Contact resistivity of ECA bonded joints · [5] Devoto et al., “Measuring the contact resistivity...
Transcript of Contact resistivity of ECA bonded joints · [5] Devoto et al., “Measuring the contact resistivity...
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M. Ignacia Devoto1*, Tudor Timofte1, Andreas Halm1, Daniel Tune1
International Solar Energy Research Center (ISC) Konstanz
Corresponding author*: [email protected]
Contact resistivity of ECA bonded joints
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Agenda
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• Introduction & motivation
• Transmission Line Method (or TLM)
•Contact End Resistance (or TLM-CER)
•Relevant issues
• Sample geometry/dimension
• Sample preparation
• Measurement procedure
• Method (TLM or TLM-CER)
•Results (ongoing)
•Conclusions
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Introduction & motivation
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• Soldering alternative
• Electrically Conductive Adhesives (ECAs)
• ECA broad formulation
• Conductive fillers (80-95 wt.%)
• Insulating polymer matrix (5-20 wt.%)
• ECA applications
• IBC or busbar-less cells (bowing)
• Shingling interconnection (no ribbon)
• Vehicle Integrated PV (vibrations)
• SHJ ribbon interconnection (low T°)
• Conductive backsheet (complexity)
• ECA-based joint advantages & disadvantages
• lead-free, low T°, mechanical flexibility, no flux, fine pitch
capabilities, curing during lamination
• use of silver, electrical/thermal conductivity, bleeding, storage,
long-term performance/reliability VIPV (Eolian Solar Car, Universidad de Chile)
Shingling PV Module (SunPower)ZEBRA IBC Solar Cell (ISC-Konstanz)
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Introduction & motivation
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• ECA-based joint
• Low cost interconnection solution
• Contact resistivity challenges
• Best Known Material/Method
• Long-term performance
• Measure/extrapolate contact resistivity
• Transmission Line Method (TLM)
• End Resistance Method (TLM-CER)
• TLM & ECA-based joints
• ECA transport mechanism (Percolation theory)
• ECA dispensing (Width & Thickness)
• Sample geometrical/dimension dependency4-point tester (GP Solar, ISC-Konstanz)
ECA-based joint (T. Geipel, 2018)
Interface
under study
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Transmission Line Method
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[1] H. H. Berger, “Models for contacts to planar devices,” Solid State Electron., vol. 15, no. 2, pp. 145–158, 1972.
[2] Y. Pan, “Versatile Circular Test Structure for Ohmic Contact Characterisation,”
2015.
𝐿𝑇
[1]
[1]
[1] [1]
The transfer length (𝑳𝑻) is defined as “the effective length over which the current must flow in the diffused layer before it transfers through
the alloy contacts into the metal layer”.[3]
[3] A. Goetzberger, R. Scarlett, R. Gereth, W. Schockley, V. Williams, and N. Zetterquist, “Research and investigation of inverse epitaxial UHF power
transistors,” 1964.
[2]
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Transmission Line Method
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[1] H. H. Berger, “Models for contacts to planar devices,” Solid State Electron., vol. 15, no. 2, pp. 145–158, 1972.
[2] Y. Pan, “Versatile Circular Test Structure for Ohmic Contact Characterisation,”
2015.
𝐿𝑇
[1]
[1]
[1] [1]
[2]
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Transmission Line Method
7
[1] H. H. Berger, “Models for contacts to planar devices,” Solid State Electron., vol. 15, no. 2, pp. 145–158, 1972.
[2] Y. Pan, “Versatile Circular Test Structure for Ohmic Contact Characterisation,”
2015.
𝐿𝑇
[1]
[1]
[1] [1]
[2]
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Transmission Line Method
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[1] H. H. Berger, “Models for contacts to planar devices,” Solid State Electron., vol. 15, no. 2, pp. 145–158, 1972.
[2] Y. Pan, “Versatile Circular Test Structure for Ohmic Contact Characterisation,”
2015.
𝐿𝑇
[1]
[1]
[1] [1]
[2]
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
TLM with Contact End Resistance
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
TLM with Contact End Resistance
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[4] G. Reeves and H. Harrison, “Obtaining the Specific Contact Resistance from
Transmission Line Model Measurements,” IEEE Electron Device Lett., vol. EDL-3, no.
May, pp. 111–113, 1982.
𝑅𝑆𝐾 𝑅𝑆𝐻
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
TLM with Contact End Resistance
11
[4] G. Reeves and H. Harrison, “Obtaining the Specific Contact Resistance from
Transmission Line Model Measurements,” IEEE Electron Device Lett., vol. EDL-3, no.
May, pp. 111–113, 1982.
𝑅𝑆𝐾 𝑅𝑆𝐻
?
?
?
(𝑹𝑺𝑯 ≠ 𝑹𝑺𝑲)
For long contacts (𝑳 ≥ 𝟐𝑳𝑻):
[4]
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
TLM with Contact End Resistance
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[4] G. Reeves and H. Harrison, “Obtaining the Specific Contact Resistance from
Transmission Line Model Measurements,” IEEE Electron Device Lett., vol. EDL-3, no.
May, pp. 111–113, 1982.
𝑅𝑆𝐾 𝑅𝑆𝐻
?
?
?
(𝑹𝑺𝑯 ≠ 𝑹𝑺𝑲)
For long contacts (𝑳 ≥ 𝟐𝑳𝑻):
[4]
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
TLM with Contact End Resistance
13
[4] G. Reeves and H. Harrison, “Obtaining the Specific Contact Resistance from
Transmission Line Model Measurements,” IEEE Electron Device Lett., vol. EDL-3, no.
May, pp. 111–113, 1982.
𝑅𝑆𝐾 𝑅𝑆𝐻
?
?
?
(𝑹𝑺𝑯 ≠ 𝑹𝑺𝑲)
For long contacts (𝑳 ≥ 𝟐𝑳𝑻):
[4]
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
TLM with Contact End Resistance
14
[4] G. Reeves and H. Harrison, “Obtaining the Specific Contact Resistance from
Transmission Line Model Measurements,” IEEE Electron Device Lett., vol. EDL-3, no.
May, pp. 111–113, 1982.
𝑅𝑆𝐾 𝑅𝑆𝐻
?
?
?
(𝑹𝑺𝑯 ≠ 𝑹𝑺𝑲)
For long contacts (𝑳 ≥ 𝟐𝑳𝑻):
[4]
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
TLM with Contact End Resistance
15
[4] G. Reeves and H. Harrison, “Obtaining the Specific Contact Resistance from
Transmission Line Model Measurements,” IEEE Electron Device Lett., vol. EDL-3, no.
May, pp. 111–113, 1982.
𝑅𝑆𝐾 𝑅𝑆𝐻
?
?
?
(𝑹𝑺𝑯 ≠ 𝑹𝑺𝑲)
For long contacts (𝑳 ≥ 𝟐𝑳𝑻):
[4]
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Relevant issues
Sample geometry/dimension
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• First proposal of metallization design:
• Results were presented in 37th EU PVSEC (Online Event 2020).
• Full proceeding publication is currently under revision to be published.
• Second proposal of metallization design:
[5] Devoto et al., “Measuring the contact resistivity of ECA-based joints,” EU PSEC 37th, 2020.
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Relevant issues
Sample preparation
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Relevant issues
Sample preparation
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Hot plate
Sample
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Relevant issues
Measurement procedure
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Relevant issues
Method (TLM or TLM-CER)
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•Results are only valid when the following
requirements are fulfilled:
• TLM plot slope is positive (𝑅𝑆𝐻 > 0)
• TLM plot ordinate axis intersection is positive
(𝐿𝑇 , 𝑅𝑆𝐾 > 0)
• The effective contact area is smaller than the
physical contact area (𝑳 > 𝟐𝑳𝑻)
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Results
Tested contact areas and valid results
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Finger pad
width [mm]
ECA line width
[mm]
Contact area
[mm²]Valid results
0.04
0.16
0.64
1.00
1.44
2.251.5
0.2
0.4
0.8
1.00
1.2
1.5
35 µm width finger with square pad at the end
0.2
0.4
0.8
1.00
1.2
Finger width
[mm]
ECA line width
[mm]
Contact area
[mm²]Valid results
0.80 0.16
1.00 0.20
1.20 0.24
1.50 0.30
0.80 0.32
1.00 0.40
1.20 0.48
1.50 0.60
0.80 0.64
1.00 0.80
1.20 0.96
1.50 1.20
0.80 0.80
1.00 1.00
1.20 1.20
1.50 1.50
0.80 0.96
1.00 1.20
1.20 1.44
1.50 1.80
0.80 1.20
1.00 1.50
1.20 1.80
1.50 2.25
1.5
Wider fingers
0.2
0.4
0.8
1.00
1.2
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Results
Tested contact areas and valid results
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Finger pad
width [mm]
ECA line width
[mm]
Contact area
[mm²]Valid results
0.04
0.16
0.64
1.00
1.44
2.251.5
0.2
0.4
0.8
1.00
1.2
1.5
35 µm width finger with square pad at the end
0.2
0.4
0.8
1.00
1.2
Finger width
[mm]
ECA line width
[mm]
Contact area
[mm²]Valid results
0.80 0.16
1.00 0.20
1.20 0.24
1.50 0.30
0.80 0.32
1.00 0.40
1.20 0.48
1.50 0.60
0.80 0.64
1.00 0.80
1.20 0.96
1.50 1.20
0.80 0.80
1.00 1.00
1.20 1.20
1.50 1.50
0.80 0.96
1.00 1.20
1.20 1.44
1.50 1.80
0.80 1.20
1.00 1.50
1.20 1.80
1.50 2.25
1.5
Wider fingers
0.2
0.4
0.8
1.00
1.2
Contact areas under
study
0.04
0.16
0.20
0.24
0.30
0.32
0.40
0.48
0.60
0.64
0.80
0.96
1.00
1.20
1.44
1.50
1.80
2.25
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Results
New designs differences
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Results
New designs differences
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Results
New designs differences
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Results
𝝆𝒄 versus contact area
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M: 8.8e-5
N: 21
M: 1.1e-4
N: 108
M: 1.6e-3
N: 4
M: 2.0e-4
N: 84
M: 4.0e-4
N: 40
M: 9.0e-6
N: 3
M: 5.0e-4
N: 1
M: Median
N: Number of points TLM valid but
TLMCER invalid
M: 2.9e-5
N: 91
Take away:
• TLM is valid for
bigger contact
areas.
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Results
𝝆𝒄 versus contact area
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TLMCER valid
but TLM invalid
M: 8.0e-3
N: 256
M: 5.2e-3
N: 240
M: 2.7e-3
N: 120
M: 2.1e-3
N: 9
M: 1.9e-3
N: 22
M: 1.2e-3
N: 12
M: 1.2e-3
N: 28
M: 3.1e-4
N: 93M: 2.5e-4
N: 30
M: 1.0e-4
N: 62
M: Median
N: Number of points
Take away:
• TLMCER is valid
for smaller contact
areas.
• 𝜌𝑐 values may be
one order of
magnitude bigger
compare to TLM.
• TLMCER is valid
for a wider range
of contact areas.
(2.9e-5)
(1.1e-4)
(1.6e-3)
(2.0e-4)
(4.0e-4)
(5.0e-4)
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Results
𝝆𝒄 versus contact area
28
TLMCER and TLM simultaneously valid Take away:
• When both
methods are
valid, results are
in the same order
of magnitude.
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Results
𝝆𝒄 versus current injection
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M: 1.9e-4
SD: 3.9e-4
N: 69
M: 1.0e-4
SD: 3.5e-4
N: 99
M: 9.3e-5
SD: 3.2e-4
N: 93
M: 9.3e-5
SD: 4.9e-4
N: 91
M: Median
SD: standard deviation
N: Number of points
TLM valid but
TLMCER invalid
Take away:
• Standard deviation
is in the range of
the values.
Accuracy must be
improved.
• 𝜌𝑐 is in the same
order of magnitude
for the showed
current injection
range.
• Smaller current
injections do not
deliver valid results.
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Results
𝝆𝒄 versus current injection
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M: 5.7e-3
SD: 2.8e-3
N: 206
M: 3.1e-3
SD:3.2e-3
N: 237
M: 4.0e-3
SD:3.3e-3
N: 259 M: 4.0e-3
SD:3.4e-3
N: 259
M: Median
SD: standard deviation
N: Number of points
TLMCER valid
but TLM invalid
Take away:
• Standard deviation
is in the range of
the values.
Accuracy must be
improved.
• 𝜌𝑐 is in the same
order of magnitude
for the showed
current injection
range.
• Smaller current
injections do not
deliver valid results.
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Results
𝝆𝒄 versus current injection
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TLMCER and TLM simultaneously valid Take away:
• When both
methods are
valid, results are
in the same order
of magnitude.
• At current
injection 10-4 A,
data tend to
spread more for
both methods.
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Results
Rsk versus Rsh
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Take away:
• The sheet
resistance under
the contact (𝑅𝑆𝐾) is
significantly higher,
by several orders
of magnitude, in
comparison to the
contact sheet
resistance outside
the contact.
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Results
Transfer length versus contact area
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M: 0.1979
SD:0.0789
N: 21
M: 0.1538
SD:0.1125
N: 91
M: 0.3536
SD:0.1133
N: 108
M: 0.2607
SD:0.0222
N: 4
M: 0.3496
SD:0.1421
N: 84
M: 0.2687
SD: 0.1467
N: 40
M: 0.1109
Sd:0.0242
N: 3
M: 0.2073
N: 1
M: Median
Sd: standard deviation
N: Number of points
TLM valid but
TLMCER invalid
Take away:
• Standard deviation
of the transfer
length tend to be
high for all contact
areas.
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Results
Transfer length versus contact area
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M: 0.042
SD:0.0302
N: 255
M: 0.042
SD: 0
N: 240
M: 0.042
SD: 0
N: 120
M: 0.042
Sd: 0
N: 90
M: 0.3242
SD: 0.1291
N: 9
M: 0.3213
Sd: 0.0710
N: 62
M: 0.2717
SD: 0.1100
N: 22
M: 0.2665
SD: 0.0415
N: 12
M: 0.74
SD: 0.0868
N: 93
M: 0.5027
SD:0.0436
N: 30
M: Median
N: Number of points
TLMCER valid
but TLM invalid
Take away:
• Standard deviation
of the transfer
length is
significantly smaller
at small contact
areas.
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Conclusions
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•TLM and TLMCER methods can be used on ECA-based joints.
•Fingers with square pads at the end demonstrate current crowding.
Wide fingers generate the best datasets.
• It was not possible to study the effect of the non-probed contacts in
between the probed contacts.
• We will manufacture samples without non-probed fingers using wide fingers.
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Conclusions
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•During the current sweep, only injections in the range 10−4 − 10−1 A
generate reliable and consistent datasets for TLM plot.
•Accuracy of the method can be further improve by improving the
sample manufacture as follows:
• Instead of dispensing by pressure, ECA will be jet dispensed.
• Instead of manual resistance measurements, resistance will be measured by an
automated machine.
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M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020
Acknowledgement
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• I would like to thank to the following funding projects:
• This work was supported by the German Federal Ministry for Economic Affairs and Energy
(BMWi) as part of the Zquadrat project with funding reference number 03EE1005A.
• This work was supported by the German Federal Ministry for Economic Affairs and Energy
(BMWi) as part of the HoSSa project with funding reference number 03EE1014D.
• Finally, I would like to thank to Niklas Grab for helping me with the manual
resistance measurements at ISC Konstanz.
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Thank you for your attention!