Linear Actuator Design
Transcript of Linear Actuator Design
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The Anti-Gravity MicroMachine
Presented by: Vertically Challenged
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Introduction
• Vertically Challenged is…Shabnam Abedi MoghaddamMichele La HayeRichard TuTerrence Yu
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What are Micromirrors?• Change the angle of a reflected beam in
multiplexing and de-multiplexing of optical signals
• Very precise and flawless• Aim: raise the mirror to the desired
angle
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Mirror Animation
Click in window to start animation
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The Problem• Vertical lift cannot be obtained through
horizontal movement• Fabrication process leads the mirror to
sag down
Fixed Hinge
MirrorLever Applied
Force
Wafer
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The Solution• Provide initial lift to the mirror
Fixed Hinge Mirror Lever Applied
Force
Wafer
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Thermal Actuators• Make use of differing arm thickness to
provide movement• Problem: using the principles described,
it is difficult to obtain vertical movement
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Vertical Thermal Actuators• Design 1: Built to provide a downward
motion but is overdriven; when current is removed the actuator snaps up
202
Poly 0
Poly 2
Poly 1
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More Vertical Thermal Actuators • Design 2: Provides upward motion
through the use of thin flexible connectors
202
Poly 0
Poly 2
Poly 1
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Even More Vertical Thermal Actuators• Design 3: U-shaped designed to
prevent thicker arm from conforming
2
20
Poly 0
Poly 2
Poly 1
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Thermal Actuator Animation
Click in window to start animation
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Levers• Design 4: Downward Vertical Thermal
Actuator is used to create lift by pressing down on one end of a lever
Mirror Hinge Thermal Actuator
Lever
Poly0
Poly 0
Poly 2
Poly 1
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More Levers• Design 5: Flexible connector used to
transfer downward force of Vertical Thermal Actuator to a lever
Mirror Hinge Thermal Actuator
Lever
Poly0Poly 0
Poly 2
Poly 1
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Lever Animation
Click in window to start animation
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Linear Stepper Motor• Makes use of 2 banks of horizontal
thermal actuators to provide a drive mechanism
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Staple HingeRotating Bar
Staple
Staple Hinge
Poly 0
Poly 2
Poly 1
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Staple Hinge Issues
Rotating bar
Rotating bar
Applied Force
Poly 0
Poly 2
Poly 1
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Torsion Hinge• Thin flexible rods attached to mirror on
either side
Mirror
Rotating Bar
Lever
Applied Force
Prevent Bar from Bowing Out
Torsion Hinge
Poly 0
Poly 2
Poly 1
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Final Picture
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Possible Issues• Torsion hinge might break or not be
flexible enough• Actuating arms might bend• Vertical thermal actuators might not give
enough deflection
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Conclusion• Testing has yet to be done• “We are confident of positive results…”
Terrence
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Thanks To• Dr. Ash Parameswaran• Rob Johnstone• Shivalik Bakshi• Coffee
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