nmHeCdlaserset-Aircooled,TEMmultimode,1.6mmbeamdia.

2.Ramboss-500I,MicroRamansamplechamber-HighperformanceSpectroscopicMicroSampleChamber-UsingtheWideapertureandLongWorkingDistanceM-planObjectiveLens-Beamspotresolution:approx.1um@100xObjectivelens@TEMooMode(TFS:TheoreticalFocalSpotsize)-microscopicbodyandmotorizedXYstageforMicroRamanmapping3-5umbacklash,UV-NIRobjectivelens-Max.10000xCCDcameraSampleMonitoringsystem-RamanEdgefilter&bandpassfilter


4.HighperformanceTEcooledCCDdetectionset-Back-illuminatedtypeCCD

-Pixelformat:1024x128pixels,-SpectralRange:200-1050nm

5.PBS-020-TE2.twoStageTECPbSDetector

-WavelengthRange:1umto2.8umUV-NIRtransmittance&reflectancesystem

1.MonoRa201,200mmfocallengthmonochromator

-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:200mm.

2.DL300-XE,300WXearcLampset-spectralrange:260-2000nm,ozonefreelamp

3.DL250-TH.250WTungstenHalogenLightSource-Providesoutputfrom350nmto>2.0um.

4.OSF-6,ManualOrdersortingfilterwheelassembly-standardordersortingfilters:400nm,500nm,600nm,and720nm.

5.SampleChamber-Includes30mmdia.,FusedsilicaPL/CXlens,-VariableNDfilter,Bandpass&cutofffilter-Sampleholder,rotation&translationstageset

6.DAD-1602U,16BitAD/DAdataacquisitionset7.Monoworks,Dataacquisition&processingsoftware8.PBS-020-TE2.twoStageTECPbSDetector

-WavelengthRange:1umto2.8um9.M300CD,DigitalDisplayChopper10.M410,SinglePhaseLock-inAmplifier


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System 5 UV-VIS-NIR Macro Raman

UV-VIS-NIR Macro Raman Measurement system

ExcitationLasersource

1.IK3401R-F,40mW,325nmHeCdlaserset-Aircooled,TEM00mode,1.2mmbeamdia.,

2.FKL532.150.CWA.L,532nmSolidStateLaserSet-Outputpower:150mWTEM00

3.LDM785.150.CWA785nmdiodeLasersource-Outputpower:150MwTEM00

4.RamanSampleChamber-Includes40mmdia.,FusedSilicaPL/CXlens,Beamdivertingmirror-VariableNDfilter,Bandpassfilter(3nmFWHM,forthreelasersource)-10mmaperaturebeamdump,ramanedgefilter.(forthreelasersource)

5.PLdetectiondetectorset1)MonoRa324i,320mmfocallengthmulti-portMonochromator/spectrograph-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:320mm,-Ramanshiftrange100Cm-1to6000Cm-1with1200gr/mm@532nm

2)DV401A-BVCCDDetector-SensorOption:BackilluminatedCCD-ActivePixels:1024x127-Wavelengthrange:200-1000nm

3)Dataacquisition&processingsystem

System 6 UV-VIS-NIR Macro Raman + PL

UV-VIS-NIR Macro Raman PL Measurement system

ExcitationLasersource

1.IK3401R-F,40mW,325nmHeCdlaserset-Aircooled,TEM00mode,1.2mmbeamdia.,

2.532nmDPSSExcitationLasersource-100mW,TEMooMode

3.LDM785.150.CWA785nmdiodeLasersource-Outputpower:150mWTEM00

4.RamanSampleChamber-Includes40mmdia.,FusedSilicaPL/CXlens,Beamdivertingmirror-VariableNDfilter,Bandpassfilter(3nmFWHM,forthreelasersource)-10mmaperaturebeamdump,ramanedgefilter.(forthreelasersource)-Sampleholderforcuvettecell(liquidsample)-Xaxisrackandpiniondovetailstageforfocusing

5.PLdetectiondetectorset1)MonoRa324i,320mmfocallengthmulti-portMonochromator/spectrograph-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:320mm,-Ramanshiftrange100Cm-1to6000Cm-1with1200gr/mm@532nm


3)Dataacquisition&processingsystem


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System 7 UV-VIS-NIR Macro Raman + PL + Fluorescence / ATR

UV-VIS-NIR Macro Raman Measurement systemMacro Raman systemExcitationLasersource1.IK3401R-F,40mW,325nmHeCdlaserset

-Aircooled,TEM00mode,1.2mmbeamdia.2.532nmDPSSExcitationLasersource

-100mW,TEMooMode3.LDM785.150.CWA785nmdiodeLasersource

-Outputpower:150mWTEM004.RamanSampleChamber

-Includes40mmdia.,FusedSilicaPL/CXlens,BeamdivertingmirrorVariableNDfilter,Bandpassfilter(3nmFWHM,forthreelasersource)-10mmaperaturebeamdump,ramanedgefilter.(forthreelasersource)-Xaxisrackandpiniondovetailstageforfocusing

5.PLdetectiondetectorset1)MonoRa324i,320mmfocallengthmulti-portMonochromator/spectrograph-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:320mm,-Ramanshiftrange100Cm-1to6000Cm-1with1200gr/mm@532nm2)DV401A-BVCCDDetector-SensorOption:BackilluminatedARcoatedforoptimalperformanceinVIS-ActivePixels:1024x127-Wavelengthrange:200-1000nm

UV-NIR transmitt & reflectance system6.450WXearclampset

-450WXelamp(HamamatsuorUshiolamp)withverticaltypelamphousing-spectralrange:260-2000nm,ozonefreelamp

7.MOSF-6,MotorizedOrdersortingfilterwheelassembly,installed

-Standardordersortingfilters:400nm,500nm,600nm,

8.SC100AARTSampleChamberwithIN/OUTMount-Includedreferencecellandshortwavepassfiltfor200-500nm(excitingsourcerange)-MotorizedRotationsampleholderforanglescanwith0.1degreeresolution

9.S-050(or025)-TE2-H,TEcooledSiphotodiodeset-200-1100nm2.5mmor5mmdia.

10.PBS-020-TE2.twoStageTECPbSDetector-WavelengthRange:1umto2.8um

11.DAD-1602U,16BitAD/DAdataacquisitionset,12.Monoworks,Dataacquisition&processingsoftware13.Dataacquisition&processingsystem

System 8 UV-VIS-NIR Macro Raman + PL

UV-VIS-NIR Macro Raman PL PLE Measurement system

Macro Raman PL PLE system1.IK3401R-F,40mW,325nmHeCdlaserset

-Aircooled,TEM00mode,1.2mmbeamdia.,2.532nmDPSSExcitationLasersource

-100mW,TEMooMode3.LDM785.150.CWA785nmdiodeLasersource\

-Outputpower:150mWTEM004.SCP200,RamanSampleChamber

-Includes40mmdia.,FusedSilicaPL/CXlens,BeamdivertingmirrorVariableNDfilter,Bandpassfilter(3nmFWHM,forthreelasersource)-10mmaperaturebeamdump,ramanedgefilter.(forthreelasersource)

5.PLdetectiondetectorset1)MonoRa324i,320mmfocallengthmulti-portMonochromator/spectrograph

-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:320mm,-Ramanshiftrange100Cm-1to6000Cm-1with1200gr/mm@532nm


UV-NIR PLE system6.MonoRa324i,320mmfocallengthmulti-portMonochromator/spectrograph

-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:320mm,

7.450WXearclampset-spectralrange:260-2000nm,ozonefree450Wlamp

8.MOSF-6,MotorizedOrdersortingfilterwheelassembly,installed

-Standardordersortingfilters:400nm,500nm,600nm,

9.PLESampleChamberwithIN/OUTMount25mmdia.FusedSilicalens,Biconvex,4pcsincluded(pleasespecifyfocallength)

-Adjustablesampleholder.(cuvettecellorwafer)andcutofffilter&filterholder-MotorizedRotationsampleholderforanglescanwith0.1degreeresolution

10.S-050(or025)-TE2-H,TEcooledSiphotodiodeset-200-1100nm2.5mmor5mmdia.


12.DAD-1602U,16BitAD/DAdataacquisitionset,13.Monoworks, Data acquisit ion & processingsoftware


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System 9 UV-VIS-NIR Microscope Raman


1.SourcesetA.FKL532.50.CWA.L532nmSolidStateLaserSet-Outputpower:50mWTEM00B.LDM830100CWA830nmSolidStateLaserSet-Outputpower:100mWTEM00C.IK3501R-G,325nmHeCdlaserset-Outputpower:50mWAircooled,Multimode,1.2mmbeamdia.

2.MicroscopeSystem-20xObjectiveLens,workingdistance<31mmDepthoffocallength+/-3.5um-50xM-PlaneObjectiveLensDepthoffocallength+/-1.6um-50xObjectiveLens,workingdistance>20mm-Spotsize:10umwhenthewavelengthusedexceeds1100nm,thefocusingpositionmayslightlydeviate

3.HighResolutionSampleChamber-CCDcameramonitoringsetw/Videocaptureboard,1600x-VerticalilluminationforCCDmonitoring-LaserMirrorforVIS(400-700nm)-325/532/830nmRamanedgefilter&Holder-325/532/830nmBandpassFilterw/holderforplasmalinerejectionDirectOpticalinterfaceforlaserbeamdelivery-100umopticalfiberforsignalbeamdeliverytospectrometer

4.MonoRa-512iMonochromator/Spectrograph-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:500mm,-Ramanshiftfrom94Cm-1to1345Cm-1with1200gr/mm@532nmwith41nmcoverage-Ramanshiftfromfrom90Cm-1to3400Cm-1with1200gr/mm@325nmwith41nmcoverage

5.DV401A-BVCCDDetector-SensorOption:BackilluminatedCCD-ActivePixels:1024x256

System 10UV-VIS-NIR AFM-Raman

Ramboss Star-N Raman / AFM measurement system includes

1.LightsourcesetA.IK3501R-G,325nmHeCdlaserset-outputpower:50mWAircooled,TEM00B.QUV266-50,266nmdiodepumpedQswitchedlaserset-Maxaverageoutputpower(quasi-cw):50mW-Pulsefrequency:1-100KHz(internaladjustable)0-200KHz(externaladjustable)-Pulsewidth :10ns to20ns,adjustable fromlaser&rep.rate-Singlemode,TEMoo,M2<1.3,typicalM2<1.1

2.DetectingchamberOpticalPath&alignmentadjustablefunctionwithNDfilterforLaserpowercontrolRamanEdgeandBandpassfilterset for266&325nm(tocheckthestokesline)Direct laser input andRamansignal input tospectrographbyAlmirror&beamsplitterA.MonoRa 512i, 500mm focal length highresolutionspectrograph,-500mmfocallengthmulti-portmonochromator/spectrograph,.

-Resolution:[email protected](1200gr/mmgrating),10umslits0.12nm1200gr/mmgrating0.08nmwith1800gr/mm/10umslit/1024pixelCCD-Ramanshift from from305Cm-1 to4000Cm-1with1200gr/mm@785nmwith41nmcoverageB.HighperformanceTEcooledCCDdetectionset-Back-illuminatedtypeCCD-Pixelformat:1024x128pixels,-SpectralRange:330-1050nm

3.AFM-RamanmoduleA.MV4000SPM/NSOM/Multi ProbeSystemProbeandSampleScanning- ScanHeadAssembly:Up to 85micron flatscannerpiezostage,incorporating:B.Labviewbasedcontroller&softwareC.Tip/samplescanningcontrollerD.MV4000InterfacePlate(twoprobe)E.AdvancedRamanAFM/TERS/NSOMIntegrationPackageF.AcoustichoodH.RamanSoftwareModule

4.AdditionalProbeTower:A . Add i t i ona l p robe t owe r assemb l y f o rMultiView4000B.Labviewbasedcontroller&software


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System 11 VECTOR-01FX True Confocal Raman


System ConfigurationConfocalRamansystemcombinesthebenefitsof thebothRamanandConfocal technologiestoachievehighqualityRamansignalat thehighestspatial resolution .TypicallyConfocalRamansystemcanbebrokendownintoanumberofmodulesandtheyareLaser,ConfocalMicroscope,Spectrometer,andDataProcessingUnit.TheConfocalMicroscope includesaConfocalAperturecontrolunit,ObjectiveLenses,XYZpiezostages,anImagingCCD,anoptionalauto-focusmodule.Spectrometerincludesa500mmfocallengthimagingMonochromatorandahighresolutionCCDdetector.DataProcessingUnitincludesastagecontroller,aLaserController,andahighhorse-powerPC.

System Specification1.Laser:325nm,488nm,514nm,785nmandoptional(405,473,632,830nm)2.Objectivelens:5X,10X,20X,50X,100X3.N.A(NumericalAperture:

0.15,0.30,0.40,0.55,0.954.Lateralresolution:[email protected]:200um(piezostagescanner)6.Positionalrepeatability:20nm7.XYaxisrange:80x80mm8.Optionalautofocusingset9.Positionalrepeatability:

1umstepsize,3umbacklash10.Spectralrange:50cm^-1-6000cm^-111.LateralSpectralresolution:

1.7cm^-1/CCDpixel@1200gr/mmgrating12.Microscope:UprightorInvertedtype13.CCDforsamplemonitoring14.Opticalunit:

UV-VISorUV-VIS-NIR(optional)

15.Imagespectrometer-Focallength:500mm-Turret:triplegrating-Inputslit:oneortwo(optional)-Exitports:2forCCDandPMTorAPD(optional)-Slitwidth:0-5mm,10umviamicrometer,4-15mmheight-Motorizedslit(optional)-Dispersion:1.6nm

16.Software:dataacquisitionandmappingin2D/3D,controlofshutter,laserpower,grating,centerwavelength,andfilter.17.Ramanlibrarywithspectramatchingfunction

Confocal RamanThekeyfeatureofConfocalmicroscopyisitsabilitytoacquirein-focusimages/spectrumfromselecteddepths,aprocessknownasopticalsectioning.InaConfocallaserscanningmicroscope,alaserbeampassesthroughalightsourceapertureandthenisfocusedbyanobjectivelensintoasmall(ideallydiffractionlimited)focalvolumeprojectedinthespecimenlayerbylaser.Thisallowstobuilda3Dprofileofthescannedarea.WithConfocalandRamantechniquestogetherformsapowertoolinacquiringhighresolution,RamanImagesin3Dprofile.IntermsofimagingresolutionConfocaltechnologycanbecomparedwithSEMbutishasadvantageofnothavingphysicalprobe.

Product Features

Objectve LensVECTOR-001FXusesa100xobjectivelenswhichis theonlyobjectiveallowingtoreachthehighestspatial resolutionof1micron in thevisiblerange.It isoptimizedso that thehighest fluxwhich iscollectedandwhichentersthesystemisobtainedwhenworkingwiththehighestspatialresolution.

Confocal ApertureVECTOR-001FXusesa trueConfocalaperturewhensomeothersystemsareusingonlypseudoConfocalaperture.The trueConfocalapertureallows to reach the highest spatial resolutionremovingallkindsofstray lightgeneratedby the

moleculessurroundingthevolumetobeanalyzed.Dependingonthe levelof luminescencegeneratedbythesemoleculesafilteringat the levelof theCCDdetectorisimpossibleasforhighleveloflightssomechargescanbetransferredfrompixeltopixelenlargingthesizeoftheimageonthedetectorandthenreducingthespatialresolution.

Confocal Raman PrincipleTheenergyfromapointonthesubjectsampleirradiatedbyalaserisfocusedonaConfocalholeandinturnisdetectedbyadetector.WiththeConfocalhole,onlytheenergygeneratedbyapointinthespottedplaneisdetected.IftheenergyisgeneratedattheplanewhichisnotfocusedontheConfocalhole,itispartiallyrejectedandnotdetected.


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XeArcLamp

250WQuartzTungstenHalogen

MonoRa150i

MonoRa200

DPSSLasers

Ar++Lasers

HeCdLasers

HeNeLasers

Maple IIPL / PLE diagram

Light Sources Monochromators

Focusing Lens Set

Fiber optic illuminator

PL/PLE System

Maple II Lasers+MapleChamber+CCDSpectrograph(UV-VIS/InGaAs(NIR))

Maple HR Lasers+MapleChamber+MonoRa+Detectors(PMT/SI100/InGaAs/iDus)

Maple E Lamp(450WXearc)+MonoRa+MapleChamber+MonoRa+Detectors(PMT/Si/InGaAs/iDus)+

Maple HR-Cryo

Lasers+MapleChamber+MonoRa+Detectors(PMT/Si/InGaAs/iDus)+LowTemp.Cryogenicsystem

Micro/MacroPLMappingChamber

MonoRa500i

MonoRa320i

PMT:PDS-1

SiliconSI-100-1

InGaAs:IGA-300-T2

LNCooledMCT

PbSe,PbS

2048pixelsLineCCD:

DL-CCD-2048

CCD:iDus,Newton,Star

LowTemp.Cryo

ChambersMonochromators

&Spectrographs

Detectors

HIGH QUALITYOPTICAL

INSTRUMENTS& COMPONENTSFOR RESEARCH


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"MapleII"HighPerformanceP/LMappingsystem

Maple IIPhotoluminescence system summary

Features Applications

Specifications

• Highperformance&LowcostPLMappingsystem• Widerangeextension(UV-VIS-NIR)• SimpleDesign&Alignment• LownoiseandHighPLsignaldetection• AnyExcitationLaserSourceavailable• EasytofindapeakandFWHM

• Generalphotoluminescence• III-VmaterialsPhotoluminescence• Fluorescence• LD,LEDEpi-waferPLmapping

• He-CdLaser,325nm,25mW,TEMmultimode• Highreflectiondielectricmirrorandholder• Laserbandpassfilter• Fusedsilicalenssetforfocusingandcollimating• Cut-offfiltersetforlaserlinerejection• MotorizedXYstageset,1umstepresolution• 2&4wafersampleholder• CompactconcaveHolographicspectrograph• 2048pixels,lownoisearraydetector• Detectionrange:200-1100nm(dependsongrating)• SMA905connector,100umdia.,fiberopticinterface• includessystemcontroller,control&Mapping• OptionforThinfilmthicknessmeasurementwithwhitelightsource

325nmHe-CdLaser

Maple,P/LMappingsamplechamber

"MapleII"HighPerformanceP/LMappingsystem

Available Excitation Source

Available Detectors

System spatial Resolution (TEMoo Mode)

Ordering Information

• 266nmUVlaser(10mW-20mW)• Ar-IonLaser(488and514nm)50-100mW• DPSSLaser(532nm)100-300mW• He-NeLaser(632.8nm)20mW• NIRLaser(785nm)100mW

• LineCCDdetector(2048pixels)200-1000nm• InGaAsArraydetector(NIR512pixels)900-1700nm• HighPerformance&LownoiseCooledCCDdetector(-75°C)(1024x128or1024x256pixels)

• PMTdetectorset(190-900nmrange)

• 50um~100um(generalpurpose)• 10um(10xM-planlens)• 1umstepresolutionwithmicrosteppingmotorstage• CryogenicsystemforLowTemp.PL,availableuponrequest

• MapleII:Lasers+MapleChamber+CCDSpectrograph(UV-VIS/InGaAs(NIR))• MapleHR:Lasers+MapleChamber+MonoRa+Detectors(PMT/SI100/InGaAs/iDus)• MapleE:Lamp(450WXearc)+MonoRa+MapleChamber+MonoRa+Detectors(PMT/Si/InGaAs/iDus)+

• MapleHR-Cryo:Lasers+MapleChamber+MonoRa+Detectors(PMT/Si/InGaAs/iDus)+LowTemp.Cryogenicsystem


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System 12 Maple II, UV-VIS-NIR Micro PL Mapping

MAPLE-II, Micro/Macro PL Mapping system

1.ExcitationLasersourcea)IK3202R-D,25mW,325nmHeCdlasersetb)532nm,100mWDPSSlasersetc)LDM830100CWA830nmSolidStateLaserSet-Outputpower:100mWTEM00

2.MaplesampleChamber-UV-NIRObjectivelens-HoledmirrorforLaserbeam&PLsignalpath-IrisDiaphragmsetforlaserbeamalignment-IncludesmanualshutterandvariableNDfilter-Laserlinebandpass&cut-offfilterset-Manualstagesetforsample-2”,3”,4”Epi-Wafersampleholderplatewithvacuumchuck.

3.Monor320i,320mmfocallengthmonochromator/spectrograph-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:320mm,

4.UVenhancedTECooledCCDdetectorsetfor200-1000nm-1024x256pixels,Back-illuminated-MinimumoperatingTemp:-70°C/TEcooled-Spectralwavelengthrange:200-850nm

5.IGA-030-TE2,2StageTECInGaAsDetectorfor800-1700nm-WavelengthRange:800nmto1700nm

System 13UV-VIS-NIR AFM-Raman

UV-VIS-NIR Cryostat Micro PL EL measurement system

1.ExcitationLasersourcea)IK3202R-D,25mW,325nmHeCdlasersetb)532nm,100mWDPSSlaserc)LDM830100CWA830nmSolidStateLaserSet-Outputpower:100mWTEM00

2.MaplesampleChamber-UV-NIRObjectivelens-HoledmirrorforLaserbeam&PLsignalpath-IncludesmanualshutterandvariableNDfilter-Laserlinebandpass&cut-offfilterset-Manualstagesetforsample-2”,3”,4”Epi-Wafersampleholderplatewithvacuumchuck.

3.Monor320i, 320mm focal lengthmonochromator/spectrograph


4.UVenhancedTECooledCCDdetectorsetfor200-1000nm

-1024x256pixels,Back-illuminatedCCD-MinimumoperatingTemp:-70°…/TEcooled-Spectralwavelengthrange:200-850nm

5.IGA-030-TE2,2StageTECInGaAsDetectorfor800-1700nm

-WavelengthRange:800nmto1700nm

6.10kCryostatsystemincludesthefollowing:-HeliumCompressor-ARS-2HW-TemperatureControllerModelSI-9700-1,-INCLUDEDEXTRA4XCOPPERLEADforelectricalexperiment

7.2400sourcemeterandclipontestlead8.DAD-1602U,16BitAD/DAdataacquisitionboard,USBinterface9.Monoworks,Dataacquisition&processingsoftware10.M300CD,DigitalDisplayChopper11.M410,SinglePhaseLock-inAmplifier


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System 14 UV-VIS-NIR Macro Cryo PL + PLE

UV VIS NIR Cryostat PL+PLE Measurement system1.A.532nmDPSSExcitationLasersource

-100mW,TEMooModeB.LDM830100CWA830nmSolidStateLaserSet-Outputpower:100mWTEM00C.IK3202R-D,25mW,325nmHeCdlaserset

2.MonoRa201,200mmfocallengthmonochromator-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:200mm.

3.DL300-XE,300WXearcLampset-spectralrange:260-2000nm,ozonefreelamp

4.DL250-TH.250WTungstenHalogenLightSource5.OSF-6,ManualOrdersortingfilterwheelassembly6.SC500,FluorescenceSampleChamberwith IN/OUTMount

-30mmdia.,FusedSilicalens,Biconvex,3pcsincludedfor3ports-cryosampleport

7.DM324i,320mm focal lengthmonochromator /spectrograph


8.S/IGA-025/020-TE2,TwocolorSandwichdetectorSi,2.5mmdia. InGaAs,2mmdia.activearea300-1000nm(Si)&1000nm to1700nm(IGA)detectionrange

9.PDS-01,PMTDetectorAssemblyIncl.UniversalPhotomultiplierTubeHousingforstandard1.125"sidewindowPMT4digitLCDdisplay,HV/signalswitchincludes0-1200VHVpowersupply.PMT-955,Hamamatsu R955 s ide windowphotomultipliertube,185-930nm,Highefficiency

10.DAD-1602U,16BitAD/DAdataacquisitionset,11.Monoworks,Data acquisition& processingsoftware12.PBS-020-TE2.twoStageTECPbSDetector

-WavelengthRange:1umto2.8um-ActiveArea:2mmdia.

13.M300CD,DigitalDisplayChopper14.M410,SinglePhaseLock-inAmplifier15. 10k-550k Complete system includes thefollowing:

-DisplexCryocooler-DE-202withBoltOnSkirt-HeliumCompressor-ARS-2HW

System 15UV-VIS-NIR Macro PL

UV-VIS-NIR Macro PL Measurement system

1.ExcitationLasersourcea)IK3202R-D,25mW,325nmHeCdlaserset-Aircooled,TEMmultimode,1.6mmbeamdia.,b)532nmDPSSExcitationLasersource-Lownoise532nmDPSSlaser100mW,TEMooModec)LDM830100CWA830nmSolidStateLaserSet-Outputpower:100mWTEM00

2.MacroPLSampleChamber-Includes30mmdia.,FusedsilicaPL/CXlens,-VariableNDfilter,Bandpass&cutofffilter-Sampleholder,rotation&translationstageset

3.Monor320i,320mmfocallengthmonochromator/spectrograph-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:320mm,

4.IGA-030-TE2,2StageTECInGaAsDetector-WavelengthRange:800nmto1700nm

5.PDS-01,PMTDetectorAssemblyIncl.UniversalPhotomultiplierTubeHousingforstandard1.125"sidewindowPMT4digitLCDdisplay,HV/signalswitchincludes0-1200VHVpowersupply.PMT-928HamamatsuR928sidewindowphotomultipliertube,185-900nm


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System 16 UV-VIS-NIR Macro PL + PLE

UV VIS NIR Macro PL / PLE measurement system

1.ExcitationsourceA.LS300T,AircooledAr-ionlaserset-488nm@100mW/514nm@100mW/TEMoomodeB.LDM830100CWA830nmSolidStateLaserSet-Outputpower:100mWTEM00C.IK3202R-D,25mW,325nmHeCdlaserset

2.DL150-XE150WXearcLampset150WXearcLamp150WXe lampwithvertical type lamphousingspectralrange:200-2000nm,ozonegenerationlamp

3.MonoRa151i,150mmfocallengthmonochromator-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:150mm,

4.SampleChamberIncludes50mmdia., Fused silicaPL/CX lens,Beamsplitter/488/514/830nmlaserlinefilter&longpassfilter

5.MonoRa511i, 500mm focal lengthmulti-portmonochromator,


6.M420,DualPhaseLock-inAmplifier7.M300CD,DigitalDisplayChopper8.S/IGA-025/020-TE2,TwocolorSandwichdetector

Si,2.5mmdia. InGaAs,2mmdia.activearea300-1000nm(Si)&1000nm to1700nm(IGA)detectionrange

9.PDS-01,PMTDetectorAssembly4digitLCDdisplay,HV/signal switch includes0-1200VHVpowersupply.

PMT-955,Hamamatsu R955 side windowphotomultipliertube,185-930nm,

10.DAD-1602U16BitAD/DAdataacquisitionset,USB

interface,standalonetype

System 17UV-VIS-NIR Macro PLE + Fluorescence

UV VIS NIR Macro PLE / Fluorescence measurement system

1.DL150-XE150WXearcLampset150WXelampwithverticaltypelamphousingspectralrange:350-2000nm,ozonegenerationlamp


3.PLESampleChamberIncludes50mmdia.,FusedsilicaPL/CXlens,BeamsplitterIncludedNDfilterset(4fromOD1.3to3.0,200-700nmrange)longpassfilter(transmission:368.5-820.6nm)motorizedrotationstageandsampleholderset

4.MonoRa324i,320mmfocallengthmonochromator/spectrograph-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:320mm,

5.M420,DualPhaseLock-inAmplifier6.M300CD,DigitalDisplayChopper

Choppinghead,cableand4choppingdisksincluded.7.S/IGA-025/020-TE2,TwocolorSandwichdetector

300-1000nm(Si)&1000nmto1700nm(IGA)detectionrange8.PDS-01,PMTDetectorAssembly

4digitLCDdisplay,HV/signalswitchincludes0-1200VHVpowersupply.R955sidewindowphotomultipliertube,185-930nm,Highefficiency


10.DAD-1602U16BitAD/DAdataacquisitionset,USBinterface,standalonetype


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System 18 UV-VIS-NIR Macro PLE + EL

UV-VIS-NIR Macro / PLE / EL measurement system1.DL450-XE,450WXearcLampset

Spectralrange:260-2000nm,ozonefreelamp2.MonoRa151i,150mmfocallengthmonochromator


3.SampleChamberIncludes50mmdia.,FusedsilicaPL/CXlens,BeamsplitterIncludedNDfilterset(5fromOD1.3to3.0,200-700nmrange,30mmdia)FilterwheelsetMOSF-6,MotorizedOrdersortingfilterwheelassembly,installedDCprobeholderwithmicrometercontroller,Probetip2setVacuumchucksettoholdasample.Digitalsourcemeter&testleadsetManualstagetocontrolasampleposition

4.MonoRa320iMonoRa323i,320mmfocallengthmultiportmonochromator,


5.M420,DualPhaseLock-inAmplifier6.M300CD,DigitalDisplayChopper7.PBS-020-TE2,2StageTECPbSDetector

WavelengthRange:1umto2.8um8.PDS-01,PMTDetectorAssemblyforcalibration

-4digitLCDdisplay,HV/signalswitchincludes0-1200VHVpowersupply.-R928sidewindowphotomultipliertube,185-900nm

10.DAD-1602U16BitAD/DAdataacquisitionset,USBinterface,standalonetype11.Monoworks-TDataacquisition&processingsoftwareforMonoRaseriesMonochromator

System 19UV-VIS-NIR Macro PL + PLE + EL

UV-VIS-NIR Macro / PL / PLE / EL measurement system

1.A.LS300T,AircooledAr-ionlaserset\488nm100mW/514nm100mW/TEMoomodeB.LDM830100CWA830nmSolidStateLaserSet-Outputpower:100mWTEM00C.IK3202R-D,25mW,325nmHeCdlaserset-Aircooled,TEMmultimode,1.6mmbeamdia.,D.DL450-XE,450WXearcLampset-Spectralrange:260-2000nm,ozonefreelamp


3.PL/PLE/ELSampleChamberIncludes50mmdia.,FusedsilicaPL/CXlens,BeamsplitterIncludedNDfilterset(5fromOD1.3to3.0,200-700nmrange,30mmdia)FilterwheelsetMOSF-6,MotorizedOrder sorting filterwheelassembly, insta l led DC probe holder wi thmicrometercontroller ,Probe tip2setVacuumchucksettoholdasample.Digitalsourcemeter&testleadsetManualstagetocontrolasampleposition

4.MonoRa320iMonoRa323i,320mmfocallengthmultiportmonochromator-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:320mm,-IncludedHglampset

5.M420,DualPhaseLock-inAmplifier6.M300CD,DigitalDisplayChopper7.PBS-020-TE2,2StageTECPbSDetector

WavelengthRange:1umto2.8um8.PDS-01,PMTDetectorAssemblyforcalibration

-4digitLCDdisplay,HV/signalswitchincludes0-1200VHVpowersupply.-HamamatsuR928sidewindowphotomultipliertube,185-900nm


10.MonoworksDataacquisition&processingsoftwareforMonoRaseriesMonochromator


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System 20 ATR & PLE Measurement

UV VIS NIR Macro PL / PLE / ATR measurement system

1.ExcitationsourceA.LS300T,AircooledAr-ionlaserset-488nm100mW/514nm100mW/TEMoomodeB.LDM830100CWA830nmSolidStateLaserSet-Outputpower:100mWTEM00C.IK3202R-D,25mW,325nmHeCdlaserset-Aircooled,TEMmultimode,1.6mmbeamdia.,

2.DL150-XE150WXearcLampset-150WXearcLamp


4.SampleChamber-Includes50mmdia.,FusedsilicaPL/CXlens,BeamsplitterIncludedNDfilterset(4fromOD1.3to3.0,200-700nmrange)/488/514/830nmlaserlinefilter& longpassfilter( transmission:368.5-820.6nm)Includedbeamdiverterset for lasersource

5.MonoRa511i,500mmfocallengthmulti-portmonochromator,-Resolution:[email protected](1200gr/mmgrating),10umslits-Focallength:500mm,

6.M420,DualPhaseLock-inAmplifier7.M300CD,DigitalDisplayChopper8.S/IGA-025/020-TE2,TwocolorSandwichdetector

-300-1000nm(Si)&1000nmto1700nm(IGA)detectionrange

9.PDS-01,PMTDetectorAssembly-4digitLCDdisplay,HV/signalswitchincludes0-1200VHVpowersupply.-PMT-955,HamamatsuR955sidewindowphotomultipliertube,185-930nm,Highefficiency



System 21ATR Measurement

ATR measurement system

1.Monochromaticlightsource:A.DL030-D2,30WDeuteriumlampset-Includes,30WDeuteriumlamp(180-650nmrange),LampHousing,-Secondary focusing lens includes lamppowersupplyfor30WD2lamp.B.DL250-TH. 250WTungstenHalogen LightSource-Providesoutputfrom350nmto>2.0um.C.BeamdiverterboxsetD . M o n o R a 2 0 1 , 2 0 0mm f o c a l l e n g t hmonochromatorResolution:[email protected](1200gr/mmgrating),10umslitsFocal length:200mm.E.OSF-6,Manual Order sorting fi l ter wheelassembly Includes6holesfilterwheelw/5cut-offfilters

2.Fluorescence/ARTSampleChamberwithIN/OUTMount25mmdia.,FusedSilica lens,Biconvex,3pcsincluded(pleasespecifyfocallength)Adjustable sample holder. (cuvet te ce l l orwafer),referencecellandcutofffilter&filterholderManualRotationsampleholderforanglescanwith0.1degreeresolution

3.DetectingsetA.MonoRa321i,320mmfocallengthmonochromator,adjustableentranceandexitslit.Resolution:[email protected](1200gr/mmgrating),10umslits5

Focallength:320mm,B.PDS-01,PMTDetectorAssembly-4digitLCDdisplay,HV/signalswitchincludes0-1200VHVpowersupply.-HamamatsuR928sidewindowphotomultipliertube,185-900nmC.XYZpositioncontrolstagesetforinputsignaltomonochromatorIncluded 1 mm core f iber and focusingassemblyset(1ea)

4.DAD-1602U,16BitAD/DAdataacquisitionset,5.Monoworks,Dataacquisition&processingsoftware


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System 24 Maple-X PL Mapping

Features• Highperformance&LowcostPLMappingWideextensionwavelengthrange(UV-VIS-NIR)• Compactdesign&highresolutionAnyexcitationlasersourceavailableThinfilmthicknessmeasurementsHighspeedAutomaticsystem(Forthemass-production)

Applications• Generalphotoluminescence• III-Vmaterialsphotoluminescence• Fluorescence• LD,LEDEpi-waferPLmapping

S/W• Integratedmodeforhighspeedmapping• SpectralmodewithPLintensity,peak,FWHM• Thicknessmodeforthemeasurementofthinfilm• Displayoptionfor2D&3D• Easycontrolwithyourrecipe• Supportingrecipefilesandrecipeeditor

H/W• Resolution:0.1mm• Speed:25min./cassette(25pcs)/2/2mm• Real-Timelaserpowermonitoring• Programmableexcitationlaserpowercontrol• Sizeavailablefrom2-8inches• Highprecisionrepeatabilityusingpre-aligner• 2Loading/Unloadingcassette• Touchscreenmonitorinterface

Specifications1.Spectrometer• Wavelengthrange:200nm-1,100nm(UV-VIS-NIR)• Detector:LownoiseCCDlineararray,2048pixels2.Laser• Lasersource:266nm,325nm,375nm,405nm,442nm,• 532nm,658nm,785nm(Anykindoflasersourcesavailable)

3.Thinfilmthicknessmeasurements• Thickness:10nm-50um,1nmresolution• Lightsource:Deuterium-halogenlightsource4.Autoloading/unloading/Aligner• Wafersize:2,46,25pcscassettepackage(8wafersizeoptional)

MAPLE-X(HighSpeedPhotoluminescenceMapping)


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Fullyintegratedwithexcitationenergyupto5.5eV

Wide BandgapMiniPL Spectrometer

Features

•RoomTemperaturePL•5.5(224nm)or5.0eV(248.6nm)laserexcitation•measurementofexcitationandemissionenergyfordirectQEmeasurement•Highlyportable15x18x36cm,<8Kg•HighResolution0.2nm(multislitsincluded).•ComputercontrolledGratingselectionandCalibration•1200lnGratingstd.(300nmpeak)•3600lnGratingforHighResPLorRamanoptional(250nmpeak)•DigitalPMTcontrollerwithgatedboxcarIntegrator&AveragerforlownoisedigitalPMToutputmeasurement•<20Watts(90-240VAC)input•Fullyintegrated,selfcontained,system•LabViewinterfaceandcontroloflaser,spectrograph,PMT,spectraldata•Analysissoftwareincluded,FWHM,Peak,Sidelobeidentification,spectralsubtract,normalizeetc.•Upto50mmdiametersamplesize•X-Y-Zstagemanualsamplecontrol50mmstandard•50mmX-Ymotorizedstageincludingmappingsoftwareoptional.

System Configuration ThePhotonSystemsDUVMini-PLsysteminacompletely integrateddigitalinstrumentwithselfcontaineddeepUVlaser,monochromator,detector,opticsandelectronics.

Laser 224nm(5.5eV)or248nm(5.0eV)laserwithself-containedlaserpowersupply/controller.

Monochromator 1/8MCzerny-Turnerconfigurationwith2gratings:1200g/mm(0.7nmresolution,and3600g/mm(0.2nmresolutionoptional)

Detector 190nmto650nmPMT;1-106gain,computeradjustable

Optics Reflectiveobjective,laserlinefilter,injectionfilter

Data acquisitionDigitalcontroloflaser,PMTandspectrometerwithdigitalgatedboxcarintegratorandaverager.Fullycalibratedtodisplaydetectedphotonsversuswavelength,Wavenumber,photonenergy.

Software LabView8.2

Measurement of photoluminescence (PL) spectra from semiconductormaterials is an importantcharacterizationmethodand iswidelyaccepted forproviding informationoncarrierdoping levels,alloycomposition,bandgapandedgeeffects,etc.Thesemeasurementsare importantbothforresearch,devicecharacterizationandprocessmonitoring.

PhotonSystemsDeepUV (DUV)MiniPLSpectrometerprovides themostcompactand inexpensiveinstrumentavailableat thesewavelengths.EnablingPLspectrameasurementofsemiconductormaterialswithbandgapuptoabout5.5eVcorrespondingtoAlGaNwithAlconcentrationsupover80%.

Diagram of System

Ramboss-500i · UV-VIS-NIR Micro Raman + ATR UV VIS NIR Micro Raman mapping ATR Measurement system...

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Transcript of Ramboss-500i · UV-VIS-NIR Micro Raman + ATR UV VIS NIR Micro Raman mapping ATR Measurement system...