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OPHIR Profilometer Integration Report LMS-5000 532nm Hole Drilling System

12/08, ET/DLC Report Scope The purpose of this effort was to integrate the SPIRICON OPHIR Profilometer into the LMS-5000 532nm Hole Drilling System. The Ophir Profilometer is a PC based system which is used to image focused laser beams. The Profilometer system consists of a number of wedges (used for attenuation) a flair shield, an additional set of attenuators, a USB camera unit and a PC running Spiricon software. Please refer to the Spiricon software manual for specific operating instructions. The intent of this report was to summarize basic operation, calibration and initial results.

Profilometer Camera Unit

USB Cable

Power Cable

Attenuators and Flair

Shield

Optical Platform

Turning Wedges

Y-Wedge

X-Wedge

Objective

Calibration Mount

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Operation With the system fully initialized and operational, remove the objective and position the open objective mount above the first turning wedge (Y-Wedge). This can be accomplished by enabling the [GOTO Ophir Position] button the main system display.

A message will appear to confirm removal of the objective. Answer [YES] to this text box if the objective has been removed.

A second message will appear to verify objective removal again. Answer [YES] to this text box if the objective has been removed.

Move to Profilometer Measurement Position

Control

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Normally, if the optics have not been removed from the system, no further action is necessary and the Ophir camera may be accessed in this position. However, sometimes the beam must be fine tuned into position. In this case, moving the objective with the Y axis joystick translates the beam in the Y-axis of the Profilometer.

Conversely, moving the objective with the X-axis joystick moves the beam along the X-axis of the Profilometer.

Z

Z

Y

X

Profilometer Beam Path

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The beam can be focused onto the Profilometer surface normally via the Z-axis focusing joystick. It is important to maintain clearance between the objective end and other fixed components. Contact between the objective and other components will lead to damage to the system!

With the laser in the Ophir position run the Profilometer software and initialize the camera. If the software is operating normally the green light on the camera unit will come on. If there is a problem the green light will not illuminate and the software will display a cross on the video portion of the screen. Camera OK Camera Not OK

Once the software and camera are running, use the start button to initiate data capture.

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The camera setup should next be verified via the [Camera] button under the [Options] pull down. It is on this screen that the field of view scale factor is set. In most cases the format selected is pixels per micron. The lens radio button compensates for image inversion when an imaging lens is used with the Ophir camera.

The [Beam Display] menu allows selection of the two dimensional or three dimensional view as well as the display thresholds.

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Calibration To calibrate the system place a known orifice at the image plane of the camera (or at the beam focus point). Adjust the pixel scales until the Width X and Y display figures match the known standard. In the case displayed below the calibration was done with a 57um known HC cup.

For accurate measurements and best results adjust the gain until the peak value displays white colors. Dark levels can also be adjusted to maximize display dynamic range.

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Initial Applications Results An example of a potentially distorted beam with a higher than normal aspect ratio is as follows:

Note gain of 11.00 to obtain reasonable gain displays. This is done with all three attenuators in place to facilitate turning the laser up to full power for the image capture. The next image is of the same beam in 3-D profile. Note multiple beam peaks:

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After system alignment the beam quality seems to have significantly improved with less ovality.

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Recommendations The Ophir Profilometer, as a tool, seems to bring a new dimension of diagnostics to the LMS-5000 system. It may be possible to optimize service intervals and strategies via the use of this new tool. Specifically moving forward we recommend the following: 1 – Immediately initiate periodic raw beam studies in production in order to correlate system performance with beam changes. An interval of one week between data captures seems to be a reasonable starting period. 2 – As an engineering project, evaluate several objectives and techniques to image the drilling spot with an imaging objective installed in front of the Profilometer. This is a more difficult process and isn’t ready for production application at this time. Objective imaging, however, will also capture degradation of the imaging optics as well as degradation of the raw laser beam. 3 – Correlate far field beam images taken at alignment with Ophir images and microscope pictures of actual parts. By tying together alignment, Profilometer and microscope images we should be able to recognize and optimize the beam profile. This is also an engineering effort. 4 – Conduct a focus study to illuminate the structure of the beam through the entire focus of the objective. This will help us understand how focus impacts the drilling process.