AZ BARLi II - Pennsylvania State University · AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip,...
Transcript of AZ BARLi II - Pennsylvania State University · AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip,...
The information contained herein is, as far as we are aware, true and accurate. However, no representations or warranties, either express or implied, whether of merchantable quality, fitness for any particular purpose or of any other nature are hereby made in respect of the information contained in this presentation or the product or products which are the subject of it. In providing this material, no license or other rights, whether express or implied, are given with respect to any existing or pending patent, patent application, trademarks, or other intellectual property right.
AZ BARLi II Solvent Compatible Bottom Antireflective
Coating for i-Line Process
Data Package
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
AZ BARLi II Coating Material
Features, Process, and Performance
AZ’s bottom antireflective coating material, AZ BARLi II coating, is tailor-made to yield near-optimum values for refractive indices (n and k) for i-line lithography, which ensures minimum reflectivity and maximum swing reduction for photoresist layers.
AZ BARLi II coating material is formulated in photoresist-compatible solvents to simplify edge bead removal process and to be both environmentally and user friendly.
Composed of highly absorptive polymer-bound dyes, this material provides excellent coating uniformity and step coverage. Other features include high etch selectivity and good thermal stability.
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
AZ BARLi II Coating Material
Features/Benefits
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Highly absorptive polymer-bound dye used as the bottom antireflective coating for i-line photoresists
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Near-optimal optical constants (n/k=1.63/0.31) for maximum swing reduction at the optimal film thicknesses (910Å and 1960 Å)
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Formulated with photoresist-compatible solvents to simplify EBR process and to be end-user friendly
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Excellent coating uniformity and step coverage profile▶
High etch selectivity, comparable to AZ BARLi coating material▶
High thermal stability up to 230°C▶
No intermixing with photoresist layer after soft baking▶
Two thickness grades, AZ BARLi II 90 and 200, provide the optimal film thickness for the first and the second swing minimum respectively
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
Optical Constants of AZ BARLi and AZ BARLi II Coatings
Near-optimal values of n and k at 365 nm, both AZ BARLi and AZ BARLi II coatings are highly absorptive materials for i-line
process
Coating Wavelength (nm)
n from spectr. ellipsometry
k from spectr. ellipsometry
BARLi
365
1.65
0.33
BARLi II
365
1.63
0.31
BARLi film baked at 150 °C, BARLi II film baked at 200°C
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
Simulated Swing Reduction of Photoresist by AZ BARLi II Coating
Resist (n=1.704-0.024i) on AZ BARLi II (n=1.63-0.31i) on Si (n=6.55-2.07i), 365nm
0
0.2
0.4
0.6
0.8
1
0 0.1 0.2 0.3 0.4BARLi II Thickness (µm)
Nor
mal
ized
Sw
ing
Am
plitu
de
0
0.05
0.1
0.15
0.2
0.25
0.3
0.35
0.4
0.45
Ref
lect
ivity
SR
minimum reflectivity: 0.013%minimum swing amplitude: 1.80%
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
Swing Curves of AZ 7908 Photoresist on AZ BARLi II Coatings
AZ BARLi II coatings reduced swing amplitude by 80% at 900Å film thickness and 94% at 1960Å
p
40
50
60
70
80
90
100
110
120
130
0.75 0.8 0.85 0.9 0.95 1 1.05 1.1Film Thickness [µm]
Ener
gy (m
j/cm
²)
AZ BARLi II at 900Å (blue) and 1960Å (red)SB 90°C/60sec, PEB 110°C/60sec, AZ 300MIF Developer, 70sec puddle @23°C
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
Thermal Stability of AZ BARLi II Coating
Refractive index k changed < ±2% at softbake temperature from 160°C to 230°C, providing wide process latitude.
Refractive Index K vs. Softbake Temperature
0.28
0.3
0.32
0.34
0.36
140 160 180 200 220 240SB Temperature (°C)
K
0.09µm0.20µm
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
Spin Curves of AZ BARLi II Coatings
Two thickness grades of AZ BARLi II coatings provide 1st and 2nd optimal FT respectively at standard operating conditions (spin @ 3000rpm,SB @ 200°C/60sec.)
Spin Curve at 200°C Softbake
0
500
1000
1500
2000
2500
3000
3500
4000
0.5 1 1.5 2 2.5 3 3.5 4 4.5Spin Speed (rpm x 1000)
Film
Thi
ckne
ss (Å
)
0.09µm0.20µm
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
Thermal Stability of AZ BARLi II Coating
Optical density of AZ BARLi II film varied < ±1.0 % from 50°C to 210°C, indicating high thermal stability.
Absorbance loss vs. softbaking temperature
-10
-5
0
5
10
50 100 150 200 250
Softbake temperature (°C)
Abs
. los
s (%
)
Abs.Abs/µm
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
Thermal Stability of AZ BARLi II Coating
No intermixing with photoresist solvents observed after soft baking at 170°C or higher
AZ BARLi II Film Loss vs. Soft Baking Temperature
-10
0
10
20
30
40
50
110 130 150 170 190 210 230
Bake Temperature (°C)
Film
Los
s (%
)
Sampe1Sample2
AZ BARLi II films soft baked at 200°C for 60 sec., and then soaked in EL for 60 sec.
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
Etch Test of AZ BARLi and AZ BARLi II Coatings
Both AZ BARLi and BARLi II coatings are highly etchable
Etch conditions: Samco RIE-10N, CHF3 /O2 in 40/10 sccm, 60w, 60 seconds.
Etch Rate vs. Softbake Temperature
0
200
400
600
800
1000
BARLi II BARLiSoftbake Temperature (°C)
Etc
h R
ate
(Å/m
in)
170°C200°C230°C
AZ 7900
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
Etch Selectivity of AZ BARLi and AZ BARLi II Coatings
Both AZ BARLi and AZ BARLi II coatings showed etch selectivity of higher than 1.4 vs. Novolak-based photoresist
Etch conditions: Samco RIE-10N, CHF3 /O2 in 40/10 sccm, 60w, 60 seconds.
AZ 7900
0.0
0.2
0.4
0.6
0.8
1.0
1.2
1.4
1.6
BARLi II BARLi
Softbake Temperature (°C)
Etc
h se
lect
ivity
170°C200°C230°C
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
Sublimation Test of AZ BARLi and BARLi II Coatings
AZ BARLi II coating showed high thermal stability and no sublimation of absorptive materials at up to 240°C
Sublimation test: AZ BARLi II coated @ 0.3 µm onto ten 4” Si-wafers and each baked for 120sec, quartz wafer measured for absorbance after 10 Si- wafers baked.
Wafer
Hot Plate
Quartz plate
UV absorbance of quartz plate
0.000
0.100
0.200
0.300
0.400
0.500
0.600
AZ BARLi II AZ BARLi
UV A
bsor
banc
e
200 °C
220 °C
240 °C
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
Topography Profiles of AZ BARLi II Coating
AZ BARLi II coating showed good conformity properties
AZ BARLi II material coated onto SiO2 wafers with contact holes at ~1.7 µm deep and 0.4 µm open.
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
SEM Micrographs of AZ 7908 Resist on AZ BARLi II and AZ BARLi
Resolution better than 0.32µm, showed AZ BARLi II and AZ BARLi coatings are comparable
AZ BARLi II &AZ BARLi FT at 0.19µm, SB 200°C/60sec., AZ 7908 FT at 0.97µm, SB 90°C/60sec., PEB 110°C/60sec., Developer AZ 300MIF 23°C/70sec., Exposure Nikon 0.54NA i-line.
AZ BARLi II: 0.30µm 0.32µm 0.34µm 0.36µm 0.38µm
AZ BARLi: 0.30µm 0.32µm 0.34µm 0.36µm 0.38µm
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
SEM Micrographs of AZ 7908 Resist on AZ BARLi II and BARLi
DOF 1.2µm (at 0.34µm), comparable performance for both AZ BARLi II and AZ BARLi coatings.
AZ BARLi II & AZ BARLi FT at 0.19µm, SB 200°C/60sec., AZ 7908 FT at 0.97µm, SB 90°C/60sec., PEB 110°C/60sec., Developer AZ 300MIF 23°C/70sec., Exposure Nikon 0.54NA i-line.
AZ BARLi IIDOF: -0.8µm -0.6µm -0.4µm -0.2µm 0.0µm +0.2µm +0.4µm
AZ BARLiDOF: -0.8µm -0.6µm -0.4µm -0.2µm 0.0µm +0.2µm +0.4µm
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
Recommended Standard Process
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Substrate Pre-TreatmentHMDS not recommended.
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Spin ProcessTarget thickness: 910Å for AZ BARLi II 90
1960Å for AZ BARLi II 200Spin and EBR process similar to photoresist process.Apply static or dynamic dispense at 500-1000rpm.Final spin speed approx. 3000rpm, actual setting depends on equipment, set spin speed to meet target thickness as above.
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EBR ProcessAZ EBR70/30 recommended for best result.Also compatible to EL, PGME, or other solvents.
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
Recommended Standard Process (continued)
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SoftbakeRecommended setting: 200°C/60seconds on contact hotplate.Depending on equipment, temperature may be set between 180°C to 220°C and proximity bake may be applied.
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StripAZ 300T and 400T strippers are recommended.
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Solvent SafetyBARLi II coatings are formulated with EL/PGME.
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StorageStoring in refrigeration is recommended.
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Shelf LifeShelf life in room temperature is 12 months.
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
AZ BARLi II Thickness Measurement
The Cauchy coefficients for AZ BARLi II coating are:
A = 1.6097B = 0.0083014C = 0.006187 ( measured by J. A. Woollam V.A.S.E.® Spectroscopic Ellipsometer)
They fit the following equation:
n = A + B/ Σ2 + C/ Σ4
where B in µm2, C in µm4.If using nm, then multiply B by 106, C by 1012;If using Å, then multiply B by 108, C by 1016.
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
Summary
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AZ BARLi II coating material has near-optimum values of refractive indices for i-line lithography.
▶
AZ BARLi II coating material is formulated in photoresist compatible solvents.
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AZ BARLi II coating material performs comparable to AZ BARLi coating.
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AZ BARLi II coating material is composed of polymer-bound dyes, no sublimation of monomeric dyes and other materials during soft baking.