Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast,...
Transcript of Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast,...
Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)
Outline
2/26/2014 2 Bruker Confidential
• Introductions
• Brief Overview of 3D Microscopes based on WLI
• General technology description
• Benefits and general applications
• Specific Webinar Application Examples
• Corrosion Measurement/Monitoring
• Wear Metrology
• Summary
Introductions Bruker Nano Surfaces Division
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• Scanning Probe Microscopy
• 3D Optical Microscopy
• Stylus Profilometry
• Tribology and Mechanical Testing
Introductions Bruker Stylus and Optical Metrology
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• Technology Leadership
• 60+ Patents
• 3 R&D 100 Awards
• 6 Photonics Circle of Excellence Awards
• Manufacturing Excellence
• Lean, six sigma-based process
• >100 systems/quarter capacity
• Rapid production ramp capability
Bruker NSD SOM is part of Bruker Materials (BMAT), a division of Bruker
Introductions Speaker
Matt Novak, Ph.D.
Director, Technology and Applications
Stylus and Optical Metrology
• Joined Bruker 2011 (~3 years)
• Industry experience (~17 years) optical engineering, fabrication and metrology
• Earned Ph.D. working in private sector metrology capital equipment (instrument design/assembly/test)
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• People interested fast, non-contact method for looking at wear or corrosion on metal or other parts (vs. gravimetric or SEM type studies)
• Those looking for metrology to monitor changes in surface topography from nm to µm scales with accuracy and repeatability
• Those unfamiliar with 3D microscopes based on WLI will gain understanding of this technique for quantitative surface measurements and imaging capabilities
• Those already familiar with 3D microscopes based on WLI –introduced to some example applications where the technique may be new
Who Will Benefit? Intended Webinar Audience
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Outline
2/26/2014 7 Bruker Confidential
• Introductions
• Brief Overview of 3D Microscopes based on WLI
• General technology description
• Benefits and general applications
• Specific Webinar Application Examples
• Corrosion Measurement/Monitoring
• Wear Metrology
• Summary
3D Optical Microscope Bruker - White Light Interference (3D WLIM)
• Specialized objective and precision
scanner on an extremely stable
microscope platform
• Scan special objective in a
predefined fashion to change optical
path between sample and reference
• CCD camera captures the intensity
changes over multiple frames
• Best focus determined from captured
intensity - phase calculated from the
fringes or COM of signal envelope
used to build height information
VSI
Demonstration of 3D Optical Scan Step Height Measurement
Step Height Sample
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~ 40 µm
~ -110 µm
~ 150 µm
range
Images can be displayed as a color look up table (e.g., red high, blue low)
…or displayed in greyscales to
look like SEM as well
3D Microscope Surface Imaging What do the images look like?
Benefits and Applications Why 3D Optical Microscopes?
MEMS
Electronics
Orthopedics
Functional surface +
texture metrology
3D Optical Microscopes
provide…
• Fast, accurate, GR&R capable metrology
• Non-contact, non-destructive
• 1000+ analyses
• Stable and operator independent data
Outline
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• Introductions
• Brief Overview of 3D Microscopes based on WLI
• General technology description
• Benefits and general applications
• Specific Webinar Application Examples
• Corrosion Measurement/Monitoring
• Wear Metrology
• Summary
Corrosion important in…
• Structural Infrastructure Management
• Buildings, Bridges, Railways, etc…
• Large Commercial Asset Management
• Trucks, Excavation equipment, Mining, etc.
• Automotive, Aerospace, Military
• Turbines
• Wind, Jet
• Coupon Analysis (Pipelines)
• Oil and gas
• Natural Gas Condensate
• Liquid Petroleum
• Water
Applications in Corrosion Monitoring How Quickly Will Infrastructure Degrade?
Alliance Pipeline Repair
US/Canada Border
• Leaks, cleanup, PR issues
• Closed pipeline, product availability & sales
• Survey and tracking of pipeline conditions
• Preventative maintenance - products and manpower
There's a need for corrosion monitoring and preventing costly failures
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Corrosion Causes Problems Expensive Problems…
• Large Oil companies
• Large monitoring service providers for these companies
• Pipeline protectant and coating providers
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Industry Supply/Support Oil & Gas, Monitoring, Protectants
Pipe-line Coupons
• A “coupon” is placed through (or could be) a section of pipe that is removed to establish service requirements
• Coupons placed in pipe (using ‘hot-taps’) and measured for corrosion
• Commonly measured every few months for amount of corrosion
• Conservative estimates approximately ~5000 of these pulled every day to be measured (global basis)
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Common Industry Measurment/Sampling Oil & Gas, Monitoring, Protectants
Many different types..
• Strip
• Disk
• Scale
• Weld
• Stressed
• Coupon placement in pipes
• Sometimes coupons are small parts of the original piece
• i.e., sections of pipes
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Common Industry Measurment/Sampling Coupons Used in Monitoring
Corrosion Global vs Localized Pitting
• Surface changes over time can be both global and localized
• Global changes, such as rusted areas, area easily modeled and can be tested using bulk techniques such as resistivity
• Localized changes, such as pitting, are difficult to model and can cause catastrophic failure in short periods of time
Global
corrosion
Localized
Pitting
Pitting Corrosion Examination Serious Enough For a Designated Standard!
©2006 Veeco Instruments Inc.
Currently using
• Weight loss – for global corrosion, slow (need to remove large material to get accuracy)
• SEM – for quantifying corrosion pits, time consuming, small area sample
Industry Challenge
• Need rapid and sensitive measure general/global corrosion
• High precision corrosion pit measurement
• Automated throughput of multiple sample measurements
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Pitting Corrosion Monitoring Current monitoring methods
Current Corrosion Testing Gravimetric or SEM
• ASTM standards for testing corrosion coupons
• Mainly directed at gravimetric (weight loss/gain) for corrosion measurement
• Need for accurate and fast pit measurements – these are of real importance in corrosion and leak prevention
• Significant work being done using 3D microscope inspection to improve corrosion monitoring
Corrosion Metrology Example Corrosion Study
• Experiments range from salt water baths for petrochemical industry to slight atmospheric contamination in MEMS
• To accelerate experiments, expose surfaces to dilute Sulfuric Acid
• Aluminum coupon and 22 different surface texture regions on a GAR strip were examined
Four of the 22 surface regions studied for corrosion
Surface roughness is 2, 8, 16 and 63 micro-inches moving from left to right
*GAR strip is a Precision Reference Standard, rectangular in shape, (2 1/2" x 3 3/4"), made of electroformed nickel and is
rhodium plated for superior abrasion resistance. It is a calibration block (on the market) with actual patch mean values of low
and high micro-inch surfaces and certified by the National Institute of Standards and Technology. (N.I.S.T.).
RMS roughness changes from 1.3 to 3.5 µm
Ra 1.0
micron
Ra 1.46
micron
Ra 1.88
micron
Ra 2.58
micron
0 m
in
10 M
in
20 M
in
30 M
in
Corrosion Metrology Example Corrosion Study
• Corrosion with different starting surface finish type and level examined
• Overall rougher surfaces did not corrode significantly more in static environment
• Some initial defects seen to foster pitting and corrosion
SM
OO
TH
R
OU
GH
CORROSION
- +
Corrosion Metrology Example Corrosion Study
• Various surface finishes examined for rate of corrosion over longer time period
• Similar trends on increasing roughness and randomness of the surface
• Rougher surfaces corroded to greater degree
Y PSD of surface finish
1
10
100
1000
10000
10 100 1000
Spatial Frequency (1/mm)
PS
D (
mm
nm
^2)
Uncorroded
7 hours corroded
14 hours corroded
21 hours corroded
Corrosion Metrology Example Corrosion Study – Longer Accelerated Exposure
Data Analysis Automated Multiple Region Analysis
• Easy way to study dynamic processes
• Visual or automated examination of surface differences
• Calculate volumes, areas, relative statistics on user-defined regions
• Here 13 pits are >250nm depth
Curved Coupon Stitched Image
Robust Gaussian Filter - Removes Form
• RGF keeps edge details intact best possible results for depths/edge informaiton
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Data Analysis Automated Data Conditioning Enables Best Results
• Utilized software analysis to provide to find corrosion pits and quantify their size and volume
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Image of flat coupon with corrosion pits
Data Analysis Automated Software Analysis to ID and Quantify Pitting/Corrosion
Outline
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• Introductions
• Brief Overview of 3D Microscopes based on WLI
• General technology description
• Benefits and general applications
• Specific Webinar Application Examples
• Corrosion Measurement/Monitoring
• Wear Metrology
• Summary
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• Science of mechanisms of friction, lubrication, and wear of interacting surfaces that in relative motion
•A very old science, historically quantified using Gravimetric methods (weight changes determine material loss)
• Quantification of these processes is essential for many industries
Automotive, Aerospace, robotics, data storage, Petroleum, MEMS, Biomedical, Chemical, Materials, precision machining, Microelectronics and more
• Current development studies and process/quality control goals require higher performance as manufacturing demands increase
Tribology Accurate Quantitative Metrology is Key
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Tribological Study: Drills Examination of Wear of Drilling Bits
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• Examine surface properties of bits of varying material/coatings drilling the same surface
• High speed steel, TiCN, SiC, TiN bits used to drill into 6mm anodized aluminum plate
• Head, inside surface, and forward surfaces examined throughout the process
• Many parameters examined to obtain meaningful data
Tribological Study: Drills 3D Images Allow Study of Tribology of Drilling Process
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TiCN TiN HSS SiC
• 30 holes drilled with each type of bit, using same machine, plate, and setup
• SiC bit showed least amount of material redeposition, HSS the most
• Edge chipping, radius of curvature changes overall insignificant for this number of uses
Tribological Study: Drills 3D Images Allow Study of Tribology of Drilling Process
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Example Tribology Case Studies Cutting Tools
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Sphere with wear scar
Same surface with spherical form removed
PEEK Sphere
Untested 3D Profile
Tribological Study: Implant Material 3D Images Allow Study of Wear
• PEEK (Polyether ether ketone)
• Used in implants due to robustness, excellent mechanical/chemical properties
• Wear study on PEEK sphere follows as example application of 3D microscope for wear monitoring
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Tribological Study Wear on PEEK Material
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Example Images of Simulated Wear Wear on PEEK Material
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Example Images of Simulated Wear Wear on Carbon-PEEK Material
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3D Microscope for Wear Metrology Orthopedic Material Application Example
• Wear of bearing surfaces is function of the amount and type of use and conditions under which the bearing operates
• The same principle applies to metal-on-metal and ceramic-on-ceramic bearings
• For a majority of patients, walking is the activity that contributes most to wear of total hip and knee prostheses
• Polyethylene (PE) wear of more than 0.1-0.2mm/year is associated with later osteolysis and failure of total hip arthroplasty (THA)
• Broad need for materials understanding
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Sphere before wear Wear mark introduced
Sphere terms removed,
before and after subtracted,
wear remains
Sphere mass measured before and after wear
Tribological Study 1” PEEK Sphere Wear on PEEK Material
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Initial Wear 1mg PEEK Removed Based on Mass Density ~7.6x108 µm3/mg
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1mg of PEEK Removed 0.152mm Depth of Wear Scar
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Wear 5mg PEEK Removed Based on Mass Density ~3.75x109 µm3/mg
Slight difference
due to wear
outside FOV..
Outline
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• Introductions
• Brief Overview of 3D Microscopes based on WLI
• General technology description
• Benefits and general applications
• Specific Webinar Application Examples
• Corrosion Measurement/Monitoring
• Wear Metrology
• Summary
Summary
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• Introduced Bruker BNS-SOM, 3D Microscopes based on WLI
• Gave general benefits of technology and brief overview of applications
• Discussed specific applications for corrosion and wear metrology
• Questions
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