PIRELLI LABS OPTICAL INNOVATION L A B S M. Romagnoli Integrated Optics: basic building block Lower...

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PIRELLI LABS OPTICAL INNOVATION L A B S M. Romagnoli tegrated Optics: basic building block tegrated Optics: basic building block Lower Clad Oxide Lower Clad Oxide wg wg wg wg Silicon Substrate Silicon Substrate Upper clad conformal oxide Upper clad conformal oxide RI= n RI= n core core 2 -n -n clad clad 2 /2 n /2 n cor core Material Material RI RI Waveguid Waveguid e Size e Size Curvatu Curvatu re re SiO SiO 2 (Ge) (Ge) 0.7% 0.7% 4.5X4.5 4.5X4.5 µm µm 2 7 mm 7 mm SiO SiO 2 (Ge) (Ge) 2.5% 2.5% 2.5X2.5 2.5X2.5 µm µm 2 1.2 mm 1.2 mm SiON SiON 7% 7% 2.2X2.2 2.2X2.2 µm µm 2 300 µm 300 µm Si Si 3 N 4 35% 35% submicro submicro n 7 µm 7 µm SOI SOI 41% 41% Deep- Deep- submicro submicro n 2.5 µm 2.5 µm 150 mm 150 mm

Transcript of PIRELLI LABS OPTICAL INNOVATION L A B S M. Romagnoli Integrated Optics: basic building block Lower...

Page 1: PIRELLI LABS OPTICAL INNOVATION L A B S M. Romagnoli Integrated Optics: basic building block Lower Clad Oxide wgwg Silicon Substrate Upper clad conformal.

PIRELLI LABS OPTICAL INNOVATION

L A B SM. Romagnoli

Integrated Optics: basic building blockIntegrated Optics: basic building block

Lower Clad OxideLower Clad Oxide

wgwg wgwg

Silicon SubstrateSilicon Substrate

Upper clad conformal oxideUpper clad conformal oxide

RI= nRI= ncorecore22-n-ncladclad

22/2 n/2 ncorecore22

MaterialMaterial RIRI WaveguiWaveguide Sizede Size

CurvatuCurvaturere

SiOSiO22 (Ge) (Ge) 0.7%0.7% 4.5X4.5 4.5X4.5 µmµm22

7 mm7 mm

SiOSiO22 (Ge) (Ge) 2.5%2.5% 2.5X2.5 2.5X2.5 µmµm22

1.2 mm1.2 mm

SiONSiON 7%7% 2.2X2.2 2.2X2.2 µmµm22

300 µm300 µm

SiSi33NN44 35%35% submicrosubmicronn

7 µm7 µm

SOISOI 41%41% Deep-Deep-submicrosubmicronn

2.5 µm2.5 µm150 mm150 mm

Page 2: PIRELLI LABS OPTICAL INNOVATION L A B S M. Romagnoli Integrated Optics: basic building block Lower Clad Oxide wgwg Silicon Substrate Upper clad conformal.

PIRELLI LABS OPTICAL INNOVATION

L A B SM. Romagnoli

Piattaforma Tecnologica Pirelli

• Clean Room di classe 10

• Capacità di fabbricazioni sub micron: litografia E-beam ed ottica

• Deposizioni di: SiO2, SiN, etc

• Banchi di allineamento automatico e di fiber pigtail

• Tecnologie di packaging avanzato: laser welding etc.

• Piattaforme disponibili: SOI, Glass,...

Page 3: PIRELLI LABS OPTICAL INNOVATION L A B S M. Romagnoli Integrated Optics: basic building block Lower Clad Oxide wgwg Silicon Substrate Upper clad conformal.

PIRELLI LABS OPTICAL INNOVATION

L A B SM. Romagnoli

Funzionalità per la fotonica integrata

• laser sintonizzabile

• circuiti ottici integrati (PLC) a basso (SiO2, SiON) ed alto salto d’indice (SOI, SiN)

• filtri fissi e sintonizzabili

• filtri per compensazione di dispersione

• switch (termo-ottico)

• microriscaldatori per controllo termico PLC e sintonizzazione filtri/switch etc.

• integrazione ibrida di laser e fotodiodi pigtail & packaging di chip