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Epameinondas Anastasiou
23/02/2014
Meet the scientist
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Nodas Anastasiou
23/02/2014
Meet the scientist
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• Who am I?
• How did I end up here?
• Introducing ASML
• Lithography - How do we do it?
• What am I doing here?
Agenda 22 January 2014
Public
Slide 3
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Who am I?
22 January 2014
Public
Slide 4
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• Full name: Nodas Anastasiou
• Born in Karditsa, Greece almost 3 decades ago
22 January 2014
Public
Slide 5
Who am I?
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• Moved to Thessaloniki for studies in 2003
• Physics at Aristotle University of Thessaloniki
• Master in Computational Physics
22 January 2014
Public
Slide 6
Who am I?
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• Physics at Aristotle University of Thessaloniki
• Experimental and computational physics of elementary particles (not as fancy as it sounds! If I did it, you can do it as well )
• In other words, it was not just experiments and theory, but also
programming
• Master in Computational Physics
• Data analysis techniques and numerical problem solving in
several fields such as nuclear physics , high energy
physics, electromagnetism etc
22 January 2014
Public
Slide 7
Who am I?
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• Physicist
• Background in software development
• Software engineer in the metrology department of
ASML since June
22 January 2014
Public
Slide 8
Who am I?
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How did I end up here?
22 January 2014
Public
Slide 9
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• Moved to Belgium in 2011 as part of my master thesis
and never left (BENELUX is more interesting than you think!)
• Worked for a year at the University of Antwerp, Belgium
• Applied for a position at the Metrology Department of
ASML
22 January 2014
Public
Slide 10
How did I end up here?
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Microchips are everywhere
22 January 2014
Public
Slide 11
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It’s hard to imagine a world without microchips 22 January 2014
Public
Slide 12
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More than 180 billion microchips are made every year 22 January 2014
Public
Slide 13
Data: WSTS
• 25 for every man, woman
and child on the planet.
0
20
40
60
80
100
120
140
160
180
2001
99
1
199
2
199
3
199
4
199
5
199
6
199
7
199
8
199
9
200
0
200
1
200
2
200
3
200
4
200
5
200
6
200
7
200
8
200
9
201
0
201
1
201
2
IC units, in billions
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Introducing ASML
22 January 2014
Public
Slide 14
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ASML builds the machines that make those microchips 22 January 2014
Public
Slide 15
• Lithography is the critical tool for
producing microchips
• All of the world’s top microchip
makers are our customers
− Intel,
− Samsung,
− Toshiba (incl. SanDisk)
− Sony
• We have departments in
Europe, Asia and Northern
America
• More than 12.000 employees
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Source: Wikipedia
Moore’s Law 22 January 2014
Public
Slide 16
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2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015
Source: Gartner. High quality Flash
Lith
og
raph
y c
ost p
er
unit o
f m
em
ory
$/G
Byte
Moore’s Law makes microchips cheaper…
10000
100
10
1
1000
22 January 2014
Public
Slide 17
$1,162 for 1 GB
$0.17 for 1 GB
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… and more energy-efficient Computations per Kilowatt hour double every 1.5 years
Source: Jonathan Koomey, Lawrence Berkeley National Laboratory and Stanford University, 2009
Dell Optiplex GXI
486/25 and 486/33 Desktops
IBM PC-AT IBM PC-XT
Commodore 64
DEC PDP-11/20
Cray 1 supercomputer
IBM PC
SDS 920
Univac I
Eniac EDVAC
Univac II
Univac III (transistors)
Regression results: N = 76 Adjusted R-squared = 0.983 Comps/kWh = exp(0.440243 x year – 849.259) Average doubling time (1946 to 2009) = 1.57 years
IBM PS/2E + Sun SS1000
Gateway P3. 733 MHz
Dell Dimension 2400
SiCortex SC5832
2008 + 2009 laptops 1.E+16
1.E+15
1.E+14
1.E+13
1.E+12
1.E+11
1.E+10
1.E+09
1.E+08
1.E+07
1.E+06
1.E+05
1.E+04
1.E+03
1.E+02
1.E+01
1.E+00
Co
mp
uta
tio
ns p
er
kW
h
1940 1950 1960 1970 1980 1990 2000 2010
22 January 2014
Public
Slide 18
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Doing more in less space
Cray 1: The first supercomputer
• 8 megabytes of memory
• 5.5 tons
• 150 kilowatt power supply
• “Innovative Freon cooling
system”
• $8.8 million ($30 million in
today’s dollars)
1976
22 January 2014
Public
Slide 19
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1976 2014
The supercomputer in your pocket:
a fraction of the
materials,
price,
power consumption
16 October 2013
Public
Slide 20
Doing more in less space
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Key to Moore’s Law: Making smaller transistors 22 January 2014
Public
Slide 21
The first integrated circuit on
silicon, on a wafer the size of
a fingernail (Fairchild Semiconductor, 1959)
Today: More than a
billion transistors on
the same area
Transistor length has
shrunk by a million
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How do we do it?
22 January 2014
Public
Slide 22
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How a lithography system works 22 Januar!2014
Public
Slide 23
http://www.youtube.com/watch?v=ShYWUlJ2FZs until 3:18 https://www.youtube.com/watch?v=p1cNvS3OMrU#t=61 until 3:02
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Lithography is critical for shrinking transistors 22 January 2014
Public
Slide 24
Like a photo printed on a
photographic paper, lithography
forms the image of chip patterns
on a wafer
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What am I doing here?
22 January 2014
Public
Slide 25
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• Mind the oven!
• It needs a thermostat,
• a timer and
• a thermometer
• You need three tools in a machine that costs ~500
euros (and makes bread) in order to make sure that it
will be ok at the end - three types of measurements
• Imagine what happens in a complex machine that costs
80M euros
22 January 2014
Public
Slide 26
What am I doing here?
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• Member of the Metrology department (metrology = the science of measurement)
• We measure every single aspect that could affect the
process of making a microchip
• Identifying and correcting a problem
• Use that knowledge in preventing that problem in the
future
22 January 2014
Public
Slide 27
What am I doing here?
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What can go wrong? 22 January 2014
Public
Slide 28
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Firing a laser on a tin droplet 40,000 times a second 22 January 2014
Public
Slide 29
CO2 drive laser
Collector
Tin droplets
plasma
What can go wrong?
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22 January 2014
Public
Slide 30
What can go wrong?
• The worst enemy of the machine is the human
presence and metrology can’t help on that
• That is why we need a controlled and filtered
environment to work on (a clean room!)
http://www.youtube.com/watch?v=7anmVvUnbQQ#t=148
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