January, 2007Vaclav Vrba, Prague FVTX Strip Sensor Design General features: Strip pitch = 75 µm #...
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Transcript of January, 2007Vaclav Vrba, Prague FVTX Strip Sensor Design General features: Strip pitch = 75 µm #...
January, 2007 Vaclav Vrba, Prague
FVTX Strip Sensor Design General features:
Strip pitch = 75 µm
# chip channels = 128; chip width = 128 x 75 µm = 9600 µm
Forward disk radial coverage (cca) = 17.0 – 4.5 cm = 12.5 cm
# of chips = 12.5 cm/0.960 cm = 13 chips
azimuthal coverage is by 24 wedges; each wedge covers angle of 7.5 º
+ 2 x 1 mm overlap
each wedge consists of two symmetric parts (each covering 3. 75º) + 1 mm overlap
to place on 4” wafer: 2 types of wedges are needed: narrow and wide (next page)
both type wedges we made of the same radial coverage (each 7 “chips”, with 1 chip overlap)
January, 2007 Vaclav Vrba, Prague
Narrow and wide wedges
Two narrow wedges on a wafer One wide wedge on a wafer
January, 2007 Vaclav Vrba, Prague
Narrow and wide wedgesStandard position
Shifted – just to see the radial overlap
The radial overlap is probably too big; may be the “wide” wedge can be (by one “chip”) shorter – please comment
one chip
January, 2007 Vaclav Vrba, Prague
Wedge layoutZoom in …
one chip
testing pads
(both staged)
bonding pads
January, 2007 Vaclav Vrba, Prague
Wedge layout
7.5 deg.
coverage
1 mm overlap
Guard ring
Cut line
January, 2007 Vaclav Vrba, Prague
Wedge layout
January, 2007 Vaclav Vrba, Prague
Conclusions
• See mail