March 15 - 18, 2015 Hilton Phoenix / Mesa Hotel Mesa, Arizona … · 2015-03-30 · BiTS 2015 All...

BiTS 2015

March 15-18, 2015Burn-in & Test Strategies Workshop www.bitsworkshop.org

Proceedings

Archive – Session 7

March 15 - 18, 2015

Hilton Phoenix / Mesa Hotel

Mesa, Arizona

© 2015 BiTS Workshop – Image: BCFC/iStock

BiTS 2015


ProceedingsBiTS Workshop 2015 Schedule

Session

Session Chair

Solutions DayWednesday March 18 8:00 am

All That Glitters Is Or Is Not Gold

"One piece spring probes in one piece house socket (The best cost socket solution)"

AJ Park & JD Cho - IWIN Co. Ltd.

"MEMS rubber contact for TEST socket"Justin Yun & BoHyun Kim - TSE Co., Ltd.

Do You Believe In Leprechauns?"Marketplace Report"

Ira Feldman - Feldman Engineering Corp.

"A Testing Time for Test Socket Suppliers"John West - VLSI Research

7Valts Treibergs

Approved/BiTS2015s7p1Park.pptx

Approved/BiTS2015s7p2YunR3.pptx

Approved/BiTS2015s7p3Feldman-temp.pptx

Approved/BiTS2015s7p4West.pptx

BiTS 2015


Proceedings

Copyright Notice

The presentation(s)/paper(s) in this publication comprise the Proceedings of the 2015 BiTS Workshop. The content reflects the opinion of the authors and their respective companies. They are reproduced here as they were presented at the 2015 BiTS Workshop. This version of the papers may differ from the version that was distributed in hardcopy & softcopy form at the 2015 BiTS Workshop. The inclusion of the presentations/papers in this publication does not constitute an endorsement by BiTS Workshop or the workshop’s sponsors.

There is NO copyright protection claimed on the presentation content by BiTS Workshop. However, each presentation is the work of the authors and their respective companies: as such, it is strongly encouraged that any use reflect proper acknowledgement to the appropriate source. Any questions regarding the use of any materials presented should be directed to the author(s) or their companies.

The BiTS logo and ‘Burn-in & Test Strategies Workshop’ are trademarks of BiTS Workshop. All rights reserved.

All That Glitters Is… - Contact TechnologyBiTS 2015Session 7 Presentation 2


MEMS Rubber Contact

for TEST Socket

Justin Yun

BoHyun Kim

TSE Co., Ltd.

2015 BiTS Workshop

March 15 - 18, 2015Conference Ready

mm/dd/2014



Overview

• Introduction

• Wafer & Final Test Contacts

• MEMS Powder Fab. Process

• PCR vs. MRC Contact Comparison

• Lab & Production Test Results Evaluation

• Conclusion

MEMS Rubber Contact for TEST Socket 2



Wafer Sort & Final Test Contacts

• SnAgCu ball

• Spring probe(BeCu/SK/Pd)

Rubber contact(Ni+Ag+Au)

• 120~500um O.D


• Al/Cu pad

• Tungsten probe,

MEMS Probe

(Ni alloy+Rh+Au)

• 50~200um O.D

https://www.google.co.kr/imgres?imgurl=http://www.info.univ-angers.fr/~richer/ens/l3info/ao/img/wafer.jpg&imgrefurl=http://www.info.univ-angers.fr/~richer/ensl3i_crs3.php&docid=L8cxxneTuGXQ9M&tbnid=gBvkPQtFbdYDtM&w=1024&h=1014&ei=tcmpVPCsJMbg8AWfxIKYBg&ved=0CAkQxiAwBw&iact=c

https://www.google.co.kr/imgres?imgurl=http://www.info.univ-angers.fr/~richer/ens/l3info/ao/img/wafer.jpg&imgrefurl=http://www.info.univ-angers.fr/~richer/ensl3i_crs3.php&docid=L8cxxneTuGXQ9M&tbnid=gBvkPQtFbdYDtM&w=1024&h=1014&ei=tcmpVPCsJMbg8AWfxIKYBg&ved=0CAkQxiAwBw&iact=c

http://www.google.co.kr/url?sa=i&rct=j&q=&esrc=s&source=images&cd=&cad=rja&uact=8&ved=0CAcQjRw&url=http://en.wikipedia.org/wiki/Ball_grid_array&ei=CKO7VMiFBsT18QWM8YLICw&bvm=bv.83829542,d.dGc&psig=AFQjCNEKPzntekFtWZYHAbgSJ5MNTEr00w&ust=1421669444229427

http://www.google.co.kr/url?sa=i&rct=j&q=&esrc=s&source=images&cd=&cad=rja&uact=8&ved=0CAcQjRw&url=http://en.wikipedia.org/wiki/Ball_grid_array&ei=CKO7VMiFBsT18QWM8YLICw&bvm=bv.83829542,d.dGc&psig=AFQjCNEKPzntekFtWZYHAbgSJ5MNTEr00w&ust=1421669444229427



MEMS Powder Fab. Process


Substrate

Seed metal sputtering

Substrate

Sacrificial layer

electro plating

Substrate

Photoresist spin coating

Substrate

Exposure Develop

Substrate

Electro plating(NiCo)

Substrate

Electro plating(Rh)

Substrate

PR strip

Substrate

Etching



PCR vs. MRC Comparison


Tolerance : ±15

Non-Uniform SizeNon-Uniform Shape

Tolerance : ±2

Uniform SizeUniform Shape

1) Size & Shape of Powder

Silicone

Bump

Conventional PCR powder MRC powder

Non-Uniform

Sphere Powder

Uniform Powder





2) Plating


PCR Powder

MEMS Powder

Au Ni

Au

NiCo

Rh

<Au Plating> <Rh Plating + Au Plating>





3) Cohesion


Silicone Holds

Conventional

PCR Powder

Silicone Penetrates

MRC Powder grip portion

Improved Binding Force





4) Contact of Powder (Conventional PCR Powder)

a. Before Device Contact

Device

Ela

sto

mer

Reactio

nS

troke

Point Contact

Concentr

ate

d

Load

b. After Device Contact

Elastomer & Powder

is damaged

by concentrated load





5) Contact of Powder (MEMS Powder)

a. Before Device Contact – Docking Powder

Device

Powder

Device

Powder and another Powder

Contact by Magnetic

Contact by Magnetic

Be occurred

Contact






b. After Device Contact – Reciprocation of Docking Powder

Device

Ela

sto

me

r

Re

actio

n

Conta

ct

Conta

ct

Stro

ke

Be occurred

Contact

Stro

ke

Dis

trib

ute

d

Load

Stro

ke

Stro

ke

Stro

ke

Stro

ke

Ela

sto

mer

Reactio

n

Ela

sto

mer

Reactio

n

Dis

trib

ute

d

Load






b. After Device Contact – Reciprocation of Docking PowderE

lasto

me

r

Re

actio

n

Stro

ke

Re

cip

roca

tio

nBe occurred

Contact

Conta

ct

Conta

ct





6) Resistance Comparison by Powder Structure

a. Resistance Improvement by Docking Effect





7) Contact Lifespan

a. Evaluation Condition

- Tester : TSE IT-490

- Temp : 23

- Probe Size : ø0.23mm

- Probe Material : BeCu + Plating Au

- Socket : 0.35mm Pitch

- Stroke : 120um

- Lifespan : Touch Down 100K Probe Pin

Bump



0

50

100

150

200

250

300

350

400

450

500

Resis

tan

ce (

mΩ

)

Contact

Conventional PCR Socket & MRC Socket Lifespan Comparison(100K Touch Down)

MRC Socket Sample_1 Resistance (mΩ) MRC Socket Sample_2 Resistance (mΩ) MRC Socket Sample_3 Resistance (mΩ)MRC Socket Sample_4 Resistance (mΩ) Conventional PCR Sample_1 Resistance (mΩ) Conventional PCR Sample_2 Resistance (mΩ)Conventional PCR Sample_3 Resistance (mΩ)



8) Contact Lifespan

Conventional PCR

Socket

MRC Socket





9) Durability

Conventional PCR Socket

MRC Socket

Depress : 38um

Depress : 11um

Before 100K After 100K



Evaluation


1) Lifespan

a. Evaluation Condition

- Tester : TSE IT-490

- Temp : 23

- Dummy Device Ball Size : ø0.23mm

- Dummy Device Ball Material : (Pb Free) Sn

- Socket : 0.35mm Pitch

- Stroke : 120um

- Lifespan : Touch Down 100K

(Dummy Package was changed whenever after touchdown 10K)



Evaluation


Lifespan Jig

Socket

S/GInsert

Dummy

DevicePusher

JIG Ass'y

IT- 490

Lifespan Jig

Pu

sh

ing



Evaluation


2) Lifespan Results

Initial 10K 20K 30K 40K 50K

60K70K80K90K100K

Depress 11um & AVG Resistance 119.4mΩ

Durability



Evaluation


2) Lifespan Results

Average Resistance

110.99 101.25 96.72

114.00 123.05 122.27 125.39

111.25 106.89 105.66 119.43

0

50

100

150

200

250

Initia

l

10K

20K

30K

40K

50K

60K

70K

80K

90K

100K

Resis

tan

ce(m

Ω)

Contact

0.35mm Pitch MRC Socket Average Resistance Deviation

Resistance(mΩ)



Evaluation


3) Durability at Customer HV Production Site

0.35mm Pitch – 40K 0.8mm Pitch – 100K 1.0mm Pitch – 120K

Stroke : 120um

Depress : 17.3um

Stroke : 250um

Depress : 43.6um

Stroke : 350um

Depress : 68.5um



Conclusion


• Reduced Depression

- Force distribution on the device & elastomer with uniform shape

- Prevent damage on powder & elastomer with force distribution

- Reduced depress by elastomer damage prevention




Conclusion


• Improved Resistance

- Stable signal path with a powder docking structure

- Lower contact resistance with stable signal path

- Resistance Improvement by increasing plating thickness



Conclusion


• Improved Lifespan

- Secure the stroke even though the contact count increase by

reducing depress

- Resistance reliability and uniformity secured between bumps by

docking structure

- Improved lifespan by stable stroke, bump reliability & uniformity

March 15 - 18, 2015 Hilton Phoenix / Mesa Hotel Mesa, Arizona … · 2015-03-30 · BiTS 2015 All...

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