ormation oduct Inf w Pr Ne - content2.smcetech.com · M5 x 0.8 M6 x 1 M4 x 0.7 M5 x 0.8 03 U N...

24
Vacuum Pad Series ZP2 New Product Information

Transcript of ormation oduct Inf w Pr Ne - content2.smcetech.com · M5 x 0.8 M6 x 1 M4 x 0.7 M5 x 0.8 03 U N...

Vacuum PadSeries ZP2

New

Pro

du

ct In

form

atio

n

Vacuum Pad Series ZP2/ZPVacuum Pad Series ZP2/ZP

Flat

Flat with rib

Thin flat (pad)

Thin flat with rib

Bellows (pad)

Deep

Nozzle pad

Flat pad

Oval pad

Heavy-duty pad

Sponge pad

Heavy-dutyball joint pad

Resin attachment

Pad with ballspline buffer

Mark-free pad

Products other than above

Vacuum pad for transferring disks Vacuum pad for fixing panel Vacuum saving valve

U

MU

EU

AU

C

UT

CT

B

J

MB

ZJ

D

AN

MT

W

U

H

HT

HB

HW

U

H

S

K

U

H

HB

0.8 1.1 2 3 3.5 4 5 6 7 8 9 10 11 13Pad type Symbol

14

Note) The ZP2 series is blast type. Blast treatment to create finely uneven surface for adsorption.Workpieces can be removed easily.

Note)

Note) Note)

∗ Cyclone pad (Non-contact pad) Made to Order

Pad Diameter List �: Series ZP2 �: Series ZP

∗ Related pad

3.5 x 72 x 4 4 x 10

3.5 x 74 x 104 x 204 x 30

5 x 105 x 205 x 30

6 x 106 x 206 x 30

8 x 208 x 30

Note)

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2

Vacuum Pad Series ZP2/ZPVacuum Pad Series ZP2/ZP

Flat

Flat with rib

Thin flat (pad)

Thin flat with rib

Bellows (pad)

Deep

Nozzle pad

Flat pad

Oval pad

Heavy-duty pad

Sponge pad

Heavy-dutyball joint pad

Resin attachment

Pad with ballspline buffer

Mark-free pad

Products other than above

Vacuum pad for transferring disks Vacuum pad for fixing panel Vacuum saving valve

U

MU

EU

AU

C

UT

CT

B

J

MB

ZJ

D

AN

MT

W

U

H

HT

HB

HW

U

H

S

K

U

H

HB

0.8 1.1 2 3 3.5 4 5 6 7 8 9 10 11 13Pad type Symbol

14

Note) The ZP2 series is blast type. Blast treatment to create finely uneven surface for adsorption.Workpieces can be removed easily.

Note)

Note) Note)

∗ Cyclone pad (Non-contact pad) Made to Order

Pad Diameter List �: Series ZP2 �: Series ZP

∗ Related pad

3.5 x 72 x 4 4 x 10

3.5 x 74 x 104 x 204 x 30

5 x 105 x 205 x 30

6 x 106 x 206 x 30

8 x 208 x 30

Note)

Note)

Note) Note)

Note)

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Pad Diameter List

15 16 18 20 25 30 32 40 46 50 63 80 100 125 150 250 300 340

30 x 50

Pad diameter

U

MU

EU

AU

C

UT

CT

B

J

MB

ZJ

D

AN

MT

W

U

H

HT

HB

HW

U

H

S

K

U

H

HB

Symbol

∗ : Refer to SMC website or catalogue CAT.ES100-76A for details of the ZP2 and ZP Series.

SMC vacuum pad

http://www.smceu.com

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3

M5 x 0.8M6 x 1

M4 x 0.7M5 x 0.8

N03 U

Vacuum Pad

Series ZP2

How to Order

ZP2• 7 types of ø3 to ø8 are added.• Applicable for the ZP series adapter.

Compact Pad: U, C, UT, BU: FlatC: Flat with ribUT: Thin flatB: BellowsPad diameter: ø3, ø4, ø5, ø6, ø7, ø8

Pad diameter

03B040506

B0607

B08

Pad diameter Blast type—�——�—�

ø3ø4ø5ø6ø6ø7ø8

Symbol

ZP2-03U�; ZP2-B04U�; ZP2-B06C�; ZP2-07C�; ZP2-B08C�;

ZP2-B06B�; ZP2-B08B�; ZP2-05UT�; ZP2-06UT�

Pad unit

U (Flat)C (Flat with rib)UT (Thin flat)B (Bellows)

03

�———

Pad diameter(Symbol)Pad type B04

�———

05

——�—

06

——�—

B06

—�—�

07

—�——

B08

—�—�

Pad type—Pad diameter

ZPT1-A5ZPT1-A6ZPT1-B4ZPT1-B5

Adapter part no. Pad unit part no. Thread sizeAdapter

M5 x 0.8M6 x 1

M4 x 0.7M5 x 0.8

ZP2-05UT�; ZP2-06UT�; ZP2-11UT�;ZP2-14UT�; ZP2-18UT�; ZP2-20UT�

ZPT1-A5ZPT1-A6ZPT1-B4ZPT1-B5

Adapter part no. Pad unit part no. Thread sizeAdapter

Pad diameter

050611141820

Pad diameterø5ø6ø11ø14ø18ø20

Symbol

UTType

Thin flat (Skirt)Symbol

N11 UT

How to Order

ZP2• For adsorption of soft workpieces such as thin sheets or vinyl. Wrinkling or deformation during adsorption is reduced.• Applicable for the ZP series adapter.

Thin Flat PadUT: Thin flat (Skirt)Pad diameter: ø5, ø6, ø11, ø14, ø18, ø20

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

Pad unit

Pad type

Mark-free:� For use where adsorption marks must no be left on workpieces: Transferring glass substrates - Solar cell manufacturing equipment - Semiconductor manufacturing equipment - FPD (Flat Panel Display) manufacturing equipment

Mark-free cyclone pad XT661:� Workpiece with uneven and/or viscous surface.� Workpiece sensitive to scars or suction traces.� Workpiece with holes.� Thin / porous workpiece: - Solar battery cell - Liquid crystal glass - Film, paper, lumber, etc.

• It is necessary to determine vacuum pad materials carefully taking into account the workpiece shape, adaptability in the operating environment, effect after being adsorbed, electrical conductivity, etc. • Based on the work transfer example for each material, select after confirming the characteristics (adaptability) of rubber.

Made to order

Application Material

NBR Transfer of general work, Corrugated board, Veneer plate, Iron plate and others

Silicone rubber Semiconductor, Removing from die-casting, Thin work, Food processor

Urethane rubber Corrugated board, Iron plate, Veneer plate

FKM Chemical work

Conductive NBR General work of semiconductor (Static electricity resistance)

Conductive silicone rubber Semiconductor (Static electricity)

Applications by pad material

Applications by pad type

Flat / thin flat:� Flat: for adsorption of general workpieces; and for adsorption of workpieces with flat and not deformed surface.� Thin flat: for a workpiece which is likely to deform. Wrinkling or deformation during adsorption is reduced. For sheets of vinyl

Flat with rib:� When surface is likely to deform.� For releasing a workpiece certainly.

Sponge:� For adsorption of workpieces with bumps.

Ball joint:� To be used when adsorption surface of work is not horizontal.

Compact / short / nozzle pad:� For adsorption of small components such as IC chips.� Compact, space-saving.

Vacuum pad for fixing panel:� For adsorbing and fixing the stage of panels or glass circuit board etc.� Bellows mechanism allows complete contact with curved work surface.

Vacuum pad for transferring disks:� For adsorbing circular components like CD and DVD.� Bellows mechanism is realised in the pad to dampen the impact to the work.

Vacuum saving valve:� Can restrict the reduction of vacuum pressure even when there is no workpiece.� No need for switching operation when changing workpieces.� Multiple vacuum pads can be operated by one ejector.� When the workpieces have different shapes, the control circuit can be simplified. For energy saving applications!

Bellows:� For use where there is no space for the buffer (spring type). � For adsorption of workpieces with inclined surface.

Deep:� To be used when work is curved shape.

Oval pad:� For workpieces with limitation on the adsorption surface. For rectangular workpieces!

Heavy duty:� For heavy or large workpieces

Long stroke buffer:� To be used when work height is not even or cushioning toward work is required.

4

M5 x 0.8M6 x 1

M4 x 0.7M5 x 0.8

N03 U

Vacuum Pad

Series ZP2

How to Order

ZP2• 7 types of ø3 to ø8 are added.• Applicable for the ZP series adapter.

Compact Pad: U, C, UT, BU: FlatC: Flat with ribUT: Thin flatB: BellowsPad diameter: ø3, ø4, ø5, ø6, ø7, ø8

Pad diameter

03B040506

B0607

B08

Pad diameter Blast type—�——�—�

ø3ø4ø5ø6ø6ø7ø8

Symbol

ZP2-03U�; ZP2-B04U�; ZP2-B06C�; ZP2-07C�; ZP2-B08C�;

ZP2-B06B�; ZP2-B08B�; ZP2-05UT�; ZP2-06UT�

Pad unit

U (Flat)C (Flat with rib)UT (Thin flat)B (Bellows)

03

�———

Pad diameter(Symbol)Pad type B04

�———

05

——�—

06

——�—

B06

—�—�

07

—�——

B08

—�—�

Pad type—Pad diameter

ZPT1-A5ZPT1-A6ZPT1-B4ZPT1-B5

Adapter part no. Pad unit part no. Thread sizeAdapter

M5 x 0.8M6 x 1

M4 x 0.7M5 x 0.8

ZP2-05UT�; ZP2-06UT�; ZP2-11UT�;ZP2-14UT�; ZP2-18UT�; ZP2-20UT�

ZPT1-A5ZPT1-A6ZPT1-B4ZPT1-B5

Adapter part no. Pad unit part no. Thread sizeAdapter

Pad diameter

050611141820

Pad diameterø5ø6

ø11ø14ø18ø20

Symbol

UTType

Thin flat (Skirt)Symbol

N11 UT

How to Order

ZP2• For adsorption of soft workpieces such as thin sheets or vinyl. Wrinkling or deformation during adsorption is reduced.• Applicable for the ZP series adapter.

Thin Flat PadUT: Thin flat (Skirt)Pad diameter: ø5, ø6, ø11, ø14, ø18, ø20

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

Pad unit

Pad type

5

Vacuum Pad

Series ZP2

How to Order

With adapter ZP2

Pad diameter

B10B15B20B25B30

�����

ø10ø15ø20ø25ø30

Pad type

MT

TypeThin flat

(With groove)

Symbol

Replacement Part No.Pad unit part no.ZP2-B10MT�ZP2-B15MT�ZP2-B20MT�ZP2-B25MT�ZP2-B30MT�ZP2-B10MT�ZP2-B15MT�

Adapter part no.

ZP2A-M02

ZP2A-M03

ZP2A-M04

ZP2-TB10MT�-H5ZP2-TB15MT�-H5ZP2-TB20MT�-H5ZP2-TB25MT�-H5ZP2-TB30MT�-H5ZP2-TB10MT�-B5ZP2-TB15MT�-B5

Model

Mounting

H5 (M5 x 0.8 Male thread)B5 (M5 x 0.8 Female thread)

B10

��

Pad diameter(Symbol)Thread size (Symbol)

B15

��

B20

�—

B25

�—

B30

�—

Note) � in the table indicates the pad material.

Vacuum inlet direction

TDirectionVertical

Symbol

Pad diameter Blast typeSymbol

Pad material

NSF

GNGS

MaterialNBR

Silicone rubberFKM

Conductive NBRConductive silicone rubber

Symbol

B10 MT H5T N

(0.3

)

How to Order

• Adsorption surface with groove

Flat PadMT: Thin Flat (with groove)Pad diameter: ø10, ø15, ø20, ø25, ø30

Pad type

MTType

Thin flat (With groove)Symbol

Pad diameter

B10B15B20B25B30

Pad diameter Blast type�����

ø10ø15ø20ø25ø30

SymbolPad material

NSF

GNGS

MaterialNBR

Silicone rubberFKM

Conductive NBRConductive silicone rubber

Symbol

NB10 MTZP2Pad unit

For adsorption of thin sheets or filmDeformation of the flat surface during adsorption is reduced.Note 1) Not suitable for transferring workpieces which apply a load.

Note 2) Wrinkling may be generated depending on the sheet thickness.

Confirm the thickness before use.

6

Vacuum Pad

Series ZP2

How to Order

With adapter ZP2

Pad diameter

B10B15B20B25B30

�����

ø10ø15ø20ø25ø30

Pad type

MT

TypeThin flat

(With groove)

Symbol

Replacement Part No.Pad unit part no.ZP2-B10MT�ZP2-B15MT�ZP2-B20MT�ZP2-B25MT�ZP2-B30MT�ZP2-B10MT�ZP2-B15MT�

Adapter part no.

ZP2A-M02

ZP2A-M03

ZP2A-M04

ZP2-TB10MT�-H5ZP2-TB15MT�-H5ZP2-TB20MT�-H5ZP2-TB25MT�-H5ZP2-TB30MT�-H5ZP2-TB10MT�-B5ZP2-TB15MT�-B5

Model

Mounting

H5 (M5 x 0.8 Male thread)B5 (M5 x 0.8 Female thread)

B10

��

Pad diameter(Symbol)Thread size (Symbol)

B15

��

B20

�—

B25

�—

B30

�—

Note) � in the table indicates the pad material.

Vacuum inlet direction

TDirectionVertical

Symbol

Pad diameter Blast typeSymbol

Pad material

NSF

GNGS

MaterialNBR

Silicone rubberFKM

Conductive NBRConductive silicone rubber

Symbol

B10 MT H5T N

(0.3

)

How to Order

• Adsorption surface with groove

Flat PadMT: Thin Flat (with groove)Pad diameter: ø10, ø15, ø20, ø25, ø30

Pad type

MTType

Thin flat (With groove)Symbol

Pad diameter

B10B15B20B25B30

Pad diameter Blast type�����

ø10ø15ø20ø25ø30

SymbolPad material

NSF

GNGS

MaterialNBR

Silicone rubberFKM

Conductive NBRConductive silicone rubber

Symbol

NB10 MTZP2Pad unit

For adsorption of thin sheets or filmDeformation of the flat surface during adsorption is reduced.Note 1) Not suitable for transferring workpieces which apply a load.

Note 2) Wrinkling may be generated depending on the sheet thickness.

Confirm the thickness before use.

Vacuum Pad

Short-type Pad: MU, EU, AUMU: FlatPad diameter: ø2, ø3.5, ø4, ø5, ø6, ø8, ø10, ø15

Space-saving in theheight direction

Pad type

MUTypeFlat

Symbol

Pad diameter

B02B035B04B05B06B08B10B15

Pad diameter Blast type��������

ø2ø3.5ø4ø5ø6ø8ø10ø15

SymbolPad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

Pad unit ZP2 B02MU N

ZP2 TB02 MU A3

Pad diameter

B02B035B04B05B06B08B10B15

Pad diameter Blast type��������

ø2ø3.5ø4ø5ø6ø8ø10ø15

Symbol

Mounting

With adapter

Pad type

Vacuum inlet direction

TDirectionVertical

Symbol

Replacement Part No.Pad unit part no.ZP2-B02MU�ZP2-B035MU�ZP2-B04MU�ZP2-B05MU�ZP2-B06MU�ZP2-B08MU�ZP2-B10MU�ZP2-B15MU�ZP2-B06MU�ZP2-B08MU�ZP2-B10MU�ZP2-B15MU�

Adapter part no.

ZP2A-M01P

ZP2A-M02P

ZP2A-M04

ZP2-TB02MU�-A3ZP2-TB035MU�-A3ZP2-TB04MU�-A3ZP2-TB05MU�-A3ZP2-TB06MU�-H5ZP2-TB08MU�-H5ZP2-TB10MU�-H5ZP2-TB15MU�-H5ZP2-TB06MU�-B5ZP2-TB08MU�-B5ZP2-TB10MU�-B5ZP2-TB15MU�-B5

Model

A3 (M3 x 0.5 Male thread)H5 (M5 x 0.8 Male thread)B5 (M5 x 0.8 Female thread)

B02

�——

Pad diameter(Symbol)Thread size B035

�——

B04

�——

B05

�——

B06

—��

B08

—��

B10

—��

B15

—��

Note) � in the table indicates the pad material.

MUTypeFlat

Symbol

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

N

EU: FlatPad diameter: ø2, ø4, ø6, ø8, ø15

Space-saving in theheight direction

Pad type

EUTypeFlat

Symbol

Pad unit ZP2 B02 EU NPad diameter

B02B04B060815

Pad diameter Blast type���——

ø2ø4ø6ø8ø15

SymbolPad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

Series ZP2

How to Order

How to Order

How to Order

7

ZP2 TB02 EU A5With adapter

Vacuum inlet direction

TDirectionVertical

Symbol

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

N

Pad diameter

B02B04B060815

Pad diameter Blast type���——

ø2ø4ø6ø8ø15

Symbol

Mounting

A5H5

Thread sizeM5 x 0.8M5 x 0.8

Adapter typeHexagon O.D.

Hexagon socket head

Symbol

Replacement Part No.Pad unit part no.ZP2-B02EU�ZP2-B04EU�ZP2-B06EU�ZP2-08EU�ZP2-15EU�ZP2-B02EU�ZP2-B04EU�ZP2-B06EU�ZP2-08EU�ZP2-15EU�

Adapter part no.

ZP2A-Z01P

ZP2A-Z02P

ZP2-TB02EU�-A5ZP2-TB04EU�-A5ZP2-TB06EU�-A5ZP2-T08EU�-A5ZP2-T15EU�-A5ZP2-TB02EU�-H5ZP2-TB04EU�-H5ZP2-TB06EU�-H5ZP2-T08EU�-H5ZP2-T15EU�-H5

Model

Note) � in the table indicates the pad material.

Pad type

EUTypeFlat

Symbol

Pad diameter

02030406

B08

Pad diameter Blast type————�

ø2ø3ø4ø6ø8

Symbol

Pad type

AUTypeFlat

Symbol

AU: FlatPad diameter: ø2, ø3, ø4, ø6, ø8

Space-saving in theheight direction Pad unit ZP2 02 AU N

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

Series ZP2

How to Order

How to Order

M5 x 0.8ZP2-02AU�; ZP2-03AU�; ZP2-04AU� ZP-312-AAdapter part no. Pad unit part no. Thread sizeAdapter

Note) For pad units ZP2-06AU�, ZP2-B08AU� please consult SMC.

8

N06 J

Vacuum Pad

Series ZP2

ZP2

Bellows Pad: J, MB, ZJJ: Bellows (Multistage type)Pad diameter: ø6, ø9, ø10, ø14, ø15, ø16, ø25, ø30

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

Pad unit

Pad type

JType

Bellows (Multistage type)Symbol

With/Without lock ring

X19With lock ring

Without lock ring Note)—

X19

Pad diameter

0609

B1014

B1516

B25B30

Pad diameter Blast type——�—�—��

ø6ø9ø10ø14ø15ø16ø25ø30

Symbol

• For use where there is no space for the buffer (spring type)• Workpieces with inclined adsorption surface • Applicable for the ZP series adapter

Note) ø6, ø10, ø15 are not available.

Pad type

MBType

BellowsSymbol

NB04MBZP2

MB: BellowsPad diameter: ø4, ø6, ø8, ø10, ø15, ø20

Pad unit• For use where there is no space for the buffer (spring type)• Workpieces with inclined adsorption surface

B04B06B08

Pad diameter Blast type���

ø4ø6ø8

Symbol

B10B15B20

���

ø10ø15ø20

Pad diameter

How to Order

How to Order

M5 x 0.8M6 x 1

M4 x 0.7M5 x 0.8M5 x 0.8M6 x 1

M5 x 0.8M6 x 1Rc1/8

NPT1/8NPTF1/8M6 x 1M8 x 1

M5 x 0.8M6 x 1

M8 x 1.25Rc1/8

NPT1/8NPTF1/8

ZP2-06J�; ZP2-B10J�; ZP2-B15J�

ZP2-09J�; ZP2-14J�; ZP2-16J�

ZP2-B25J�; ZP2-B30J�

ZPT1-A5ZPT1-A6ZPT1-B4ZPT1-B5ZPT2-A5ZPT2-A6ZPT2-B5ZPT2-B6ZPT2-B01ZPT2-N01ZPT2-T01ZPT3-A6ZPT3-A8ZPT3-B5ZPT3-B6ZPT3-B8ZPT3-B01ZPT3-N01ZPT3-T01

Adapter part no. Pad unit part no. Thread sizeAdapter

9

N02 ZJZP2

ZJ: BellowsPad diameter: ø2, ø4, ø5, ø6, ø40, ø46

Pad unit

Pad diameter

Pad type

• For use where there is no space for the buffer (spring type)• Workpieces with inclined adsorption surface

ZJType

BellowsSymbol

020405

Pad diameterø2ø4ø5

Symbol

064046

ø6ø40ø46

How to Order

B04 MB A3

Mounting

ZP2With adapter

Replacement Part No.Pad unit part no.ZP2-B04MB�ZP2-B06MB�ZP2-B08MB�ZP2-B10MB�ZP2-B15MB�ZP2-B20MB�ZP2-B06MB�ZP2-B08MB�

Adapter part no.ZP2A-M01P

ZP2A-M02P

ZP2A-M05

ZP2A-M06

ZP2A-M04

ZP2-TB04MB�-A3ZP2-TB06MB�-H5ZP2-TB08MB�-H5ZP2-TB10MB�-H5ZP2-TB15MB�-H5ZP2-TB20MB�-H5ZP2-TB06MB�-B5ZP2-TB08MB�-B5

Model

Pad typePad diameter

B04B06B08B10B15B20

Pad diameter Blast type������

ø4ø6ø8ø10ø15ø20

Symbol

T

A3 (M3 x 0.5 Male thread)H5 (M5 x 0.8 Male thread)B5 (M5 x 0.8 Female thread)

B04

�——

Pad diameter(Symbol)Thread size (Symbol) B06

—��

B08

—��

B10

—�—

B15

—�—

B20

—�—

Note) � Indicates the pad material.

Vacuum inlet direction

TDirectionVertical

Symbol

MBType

BellowsSymbol

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

N

Series ZP2

How to Order

M5 x 0.8M4 x 0.7

ZP2-05ZJ� ZP-445-AZP-474-A

Adapter part no. Pad unit part no. Thread sizeAdapter

Note) For pad units ZP2-02ZJ�, ZP2-04ZJ�, ZP2-06ZJ�, ZP2-40ZJ�, ZP2-46ZJ� please consult SMC

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

10

Vacuum Pad

Series ZP2

Pad type

Pad diameter

N08 ANZP2

Nozzle Pad: ANAN: NozzlePad diameter: ø0.8, ø1.1

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

Pad unit• For adsorption of small pieces (such as IC chips)

08 AN A5ZP2With adapter TVacuum inlet direction

TDirectionVertical

Symbol

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

N

0811

Pad diameterø0.8ø1.1

Symbol

ANType

NozzleSymbol

Pad diameter

0811

Pad diameterø0.8ø1.1

Symbol

Mounting

A5Thread size

M5 x 0.8Symbol

Replacement Part No.Pad unit part no.

ZP2-08AN�ZP2-11AN�

Adapter part no.

ZP2A-Z21PZP2-T08AN�-A5ZP2-T11AN�-A5

Model

Note) � indicates the pad material.

Pad type

ANType

NozzleSymbol

How to Order

How to Order

11

GS06 S

Vacuum Pad

Series ZP2

ZP2

Sponge Pad: SS: SpongePad diameter: ø4, ø6, ø8, ø10, ø15

Pad unit

Pad with Ball Spline Buffer: UU: FlatPad diameter: ø2, ø4, ø6, ø8

• Ball spline guide is used to the buffer.

Pad diameter

Pad type

• For adsorption of workpieces with bumps

Pad material

GSGC

Conductive siliconeConductive CR

Symbol Material

0406081015

ø4ø6ø8

ø10ø15

Symbol Pad diameter

SType

SpongeSymbol

06S A3ZP2With adapter TVacuum inlet direction

TDirectionVertical

Symbol

GS

Pad diameter

Mounting

0406081015

ø4ø6ø8ø10ø15

Symbol Pad diameter

Replacement Part No.Pad unit part no.

ZP2-04S�ZP2-06S�ZP2-08S�ZP2-10S�ZP2-15S�ZP2-04S�ZP2-06S�ZP2-08S�ZP2-10S�ZP2-15S�

Adapter part no.ZP2A-S01PZP2A-S02PZP2A-S03PZP2A-S04PZP2A-S05PZP2A-S11ZP2A-S12ZP2A-S13ZP2A-S14ZP2A-S15

ZP2-T04S�-A3ZP2-T06S�-A5ZP2-T08S�-A5ZP2-T10S�-A5ZP2-T15S�-A5ZP2-T04S�-B3ZP2-T06S�-B5ZP2-T08S�-B5ZP2-T10S�-B5ZP2-T15S�-B5

Model

Note) � in the table indicates the pad material.

A3A5B3B5

M3 x 0.5 (Male thread)M5 x 0.8 (Male thread)M3 x 0.5 (Female thread)M5 x 0.8 (Female thread)

�—�—

—�—�

—�—�

—�—�

—�—�

Symbol Thread sizeApplicable pad O.D. symbol04 06 08 10 15

Pad type

SType

SpongeSymbol

Pad material

GSGC

Conductive siliconeConductive CR

Symbol Material

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

Pad typeSymbol

UTypeFlat

Bufferspecification

S Ball splineSymbol Specification

Buffer stroke

6 6 mmSymbol Stroke

Pad diameter

02040608

Pad diameterø2ø4ø6ø8

Symbol

Replacement Part No.Pad unit part no.

ZP02U�ZP04U�ZP06U�ZP08U�

Adapter part no.

ZPT1-B5

Buffer assembly part no.

ZP2B-T3S6

ZP2-T02U�S6ZP2-T04U�S6ZP2-T06U�S6ZP2-T08U�S6

Model

Note) � Indicates the pad material.

02U SZP2 TVacuum inlet

direction

TDirectionVertical

Symbol

N 6

At 0 stroke [N]

At buffer stroke [N]

Ball spline

6

0.8

1.1

Stroke [mm]

Specifications

Buffer Specifications

Spring reactiveforce

How to Order

How to Order

How to Order

12

N3507 W

Vacuum Pad

Series ZP2

ZP2

Oval Pad: WW: OvalPad size: 3.5 x 7 to 8 x 30 How to Order

How to Order

How to Order

Pad unit• For workpieces with limitations on the adsorption surface

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

Pad type

WTypeOval

Symbol

Pad unit part no.ZP2-3507W�ZP2-4010W�ZP2-5010W�ZP2-6010W�ZP2-4020W�ZP2-5020W�ZP2-6020W�ZP2-8020W�ZP2-4030W�ZP2-5030W�ZP2-6030W�ZP2-8030W�

Adapter part no.

ZP2A-001

ZP2A-002

ZP2A-003

ZP2-T3507W�-B5ZP2-T4010W�-B5ZP2-T5010W�-B5ZP2-T6010W�-B5ZP2-T4020W�-B5ZP2-T5020W�-B5ZP2-T6020W�-B5ZP2-T8020W�-B5ZP2-T4030W�-B5ZP2-T5030W�-B5ZP2-T6030W�-B5ZP2-T8030W�-B5

ModelReplacement Part No.

Note) � indicates the pad material.

Pad material

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

3507 W B5ZP2 TVacuum inlet

direction

TDirectionVertical

Symbol

N

Pad size

Pad type

Vacuum inletSymbol Thread sizeB5 M5 x 0.8

602080204030503060308030

Size6 x 208 x 204 x 305 x 306 x 308 x 30

Symbol350740105010601040205020

Size3.5 x 74 x 105 x 106 x 104 x 205 x 20

Symbol

WTypeOval

Symbol

With adapter

Pad size

602080204030503060308030

Size6 x 208 x 204 x 305 x 306 x 308 x 30

Symbol350740105010601040205020

Size3.5 x 74 x 105 x 106 x 104 x 205 x 20

SymbolPad material (�)

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

Pad typeSymbol

WTypeOval Buffer specification

Symbol SpecificationK Non-rotating

Buffer stroke ( )Symbol Stroke1020304050

10 mm20 mm30 mm40 mm50 mm

Vacuum inlet (�)Symbol Applicable tube O.D.B50406

M5 x 0.8ø4 one-touch fittingø6 one-touch fitting

Vacuum inlet direction

TDirectionVertical

Symbol

Buffer strokeSymbol Stroke1020304050

10 mm20 mm30 mm40 mm50 mm

Vacuum inlet

Symbol Applicabletube O.D.

B5

04

06

M5 x 0.8

ø6 one-touch fitting

ø4 one-touch fitting

Replacement Part No.Pad unit part no.ZP2-3507W�ZP2-4010W�ZP2-5010W�ZP2-6010W�ZP2-4020W�ZP2-5020W�ZP2-6020W�ZP2-8020W�ZP2-4030W�ZP2-5030W�ZP2-6030W�ZP2-8030W�

Adapter part no.

ZP2A-001

ZP2A-002

Buffer assembly part no.

ZPB2K -�

ZP2A-003

ZP2-T3507W�K -�ZP2-T4010W�K -�ZP2-T5010W�K -�ZP2-T6010W�K -�ZP2-T4020W�K -�ZP2-T5020W�K -�ZP2-T6020W�K -�ZP2-T8020W�K -�ZP2-T4030W�K -�ZP2-T5030W�K -�ZP2-T6030W�K -�ZP2-T8030W�K -�

Model

Note 1) � indicates the pad material.Note 2) indicates the buffer stroke.

Note 3) � indicates the vacuum inlet.

3507 W B5ZP2 T N K10With buffer

Pad size

602080204030503060308030

Size6 x 208 x 204 x 305 x 306 x 308 x 30

Symbol350740105010601040205020

Size3.5 x 74 x 105 x 106 x 104 x 205 x 20

Symbol

At 0 stroke [N]At buffer stroke [N]

Stroke [mm]

Tightening torque

10, 20, 30, 40, 501.03.0

3.0 N·m ±5%

Spring reactiveforce

Ball splineSpecifications

Buffer Specifications

13

Ball splineSpecifications

Buffer Specifications

Pad material (�)

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

SymbolPad typeSymbol

WTypeOval

3507 W A5ZP2 R N 04Without buffer

Vacuum inlet (�)

0406

ø4ø6

Applicable tube O.D.Symbol

MountingSymbol Thread sizeA5B5

M5 x 0.8 (Male thread)M5 x 0.8 (Female thread)

Replacement Part No.Pad unit part no.ZP2-3507W�ZP2-4010W�ZP2-5010W�ZP2-6010W�ZP2-4020W�ZP2-5020W�ZP2-6020W�ZP2-8020W�ZP2-4030W�ZP2-5030W�ZP2-6030W�ZP2-8030W�

Adapter part no.

ZP2A-001

ZP2A-002

Type R adapter part no.

ZPRS-�-A5

ZPRS-�-B5

ZP2A-003

ZP2-R3507W�-�-A5ZP2-R4010W�-�-A5ZP2-R5010W�-�-A5ZP2-R6010W�-�-A5ZP2-R4020W�-�-A5ZP2-R5020W�-�-A5ZP2-R6020W�-�-A5ZP2-R8020W�-�-A5ZP2-R4030W�-�-A5ZP2-R5030W�-�-A5ZP2-R6030W�-�-A5ZP2-R8030W�-�-A5

ModelZP2-R3507W�-�-B5ZP2-R4010W�-�-B5ZP2-R5010W�-�-B5ZP2-R6010W�-�-B5ZP2-R4020W�-�-B5ZP2-R5020W�-�-B5ZP2-R6020W�-�-B5ZP2-R8020W�-�-B5ZP2-R4030W�-�-B5ZP2-R5030W�-�-B5ZP2-R6030W�-�-B5ZP2-R8030W�-�-B5

Note 1) � Indicates the pad material.Note 2) � Indicates the vacuum inlet.

Vacuum inlet

0406

ø4ø6

Symbol Applicable tube O.D.

Vacuum inlet direction

RDirectionLateral

Symbol

Pad size

Buffer specification

Buffer stroke ( )

1020304050

10 mm20 mm30 mm40 mm50 mm

Symbol Stroke

Vacuum inlet (�)

0406

ø4ø6

Symbol Applicable tube O.D.

602080204030503060308030

Size6 x 208 x 204 x 305 x 306 x 308 x 30

Symbol350740105010601040205020

Size3.5 x 74 x 105 x 106 x 104 x 205 x 20

Symbol

Symbol SpecificationK Non-rotating

Replacement Part No.Pad unit part no.ZP2-3507W�ZP2-4010W�ZP2-5010W�ZP2-6010W�ZP2-4020W�ZP2-5020W�ZP2-6020W�ZP2-8020W�ZP2-4030W�ZP2-5030W�ZP2-6030W�ZP2-8030W�

Adapter part no.

ZP2A-001

ZP2A-002

Type R adapter part no.

ZPRS-�-B5

ZP2A-003

ZP2-R3507W�K -�ZP2-R4010W�K -�ZP2-R5010W�K -�ZP2-R6010W�K -�ZP2-R4020W�K -�ZP2-R5020W�K -�ZP2-R6020W�K -�ZP2-R8020W�K -�ZP2-R4030W�K -�ZP2-R5030W�K -�ZP2-R6030W�K -�ZP2-R8030W�K -�

Model Buffer assembly part no.

ZPB2K

Buffer stroke

1020304050

10 mm20 mm30 mm40 mm50 mm

Symbol StrokeVacuum inlet

0406

ø4ø6

Symbol Applicabletube O.D.

Note 1) � indicates the pad material.Note 2) indicates the buffer stroke.

Note 3) � indicates the vacuum inlet.

Pad material (�)

NSUF

GNGS

MaterialNBR

Silicone rubberUrethane rubber

FKMConductive NBR

Conductive silicone rubber

Symbol

Pad typeSymbol

WTypeOval

3507 W 04ZP2 R N 10With buffer

Vacuum inlet direction

RDirectionLateral

Symbol

K

Pad size

602080204030503060308030

Size6 x 208 x 204 x 305 x 306 x 308 x 30

Symbol350740105010601040205020

Size3.5 x 74 x 105 x 106 x 104 x 205 x 20

Symbol

Series ZP2

How to Order

Female thread mounting

Male thread mounting

How to Order

At 0 stroke [N]At buffer stroke [N]

Stroke [mm]

Tightening torque

10, 20, 30, 40, 501.03.0

3.0 N·m ±5%

Spring reactiveforce

14

CL04 U

Vacuum Pad

Series ZP2

ZP2

Mark-free Pad: U, H, Resin Attachment, Cyclone PadU: FlatPad diameter: ø4, ø6, ø8, ø10, ø16, ø25, ø32, ø40, ø50Material: Mark-free NBR

Pad unit

Pad diameter

Pad type

UTypeFlat

Symbol

Pad material

CLMaterial

Mark-free NBRSymbol

With/Without lock ring

X19

Note) ø10 or larger

• Pad which reduces the adsorption marks left on the workpiece by rubber. • The pad is made from mark-free NBR, and the NBR is then specially treated to minimise the transfer of rubber constituents to the workpiece. • Applicable for the ZP series adapter

X19With lock ring

Without lock ring Note)—

0406081016

ø4ø6ø8

ø10ø16

Symbol Pad diameter

25324050

ø25ø32ø40ø50

How to Order

M5 x 0.8M6 x 1

M4 x 0.7M5 x 0.8M5 x 0.8M6 x 1

M5 x 0.8M6 x 1Rc1/8

NPT1/8NPTF1/8M6 x 1M8 x 1

M5 x 0.8M6 x 1

M8 x 1.25Rc1/8

NPT1/8NPTF1/8M6 x 1M8 x 1M6 x 1

M8 x 1.25Rc1/8

NPT1/8NPTF1/8

ZP2-04UCL; ZP2-06UCL; ZP2-08UCL

ZP2-10UCL; ZP2-16UCL

ZP2-25UCL; ZP2-32UCL

ZP2-40UCL; ZP2-50UCL

ZPT1-A5ZPT1-A6ZPT1-B4ZPT1-B5ZPT2-A5ZPT2-A6ZPT2-B5ZPT2-B6ZPT2-B01ZPT2-N01ZPT2-T01ZPT3-A6ZPT3-A8ZPT3-B5ZPT3-B6ZPT3-B8ZPT3-B01ZPT3-N01ZPT3-T01ZPT4-A6ZPT4-A8ZPT4-B6ZPT4-B8ZPT4-B01ZPT4-N01ZPT4-T01

Adapter part no. Pad unit part no. Thread sizeAdapter

15

Made to order

Pad diameter

40506380100125

ø40ø50ø63ø80

ø100ø125

Symbol Pad diameter

Pad material

CLNTFT

MaterialMark-free NBR

NBR + Stuck fluororesinFluororubber + Stuck fluororesin

Symbol

Pad type

HType

Heavy-duty (Flat with rib)Symbol

Stuck fluororesinCL40 HZP2

H: Heavy duty (Flat with rib)Pad diameter: ø40, ø50, ø63, ø80, ø100, ø125Material: Mark-free NBR, NBR + Stuck fluororesin, Fluororubber + Stuck fluororesin

Pad unit• Pad which reduces the adsorption marks left on the workpiece by rubber. • The pad is made from mark-free NBR, and the NBR is then specially treated to minimise the transfer of rubber constituents to the workpiece. • Prevents rubber constituents of the pad from transferring by baking the fluororesin sheet to the adsorptio surface.

• No adsorption marks (rubber constituents) are left on the workpiece. Avoids direct contact between the workpiece and the rubber by installing a PEEK attachment to the bellows pad to prevent the transfer of rubber constituents. • Prevents sticking of the pad (rubber) and the workpiece. • Ideal for the ZP series bellows pad (ø6 to ø32)

Pad diameter

0608101316202532

ZP06B�ZP08B�ZP10B�ZP13B�ZP16B�ZP20B�ZP25B�ZP32B�

Symbol Pad diameter

Attachment material

PGP

MaterialPEEK

Conductive PEEK

Symbol

P06 KZP2

Resin AttachmentPad diameter: ø6, ø8, ø10, ø13, ø16, ø20, ø25, ø32Material: PEEK, Conductive PEEK

XT661 Cyclone PadPad diameter: ø20, ø40, ø60, ø80, ø100

Note) Consult SMC for detailed information.

How to Order

How to Order

M8 x 1.25M10 x 1.5

Rc1/8NPT1/8

NPTF1/8M8 x 1.25M10 x 1.5M12 x 1.75M16 x 1.5

Rc1/8NPT1/8

NPTF1/8M12 x 1.75M16 x 1.5

Rc1/8NPT1/8

NPTF1/8

ZP2-40H�; ZP2-50H�

ZP2-63H�; ZP2-80H�

ZP2-100H�; ZP2-125H�

ZPA-T1-B8ZPA-T1-B10ZPA-T1-B01ZPA-T1-N01ZPA-T1-T01ZPA-T2-B8ZPA-T2-B10ZPA-T2-B12ZPA-T2-B16ZPA-T2-B01ZPA-T2-N01ZPA-T2-T01ZPA-T3-B12ZPA-T3-B16ZPA-T3-B01ZPA-T3-N01ZPA-T3-T01

Adapter part no. Pad unit part no. Thread sizeAdapter

Series ZP2

16

Vacuum Pad

Series ZP2

• Reinforced pad to prevent deformation when transferring heavy or large workpieces.

N32 HZP2

Heavy-duty Pad: H, HT, HB, HWH: Heavy duty (Flat with rib)HT: Heavy duty (Thin flat with rib)Pad diameter: ø32, ø150, ø250, ø300, ø340

Pad diameter

32150250300340

Pad diameterø32

ø150ø250ø300ø340

SymbolPad material

NSFC

MaterialNBR

Silicone rubberFKMCR

Symbol

Note) Silicone rubber is only applicable to the ø32 pad.

H (Flat with rib)HT (Thin flat with rib)

32

�—

Pad diameter(Symbol)Pad type 150

—�

250

—�

300

�—

340

�—

Pad type—Pad diameter

Pad unit

• For heavy or large workpieces

N32 HBZP2

HB: Heavy-duty (Bellows)Pad diameter: ø32, ø150

Pad material

NSFC

MaterialNBR

Silicone rubberFKMCR

Symbol

Note) Silicone rubber is only applicable to the ø32 pad.

Pad unit

Pad diameter

32150

Pad diameterø32

ø150

Symbol

Pad typeSymbolHB

TypeHeavy-duty (Bellows)

How to Order

How to Order

A14 x 1G1/8

M8 x 1.25M18 x 1.5M20 x 2M24 x 3M24 x 3

ZP2-32H�

ZP2-150HT�

ZP2-250HT�

ZP2-300H�

ZP2-32H�

ZP2-150HB�

INO-3769-1435-AZP-497-AINO-3769-1341-ABZP-307-AZP-417-AZP-124-AZP-124-A

Adapter part no. Pad unit part no. Thread sizeAdapter

A14 x 1G1/8

M8 x 1.25M18 x 1.5

INO-3769-1435-AZP-497-AINO-3769-1341-ABZP-307-A

Adapter part no. Pad unit part no. Thread sizeAdapter

Note) For pad unit ZP2-340H� please consult SMC.

17

Pad size

3050Pad size30 x 50

Symbol

Pad typeSymbolHW

TypeHeavy-duty (Oval)

• For heavy or large workpieces

N3050 HWZP2

HW: Heavy-duty (Oval)Pad size: 30 x 50

Pad material

NSFC

MaterialNBR

Silicone rubberFKMCR

Symbol

Pad unit

How to Order

M8 x 1.25M10 x 1.5

Rc1/8NPT1/8

NPTF1/8

ZP2-3050HW�

ZPA-T1-B8ZPA-T1-B10ZPA-T1-B01ZPA-T1-N01ZPA-T1-T01

Adapter part no. Pad unit part no. Thread sizeAdapter

Series ZP2

18

Vacuum Pad

Series ZP2Heavy-duty Ball Joint Pad: H, HBH: Heavy duty (Flat with rib)Pad diameter: ø40, ø50, ø63, ø80, ø100, ø125

How to Order

How to Order

• For adsorption of workpieces with inclined surface. 40 HZP2 T

Vacuum inletdirection

TX

DirectionVerticalLateral

Symbol

N

Specification (mechanism)

FSpecificationBall joint

Symbol

Pad material (�)

NSUFE

MaterialNBR

Silicone rubberUrethane rubber

FKMEPR

Symbol

H

TypeHeavy-duty

(Flat with rib)

SymbolPad typePad diameter

40506380100125

Pad diameterø40ø50ø63ø80

ø100ø125

Symbol

Replacement Part No.Pad unit part no.

ZP40H�ZP50H�ZP63H�ZP80H�ZP100H�ZP125H�

Adapter assembly part no.

ZP2A-∗F1

ZP2A-∗F2

ZP2A-∗F3

ZP2-∗F40H�ZP2-∗F50H�ZP2-∗F63H�ZP2-∗F80H�ZP2-∗F100H�ZP2-∗F125H�

Model

Note 1) � indicates the pad material.Note 2) ∗ refers to vacuum inlet direction. Put T for vertical direction or X for lateral direction.

With threeM3 boltsWith fourM4 boltsWith fourM5 bolts

With adapter F Vacuum inletdirectionVertical Lateral

Vacuum inletdirection

Replacement Part No.Pad unit part no.

ZP40H�

ZP50H�

ZP63H�

ZP80H�

ZP100H�

ZP125H�

Buffer assembly part no.ZP2B-∗F1(JB/JF)25ZP2B-∗F1(JB/JF)50ZP2B-∗F1(JB/JF)75ZP2B-∗F1(JB/JF)25ZP2B-∗F1(JB/JF)50ZP2B-∗F1(JB/JF)75ZP2B-∗F2(JB/JF)25ZP2B-∗F2(JB/JF)50ZP2B-∗F2(JB/JF)75ZP2B-∗F2(JB/JF)100ZP2B-∗F2(JB/JF)25ZP2B-∗F2(JB/JF)50ZP2B-∗F2(JB/JF)75ZP2B-∗F2(JB/JF)100ZP2B-∗F3(JB/JF)25ZP2B-∗F3(JB/JF)50ZP2B-∗F3(JB/JF)75ZP2B-∗F3(JB/JF)100ZP2B-∗F3(JB/JF)25ZP2B-∗F3(JB/JF)50ZP2B-∗F3(JB/JF)75ZP2B-∗F3(JB/JF)100

ZP2-∗F40H�(JB/JF)25ZP2-∗F40H�(JB/JF)50ZP2-∗F40H�(JB/JF)75ZP2-∗F50H�(JB/JF)25ZP2-∗F50H�(JB/JF)50ZP2-∗F50H�(JB/JF)75ZP2-∗F63H�(JB/JF)25ZP2-∗F63H�(JB/JF)50ZP2-∗F63H�(JB/JF)75ZP2-∗F63H�(JB/JF)100ZP2-∗F80H�(JB/JF)25ZP2-∗F80H�(JB/JF)50ZP2-∗F80H�(JB/JF)75ZP2-∗F80H�(JB/JF)100ZP2-∗F100H�(JB/JF)25ZP2-∗F100H�(JB/JF)50ZP2-∗F100H�(JB/JF)75ZP2-∗F100H�(JB/JF)100ZP2-∗F125H�(JB/JF)25ZP2-∗F125H�(JB/JF)50ZP2-∗F125H�(JB/JF)75ZP2-∗F125H�(JB/JF)100

Model

WiththreeM3

bolts

WithfourM4

bolts

WithfourM5

bolts

Note 1) � indicates the pad material.Note 2) ∗ refers to vacuum inlet direction. Put T for vertical direction or X for lateral direction.

Buffer specification

JB

JF

SpecificationRotating

With bushingMaterial: Brass

RotatingWith bushing

Material: Steel

Symbol

H

TypeSymbol

Pad type

Heavy-duty(Flat with rib)

255075100

ZP40HZP50H

Applicablepad

StrokeZP63HZP80H

ZP100HZP125H

Buffer stroke

���—

����

����

40 HZP2 TVacuum inlet

direction

TX

DirectionVerticalLateral

Symbol

N

Specification (mechanism)

FSpecificationBall joint

Symbol

Pad material (�)

NSUFE

MaterialNBR

Silicone rubberUrethane rubber

FKMEPR

Symbol

Pad diameter

40506380100125

Paddiameterø40ø50ø63ø80

ø100ø125

Symbol

With buffer F JB 25Vacuum inlet

directionVertical Lateral

Vacuum inletdirection

Pad diameter ø40, ø50

6.911.8

Tightening torque: 30 N·m ±5%

Tightening torque: 50 N·m ±5%

At 0 stroke [N]At buffer stroke [N]

JB

JF

Stroke [mm]Springreactive force

Bufferspecifications

ø63, ø80, ø100, ø125

1015

Tightening torque: 45 N·m ±5%

Tightening torque: 70 N·m ±5% (Vertical direction)Tightening torque: 75 N·m ±5% (Lateral direction)

Buffer Specifications

25, 50, 75 25, 50, 75, 100

RotatingWith bushing

Buffer body material: Brass

RotatingWith bushing

Buffer body material: Steel

19

ZP2A-∗F1

ZP2A-∗F2

ZP2A-∗F3

ZP2-∗F40HB�ZP2-∗F50HB�ZP2-∗F63HB�ZP2-∗F80HB�ZP2-∗F100HB�ZP2-∗F125HB�

ZP2B-∗F1(JB/JF)25ZP2B-∗F1(JB/JF)50ZP2B-∗F1(JB/JF)75ZP2B-∗F1(JB/JF)25ZP2B-∗F1(JB/JF)50ZP2B-∗F1(JB/JF)75ZP2B-∗F2(JB/JF)25ZP2B-∗F2(JB/JF)50ZP2B-∗F2(JB/JF)75ZP2B-∗F2(JB/JF)100ZP2B-∗F2(JB/JF)25ZP2B-∗F2(JB/JF)50ZP2B-∗F2(JB/JF)75ZP2B-∗F2(JB/JF)100ZP2B-∗F3(JB/JF)25ZP2B-∗F3(JB/JF)50ZP2B-∗F3(JB/JF)75ZP2B-∗F3(JB/JF)100ZP2B-∗F3(JB/JF)25ZP2B-∗F3(JB/JF)50ZP2B-∗F3(JB/JF)75ZP2B-∗F3(JB/JF)100

ZP2-∗F40HB�(JB/JF)25ZP2-∗F40HB�(JB/JF)50ZP2-∗F40HB�(JB/JF)75ZP2-∗F50HB�(JB/JF)25ZP2-∗F50HB�(JB/JF)50ZP2-∗F50HB�(JB/JF)75ZP2-∗F63HB�(JB/JF)25ZP2-∗F63HB�(JB/JF)50ZP2-∗F63HB�(JB/JF)75ZP2-∗F63HB�(JB/JF)100ZP2-∗F80HB�(JB/JF)25ZP2-∗F80HB�(JB/JF)50ZP2-∗F80HB�(JB/JF)75ZP2-∗F80HB�(JB/JF)100ZP2-∗F100HB�(JB/JF)25ZP2-∗F100HB�(JB/JF)50ZP2-∗F100HB�(JB/JF)75ZP2-∗F100HB�(JB/JF)100ZP2-∗F125HB�(JB/JF)25ZP2-∗F125HB�(JB/JF)50ZP2-∗F125HB�(JB/JF)75ZP2-∗F125HB�(JB/JF)100

HB: Heavy duty (Bellows)Pad diameter: ø40, ø50, ø63, ø80, ø100, ø125

• For adsorption of workpieces with inclined or curved surface. 40 HBZP2 T

Vacuum inletdirection

TX

DirectionVerticalLateral

Symbol

N

Specification (mechanism)

FSpecificationBall joint

Symbol

Pad material (�)

NSUFE

MaterialNBR

Silicone rubberUrethane rubber

FKMEPR

Symbol

HB

TypeHeavy-duty(Bellows)

SymbolPad typePad diameter

40506380100125

Pad diameterø40ø50ø63ø80

ø100ø125

Symbol

Replacement Part No.Pad unit part no.

ZP40HB�ZP50HB�ZP63HB�ZP80HB�ZP100HB�ZP125HB�

Adapter assembly part no.Model

Note 1) � indicates the pad material.Note 2) ∗ refers to vacuum inlet direction. Put T for vertical direction or X for lateral direction.

With threeM3 boltsWith fourM4 boltsWith fourM5 bolts

With adapter F Vacuum inletdirectionVertical Lateral

Vacuum inletdirection

Replacement Part No.Pad unit part no.

ZP40HB�

ZP50HB�

ZP63HB�

ZP80HB�

ZP100HB�

ZP125HB�

Buffer assembly part no.Model

WiththreeM3

bolts

WithfourM4

bolts

WithfourM5

bolts

Note 1) � indicates the pad material.Note 2) ∗ refers to vacuum inlet direction. Put T for vertical direction or X for lateral direction.

Buffer specification

JB

JF

SpecificationRotating

With bushingMaterial: Brass

RotatingWith bushing

Material: Steel

Symbol

HB

TypeSymbol

Pad type

Heavy-duty(Bellows)

255075100

ZP40HBZP50HB

Applicablepad

StrokeZP63HBZP80HB

ZP100HBZP125HB

Buffer stroke

���—

����

����

40 HBZP2 TVacuum inlet

direction

TX

DirectionVerticalLateral

Symbol

N

Specification (mechanism)

FSpecificationBall joint

Symbol

Pad material (�)

NSUFE

MaterialNBR

Silicone rubberUrethane rubber

FKMEPR

Symbol

Pad diameter

40506380100125

Paddiameterø40ø50ø63ø80

ø100ø125

Symbol

With buffer F JB 25Vacuum inlet

directionVertical Lateral

Vacuum inletdirection

Pad diameter ø40, ø50

6.911.8

Tightening torque: 30 N·m ±5%

Tightening torque: 50 N·m ±5%

At 0 stroke [N]At buffer stroke [N]

JB

JF

Stroke [mm]Springreactive force

Bufferspecifications

ø63, ø80, ø100, ø125

1015

Tightening torque: 45 N·m ±5%

Tightening torque: 75 N·m ±5%

Buffer Specifications

25, 50, 75 25, 50, 75, 100

RotatingWith bushing

Buffer body material: Brass

RotatingWith bushing

Buffer body material: Steel

Series ZP2

How to Order

How to Order

20

Vacuum Pad

Series ZPHeavy-duty Pad: H, HBH: Heavy duty (Flat with rib)HB: Heavy duty (Bellows)Pad diameter: ø40, ø50, ø63, ø80, ø100, ø125

• Reinforced pad prevents deformation when transferring heavy or large workpieces. 40 HZP N

Pad material (�)

NSUFE

MaterialNBR

Silicone rubberUrethane rubber

FKMEPR

Symbol

Pad type

Pad diameter

40506380100125

Pad diameterø40ø50ø63ø80

ø100ø125

Symbol

Pad unit

HHB

TypeHeavy-duty (Flat with rib)

Heavy-duty (Bellows)

Symbol

Mounting thread size (Vacuum inlet)

A14A14NA14TA16A16NA16TB8B10B12B16

M14 x 1

M16 x 1.5

Malethread

Female thread

Pad diameterThreadsize

Symbolø40, ø50

Rc1/8NPT1/8

NPTF1/8Rc1/8

NPT1/8NPTF1/8M8 x 1.25M10 x 1.5

M12 x 1.75M16 x 1.5

———�������

���———��——

ø63, ø80———���——��

ø100, ø125

Vacuum inlet direction Vertical

Mounting

Pad material (�)

HHB

TypeHeavy-duty (Flat with rib)

Heavy-duty (Bellows)

Symbol

NSUFE

MaterialNBR

Silicone rubberUrethane rubber

FKMEPR

Symbol

Pad type (∗)

40 HZPT NPad diameter

40506380100125

Pad diameterø40ø50ø63ø80ø100ø125

Symbol

With adapter A14

ZPT40∗�-A14ZPT40∗�-A14NZPT40∗�-A14TZPT50∗�-A14ZPT50∗�-A14NZPT50∗�-A14TZPT63∗�-A16ZPT63∗�-A16NZPT63∗�-A16TZPT80∗�-A16ZPT80∗�-A16NZPT80∗�-A16TZPT100∗�-A16ZPT100∗�-A16NZPT100∗�-A16TZPT125∗�-A16ZPT125∗�-A16NZPT125∗�-A16T

ZP40∗�

ZP50∗�

ZP63∗�

ZP80∗�

ZP100∗�

ZP125∗�

ZPA-T1-B01ZPA-T1-N01ZPA-T1-T01ZPA-T1-B01ZPA-T1-N01ZPA-T1-T01ZPA-T2-B01ZPA-T2-N01ZPA-T2-T01ZPA-T2-B01ZPA-T2-N01ZPA-T2-T01ZPA-T3-B01ZPA-T3-N01ZPA-T3-T01ZPA-T3-B01ZPA-T3-N01ZPA-T3-T01

With threeM3 bolts

With fourM4 bolts

With fourM5 bolts

Model Pad unit part no. Adapter assembly part no.ZPT40∗�-B8ZPT40∗�-B10ZPT50∗�-B8ZPT50∗�-B10ZPT63∗�-B8ZPT63∗�-B10ZPT63∗�-B12ZPT63∗�-B16ZPT80∗�-B8ZPT80∗�-B10ZPT80∗�-B12ZPT80∗�-B16ZPT100∗�-B12ZPT100∗�-B16ZPT125∗�-B12ZPT125∗�-B16

ZP40∗�

ZP50∗�

ZP63∗�

ZP80∗�

ZP100∗�

ZP125∗�

ZPA-T1-B8ZPA-T1-B10ZPA-T1-B8ZPA-T1-B10ZPA-T2-B8ZPA-T2-B10ZPA-T2-B12ZPA-T2-B16ZPA-T2-B8ZPA-T2-B10ZPA-T2-B12ZPA-T2-B16ZPA-T3-B12ZPA-T3-B16ZPA-T3-B12ZPA-T3-B16

With threeM3 bolts

With fourM4 bolts

With fourM5 bolts

Note 1) ∗ indicates the pad type.Note 2) � indicates the pad material.

Model Pad unit part no. Adapter assembly part no.Replacement Part No.

How to Order

How to Order

21

How to Order

Vacuum inlet direction Lateral

ZPX40∗�-B01-B8ZPX40∗�-N01-B8ZPX40∗�-T01-B8ZPX40∗�-B01-B10ZPX40∗�-N01-B10ZPX40∗�-T01-B10ZPX50∗�-B01-B8ZPX50∗�-N01-B8ZPX50∗�-T01-B8ZPX50∗�-B01-B10ZPX50∗�-N01-B10ZPX50∗�-T01-B10ZPX63∗�-B01-B10ZPX63∗�-N01-B10ZPX63∗�-T01-B10ZPX63∗�-B01-B12ZPX63∗�-N01-B12ZPX63∗�-T01-B12

ZP40∗�

ZP50∗�

ZP63∗�

ZPA-X1-B01-B8ZPA-X1-N01-B8ZPA-X1-T01-B8ZPA-X1-B01-B10ZPA-X1-N01-B10ZPA-X1-T01-B10ZPA-X1-B01-B8ZPA-X1-N01-B8ZPA-X1-T01-B8ZPA-X1-B01-B10ZPA-X1-N01-B10ZPA-X1-T01-B10ZPA-X2-B01-B10ZPA-X2-N01-B10ZPA-X2-T01-B10ZPA-X2-B01-B12ZPA-X2-N01-B12ZPA-X2-T01-B12

With threeM3 bolts

With threeM3 bolts

With fourM4 bolts

Model Pad unit part no. Adapter assembly part no.

Note 1) ∗ Indicates the pad type.Note 2) � Indicates the pad material.

Replacement Part No.

ZPX80∗�-B01-B10ZPX80∗�-N01-B10ZPX80∗�-T01-B10ZPX80∗�-B01-B12ZPX80∗�-N01-B12ZPX80∗�-T01-B12ZPX100∗�-B01-B10ZPX100∗�-N01-B10ZPX100∗�-T01-B10ZPX100∗�-B01-B12ZPX100∗�-N01-B12ZPX100∗�-T01-B12ZPX125∗�-B01-B10ZPX125∗�-N01-B10ZPX125∗�-T01-B10ZPX125∗�-B01-B12ZPX125∗�-N01-B12ZPX125∗�-T01-B12

ZP80∗�

ZP100∗�

ZP125∗�

ZPA-X2-B01-B10ZPA-X2-N01-B10ZPA-X2-T01-B10ZPA-X2-B01-B12ZPA-X2-N01-B12ZPA-X2-T01-B12ZPA-X3-B01-B10ZPA-X3-N01-B10ZPA-X3-T01-B10ZPA-X3-B01-B12ZPA-X3-N01-B12ZPA-X3-T01-B12ZPA-X3-B01-B10ZPA-X3-N01-B10ZPA-X3-T01-B10ZPA-X3-B01-B12ZPA-X3-N01-B12ZPA-X3-T01-B12

With fourM4 bolts

With fourM5 bolts

With fourM5 bolts

Model Pad unit part no. Adapter assembly part no.

40 HZPX NWithout buffer B01 B8Pad diameter

40506380100125

Pad diameterø40ø50ø63ø80ø100ø125

Symbol

H

HB

TypeHeavy-duty

(Flat with rib)Heavy-duty(Bellows)

Symbol

Pad material (�)

NSUFE

MaterialNBR

Silicone rubberUrethane rubber

FKMEPR

Symbol

Vacuum inletthread size

B01N01T01

Thread sizeRc1/8

NPT1/8NPTF1/8

Symbol Mounting thread size

B8B10B12

Thread size

M8 x 1.25M10 x 1.5

M12 x 1.75

Symbol

��—

—��

—��

Pad diameterø40, ø50 ø63, ø80 ø100, ø125

Pad diameter

40506380100125

Pad diameterø40ø50ø63ø80ø100ø125

Symbol

Buffer body material ( )

JJBJF

MaterialAluminum alloy

Brass + With bushingSteel + With bushing

Symbol

255075100

ø40���—

ø50���—

ø63���—

ø80���—

ø100����

ø125����

StrokeBuffer stroke

Vacuum inletthread size

B01N01T01

Thread sizeRc1/8

NPT1/8NPTF1/8

Symbol

Mounting thread size

A18A22

Thread sizeM18 x 1.5 (ø40 to ø80)M22 x 1.5 (ø100, ø125)

Symbol

Tightening TorqueAluminum

alloyBrass

+With bushing

Steel+

With bushing

Buffer bodymaterialMounting

thread size1010

3045

5075

M18 x 1.5M22 x 1.5

[N·m]

H

HB

TypeHeavy-duty

(Flat with rib)Heavy-duty(Bellows)

Symbol

Note) Control value of the tightening torque shall be ±5%.

Pad material (�)

NSUFE

MaterialNBR

Silicone rubberUrethane rubber

FKMEPR

Symbol

40 HZPT NWith buffer B01 A18J 25Vacuum inlet

direction

TX

DirectionVerticalLateral

Symbol

Replacement Part No.

ZP*40∗� 25-(B/N/T)01-A18ZP*40∗� 50-(B/N/T)01-A18ZP*40∗� 75-(B/N/T)01-A18ZP*50∗� 25-(B/N/T)01-A18ZP*50∗� 50-(B/N/T)01-A18ZP*50∗� 75-(B/N/T)01-A18ZP*63∗� 25-(B/N/T)01-A18ZP*63∗� 50-(B/N/T)01-A18ZP*63∗� 75-(B/N/T)01-A18ZP*80∗� 25-(B/N/T)01-A18ZP*80∗� 50-(B/N/T)01-A18ZP*80∗� 75-(B/N/T)01-A18ZP*100∗� 25-(B/N/T)01-A22ZP*100∗� 50-(B/N/T)01-A22ZP*100∗� 75-(B/N/T)01-A22ZP*100∗� 100-(B/N/T)01-A22ZP*125∗� 25-(B/N/T)01-A22ZP*125∗� 50-(B/N/T)01-A22ZP*125∗� 75-(B/N/T)01-A22ZP*125∗� 100-(B/N/T)01-A22

ZP40∗�

ZP50∗�

ZP63∗�

ZP80∗�

ZP100∗�

ZP125∗�

ZP*-T1 25-(B/N/T)01ZP*-T1 50-(B/N/T)01ZP*-T1 75-(B/N/T)01ZP*-T1 25-(B/N/T)01ZP*-T1 50-(B/N/T)01ZP*-T1 75-(B/N/T)01ZP*-T2 25-(B/N/T)01ZP*-T2 50-(B/N/T)01ZP*-T2 75-(B/N/T)01ZP*-T2 25-(B/N/T)01ZP*-T2 50-(B/N/T)01ZP*-T2 75-(B/N/T)01ZP*-T3 25-(B/N/T)01ZP*-T3 50-(B/N/T)01ZP*-T3 75-(B/N/T)01ZP*-T3 100-(B/N/T)01ZP*-T3 25-(B/N/T)01ZP*-T3 50-(B/N/T)01ZP*-T3 75-(B/N/T)01ZP*-T3 100-(B/N/T)01

With threeM3 bolts

With fourM4 bolts

With fourM5 bolts

Model Pad unit part no. Buffer assembly part no.

Note 1) ∗ indicates the pad type.Note 2) � indicates the pad material.Note 3) indicates the buffer body material.Note 4) * refers to vacuum inlet direction.Put T for vertical direction or X for lateral direction.

How to Order

Vacuum inlet direction Vertical Vacuum inlet direction Lateral

Series ZP

Pad type (∗)

Pad type (∗)

22

How to Order

Vacuum inlet direction Lateral

ZPX40∗�-B01-B8ZPX40∗�-N01-B8ZPX40∗�-T01-B8ZPX40∗�-B01-B10ZPX40∗�-N01-B10ZPX40∗�-T01-B10ZPX50∗�-B01-B8ZPX50∗�-N01-B8ZPX50∗�-T01-B8ZPX50∗�-B01-B10ZPX50∗�-N01-B10ZPX50∗�-T01-B10ZPX63∗�-B01-B10ZPX63∗�-N01-B10ZPX63∗�-T01-B10ZPX63∗�-B01-B12ZPX63∗�-N01-B12ZPX63∗�-T01-B12

ZP40∗�

ZP50∗�

ZP63∗�

ZPA-X1-B01-B8ZPA-X1-N01-B8ZPA-X1-T01-B8ZPA-X1-B01-B10ZPA-X1-N01-B10ZPA-X1-T01-B10ZPA-X1-B01-B8ZPA-X1-N01-B8ZPA-X1-T01-B8ZPA-X1-B01-B10ZPA-X1-N01-B10ZPA-X1-T01-B10ZPA-X2-B01-B10ZPA-X2-N01-B10ZPA-X2-T01-B10ZPA-X2-B01-B12ZPA-X2-N01-B12ZPA-X2-T01-B12

With threeM3 bolts

With threeM3 bolts

With fourM4 bolts

Model Pad unit part no. Adapter assembly part no.

Note 1) ∗ Indicates the pad type.Note 2) � Indicates the pad material.

Replacement Part No.

ZPX80∗�-B01-B10ZPX80∗�-N01-B10ZPX80∗�-T01-B10ZPX80∗�-B01-B12ZPX80∗�-N01-B12ZPX80∗�-T01-B12ZPX100∗�-B01-B10ZPX100∗�-N01-B10ZPX100∗�-T01-B10ZPX100∗�-B01-B12ZPX100∗�-N01-B12ZPX100∗�-T01-B12ZPX125∗�-B01-B10ZPX125∗�-N01-B10ZPX125∗�-T01-B10ZPX125∗�-B01-B12ZPX125∗�-N01-B12ZPX125∗�-T01-B12

ZP80∗�

ZP100∗�

ZP125∗�

ZPA-X2-B01-B10ZPA-X2-N01-B10ZPA-X2-T01-B10ZPA-X2-B01-B12ZPA-X2-N01-B12ZPA-X2-T01-B12ZPA-X3-B01-B10ZPA-X3-N01-B10ZPA-X3-T01-B10ZPA-X3-B01-B12ZPA-X3-N01-B12ZPA-X3-T01-B12ZPA-X3-B01-B10ZPA-X3-N01-B10ZPA-X3-T01-B10ZPA-X3-B01-B12ZPA-X3-N01-B12ZPA-X3-T01-B12

With fourM4 bolts

With fourM5 bolts

With fourM5 bolts

Model Pad unit part no. Adapter assembly part no.

40 HZPX NWithout buffer B01 B8Pad diameter

40506380100125

Pad diameterø40ø50ø63ø80ø100ø125

Symbol

H

HB

TypeHeavy-duty

(Flat with rib)Heavy-duty(Bellows)

Symbol

Pad material (�)

NSUFE

MaterialNBR

Silicone rubberUrethane rubber

FKMEPR

Symbol

Vacuum inletthread size

B01N01T01

Thread sizeRc1/8

NPT1/8NPTF1/8

Symbol Mounting thread size

B8B10B12

Thread size

M8 x 1.25M10 x 1.5

M12 x 1.75

Symbol

��—

—��

—��

Pad diameterø40, ø50 ø63, ø80 ø100, ø125

Pad diameter

40506380100125

Pad diameterø40ø50ø63ø80ø100ø125

Symbol

Buffer body material ( )

JJBJF

MaterialAluminum alloy

Brass + With bushingSteel + With bushing

Symbol

255075100

ø40���—

ø50���—

ø63���—

ø80���—

ø100����

ø125����

StrokeBuffer stroke

Vacuum inletthread size

B01N01T01

Thread sizeRc1/8

NPT1/8NPTF1/8

Symbol

Mounting thread size

A18A22

Thread sizeM18 x 1.5 (ø40 to ø80)M22 x 1.5 (ø100, ø125)

Symbol

Tightening TorqueAluminum

alloyBrass

+With bushing

Steel+

With bushing

Buffer bodymaterialMounting

thread size1010

3045

5075

M18 x 1.5M22 x 1.5

[N·m]

H

HB

TypeHeavy-duty

(Flat with rib)Heavy-duty(Bellows)

Symbol

Note) Control value of the tightening torque shall be ±5%.

Pad material (�)

NSUFE

MaterialNBR

Silicone rubberUrethane rubber

FKMEPR

Symbol

40 HZPT NWith buffer B01 A18J 25Vacuum inlet

direction

TX

DirectionVerticalLateral

Symbol

Replacement Part No.

ZP*40∗� 25-(B/N/T)01-A18ZP*40∗� 50-(B/N/T)01-A18ZP*40∗� 75-(B/N/T)01-A18ZP*50∗� 25-(B/N/T)01-A18ZP*50∗� 50-(B/N/T)01-A18ZP*50∗� 75-(B/N/T)01-A18ZP*63∗� 25-(B/N/T)01-A18ZP*63∗� 50-(B/N/T)01-A18ZP*63∗� 75-(B/N/T)01-A18ZP*80∗� 25-(B/N/T)01-A18ZP*80∗� 50-(B/N/T)01-A18ZP*80∗� 75-(B/N/T)01-A18ZP*100∗� 25-(B/N/T)01-A22ZP*100∗� 50-(B/N/T)01-A22ZP*100∗� 75-(B/N/T)01-A22ZP*100∗� 100-(B/N/T)01-A22ZP*125∗� 25-(B/N/T)01-A22ZP*125∗� 50-(B/N/T)01-A22ZP*125∗� 75-(B/N/T)01-A22ZP*125∗� 100-(B/N/T)01-A22

ZP40∗�

ZP50∗�

ZP63∗�

ZP80∗�

ZP100∗�

ZP125∗�

ZP*-T1 25-(B/N/T)01ZP*-T1 50-(B/N/T)01ZP*-T1 75-(B/N/T)01ZP*-T1 25-(B/N/T)01ZP*-T1 50-(B/N/T)01ZP*-T1 75-(B/N/T)01ZP*-T2 25-(B/N/T)01ZP*-T2 50-(B/N/T)01ZP*-T2 75-(B/N/T)01ZP*-T2 25-(B/N/T)01ZP*-T2 50-(B/N/T)01ZP*-T2 75-(B/N/T)01ZP*-T3 25-(B/N/T)01ZP*-T3 50-(B/N/T)01ZP*-T3 75-(B/N/T)01ZP*-T3 100-(B/N/T)01ZP*-T3 25-(B/N/T)01ZP*-T3 50-(B/N/T)01ZP*-T3 75-(B/N/T)01ZP*-T3 100-(B/N/T)01

With threeM3 bolts

With fourM4 bolts

With fourM5 bolts

Model Pad unit part no. Buffer assembly part no.

Note 1) ∗ indicates the pad type.Note 2) � indicates the pad material.Note 3) indicates the buffer body material.Note 4) * refers to vacuum inlet direction.Put T for vertical direction or X for lateral direction.

How to Order

Vacuum inlet direction Vertical Vacuum inlet direction Lateral

Series ZP

Pad type (∗)

Pad type (∗)

Special Pads for Specific Applications

Vacuum Pad for Fixing Panel

Vacuum Pad for Transferring DisksHow to Order

ZP2 Z1 001 S• For adsorbing and transferring disks of digital household electric appliances (CD, DVD)

- For adsorbing circular components like CD and DVD- Bellows mechanism is realised in the pad to dampen the impact to the work.

Pad material

SGS

MaterialSilicone rubber

Urethane rubber

Symbol

• For adsorbing and fixing the stage of LCD panels, etc.• Bellows mechanism allows complete contact with curved work surface.

ZPT1-A5 is a recommended adapter.(Four adapters are necessary.)

ZP2-Z002ZP2-Z003

Diameterø20ø40

Part number

Fixed orificesize [mm]

0.30.50.71.0

Symbol

03050710

Fixed orifice size

Connection thread symbol for pad side

Applicable fixed orifice size

M5M8

R1/8G1/8

NPT1/8

0.3�————

0.5�����

0.7�����

1.0—����

Symbol Threadsize

A5A8A01AG1AN1

Male thread connectionApplicable fixed orifice size

M5M6

Rc1/8G1/8

NPT1/8

0.3��———

0.5�����

0.7�����

1.0——���

Symbol Threadsize

B5B6B01BG1BN1

Female thread connection

Pad sideFemalethread

Malethread

Pad side

No.0.8

No.0.8

• Can restrict the reduction of vacuum pressure even when there is no workpiece.

When multiple vacuum pads are operated by one vacuum generator, and some of them are not holding the workpiece, the reduction of vacuum pressure is restricted and the workpiece can remain held by the rest of pads.

Vacuum Saving ValveZP2V Series How to Order

ZP2V A5 03

23

ZP2-

LEA

F01A

-UK

SMC CORPORATION (Europe)

Specifications are subject to change without prior noticeand any obligation on the part of the manufacturer.

SMC CORPORATION Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-53621st printing QP printing QP 00 Printed in Spain

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