Invitation to the SEM World

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  • TITLEINTRODUCTIONCONTENTS1. What is the SEM ?1.1 Observation of a Tiny Object in Magnified Scale1.2 Principles underlying the SEM2. What is the SEM Used for ?2.1 Topographical Observation (Secondary Electron Image)2.2 Compositional Observation (Backscattered Electron Image)2.3 Elemental Analysis (X-ray Image)2.4 Inner Structure Observation (Transmitted Electron Image)2.5 Light Signal Observation (Cathodeluminescence Image)2.6 Electron Beam Induced Current (EBIC) Image (or Electromotive Force Image) and Potential Contrast (SEI) Image2.7 Crystal Structure Analysis2.8 Magnetic Domain Observation3. Specimen Preparation and Observation Technique3.1 Obtaining a Clean Object Surface3.2 Maintaining the Morphologic Construction3.3 To Prevent a Specimen From Acquiring Electrostatic Charge4. Functions of SEM's Individual Components4.1 Here is How SEM Operates4.2 Generation of Electron Beam by Electron Gun4.3 Focusing the Electron Beam by Lenses4.4 Detection of Secondary Electrons4.5 Detecting Backscattered Electrons to "Aid in Analysis"4.6 Detection of X-rays5. New Functions of SEM5.1 Image Enhancing5.2 Image Processing5.3 Image Analysis5.4 New Image Filing System5.5 Observation from Various Angles5.6 Specimen Observation While Heating It5.7 Observation of Changes of Specimen under Stress6. Comparison of Scanning Electron Microscope with Optical Microscope and Transmission Electron Microscope6.1 Comparison by Principle Diagrams6.2 Comparison of SEM Image with OM and TEM Images6.3 Differences between SEM and OM6.4 Differences between SEM and TEM7. Description of TermsLOCATION