Laser Zentrum Hannover, Germany

Nanomanufacturing

Boris N. ChichkovLeibniz University Hannover 18.04.23

b.chichkov@lzh.de

Boris Chichkov, Nanomanufacturing

Laser nanomanufacturing technologies

near IR fs-pulses

resin

Two-photon polymerization Laser printing Laser ablation

Boris Chichkov, Nanomanufacturing

SEM image of high quality microchip fabricated in 400 µm thick AlN substrate

Fs laser microstructuring

Boris Chichkov, Nanomanufacturing

targettarget

laser

Nano-Nano-particleparticle

Liquid

• High purity and stability• Monoatomic materials• Alloy nanoparticles• Particle surface-functionalization• Polymer-embedded nanoparticle • Coatings with nanosized particles• Controlled drug-release• Stoichiometric nanoparticles• Novel methods better control

J. Phys. Chem. C, 2010

Appl. Phys. A, 2010

Laser generation of nanoparticles

Boris Chichkov, Nanomanufacturing

Receiver substrate

(glass)

Tightly focused fs laser pulse

Thin Au

film

Donor substrate

(glass)

Fabrication of spherical nanoparticles by laser printing

5

„Laser-induced transfer of metallic nanodroplets for plasmonics and metamaterial application“JOSA B, Vol. 26, No. 12, B130, 2009

Boris Chichkov, Nanomanufacturing6

Controlled fabrication and precise deposition of silicon nanoparticles

Receiver substrate

(glass)

Bulk silicon

Tightly focused fs laser pulse

Silicon nanoparticle

Silicon dioxide Silicon donor layer

„Laser printing of silicon nanoparticles with resonant optical electric and magnetic responses“, Nature Communications, 5, No. 3402, (2014).

200 nm

50 µm

Boris Chichkov, Nanomanufacturing

near IR fs-pulses

resin

Opt. Lett. 28, 301, (2003)Adv. Eng. Mat. 5, 551, (2003)

3D nanostructuring by two-photon polymerization

Nanotechnology with lasers

Ormocer

Deutsches Patent 101 52 878.7-43

Boris Chichkov, Nanomanufacturing

Nature Photonics, v. 3, 450 (2009)

PhCs fabricated in Zr-hybrid polymers

Boris Chichkov, Nanomanufacturing

Commercially available 2PP system from LZH: b.chichkov@lzh.de

Two-photon polymerization (5cm/s)

Boris Chichkov, Nanomanufacturing

10 µm 2 µm

Microoptics: Tapered waveguides

Boris Chichkov, Nanomanufacturing

Fabrication of SRRs by laser direct-writing

Ring diameter: 5 µmWire diameter: 800 nmGap width: 800 nm

Resonance: 11 µm wavelength(RLC model)

-Mechanical properties of the polymer allow fabrication of free standing SRRs

-Excitation of magnetic resonance for radiation incident perpendicular to substrate surface (kz)

FDTD simulation ofsingle SRR response

Boris Chichkov, Nanomanufacturing

3D conductive polymer microstructures

PEG-DA : poly(ethylene glycol) diacrylateEDOT : 3,4-ethylenedioxythiophenePEDOT : poly(3,4-ethylenedioxythiophene)

PEG-DA and EDOT blends are used for 2PP and sequential in-situ oxidative polymerization;

Real-3D, physically stable and biocompatible microstructures are produced; Interpenetrating polymer network of PEG-DA and PEDOT leads to conductivities

of up to 0.04 S/cm.

EDOT

PEDOT

Boris Chichkov, Nanomanufacturing

3D ultralight and ultra strong materials

Boris Chichkov, Nanomanufacturing

Surface plasmon-polaritons for data transport

14

R. Zia et al., Materials Today 9, 20 (2006)

1 kHz

1 MHz

1 GHz

1 THz

10 nm 100 nm 1 µm 10 µm 100 µm 1 mmCritical dimension

Op

erat

ing

sp

eed

Plasmonics

Photonics

The Past

Electronics

Boris Chichkov, Nanomanufacturing

Surface plasmon-polaritons

15

Bandwidth of

electronics:

~ 10 GHz

Bandwidth of light:

400 THz – 750 THz

Core size:

~ 8 µm

pitch:

~ 65 nm