Crystal growth and wafer processing of 6'Indium …vertical boat. Inp single crystal can be grown...

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Transcript of Crystal growth and wafer processing of 6'Indium …vertical boat. Inp single crystal can be grown...

Page 1: Crystal growth and wafer processing of 6'Indium …vertical boat. Inp single crystal can be grown under small axial temperature gradient of between 5-20 6-inch substrates. The T TV
Page 2: Crystal growth and wafer processing of 6'Indium …vertical boat. Inp single crystal can be grown under small axial temperature gradient of between 5-20 6-inch substrates. The T TV
Page 3: Crystal growth and wafer processing of 6'Indium …vertical boat. Inp single crystal can be grown under small axial temperature gradient of between 5-20 6-inch substrates. The T TV