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Bdot System
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BDOT | PROBE “The Bdot Probe is a robust plasma measurement system and is an ideal instrument to understand more about parameters such as magnetic flux and the time varying magnetic field”
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Transcript of Bdot System
BDOT | PROBE
“The Bdot Probe is a robust plasma measurement system and is an ideal instrument to understand
more about parameters such as magnetic flux and the time varying magnetic field”
BDOT | PROBE
The Bdot Probe measures the rate of change in magnetic flux over time
inside a plasma reactor.
The Bdot Spatial Probe includes an automated linear drive and scans
across a plasma to measure the rate of change in the magnetic flux over
time.
BDOT | PROBE
Plasma Diagnostics MeasuredB-dot
Measurement FunctionalityTime Averaged • Time Resolved • Time Trend
Hardware
Electronics and SoftwareRF Plasma: Broadband Probe 0.4MHz to 100MHz
Plasma Power Source: RF, Continuous, Pulsed PlasmaTime Resolution: 1µS
Probes300mm as standard (Custom available)
Chemically cleaned and replaceable
Spatial MovementAutomated linear drive with a 0.025mm step resolution
Vacuum FeedthroughAvailable with KF, CF or custom vacuum connectors
BDOT | PROBE
Installation Setup
Generator Match Bdot ElectronicsPlasma Reactor
Bdot Probe
Computer
BDOT | PROBE
Applications
Evaluating the time varying magnetic field, the Bdot system provides greater understanding of plasma measurements within the bulk of a plasma
chamber
The Bdot System can be used in the following applications:Plasma Etching
PECVD Space Plasma
Plasma Sputtering
BDOT | PROBE
For further information on the Bdot Probe visitimpedans.com/bdot-probe
To request a quote visitwww.impedans.com/contact
Chase HouseCity Junction Business Park
Northern CrossMalahide Road
Dublin 17Ireland
Ph: +353 1 842 8826Fax: +353 1 891 6519
Web: www.impedans.comEmail: [email protected]
