Process FlowSimulation

IntelliFAB™

IntelliFAB

Process traveler developmentDevelop and certify processes

Process rule checkingCheck for process violations

Process visualizationVisualize processes in 3D

Quick sectioningInteractively explore device cross sections

Mesh generationExport 3D structures to a variety of mesh formats

Presentation quality graphicsUse process visuals in your technical papers and presentations

Process TravellerDevelopment

Visualize Complex process flows

Courtesy, Prof Tim Dallas, Texas Tech

Visualize Complex process flows

Courtesy, Prof Tim Dallas, Texas Tech

Visualize Complex process flows

Courtesy, Prof Tim Dallas, Texas Tech

Visualize complex mems

Quick cross

sectioning

Benefits:

Process Debug

Failure Analysis

Review Sessions

Operator Training

Dynamic cross sections

Courtesy, Prof Jason Clark, Purdue University

MUMPS, 3 level Poly SUMMiT V, 5 level Poly

Courtesy, Prof Tim Dallas, Texas Tech University

Photo realistic rendering

Texas Instruments, DLP Mirror Visualization

Etch & release modeling

Full CMOS visualization

Full CMOS visualization (2)

Automated Hex Meshing

… And Tet Meshing

Benefits

Design for manufactureIntegrated process development and debug environment

Documentation and trainingUse the process visuals to document your processes and train technicians

Failure analysisAnalyze device failure on your screen before going to SEM/TEM work

Save time and moneyCatch process issues before they happen

Thank you

ありがとう•謝謝 • !"#$%& • !"# $%&'

Grazie •Merci • Gracias • Danke •Obrigado • Dank U •Terima Kasih

www.intellisense.com