Bruker Contour GT-K Profilometer · Interferometry (PSI). VSI uses a broadband (normally white)...

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Bruker Contour GT-K Profilometer

Standard Operating Procedure

Revision: 1.1 – Last Updated: January 10/2019, Revised by Christopher Balicki

Overview

This document will provide a detailed operation procedure of the Bruker Contour GT-K optical

profilometer. Formal training is required for all users prior to using the system.

Revision History

# Revised by: Date Modification

1 Rene Rao 05/24/18 Initial Release

2 Christopher Balicki 01/10/19 Minor Update

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Document No. 4DSOP000X

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Table of Contents

General Information ................................................................................................................................. 3

Measurement Modes ................................................................................................................................ 3

Measurement Parameters ......................................................................................................................... 4

Operation ................................................................................................................................................ 5

1. System Startup and Sample Loading .............................................................................................. 5

2. Taking a Scan ............................................................................................................................... 6

3. Data Analysis ................................................................................................................................ 7

4. Data Saving and Export ................................................................................................................. 9

5. Unloading Sample and Shutdown ................................................................................................. 9

6. Other Features ............................................................................................................................ 10

6.1 Stitching ................................................................................................................................... 10

References and Files ............................................................................................................................... 11

Contact Information ............................................................................................................................... 11

Appendix ............................................................................................................................................... 12

A.1 Level Using Terms Mask ............................................................................................................... 12

A.2 Changing Objectives ................................................................................................................... 14

A.3 Storing Objective 1X ................................................................................................................... 15

A.4 Storing Objective 5X ................................................................................................................... 17

A.5 Fix Squeaky Noise from Lead Screw (STAFF ONLY) ........................................................................ 17

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General Information

The Contour GT-K is a versatile bench-top optical surface-profiling system that can measure step-heights,

film stress, roughness, and other parameters. It measures surface topography with a ~1-2um x-y resolution

and <1nm vertical resolution.

Measurement Modes

There are two measurement modes: Vertical Scanning interferometry (VSI) and Phase-Shifting

Interferometry (PSI).

VSI uses a broadband (normally white) light source. It is effective for measuring objects with rough

surfaces, as well as those with adjacent pixel-height differences greater than 135 nm. The internal

translator moves the objective while the camera periodically records frames. As each point on the surface

comes into focus, the modulation on that point reaches a maximum, and then tapers off as the objective

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passes through focus. By recording the height of the translator at maximum modulation, the system can

determine the height of each pixel.

PSI uses a narrowband (normally green) light source. It is typically used to test smooth surfaces such as

mirrors, optics or highly polished samples. It is very accurate, resulting in vertical measurements with sub-

nanometer resolution. However, PSI cannot obtain a correct profile for objects that have large step-like

height changes. The internal translator precisely alters the optical path length of the test beam. Each

optical path change causes a shift in the fringe pattern. The shifted fringes are periodically recorded by the

camera, producing a series of interferograms. Computerized calculations combine these interferograms to

determine the surface height profile.

Measurement Parameters

1. Speed

Speed at which the scan head will move.

Resolution decreases as speed increases.

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2. Backscan

The distance that the system moves backward before it begins a scan.

Set the backscan large enough to account for the greatest possible variation in feature height

3. Length

The vertical length that the system will scan during a measurement.

To determine the appropriate length, estimate the peak-to-valley height of the step/surface

that you are measuring, and then set the length 10% to 20% higher.

4. Threshold

Percentage value to determine the acceptable signal-to-noise level for which a given pixel is

considered valid.

Too low threshold will consider poor-quality data points.

Too high threshold will eliminate high-quality data points.

Operation

1. System Startup and Sample Loading

Ensure the system is powered on by looking at the controller to the left of the computer.

Start the Vision 64 software.

Click Initialize Z.

Click Unload XY. Place the sample once the stage moves to the front.

Click Initialize X/Y.

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Select the Measurement Type (VSI or PSI), Objective (1X or 5X) and Field of View (0.55X, 1X or

2X).

Set the measurement parameters.

2. Taking a Scan

Lower the objective until it’s a few millimeters above the sample by pulling down the red

indicator in the z-control window. Left click and drag the red dot in the XY control window to

move your sample beneath the objective. Control the speed by how far low you pull the

indicator and by the SLOW, MED, FAST buttons. Ensure the objective does not strike the

sample.

Turn the auto intensity on by clicking Auto in the intensity control window.

Raise/lower the objective till the sample feature is sharp on the Video window.

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Slowly raise the objective until fringes appear in the Video Window.

Turn off the Auto intensity

Too Low Too High Optimum

Fringes need to be aligned along the x-axis and only 3-5 fringes should appear on the Video

Window. Turn the tip and tilt stage knobs on the device to adjust the fringes.

Press the Single Acquisition button on the ribbon at the top to start the scan.

3. Data Analysis

2D Plot in the Data Analysis window will be displayed on completion of the scan.

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Move X and Y cursors to get corresponding line plots.

Move the R cursor to a baseline location and the M cursor to a step height to acquire the

desired measurements. Expand the cursors to cover a larger area.

Right-click on the plot and select Two-Point Linear Fit. Alternatively, right-click on Terms

Removal (F-Operator), click on Edit Settings, select Two-Point Linear Fit and click Calculate.

Click Data in the Data Analyzer window to select other analysis tools.

Click 3D Plot button to see the 3D image.

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4. Data Saving and Export

Click the Save button to save the file as an .opdx file.

Data can be exported by right-clicking on the plot and selecting Export.

Multiple scans can be done at the same time and can be selected in the Active Gallery window

at the bottom.

5. Unloading Sample and Shutdown

Click Initialize Z to raise the objective.

Click Unload XY to move the stage front.

Remove the sample.

Click Initialize X/Y.

Close the Vision 64 software. Leaving the software open will reduce the equipment’s lifetime.

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6. Other Features

6.1 Stitching

Click the Stitching button in the Measurement Setup Window.

Select the Enable Stitching check box.

Select the shape of the area that needs to be stitched.

If the area of the sample is unknown, click the Teach button and follow the instructions on the

screen to define an area for stitching.

Click the Set Reference Point and Traversal button to open the Reference Point and Traversal

Setup dialog box. Select a reference point, and then indicate the traversal pattern to be

followed during the stitching operation.

In the Overlap Area field, enter the percentage area that the system needs to overlap on

stitched scans to level them. A higher overlap percentage produces a better fit but requires

more scans. The actual overlap may be higher than the set percentage as the system spaces

the scans evenly.

Select Autofocus to be Off and enter Delay After Movement if required

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Select Overlap Region Fit Type – either All Data or Flat Data. When Flat Data is selected, set

the Lowest Slope Data % to choose the amount of flat data to use.

Click the Measurement button to stitch data.

The stitched 2D plot will open in the Data Analysis window.

To save the dataset, click File and select Save Dataset As.

References and Files

Bruker Contour GT-K Manual and Vision 64 Help Content

Contact Information

Questions or comments in regard to this document should be directed towards Nathanael Sieb

([email protected]) in 4D LABS at Simon Fraser University, Burnaby, BC, Canada.

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Appendix

A.1 Level Using Terms Mask

Right-click on Terms Removal (F Operator) in the Data Analyzer and then click on Edit Settings.

Select Tilt Only and check Use Terms Mask, then click Edit Mask to open the Mask Editor

Window.

Draw a box on the area that needs to be considered in the levelling process. Under Region,

check the Inside box.

Do this for a few regions and they will be grayed out.

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Click Invert Mask to make the selected areas active.

Click OK and the sample should be levelled using the masked data.

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A.2 Changing Objectives

Handle the objectives with extreme care.

Hold the current objective (attached to the profilometer) with one hand and move the lever to

the right with your free-hand to unlock it.

Remove this objective and store it in its storage container. (Refer Appendix A.3 and A.4)

Hold the new objective in one hand and align the pin on the top with the hole in the

profilometer’s objective holder.

Move the lever to the left with your free-hand to lock it.

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A.3 Storing Objective 1X

Remove the mount from the plastic container.

Unscrew the mount and place the objective in the slot.

While holding the objective with one hand, tighten the screws.

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Place the mount and the objective in the plastic container and close the lid.

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A.4 Storing Objective 5X

Place the objective in the plastic box.

Close the lid with the small foam piece placed on top of the objective.

A.5 Fix Squeaky Noise from Lead Screw (STAFF ONLY)

Squeaking sounds would be produced if the lead screw is bent.

Remove the objective and store it in its container to ensure it’s not damaged during the

maintenance.

Loosen the 4 screws at base of the lead screw just enough for the black plate to slightly move.

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Run the optics up and down a few times for the plate to shift into a better centered position

and stops producing the noise.

If the noise still exists, manually adjust the black plate and run the optics up and down a few

times.

Once the noise stops, tighten the 4 screws and place the objective back in the profilometer’s

holder.

Bruker Contour GT-K Profilometer · Interferometry (PSI). VSI uses a broadband (normally white)...

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