Contact resistivity of ECA bonded joints · [5] Devoto et al., “Measuring the contact resistivity...

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M. Ignacia Devoto 1 *, Tudor Timofte 1 , Andreas Halm 1 , Daniel Tune 1 International Solar Energy Research Center (ISC) Konstanz Corresponding author*: [email protected] Contact resistivity of ECA bonded joints

Transcript of Contact resistivity of ECA bonded joints · [5] Devoto et al., “Measuring the contact resistivity...

  • M. Ignacia Devoto1*, Tudor Timofte1, Andreas Halm1, Daniel Tune1

    International Solar Energy Research Center (ISC) Konstanz

    Corresponding author*: [email protected]

    Contact resistivity of ECA bonded joints

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Agenda

    2

    • Introduction & motivation

    • Transmission Line Method (or TLM)

    •Contact End Resistance (or TLM-CER)

    •Relevant issues

    • Sample geometry/dimension

    • Sample preparation

    • Measurement procedure

    • Method (TLM or TLM-CER)

    •Results (ongoing)

    •Conclusions

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Introduction & motivation

    3

    • Soldering alternative

    • Electrically Conductive Adhesives (ECAs)

    • ECA broad formulation

    • Conductive fillers (80-95 wt.%)

    • Insulating polymer matrix (5-20 wt.%)

    • ECA applications

    • IBC or busbar-less cells (bowing)

    • Shingling interconnection (no ribbon)

    • Vehicle Integrated PV (vibrations)

    • SHJ ribbon interconnection (low T°)

    • Conductive backsheet (complexity)

    • ECA-based joint advantages & disadvantages

    • lead-free, low T°, mechanical flexibility, no flux, fine pitch

    capabilities, curing during lamination

    • use of silver, electrical/thermal conductivity, bleeding, storage,

    long-term performance/reliability VIPV (Eolian Solar Car, Universidad de Chile)

    Shingling PV Module (SunPower)ZEBRA IBC Solar Cell (ISC-Konstanz)

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Introduction & motivation

    4

    • ECA-based joint

    • Low cost interconnection solution

    • Contact resistivity challenges

    • Best Known Material/Method

    • Long-term performance

    • Measure/extrapolate contact resistivity

    • Transmission Line Method (TLM)

    • End Resistance Method (TLM-CER)

    • TLM & ECA-based joints

    • ECA transport mechanism (Percolation theory)

    • ECA dispensing (Width & Thickness)

    • Sample geometrical/dimension dependency4-point tester (GP Solar, ISC-Konstanz)

    ECA-based joint (T. Geipel, 2018)

    Interface

    under study

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Transmission Line Method

    5

    [1] H. H. Berger, “Models for contacts to planar devices,” Solid State Electron., vol. 15, no. 2, pp. 145–158, 1972.

    [2] Y. Pan, “Versatile Circular Test Structure for Ohmic Contact Characterisation,”

    2015.

    𝐿𝑇

    [1]

    [1]

    [1] [1]

    The transfer length (𝑳𝑻) is defined as “the effective length over which the current must flow in the diffused layer before it transfers through

    the alloy contacts into the metal layer”.[3]

    [3] A. Goetzberger, R. Scarlett, R. Gereth, W. Schockley, V. Williams, and N. Zetterquist, “Research and investigation of inverse epitaxial UHF power

    transistors,” 1964.

    [2]

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Transmission Line Method

    6

    [1] H. H. Berger, “Models for contacts to planar devices,” Solid State Electron., vol. 15, no. 2, pp. 145–158, 1972.

    [2] Y. Pan, “Versatile Circular Test Structure for Ohmic Contact Characterisation,”

    2015.

    𝐿𝑇

    [1]

    [1]

    [1] [1]

    [2]

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Transmission Line Method

    7

    [1] H. H. Berger, “Models for contacts to planar devices,” Solid State Electron., vol. 15, no. 2, pp. 145–158, 1972.

    [2] Y. Pan, “Versatile Circular Test Structure for Ohmic Contact Characterisation,”

    2015.

    𝐿𝑇

    [1]

    [1]

    [1] [1]

    [2]

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Transmission Line Method

    8

    [1] H. H. Berger, “Models for contacts to planar devices,” Solid State Electron., vol. 15, no. 2, pp. 145–158, 1972.

    [2] Y. Pan, “Versatile Circular Test Structure for Ohmic Contact Characterisation,”

    2015.

    𝐿𝑇

    [1]

    [1]

    [1] [1]

    [2]

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    TLM with Contact End Resistance

    9

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    TLM with Contact End Resistance

    10

    [4] G. Reeves and H. Harrison, “Obtaining the Specific Contact Resistance from

    Transmission Line Model Measurements,” IEEE Electron Device Lett., vol. EDL-3, no.

    May, pp. 111–113, 1982.

    𝑅𝑆𝐾 𝑅𝑆𝐻

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    TLM with Contact End Resistance

    11

    [4] G. Reeves and H. Harrison, “Obtaining the Specific Contact Resistance from

    Transmission Line Model Measurements,” IEEE Electron Device Lett., vol. EDL-3, no.

    May, pp. 111–113, 1982.

    𝑅𝑆𝐾 𝑅𝑆𝐻

    ?

    ?

    ?

    (𝑹𝑺𝑯 ≠ 𝑹𝑺𝑲)

    For long contacts (𝑳 ≥ 𝟐𝑳𝑻):

    [4]

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    TLM with Contact End Resistance

    12

    [4] G. Reeves and H. Harrison, “Obtaining the Specific Contact Resistance from

    Transmission Line Model Measurements,” IEEE Electron Device Lett., vol. EDL-3, no.

    May, pp. 111–113, 1982.

    𝑅𝑆𝐾 𝑅𝑆𝐻

    ?

    ?

    ?

    (𝑹𝑺𝑯 ≠ 𝑹𝑺𝑲)

    For long contacts (𝑳 ≥ 𝟐𝑳𝑻):

    [4]

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    TLM with Contact End Resistance

    13

    [4] G. Reeves and H. Harrison, “Obtaining the Specific Contact Resistance from

    Transmission Line Model Measurements,” IEEE Electron Device Lett., vol. EDL-3, no.

    May, pp. 111–113, 1982.

    𝑅𝑆𝐾 𝑅𝑆𝐻

    ?

    ?

    ?

    (𝑹𝑺𝑯 ≠ 𝑹𝑺𝑲)

    For long contacts (𝑳 ≥ 𝟐𝑳𝑻):

    [4]

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    TLM with Contact End Resistance

    14

    [4] G. Reeves and H. Harrison, “Obtaining the Specific Contact Resistance from

    Transmission Line Model Measurements,” IEEE Electron Device Lett., vol. EDL-3, no.

    May, pp. 111–113, 1982.

    𝑅𝑆𝐾 𝑅𝑆𝐻

    ?

    ?

    ?

    (𝑹𝑺𝑯 ≠ 𝑹𝑺𝑲)

    For long contacts (𝑳 ≥ 𝟐𝑳𝑻):

    [4]

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    TLM with Contact End Resistance

    15

    [4] G. Reeves and H. Harrison, “Obtaining the Specific Contact Resistance from

    Transmission Line Model Measurements,” IEEE Electron Device Lett., vol. EDL-3, no.

    May, pp. 111–113, 1982.

    𝑅𝑆𝐾 𝑅𝑆𝐻

    ?

    ?

    ?

    (𝑹𝑺𝑯 ≠ 𝑹𝑺𝑲)

    For long contacts (𝑳 ≥ 𝟐𝑳𝑻):

    [4]

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Relevant issues

    Sample geometry/dimension

    16

    • First proposal of metallization design:

    • Results were presented in 37th EU PVSEC (Online Event 2020).

    • Full proceeding publication is currently under revision to be published.

    • Second proposal of metallization design:

    [5] Devoto et al., “Measuring the contact resistivity of ECA-based joints,” EU PSEC 37th, 2020.

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Relevant issues

    Sample preparation

    17

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Relevant issues

    Sample preparation

    18

    Hot plate

    Sample

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Relevant issues

    Measurement procedure

    19

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Relevant issues

    Method (TLM or TLM-CER)

    20

    •Results are only valid when the following

    requirements are fulfilled:

    • TLM plot slope is positive (𝑅𝑆𝐻 > 0)

    • TLM plot ordinate axis intersection is positive

    (𝐿𝑇 , 𝑅𝑆𝐾 > 0)

    • The effective contact area is smaller than the

    physical contact area (𝑳 > 𝟐𝑳𝑻)

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Results

    Tested contact areas and valid results

    21

    Finger pad

    width [mm]

    ECA line width

    [mm]

    Contact area

    [mm²]Valid results

    0.04

    0.16

    0.64

    1.00

    1.44

    2.251.5

    0.2

    0.4

    0.8

    1.00

    1.2

    1.5

    35 µm width finger with square pad at the end

    0.2

    0.4

    0.8

    1.00

    1.2

    Finger width

    [mm]

    ECA line width

    [mm]

    Contact area

    [mm²]Valid results

    0.80 0.16

    1.00 0.20

    1.20 0.24

    1.50 0.30

    0.80 0.32

    1.00 0.40

    1.20 0.48

    1.50 0.60

    0.80 0.64

    1.00 0.80

    1.20 0.96

    1.50 1.20

    0.80 0.80

    1.00 1.00

    1.20 1.20

    1.50 1.50

    0.80 0.96

    1.00 1.20

    1.20 1.44

    1.50 1.80

    0.80 1.20

    1.00 1.50

    1.20 1.80

    1.50 2.25

    1.5

    Wider fingers

    0.2

    0.4

    0.8

    1.00

    1.2

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Results

    Tested contact areas and valid results

    22

    Finger pad

    width [mm]

    ECA line width

    [mm]

    Contact area

    [mm²]Valid results

    0.04

    0.16

    0.64

    1.00

    1.44

    2.251.5

    0.2

    0.4

    0.8

    1.00

    1.2

    1.5

    35 µm width finger with square pad at the end

    0.2

    0.4

    0.8

    1.00

    1.2

    Finger width

    [mm]

    ECA line width

    [mm]

    Contact area

    [mm²]Valid results

    0.80 0.16

    1.00 0.20

    1.20 0.24

    1.50 0.30

    0.80 0.32

    1.00 0.40

    1.20 0.48

    1.50 0.60

    0.80 0.64

    1.00 0.80

    1.20 0.96

    1.50 1.20

    0.80 0.80

    1.00 1.00

    1.20 1.20

    1.50 1.50

    0.80 0.96

    1.00 1.20

    1.20 1.44

    1.50 1.80

    0.80 1.20

    1.00 1.50

    1.20 1.80

    1.50 2.25

    1.5

    Wider fingers

    0.2

    0.4

    0.8

    1.00

    1.2

    Contact areas under

    study

    0.04

    0.16

    0.20

    0.24

    0.30

    0.32

    0.40

    0.48

    0.60

    0.64

    0.80

    0.96

    1.00

    1.20

    1.44

    1.50

    1.80

    2.25

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Results

    New designs differences

    23

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Results

    New designs differences

    24

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Results

    New designs differences

    25

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Results

    𝝆𝒄 versus contact area

    26

    M: 8.8e-5

    N: 21

    M: 1.1e-4

    N: 108

    M: 1.6e-3

    N: 4

    M: 2.0e-4

    N: 84

    M: 4.0e-4

    N: 40

    M: 9.0e-6

    N: 3

    M: 5.0e-4

    N: 1

    M: Median

    N: Number of points TLM valid but

    TLMCER invalid

    M: 2.9e-5

    N: 91

    Take away:

    • TLM is valid for

    bigger contact

    areas.

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Results

    𝝆𝒄 versus contact area

    27

    TLMCER valid

    but TLM invalid

    M: 8.0e-3

    N: 256

    M: 5.2e-3

    N: 240

    M: 2.7e-3

    N: 120

    M: 2.1e-3

    N: 9

    M: 1.9e-3

    N: 22

    M: 1.2e-3

    N: 12

    M: 1.2e-3

    N: 28

    M: 3.1e-4

    N: 93M: 2.5e-4

    N: 30

    M: 1.0e-4

    N: 62

    M: Median

    N: Number of points

    Take away:

    • TLMCER is valid

    for smaller contact

    areas.

    • 𝜌𝑐 values may be

    one order of

    magnitude bigger

    compare to TLM.

    • TLMCER is valid

    for a wider range

    of contact areas.

    (2.9e-5)

    (1.1e-4)

    (1.6e-3)

    (2.0e-4)

    (4.0e-4)

    (5.0e-4)

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Results

    𝝆𝒄 versus contact area

    28

    TLMCER and TLM simultaneously valid Take away:

    • When both

    methods are

    valid, results are

    in the same order

    of magnitude.

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Results

    𝝆𝒄 versus current injection

    29

    M: 1.9e-4

    SD: 3.9e-4

    N: 69

    M: 1.0e-4

    SD: 3.5e-4

    N: 99

    M: 9.3e-5

    SD: 3.2e-4

    N: 93

    M: 9.3e-5

    SD: 4.9e-4

    N: 91

    M: Median

    SD: standard deviation

    N: Number of points

    TLM valid but

    TLMCER invalid

    Take away:

    • Standard deviation

    is in the range of

    the values.

    Accuracy must be

    improved.

    • 𝜌𝑐 is in the same

    order of magnitude

    for the showed

    current injection

    range.

    • Smaller current

    injections do not

    deliver valid results.

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Results

    𝝆𝒄 versus current injection

    30

    M: 5.7e-3

    SD: 2.8e-3

    N: 206

    M: 3.1e-3

    SD:3.2e-3

    N: 237

    M: 4.0e-3

    SD:3.3e-3

    N: 259 M: 4.0e-3

    SD:3.4e-3

    N: 259

    M: Median

    SD: standard deviation

    N: Number of points

    TLMCER valid

    but TLM invalid

    Take away:

    • Standard deviation

    is in the range of

    the values.

    Accuracy must be

    improved.

    • 𝜌𝑐 is in the same

    order of magnitude

    for the showed

    current injection

    range.

    • Smaller current

    injections do not

    deliver valid results.

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Results

    𝝆𝒄 versus current injection

    31

    TLMCER and TLM simultaneously valid Take away:

    • When both

    methods are

    valid, results are

    in the same order

    of magnitude.

    • At current

    injection 10-4 A,

    data tend to

    spread more for

    both methods.

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Results

    Rsk versus Rsh

    32

    Take away:

    • The sheet

    resistance under

    the contact (𝑅𝑆𝐾) is

    significantly higher,

    by several orders

    of magnitude, in

    comparison to the

    contact sheet

    resistance outside

    the contact.

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Results

    Transfer length versus contact area

    33

    M: 0.1979

    SD:0.0789

    N: 21

    M: 0.1538

    SD:0.1125

    N: 91

    M: 0.3536

    SD:0.1133

    N: 108

    M: 0.2607

    SD:0.0222

    N: 4

    M: 0.3496

    SD:0.1421

    N: 84

    M: 0.2687

    SD: 0.1467

    N: 40

    M: 0.1109

    Sd:0.0242

    N: 3

    M: 0.2073

    N: 1

    M: Median

    Sd: standard deviation

    N: Number of points

    TLM valid but

    TLMCER invalid

    Take away:

    • Standard deviation

    of the transfer

    length tend to be

    high for all contact

    areas.

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Results

    Transfer length versus contact area

    34

    M: 0.042

    SD:0.0302

    N: 255

    M: 0.042

    SD: 0

    N: 240

    M: 0.042

    SD: 0

    N: 120

    M: 0.042

    Sd: 0

    N: 90

    M: 0.3242

    SD: 0.1291

    N: 9

    M: 0.3213

    Sd: 0.0710

    N: 62

    M: 0.2717

    SD: 0.1100

    N: 22

    M: 0.2665

    SD: 0.0415

    N: 12

    M: 0.74

    SD: 0.0868

    N: 93

    M: 0.5027

    SD:0.0436

    N: 30

    M: Median

    N: Number of points

    TLMCER valid

    but TLM invalid

    Take away:

    • Standard deviation

    of the transfer

    length is

    significantly smaller

    at small contact

    areas.

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Conclusions

    35

    •TLM and TLMCER methods can be used on ECA-based joints.

    •Fingers with square pads at the end demonstrate current crowding.

    Wide fingers generate the best datasets.

    • It was not possible to study the effect of the non-probed contacts in

    between the probed contacts.

    • We will manufacture samples without non-probed fingers using wide fingers.

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Conclusions

    36

    •During the current sweep, only injections in the range 10−4 − 10−1 A

    generate reliable and consistent datasets for TLM plot.

    •Accuracy of the method can be further improve by improving the

    sample manufacture as follows:

    • Instead of dispensing by pressure, ECA will be jet dispensed.

    • Instead of manual resistance measurements, resistance will be measured by an

    automated machine.

  • M. Ignacia Devoto, Metallization & Interconnection Workshop 9th Edition, Online Conference, October 5th 2020

    Acknowledgement

    37

    • I would like to thank to the following funding projects:

    • This work was supported by the German Federal Ministry for Economic Affairs and Energy

    (BMWi) as part of the Zquadrat project with funding reference number 03EE1005A.

    • This work was supported by the German Federal Ministry for Economic Affairs and Energy

    (BMWi) as part of the HoSSa project with funding reference number 03EE1014D.

    • Finally, I would like to thank to Niklas Grab for helping me with the manual

    resistance measurements at ISC Konstanz.

  • Thank you for your attention!