Dec 15th, 2008 Progress Report

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Dec 15th, 2008 Progress Report Dec 8 th – Spin Coating Dec 9 th Spectate PR Removal Perform RIE (SiO2 / SiNx), Sample Cutting, Sample Thinning/Sanding Dec 11 th – RIE (100 nm SiO2 / 500 nm SiO2) NTU QDL Peter

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Dec 15th, 2008 Progress Report. Dec 8 th – Spin Coating Dec 9 th Spectate PR Removal Perform RIE (SiO2 / SiNx), Sample Cutting, Sample Thinning/Sanding Dec 11 th – RIE (100 nm SiO2 / 500 nm SiO2) ‏. NTU QDL Peter. - PowerPoint PPT Presentation

Transcript of Dec 15th, 2008 Progress Report

Page 1: Dec 15th, 2008 Progress Report

Dec 15th, 2008 Progress Report

Dec 8th – Spin Coating

Dec 9th

Spectate PR Removal

Perform RIE (SiO2 / SiNx), Sample Cutting, Sample

Thinning/Sanding Dec 11th – RIE (100 nm SiO2 / 500 nm SiO2)

NTU QDL Peter

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