Leveling Tuner for AMAT

Producer/Centura DXZ

Chamber

North Pole Technology

North Pole Technology Co., LTD Proprietary

CONFIDENTIAL

Objectives

• Easy and quick precision leveling of top wafer

control • Averaging 2 minutes to completion

• Performed by anyone, no technical expertise required

• No leveling screws & nuts

• Digitalized adjustments • Precision adjustments in .0002 inch increments

• Industry leading, most accurate

North Pole Technology Co., LTD Proprietary

CONFIDENTIAL

Installation

Current Technology Time consuming, tedious,

awkward

New Technology Precision leveling, world class,

unmatched, game changer

Precision Leveling Tuner Leveling screws & nuts

North Pole Technology Co., LTD Proprietary

CONFIDENTIAL

Installation

Leveling Plate Precision

Leveling Tuner

Precision

Leveling Tuner Leveling Plate

North Pole Technology Co., LTD Proprietary

CONFIDENTIAL

Current vs New Designs

Precision Leveling Tuner Patents in U.S., Korea,

China & Taiwan

Leveling Screw & Nuts

• Current OEM Design • New Design

North Pole Technology Co., LTD Proprietary

CONFIDENTIAL

Benefits

• A low cost replacement & BIG return on Investment: • Cost saving estimate per fab station chambers(4): $120K/year $1,200K in 10 years

• Easy adjustments • Simple installation • Easy access • Simple tuning • No stripped or broken screws and nuts

• Meet tightest spec flatness for better planarization • Scale of control in .0002”

• Extend fab equipment usage life

• Ten years proven service record @ world best known foundries

North Pole Technology Co., LTD Proprietary

CONFIDENTIAL