Crystal on Silicon (()LCoS) Devicesproxy.siteo.com.s3.amazonaws.com/€¦ · Assembly and...
Transcript of Crystal on Silicon (()LCoS) Devicesproxy.siteo.com.s3.amazonaws.com/€¦ · Assembly and...
Assembly and Inspection of LiquidAssembly and Inspection of Liquid Crystal on Silicon (LCoS) Devicesy ( )
Zichen Zhang1, Neil Collings1,*, L. Imbert 2, A.M. Jeziorska‐Chapman1, Mike Pivnenko1,
W.A.Crossland11Electrical Engineering Division, Department of Engineering, University of
Cambridge, 9 JJ Thomson Avenue, Cambridge, CB3 9BB, UK2Smart Equipment Technology S.A.S. 131, impasse Barteudet 74490 Saint
Jeoire ‐ France
*Corresponding author: [email protected]
Photonics & Sensors Group
Outline • LCoS Structure
• General Assembly Techniques
• Pre Inspection• Pre‐Inspection
• Inspection of Assembled LCoS Test Cellsp
• Cell Gap Measurement
• Conclusion
Photonics & Sensors Group
Architecture of Liquid Crystal on Silicon
Photonics & Sensors Group
Layer Structure of Liquid Crystal on Silicon Devices
Photonics & Sensors Group
Standardization Assembly Procedures
Photonics & Sensors Group
Ultra Compact 40mm Fizeau Interferometer for Flat or Spherical Surfaces
Photonics & Sensors Group
Pre‐Inspection of Substrates
The Purpose of pre‐inspection of the substrates is matching the curvatures of the silicon (the left figure) and the glass (the right figure).
Photonics & Sensors Group
Assembled LCoS Test Cell 1
M i h lMeasurements in the centralarea is approximate 1nm/mmvariation in x‐direction and2.4 nm/mm variation in y‐direction.
10mm*15mm Assembled LCoS Test Cell 1
Photonics & Sensors Group
Uniformity of LC layer Mappingy y pp g
1 435
1.440
1.4301.435
1.425
1.420
1.415
1.425
1.4301.410
1.4351.440 1.40
Photonics & Sensors Group
Assembled LCoS Test Cell 2
More measurements have beenimplemented indicating the locationf 48 i t f ll thi kof 48 points of cell gap thickness.
7mm*12mm Assembled LCoS Test Cell 2
Photonics & Sensors Group
8
6
nts
2
4
Cou
n
0
2
2.40 2.42 2.44 2.46 2.48 2.50 2.52
Thickness, μm
The Histogram of the 48 thickness measurements, where 26 of them are between 2.44um to 2.48 um; The Table summarize the cell thickness results.
Photonics & Sensors Group
Assembled LCoS Test Cell 3Only 2 dot measurements areimplemented. Because theconsistent interference color inconsistent interference color inthe central area illustrates abest result for the uniformityof the active area using theof the active area using themodern robotic machine.
7mm*12mm Assembled LCoS Test Cell 3
Photonics & Sensors Group
The Kadett Semi‐Automatic Device Bonder from SET for High Accuracy Assembly
Photonics & Sensors Group
Conclusion• Optical pre‐inspection is employed for quality LCoSassembly techniquesassembly techniques
• Semi‐Automatic bonding device from S.E.T is used forexcellent accuracy assembly techniques
• Reproducibility of cell assembly results i e cell gapReproducibility of cell assembly results i.e. cell gapuniformity is ascertained .
Photonics & Sensors Group
W i h t k l d th C b idWe wish to acknowledge the CambridgeIntegrated Knowledge Centre (CIKC) funded byg g ( ) yEPSRC, ALPS Electric (UK) and Smart EquipmentTechnology for their supportTechnology for their support.
Photonics & Sensors Group