LED???~???????? ?^?? 20140603 [???e????] Application_ENG.pdf · Thermal, EMMI/InGaAs, OBIRCH...
Transcript of LED???~???????? ?^?? 20140603 [???e????] Application_ENG.pdf · Thermal, EMMI/InGaAs, OBIRCH...
LED Industry
Reliability TestingEnvironmental Test, Electrical Test, Lighting Test
X-ray Inspection X-ray
Failure Analysis (FA)Thermal, EMMI/InGaAs, OBIRCH
Texturing (Surface Morphology)Optical profiler, SEM, TEM
Film Type and Thickness MeasurementSEM/EDX, TEM/EDX
Cell StructureSEM/EDX, TEM/EDX
Crystalline Defects (Dislocations)X-S TEM, P-V TEM
Depth Profiling of Elemental AnalysisTEM/EDX, SIMS
Contamination AnalysisAuger, XPS
Reliability TestingEnvironmental Test, Electrical Test, Lighting test
Reliability TestingESD, Latch-up, Wire Bonding
X-ray Inspection X-ray
Failure Analysis (FA)Thermal, EMMI/InGaAs,OBIRCH
Defect Localization by EMMI/InGaAs, OBIRCH
EMMI/InGaAs, OBIRCH for FA Application
Texturing (Surface Morphology)Optical Profiler, SEM
Optical profiler
Top view SEM
Texturing (Surface Morphology)Optical Profiler, SEM
Surface morphology of LED die surface roughnessafter RIE etching or ion bombardment.
Chip Structure and Film ThicknessSEM, DB-FIB, TEM
X-S view SEM
Precise X-S view by DB-FIB
Chip Structure and Film ThicknessSEM, DB-FIB, TEM
X-S view TEM
Chip Structure and Film ThicknessSEM, DB-FIB, TEM
Crystalline Defects (Dislocations)X-S TEM, P-V TEM
TEM Imaging(Dislocations in epitaxial butter layer)
X-S & P-V TEM at requested areato observe the dislocation density and its spatial distribution.
X-S
-P-V
-P-V
-P-V
Depth Profiling of Elemental AnalysisTEM/EDX, SIMS
TEM/EDX Line Profile – Blue LED – MQW and Superlattice
Elemental Depth profile by SIMS
Backside SIMS is also feasible now.MA-tek can deliver 5-10 samples of backside SIMS analysis per day.
In% in superlattice can be defected down to 0.2at%