Modeling of MMIC Passive Structures for mm-wave...

31
Modeling of MMIC Passive Structures Modeling of MMIC Passive Structures for mm for mm - - wave Application wave Application Yamaris Soto: UPRM Yamaris Soto: UPRM Advisors: Advisors: José José Colom Colom Ustariz Ustariz UPRM UPRM Katherine J. Herrick Katherine J. Herrick Raytheon Raytheon October 1, 2002 October 1, 2002

Transcript of Modeling of MMIC Passive Structures for mm-wave...

Page 1: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Modeling of MMIC Passive StructuresModeling of MMIC Passive Structuresfor mmfor mm--wave Applicationwave Application

Yamaris Soto: UPRMYamaris Soto: UPRMAdvisors: Advisors:

José José ColomColom UstarizUstariz UPRMUPRMKatherine J. Herrick Katherine J. Herrick Raytheon Raytheon

October 1, 2002October 1, 2002

Page 2: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

AgendaAgendaObjectivesObjectivesDesign of RMM (Raytheon MetaDesign of RMM (Raytheon Meta--Models)Models)

DOE DOE Design Expert (Statistical Software)Design Expert (Statistical Software)

Integration of RMMIntegration of RMMADSADS

Results RMMResults RMMModel ComposerModel Composer

Results ComposerResults Composer•• StepStep•• TeeTee

ConclusionsConclusions

Page 3: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

ObjectivesObjectives

Parameterization of MMIC Passives StructuresParameterization of MMIC Passives StructuresStepStepTeeTee

Integration of Raytheon metaIntegration of Raytheon meta--models (RMM) models (RMM) into HPinto HP--ADSADSDesign RMM based on Momentum responsesDesign RMM based on Momentum responses

Raytheon Specifications:Raytheon Specifications:•• 100 100 µµm GaAs substratem GaAs substrate•• 0.2 0.2 µµm thin film of Sim thin film of Si33NN44

•• Frequency range of (0.25Frequency range of (0.25--50 GHz) 50 GHz)

Page 4: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Design of RMMDesign of RMMDOEDOE

RMM of Step and Tee generated by RMM of Step and Tee generated by •• Full Factorial DesignsFull Factorial Designs

Step ( two design variables)Step ( two design variables)•• W1 (5W1 (5µµm to 500m to 500µµm)m)•• W2 (5 W2 (5 µµm to 100m to 100µµm)m)

25 runs 25 runs Tee ( three design variables )Tee ( three design variables )

•• W1 (5 W1 (5 µµm to 200m to 200µµm)m)•• W2 (5 W2 (5 µµm to 200m to 200µµm)m)•• W3 (5 W3 (5 µµm to 200m to 200µµm)m)

27 runs plus central points27 runs plus central points

W1

W2

Page 5: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Design ExpertDesign Expert

Powerful Statistical Powerful Statistical (Software)(Software)

Creates and analyze Creates and analyze models up to cubic models up to cubic orderordermodel validation by model validation by statistical testsstatistical tests

•• ANOVAANOVA•• Analysis of ResidualsAnalysis of Residuals•• Box and CoxBox and Cox

Page 6: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Parameterization Parameterization

Method for model Method for model creationcreation

ANOVA (Analysis of ANOVA (Analysis of Variance)Variance)

Model created for:Model created for:SS--parametersparameters

•• Tee (18 models)Tee (18 models)•• Step (8 models)Step (8 models)

26 frequency points 26 frequency points

Page 7: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Model ValidationModel Validation

Check Normality Check Normality assumptionsassumptions

Stabilize varianceStabilize varianceRobust ModelingRobust Modeling

Page 8: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

INTEGRATION ADSINTEGRATION ADSSTEPSTEP

RMM step RMM step componentcomponentDesign VariablesDesign Variables

W1W1W2 W2

Models valid from Models valid from 0.250.25--50 GHz50 GHzValid for 100um Valid for 100um GaAsGaAs

Page 9: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

What is in the box?What is in the box?

Step

Page 10: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Raytheon Meta Models (RMM)Raytheon Meta Models (RMM)

Custom Library of RMM into ADSCustom Library of RMM into ADS

Page 11: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

RMM versus MOM RMM versus MOM --StepStep

RunW1=252.5 umW2= 28.75 umL= 300 um

LegendRMM Step= redMom= blue

Page 12: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

STEPSTEP--RMMRMM

Run:Run:W1= 5 umW1= 5 umW2= 5 umW2= 5 um

Legend:Legend:BlueBlue AdsAdsPinkPink RMMRMMRedRed MomentumMomentum

Page 13: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

RMMSTEPRMMSTEP--CONTCONT

Run:Run:W1= 5 umW1= 5 umW2= 5 umW2= 5 um

Legend:Legend:BlueBlue AdsAdsPinkPink RMMRMMRedRed MomentumMomentum

Page 14: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

What is Model Composer?What is Model Composer?

Model ComposerModel ComposerModeling tool for custom library generationModeling tool for custom library generation

Based on publication:Based on publication:Adaptive CADAdaptive CAD-- Model Building Algorithm for General Model Building Algorithm for General Planar Microwave Structures Planar Microwave Structures

Models are generated based on Momentum Models are generated based on Momentum SimulationsSimulationsAvailable in ADS latest versionAvailable in ADS latest versionLibraries can be easily downloaded into others Libraries can be easily downloaded into others ADS versionsADS versions

Page 15: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Composer ADS 2001Composer ADS 2001

Page 16: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

How it Works?How it Works?

Parameterization in Composer Parameterization in Composer DefineDefine•• LibraryLibrary•• Substrate Substrate •• Frequency RangeFrequency Range•• Passive ComponentPassive Component•• Design VariablesDesign Variables

Page 17: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Model ComposerModel Composer

Model Composer Model Composer generates a library generates a library component palettecomponent paletteDesign VariablesDesign Variables

W1W1W2W2

Page 18: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

ComposerComposerCustom library design parameters can be define Custom library design parameters can be define as discrete list, continuous and globalas discrete list, continuous and globalSubstrates definitions can be download as a fileSubstrates definitions can be download as a fileInput data for parameterization comes from Input data for parameterization comes from momentum simulation responsesmomentum simulation responsesA preset feed line is needed in order to generate A preset feed line is needed in order to generate the layout in momentum for the componentthe layout in momentum for the component

Page 19: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Composer ResultsComposer ResultsMMIC Measurements against composerMMIC Measurements against composer

Page 20: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

MMIC Pass AMMIC Pass AMask 399Mask 399--0909--AA

Page 21: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Pass A Pass A S21

-30

-25

-20

-15

-10

-5

0

2.5E

+08

4.25

E+0

9

8.25

E+0

9

1.23

E+1

0

1.63

E+1

0

2.03

E+1

0

2.43

E+1

0

2.83

E+1

0

3.23

E+1

0

3.63

E+1

0

4.03

E+1

0

4.43

E+1

0

4.83

E+1

0

Frequency (Ghz)

phas

e (d

eg) Composer

ADSMomentumMeasure

S11

020406080

100

2.5E+08

6.25E

+091.2

3E+10

1.83E

+102.4

3E+10

3.03E

+103.6

3E+10

4.23E

+104.8

3E+10

Frequency (Ghz)

phas

e (d

eg) Composer

ADSMomentumMeasure

S21

-0.3

-0.25

-0.2

-0.15

-0.1

-0.05

0

2.5E

+08

6.25

E+0

9

1.23

E+1

0

1.83

E+1

0

2.43

E+1

0

3.03

E+1

0

3.63

E+1

0

4.23

E+1

0

4.83

E+1

0

Frequency (Ghz)

dB

ComposerADSMomentumMeasure

S21

-30

-25

-20

-15

-10

-5

0

2.5E

+08

4.25

E+0

9

8.25

E+0

9

1.23

E+1

0

1.63

E+1

0

2.03

E+1

0

2.43

E+1

0

2.83

E+1

0

3.23

E+1

0

3.63

E+1

0

4.03

E+1

0

4.43

E+1

0

4.83

E+1

0

Frequency (Ghz)

phas

e (d

eg) Composer

ADSMomentumMeasure

Page 22: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Pass GPass GS11

-40

-30

-20

-10

0

2.5E+

086.2

5E+0

91.2

3E+1

01.8

3E+1

02.4

3E+1

03.0

3E+1

03.6

3E+1

04.2

3E+1

04.8

3E+1

0

Frequency (Ghz)

dB

Composer

ADS

Momentum

Measure

S11

-100

-50

0

50

100

2.5E+

086.2

5E+0

91.2

3E+1

01.8

3E+1

02.4

3E+1

03.0

3E+1

03.6

3E+1

04.2

3E+1

04.8

3E+1

0

Frequency (Ghz)

phas

e (d

eg) Composer

ADS

Momentum

Measure

S21

-2.5

-2

-1.5

-1

-0.5

0

2.5E+

086.2

5E+0

91.2

3E+1

01.8

3E+1

02.4

3E+1

03.0

3E+1

03.6

3E+1

04.2

3E+1

04.8

3E+1

0Frequency (Ghz)

dB

Composer

ADS

Momentum

Measure

S21

-200

-100

0

100

200

2.5E+

086.2

5E+0

91.2

3E+1

01.8

3E+1

02.4

3E+1

03.0

3E+1

03.6

3E+1

04.2

3E+1

04.8

3E+1

0

Frequency (Ghz)

phas

e (d

eg) Composer

ADS

Momentum

Measure

Page 23: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Ads Constraint StepAds Constraint Step

0 10 20 30 40 50-90

-80

-70

-60

-50

-40

-30

freq, GHz

dB(S

(1,1

))dB

(ads

_ste

p2..S

(1,1

))dB

(mom

_ste

p2..S

(1,1

))

0 10 20 30 40 50-100

-50

0

50

100

freq, GHz

phas

e(S(

1,1)

)ph

ase(

ads_

step

2..S

(1,1

))ph

ase(

mom

_ste

p2..S

(1,1

))

0 10 20 30 40 50-0.030

-0.025

-0.020

-0.015

-0.010

-0.005

0.000

f req, GHz

dB(S

(1,2

))dB

(ads

_ste

p2..S

(1,2

))dB

(mom

_ste

p2..S

(1,2

))

0 10 20 30 40 50-5

-4

-3

-2

-1

0

freq, GHz

phas

e(S(

1,2)

)ph

ase(

ads_

step

2..S

(1,2

))ph

ase(

mom

_ste

p2..S

(1,2

))

0 10 20 30 40 50-90

-80

-70

-60

-50

-40

-30

f req, GHz

dB(S

(2,2

))dB

(ads

_ste

p2..S

(2,2

))dB

(mom

_ste

p2..S

(2,2

))

0 10 20 30 40 50-100

-50

0

50

100

freq, GHz

phas

e(S(

2,2)

)ph

ase(

ads_

step

2..S

(2,2

))ph

ase(

mom

_ste

p2..S

(2,2

))

ConstraintConstraint0.1<W2/W1<10 0.1<W2/W1<10

RunRunW1=5umW1=5umW2=100W2=100

where w2/w1where w2/w1=20=20

LegendMom = pink

Composer = redAds =blue

Page 24: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Valid ADS Run Valid ADS Run

0 20 40 60 80 100-80

-60

-40

-20

0

freq, GHz

dB(S

(1,1

))...

_ste

p_50

0_10

0..S

(1,1

))...

_ste

p_50

0_10

0..S

(1,1

))

0 20 40 60 80 100-5

-4

-3

-2

-1

0

freq, GHz

dB(S

(1,2

))...

_ste

p_50

0_10

0..S

(1,2

))...

_ste

p_50

0_10

0..S

(1,2

))

0 20 40 60 80 100-200

-100

0

100

200

freq, GHz

phas

e(S(

1,1)

)...

_ste

p_50

0_10

0..S

(1,1

))...

_ste

p_50

0_10

0..S

(1,1

))

0 20 40 60 80 100-200

-100

0

100

200

freq, GHz

..._s

tep_

500_

100.

.S(1

,2))

..._s

tep_

500_

100.

.S(1

,2))

phas

e(S(

1,2)

)

W2/W1=0.25W2/W1=0.25RunRun

W1=500 umW1=500 umW2=100 umW2=100 umL=300 umL=300 um

Freq RangeFreq Range0.25 to 100 GHz0.25 to 100 GHz

LegendMom = pink

Composer = redAds =blue

Page 25: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Step ErrorsStep ErrorsMeasurements versus ComposerMeasurements versus Composer

Error S11mag

0.00%

5.00%

10.00%

15.00%

20.00%

25.00%

2.5E+08

4.25E

+098.2

5E+09

1.23E

+101.6

3E+10

2.03E

+102.4

3E+10

2.83E

+103.2

3E+10

3.63E

+104.0

3E+10

4.43E

+104.8

3E+10

Frequency (GHz)

Erro

r (%

)

composer_s11m

Error S12mag

0.00%

0.50%

1.00%

1.50%

2.00%

2.5E+08

4.25E

+098.2

5E+09

1.23E

+101.6

3E+10

2.03E

+102.4

3E+10

2.83E

+103.2

3E+10

3.63E

+104.0

3E+10

4.43E

+104.8

3E+10

Frequency (GHZ)

Erro

r(%

)

composer_s12m

Error S22mag

0.00%

5.00%

10.00%15.00%

20.00%

25.00%

2.5E+08

4.25E

+098.2

5E+09

1.23E

+101.6

3E+10

2.03E

+102.4

3E+10

2.83E

+103.2

3E+10

3.63E

+104.0

3E+10

4.43E

+104.8

3E+10

Frequency (GHz)

Erro

r (%

)

composer_s22m

Page 26: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Pass APass AMask 399Mask 399--1010--AA

RunW1=70 umW2=70 umW3=70 um

Page 27: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

S11

-50

-40

-30

-20

-10

0

2.5E+

086.2

5E+0

91.2

3E+1

01.8

3E+1

02.4

3E+1

03.0

3E+1

03.6

3E+1

04.2

3E+1

04.8

3E+1

0

Frequency (Ghz)

dB

Composer

ADS

Momentum

Measure

S11

-200

-100

0

100

200

2.5E+

086.2

5E+0

91.2

3E+1

01.8

3E+1

02.4

3E+1

03.0

3E+1

03.6

3E+1

04.2

3E+1

04.8

3E+1

0

Frequency (Ghz)

phas

e (d

eg) Composer

ADS

Momentum

Measure

S21

-40

-30

-20

-10

0

2.5E+

086.2

5E+0

91.2

3E+1

01.8

3E+1

02.4

3E+1

03.0

3E+1

03.6

3E+1

04.2

3E+1

04.8

3E+1

0Frequency (Ghz)

dB

Composer

ADS

Momentum

Measure

S21

-200

-150

-100-50

0

50

100

2.5E+

086.2

5E+0

91.2

3E+1

01.8

3E+1

02.4

3E+1

03.0

3E+1

03.6

3E+1

04.2

3E+1

04.8

3E+1

0

Frequency (Ghz)

phas

e (d

eg) Composer

ADS

Momentum

Measure

TEE-PASS A

Page 28: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

ADS Constraint TeeADS Constraint Tee

Tee constraintTee constraintW widest<5*W narrowW widest<5*W narrow

Random RunRandom RunW1= 200 umW1= 200 umW2= 5 umW2= 5 umW3= 5 umW3= 5 umL=5 umL=5 um

0 10 20 30 40 50-10.4

-10.2

-10.0

-9.8

-9.6

-9.4

f req, GHz

dB(S

(1,1

))...

mpo

ser_

tee_

sola

..S(1

,1))

...e_

200_

5_5_

5um

..S(1

,1))

0 10 20 30 40 50173

174

175

176

177

178

179

180

f req, GHz

phas

e(S(

1,1)

)...

(TES

T_co

mpo

ser_

tee_

sola

..S(1

,1))

phas

e(te

e_20

0_5_

5_5u

m..S

(1,1

))

0 10 20 30 40 50-3.80

-3.75

-3.70

-3.65

-3.60

-3.55

-3.50

f req, GHz

dB(S

(1,3

))...

mpo

ser_

tee_

sola

..S(1

,3))

...e_

200_

5_5_

5um

..S(1

,3))

0 10 20 30 40 50-3.6

-3.5

-3.4

-3.3

-3.2

-3.1

f req, GHz

dB(S

(1,2

))...

mpo

ser_

tee_

sola

..S(1

,2))

...e_

200_

5_5_

5um

..S(1

,2))

LegendMom = purple

Composer = blueAds = red

Page 29: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

Errors TeeErrors TeeComposer versus MeasuresComposer versus Measures

Error S11mag

0.00%20.00%40.00%60.00%80.00%

2.5E+0

84.2

5E+0

98.2

5E+0

91.2

3E+1

01.6

3E+1

02.0

3E+1

02.4

3E+1

02.8

3E+1

03.2

3E+1

03.6

3E+1

04.0

3E+1

04.4

3E+1

04.8

3E+1

0

Frequency (GHz)

Erro

r (%

)

COMPOSERS11MAG

Error S12 mag

0.00%20.00%40.00%60.00%80.00%

100.00%

2.5E

+08

4.25

E+09

8.25

E+09

1.23

E+10

1.63

E+10

2.03

E+10

2.43

E+10

2.83

E+10

3.23

E+10

3.63

E+10

4.03

E+10

4.43

E+10

4.83

E+10

Frequency (GHz)

Erro

r (%

)

COMPOSER_S12MAG

Error S22 mag

0.00%10.00%20.00%30.00%40.00%50.00%60.00%70.00%80.00%

2.5E+0

84.2

5E+0

98.2

5E+0

91.2

3E+1

01.6

3E+1

02.0

3E+1

02.4

3E+1

02.8

3E+1

03.2

3E+1

03.6

3E+1

04.0

3E+1

04.4

3E+1

04.8

3E+1

0

Frequency (GHz)

Erro

r (%

)

COMPOSER_S12MAG

Page 30: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

ConclusionsConclusions

Ads step and tee predict accurately Ads step and tee predict accurately when parameter dimension are within when parameter dimension are within ads model constraintads model constraintComposer duplicate accurately Composer duplicate accurately momentum response and momentum response and measurementsmeasurementsComposer is a alternative for modeling Composer is a alternative for modeling beyond 50 GHz beyond 50 GHz

Page 31: Modeling of MMIC Passive Structures for mm-wave Applicationece.uprm.edu/climmate/ppp/MMIC_oct1_final2.pdf · Objectives ¾Parameterization of MMIC Passives Structures zStep zTee ¾Integration

ConclusionsConclusions

RMM methodology duplicate accurately RMM methodology duplicate accurately momentum responsemomentum responseLibraries for step, taper, bend and corner Libraries for step, taper, bend and corner are available until 100 GHzare available until 100 GHz