MicroE Systems mercury ii product presentation
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Transcript of MicroE Systems mercury ii product presentation
GSI Group Inc. CONFIDENTIAL
Mercury II™
Encoders
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GSI Group Inc. CONFIDENTIAL
Mercury II Encoder Family
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Model Resolution Output Top Speed ScalesMII6000 5µm – 1.2nm Quadrature or Serial Word 10m/s Tape, Linear Glass, Rotary Glass MII5000 5µm – 1.2nm Quadrature or Serial Word 10m/s Tape, Linear Glass, Rotary GlassMII1900 5µm – 1.2nm* Analog 7.2m/s Tape, Linear GlassMII1600 5µm – 0.5µm Quadrature 20m/s** Tape
* Dependent on customer’s electronics ** At x4 interpolation only
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Mercury II Encoder Family Common Features
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•Dual Laser optical configuration–Laser 1 = Main track
–Laser 2 = Index track
•Metal tape scale capability
•Stick-on index
•Stick-on left and right limits (except MII1600/1900)
•Double shielded cable
•Standard 15 pin D-Sub connectors
•Automatic Gain Control (AGC)
•Broad alignment tolerances
•CE and RoHS Compliant
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MII1600• Digital in the head, A-quad-B• 20µm pitch Metal tape scale• Factory set 0.5µm, 1µm, 2.5µm or
5µm resolution and repeatability• Index Window is ~20µm wide• Outputs are all differential• Single ended Sin/Cos signals for
alignment verification • No electronics in the DB15
connector • Same pin-map as Renishaw
RGH24• Standard ½, 1, 3 and 5 meter
cable lengths
MII1600L with single ended limits currently under development
Index Window
A, B
Sin/Cos(alignment)
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MII1900
Index Window
Sin/Cos
• Analog Sin and Cos• 20µm pitch metal tape or glass
scale• Excellent signal to noise ratio
allows interpolation up to 14 bits (x16,384) with customer gain, offset and phase corrections
• Index Window is ~20µm wide• Outputs are all differential • No electronics in the DB15
connector • Standard ½, 1, 3 and 5 meter
cable lengths
MII1900L with single ended limits currently under development
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MII1900/1600 Product Overview
• Customizable– Cable length up to 10 meters– Alternate pin maps– Alternate connector– Custom housing (high volume OEM)
• Easy to align– Optional alignment tool– Optional software– Oscilloscope
• Optional marker tape scale with laser written index marks
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MII1900/1600 Alignment Tools
• Alignment tool kit– Computer Interface Adaptor, Alignment Tool, 9V Power Supply– Recommended for setup (red/yellow/green LEDs)– Separate models for MII1900 vs. MII1600, S vs. H connectors– Can be customized for alternate pin maps and connectors– Does not support servo control – no pass-through
• SmartPrecision II Software– Works with Alignment Tool and Computer Interface Adapter– Priced separately (CD + RS232 interface cable)
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MII1600/1900 Qualification TestingExtensive design validation and qualification testing performed
Test SpecEMI immunity EN61000-4-3, -4, -5, -6
ESD compliance EN61000-4-2
Mechanical vibration 30G @ 17Hz
Mechanical Shock 300G, 0.5 ms half sine
Thermal shock and cycling 0°C to 70°C
Accuracy See Datasheet
Resolution See Datasheet
Output signal noise MII 1600: 1μm peak-to-peak @5kHzMII 1900: 5nm RMS at 5kHz bandwidth
Speed 7.2 M/s
Repeatability MII 1600: +/- 1 LSBMII 1900: +/- 5nm (@ 4000x)
Contamination resistance Less than 50% signal drop
Supply voltage variances 4.75V to 5.25V
Highly Accelerated Life Testing 1000 hours 85/85
Operating environment 10% to 90% RH non-condensing
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MII1900 Long Range Accuracy
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MII1900 Short Range Accuracy
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Mercury II 5000
Mercury II 5000 ModelsModel Resolution
Mercury II 5800 5µm – 1.2nm(x4 – x16,384)
Mercury II 5700 5µm – 5nm(x4 – x4000)
Mercury II 5500 5µm – 50nm(x4 – x400)
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Mercury II 5000
1 LSB• A-quad-B output with 1LSB index and limits; tri-state alarm for low / high signal
• High speed serial word available • High speed
– Up to 10m/s @ 0.2µm– Up to 5m/s @ 0.1µm
• User-programmable resolution from 5µm to 1.2nm
• All electronics in the sensor, including interpolation up to x16384
• AGC for resistance to scale contamination and long term stability
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Mercury II 5000
• Many programmable features– Resolution– Quadrature output frequency– Low-pass filter frequency– Limit polarity– Serial word format
• 1m or 5m double-shielded sensor cable; 12 conductors
• All outputs are differential• Pin map matches Renishaw RGH24• Required Alignment Tool:
– Pushbutton setup process– Setup LED’s– Built-in SmartPrecision II Software– Ethernet software interface– 5V Power supply– Not for use while in servo control
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MII5000 Customization
• Alternate connector or pin map• Cable lengths, up to 10m• Custom serial word interface may require NRE
charge. (ex: Panasonic controller)• ULE glass scales (ultra low expansion; CTE = 0)• Linear scale with embedded chrome index and
limits (ex: 303-00189)
• Custom rotary or rotary segment gratings• ETC. MicroE, as always, is willing to consider any
reasonable business opportunity
303-00189
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MII5000 Unique Selling Points
Only digital-from-the-sensor encoder with all of these features:
• Integral dual limits• Stick-on index• Up to 1.2nm resolution• 11mm sensor Z height• Programmable resolution• Option for high speed serial word output• Broadest alignment tolerances of any 20μm
encoder system• Fastest encoder available with 0.1μm digital
output (5m/s)
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MII5000 Qualification Testing
Extensive design validation and qualification testing performed
Test SpecEMI immunity EN61000-4-3, -4, -5, -6
ESD compliance EN61000-4-2
Mechanical shock 300G 0.5 ms half sine
Mechanical vibration 30G @ 17Hz
Thermal shock and cycling 0°C to 70°CAccuracy See Datasheet
Resolution See Datasheet
Output signal noise 30nm peak to peak @ full bandwidth
Speed 5 meters/second
Repeatability +/- 1 LSB maximum
Highly Accelerated Life Testing 1000 hours 85/85
Supply voltage variances 5V +/- 0.25V
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MII5000 Short Range Accuracy On Tape
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MII5000 Short Range Accuracy On Glass
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MII5000 Long Range Accuracy On Tape
After two-point linear correction
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MII5000 Long Range Accuracy On Glass
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MII6000
• Repackaging of the MII5000 product• All the same features as the MII5000 but
with some external electronics• Significantly smaller read head• Power dissipation in the head reduced 72%• LED indicators in the connector
– Signal Strength (red, yellow, green and purple)
– Index (green)
– Left Limit (blue)
– Right Limit (red)
• MII6000V vacuum version
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MII4000
• Grandfather of Mercury II• Forerunner to the MII5000 product• All the same features as the
MII5000 but with external electronics
• Built-in LED signal strength indicators
• Built-in calibration push button• No alignment tool• Connects directly to Ethernet for
access to SmartPrecision II software
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Metal Tape Scales
• Inconel 625 substrate (CTE: 12-15ppm/ºC)
• Laser written pattern – Main track– Dark region– Reference track (laser written or stick-on)
• Index• Left limit• Right limit
• Peel-and-stick adhesive backing• Protective blue film• Installation tool• ±30µm/m long range accuracy before linearization
Non-reflective reference track available soon– Improved contamination resistance– Reduces the incidence of false index or limits– Requires customized MII1900 or MII1600– Laser written index and limits only (no stick-on markers)
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Linear Glass Scales
• 2.5mm thick B270 float glass substrate (CTE: 8-9ppm/ºC)
• Chrome deposition pattern• Gratings all cut to length in-house
– ≤130mm cut from 303-00159– 130mm < x ≤
1000mm cut from 303-00166• Model #: MIILXXX (XXX= total length in mm)
• Part #: 303-00159-XXX or 303-00166-XXX (XXX= total length in mm)
• Long range accuracy– Short: ±1.5µm standard, ±1.0µm high accuracy grade– Long: ±5.0µm standard, ±2.0µm high accuracy grade
• Custom scales available with chrome index and limits• Custom substrates available: Quartz, ULE, etc.
303-00159
303-00166
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Rotary Glass Scales
• 2.5mm thick B270 float glass substrate (CTE: 8-9ppm/ºC)
• Chrome deposition pattern• Three standard models
– MIIR4513-HI (pn: 190-00102)
– MIIR6425-HJ (pn: 190-00103)
– MIIR12151-HK (pn: 190-00104)
• Available without hubs
190-00102 190-00103 190-00104
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Coming Soon!! MII1900L and MII1600L
• Same as MII1900/1600 but with single ended left and right limits– Microprocessor controlled– Calibration required
• USB based alignment tool and software– Power the tool and encoder from the USB port
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