An Introduction to ICP MS

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    The world leader in serving science

    From first principles:

    An introduction to the

    ICP-MS technique

    This presentation describes the history of how ICP-MS was developed,

    gives the characteristics of modern ICP-MS instruments and explains the

    theory of how ICP-MS works.

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    Design requirements for new analytical massspectrometer March 1971

    Courtesy of Kym Jarvis, National Environmental Research Centre (NERC) Facility, UK

    The story of ICP-MS begins back in 1971 at the University of Surrey, UK.

    Environmental and geological scientists were looking for a new analytical

    mass spectrometer to help characterize their samples. Their initial designrequirements were quite modest by todays standards. They wanted to be

    able to analyze between 4 and 6 samples per hour (10-15 minutes per

    sample) and detect all metallic elements from lithium to uranium mass

    range from 6 to 238 amu. They were searching for detection limits of

    around 100 ppb - considerably below the possible detection level of the

    early optical ICP instruments around in those days - and they would be

    happy with precision of around 25% RSD. They were interested in

    elemental concentrations, but also isotopic information (mostly given asratios), which was another reason for looking at mass spectrometry.

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    Some development landmarks

    Alan Gray, Applied Research Laboratories

    (1974, 1975)DC plasma

    3000-6000K

    Sufficient to ionise elements

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    First DCP - 1971

    Alan Gray, Applied Research Laboratories

    This slide shows a photograph of the Alan Grays first DCP-MS instrument

    in around 1971. The DCP-MS proved that a plasma source mass

    spectrometer could be a useful and successful tool for inorganic analysisand detection limits looked reasonably promising. The source did limit the

    techniques element coverage and there was a need for a higher energyionisation method.

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    Development landmarks

    Decision to replace DC plasma with Inductively Coupled Plasma

    (ICP) Parallel developments in UK (Uni of Surrey and VG now

    Thermo), USA (Iowa State Uni) and Canada (Sciex)

    First spectra obtained by Alan Gray & Alan Date at Uni of Surrey

    in 1981

    First commercial instruments ordered in 1983 (VG/Thermo and

    PE/Sciex)

    This lead to a decision to replace the DC plasma with an inductively

    coupled plasma (ICP), since this excitation source was known to be able

    to produce more energetic plasmas, capable of ionizing more elements toa higher degree. At about this time (~1980), parallel developments for an

    ICP-MS began in the UK with Alan Grays group at the University of

    Surrey, in the USA with Sam Houks group at Iowa State University, and in

    Canada with Don Douglass group at the University of Toronto.

    Associations were formed between Grays group and a company called

    VG (now part of Thermo), and Douglass group and a company called

    Sciex (now a joint-venture with PerkinElmer Instruments). The race wason to produce a commercial product!

    The first commercial instruments shipped at around the same time in 1983from both VG (Thermo) and Sciex.

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    Early development: Experimental instruments

    Vertical Plasma instrument

    Uni of Surrey

    c.a. 1980

    Angel Plasma instrument

    Uni of Surrey

    c.a. 1981

    These two photos show some early experimental ICP-MS instruments

    from Grays group. The left photo shows a vertical plasma instrument from

    around 1980 and the right hand photo shows the so-called Angel plasmainstrument. These were experiments in ion sampling from the plasma.

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    Towards commercialization

    NERC research instrument

    Uni of Surrey/VG (Thermo)

    early 1980s

    Prototype PQ instrument atBGS Grays Inn Road

    VG (Thermo), early 1980s

    These photos show some prototype instruments slightly closer to the

    finished commercial product from VG (Thermo). The instrument on the left

    is still functioning in Kym Jarviss lab at the NERC facility in the UK. Theinstrument on the right is a prototype supplied to the British Geological

    Survey. These prototypes paved the way towards the first VG commercialinstrument.

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    Finally a product! And another

    Thermo (VG) commercialize the

    first PlasmaQuad ICP-MS1983

    1990 PQ 2 ICP-MS Launched

    Sensitivity increased, stability

    improved, ease-of-use improved

    Finally in 1983 VG (Thermo) launched the PlasmaQuad instrument. This

    was a successful product that was installed in many research facilities. It

    had limited application to the routine analysis market since it requiredsome expertise to use.

    In 1990 VG launched the PlasmaQuad 2 which was a refinement of the

    original PlasmaQuad that was repackaged in an easier to use format. In

    addition, some of the performance characteristics, such as sensitivity and

    stability were improved. This platform was incredibly successful and reallybegan to find its way into routine labs.

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    And anotherand another

    PQ 3 ICP-MS Launched

    Huge ease-of-use improvements,

    sensitivity improvements, compact

    design, all computer-controlled,cool plasma capability

    1994

    1997

    VG PQ ExCell ICP-MS Launched

    1st PQ with Collision CellTechnology, new software platform

    Collision/Reaction Cell Technology for

    ICP-MS invented

    1999

    By 1994, the demand for routine usage of the technique had grown. The

    VG response was the PQ 3, a compact ICP-MS that was under complete

    PC control. This allowed much greater automation and made it mucheasier to use. Some performance enhancements were also added,

    including cool plasma that allowed the measurement of several elements

    that were previously impossible due to high backgrounds or gas-based

    interferences. PQ 3 instruments also shipped under brand names such as

    Fisons Instruments and TJA Solutions, as VG was acquired by first

    Fisons and then Thermo Electron Corporation as part of the ThermoJarrell Ash (TJA) group.

    By 1997, there had been a new technological development in ICP-MS:

    the introduction of collision/reaction cells. This new technology provided

    an instrumental method of removing polyatomic interferences one of the

    longstanding problems for the technique. In 1997, collision reaction cell

    technology for ICP-MS was invented by GVI (previously Micromass, now

    Thermo) and in 1999 the VG PQ ExCell was launched. This was the first

    collision cell PQ and was based on the PQ 3 platform. The collision cell

    opened up new applications and enabled the analysis of previously

    challenging or impossible analytes and sample types. A new softwareplatform also simplified the use of the system.

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    And another 25 years of improvements!

    X Series ICP-MS Launched

    Super-compact design for ease of use

    and low maintenance, 2nd Generation

    Collision Cell with KED, newsoftware, fastest ever analysis

    20

    00

    20

    05

    2001

    Xi / Environmental Interface Launched

    XSeriesII ICP-MS Launched

    Xt and Xs interfaces ultimate matrix

    tolerance,-Extraction, 3rd Generation

    Collision Cell lowest ever DLs and

    freedom from interference

    In 2000, we launched the environmental interface (later known as the Xi interface); a

    cone set with special properties to aid routine environmental analysis. This enabled the

    measurement analytes typically found at high concentrations in environmental samples,

    while still allowing ppt level measurements of toxic analytes. It also improved theinstruments tolerance to highly concentrated matrices by reducing drift and polyatomicinterferences.

    In 2001, the X Series ICP-MS was launched. This heralded the modern age of ICP-MS. It

    was a super-compact bench-top system that redefined the ease-of-use and maintenance

    of the technique and massively improved the speed of analysis by incorporating

    productivity enhancing design features and software functionality. Performance was also

    improved with the release of our improved 2nd generation collision cell technologydesigned for kinetic energy discrimination.

    In 2005 Thermo launched the new XSeriesII. This builds on the ideas in the X Series and

    gives the customer more productivity, more practicality and more performance. The key

    innovations include developments in interface technology (the Xt and Xs interfaces),

    designed for even better tolerance to high matrices; a new optics design (PI extraction),

    producing the lowest ever detection limits and; our 3rd generation of collision cell

    technology, providing the simplest, most effective interference removal technologyavailable.

    More than ever before, this latest generation of ICP-MS provides overlap with Optical ICP

    characteristics, but also produces detection limits at the ppt-level and below withexcellent freedom from interference.

    So where has the modern technique of ICP-MS got to? We are now able to analyze

    samples for up to 75 elements for many sample types in timescales of between 2 and 6

    minutes per sample (10-30 samples per hour), with detection limits in the ppq to ppt

    range for most elements and RSDs of around 1-5%. CRC technology also removes many

    of the old problems with interference. Modern ICP-MS has more than surpassed theexpectations of Alan Grays group in the early 1970s.

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    Key features of modern ICP-MS

    A quantitative elementalanalysis technique

    Accommodates a broadrange of samples andmatrices

    Nearly all elements inperiodic table

    Excellent sensitivity

    Wide linear dynamic range

    Enough history. Now onto some characteristics.

    ICP-MS has many unique features which make it attractive as a techniquefor quantitative trace element analysis.

    ICP-MS is capable of accommodating a broad range of sample types.

    Although in its basic form, ICP-MS analyses materials as a solution, it can

    be successfully coupled to laser (enabling direct analysis of solids) or

    gases (for example by hydride generation). More recently, ICP-MS has

    been coupled with techniques such as HPLC and GC to providespeciation analysis of certain elements.

    The technique is applicable to nearly all elements in the periodic table, so

    that all commonly occurring elements can typically be measured in oneanalysis.

    ICP-MS is a highly sensitive technique, providing the analyst with

    determinations down to sub ppt levels, lower than most other analytical

    techniques. This sensitivity is very well complemented by its very widedynamic range.

    As environmental regulations and process control require ever-increasing

    sensitivity, ICP-MS continues to become the analytical technique of choicein a wide variety of application areas.

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    ICPIon optics and mass

    spectrometerIon detection

    What is ICP-MS?

    Instrument comprises five basic steps:

    Generating an aerosol of the sample

    Ionizing sample in the ICP source

    Extracting ions in the sampling interface

    Separating ions by mass

    Detecting ions, calculating the concentrations

    Sampling

    interface.

    Sample intro

    We will now move onto the theory of how ICP-MS works.

    The technique can be simplified in five main stages or processes.

    Although ICP-OES and ICP-MS use the same kind of plasma source, the

    steps towards the analytical outcome are quite different. The sample

    introduction stages are essentially the same in both ICP-OES and ICP-

    MS. The sample is introduced into the instrument by nebulization into afine aerosol which is then carried into the plasma to generate excitation.

    In ICP-OES the excitation and relaxation processes occurring in theplasma produce light emitted from the elements of interest. In ICP-MS the

    goal of the plasma is to remove electrons from the analyte atoms and

    generate ions. The ICP conditions are optimized to achieve this as

    efficiently as possible, trying to minimize the formation of multiply-chargedand molecular ions.

    These positive ions are sampled from the plasma through a sampling

    interface and directed into the mass spectrometer, where they are

    separated according to mass (strictly mass to charge ratio), beforereaching the instrument detector.

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    ICP-MS: characteristic mass spectrum

    Simple spectra (primarily M+ions)

    - Simple interpretation

    Very high signal tobackground

    - Low detection limits

    ICP-MS Spectrum - Vanadium (51V)ICP-AES Spectrum - Vanadium 10 mg/L

    Many emission lines

    High continuum background

    The mass spectra of all elements contain a small number of peaks. Even

    ifall elements in the Periodic Table were present in the sample there

    would only be 211 peaks in the mass spectrum. Every element (with theexception of indium) has at least one isotope that is at a unique mass. The

    peak position along the mass scale (x axis) identifies the isotope present

    (ie provides qualitative analysis) and the peak intensity (y axis) is

    proportional to the concentration. Quantitative analysis is obtained by

    analyzing standards of known concentration for each of the isotopes of

    interest and comparing the peak intensities of the standards and samples.

    Mass spectra tend to be much less complex and far more predictable than

    optical spectra. For example, the mass spectrum for vanadium comprises

    two peaks - one isotope at mass 51 and a small peak at mass 50 is

    extremely simple compared to the rather complex ICP optical emissionspectrum comprising many lines, and begins to illustrate why ICP-MS is

    often less troubled by interferences than ICP-OES and other atomic

    spectroscopy methods. You will also notice that optical spectra often have

    quite high continuum backgrounds, whereas the mass spectrum is often

    characterized by low backgrounds, yielding ppt detection limits for mostelements.

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    Location of ICP-MS components

    This simplified schematic of an ICP-MS will be used to explain the

    positions, functions and relationship between the key components of the

    system. The following slides will then deal with each area in turn, followingthe journey of the sample through the ICP-MS:

    Sample introduction system (spray chamber and nebulizer)

    ICP (torch and power supply)

    Mass spectrometer Interface

    Lens system (ion optics)

    Mass analyzer

    Vacuum system (Mechanical and turbomolecular pumps)Detector

    Data handling and system controller

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    Components of an ICP-MS

    Sample introduction system

    ICP

    Interface

    Lens system

    Mass analyzer

    Vacuum system

    Detector

    The first area to look at is the sample introduction components.

    For the purposes of this workshop we will consider only solution samples.

    However, it is possible to directly sample solid samples (for example usinglaser ablation) and gases (for example by hydride generation).

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    Sample introduction

    Most common samples are aqueoussolutions

    Sample delivery by peristaltic pump

    Fine (

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    Sample introduction - nebulizer types

    Pneumatic nebulizers

    Concentric

    Excellent sensitivity and stability

    ~ 1 ml/min uptake rate

    Micro concentric

    Low flow nebulizers

    < 0.1 mL/min uptake rate for micro samples, organics or radioactive samples

    PTFE, PFA or PVDF for excellent corrosion resistance

    Low blank levels - ideal for semiconductor labs

    Parallel path or cross flow

    Heavier matrix, higher TDS samples or particulate matter

    The job of the nebulizer is to generate a fine aerosol of the sample. It does

    this by contacting the flow of liquid sample with a high velocity stream of

    argon gas at its tip. The gas makes the liquid break up into small dropletswhich are carried into the spraychamber by the gas stream. A number ofdesigns of nebulizer are available:

    Glass concentric nebulizer

    Advantage: stable aerosol; easy setup; widely available

    Disadvantages: will not tolerate high total dissolved solids (TDS) oraggressive acids (e.g.HF)

    Other nebulizers are available for use in different applications e.g. Inertnebulizers such as the concentric Burgener and polyimide types

    Inert nebulizer

    Advantages: can tolerate aggressive acids and high TDS

    Disadvantages: less stable, less sensitive.

    Inert low flow nebulizers such as the PFA-50 are also available

    Advantages: HF resistant; useful for small sample volumes; contaminationfree (ideal for semiconductor applications)

    Disadvantages: will not tolerate high TDS.

    Applications using high TDS samples or very fine particulates, emulsified

    samples and colloidal materials can be successful, using suitablenebulizers such as cross-flow or parallel path designs.

    Micro-volume samples, organic matrices, radioactive samples are all

    ideally suited to the range of micro-concentric nebulizers, includingcorrosion-resistant designs.

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    Sample introduction droplet size

    Fine (

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    Sample introduction spraychamber cooling

    Spraychamber cooling to ~ 2oC 5oC

    Water-jacket or Peltier device

    Less solvent to plasma

    Stable plasma

    Lower moleculars (oxides)

    Spraychamber cooling to 15oC

    Removal of organic solvents

    Performance can also be improved by cooling of the spraychamber.

    Cooling removes most of the sample solvent (water), making processes in

    the plasma even more efficient, enhancing sensitivity for most elements.Eliminating solvent also reduces some solvent-derived interferences and

    reduces oxide formation, again simplifying spectra even further. Cooling

    also tends to improve long-term stability as the processes occurring in the

    chamber are under temperature control and are therefore not sensitive to

    lab temperature changes. The chamber can be cooled using water jacketor using a Pelter device (electrothermal cooling).

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    Components of an ICP-MS

    Sample introduction system

    ICP

    Interface

    Lens system

    Mass analyzer

    Vacuum system

    Detector

    Once the sample aerosol is generated, it is introduced to the inductively

    coupled plasma (ICP). The plasma is a very high temperature (6000-

    10000 Kelvin) environment of atoms, ions and electrons. At thesetemperatures many elements make the transition from the atomic to

    the ionic state since there is sufficient energy to completely remove

    their outer shell electron. A very useful characteristic of the argon ICP

    is that the great majority of the elements form mainly singly-charged

    positive ions. This helps to generate a simple mass spectrum evenwhen lots of elements are present in the sample.

    The inductively coupled plasma source consists of two primarycomponents.

    1. RF generator

    2. Torch assembly

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    RF generator

    Solid state generator

    RF generator frequency is typically 27 MHz or 40 MHz

    27 MHz provides higher sensitivity with ICP-MS

    RF power is typically 0.6 - 1.5 kW

    Water-cooled copper load coil

    Coupling efficiency 70-75%

    Actual power from generator that reaches the plasma

    Most instruments use solid state RF generators that operate at either 27

    or 40 MHz. The load coil carries this oscillating RF energy from the

    generator to the area around the end of the torch and is often made fromcopper and is usually water-cooled. Most of the energy produced by thegenerator reaches the plasma, so coupling efficiency is quite high.

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    Matching networks

    Compensates for changes in impedance Impedance A materials resistance to the flow of an electric

    current

    Hence compensates for changes in sample matrix or solventvolatility

    Crystal controlled Frequency locked at 27.12 MHz or 40.68 MHz

    Uses servo-driven capacitors

    Free running Frequency at ~40 MHz

    Electronic tuning of frequency changes (impedance) due tomatrix/solvent

    Most instruments use a matching network to control the impedance of the

    plasma. Plasma impedance changes are the content of the plasma

    changes (e.g. when the plasma contains air of a sample). As theimpedance changes, the plasma energy must continue to be balanced to

    maintain a stable plasma. This is the job of the matching network. This is

    normally performed by some motor driven capacitors that adjust the drive

    impedance dynamically as the plasma impedance changes.

    An alternative design is the so-called free-running generator which adjustsimpedance by shifting the RF frequency.

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    The ICP-MS torch

    Torch consists of three

    concentric tubes

    One piece or demountable

    types available

    Torch Is mounted horizontally

    (axially)

    Approx 10-20 mm from

    interface

    Gas flows optimized for M+ ion

    formation and low molecular

    (oxide) species

    Most elements achieve their first ionization potential at a temperature of

    approximately 7,000 K. This temperature is achieved at approximately

    12-14 mm from the first turn of the load coil.The torch comprises three concentric quartz tubes, mounted axially (the

    end of the torch faces the sample cone, separated by 10-20mm).

    1. The inner tube (the torch injector) is used to direct the nebulizedsample into the plasma.

    2. The next tube, supplying argon gas (the auxiliary gas), serves to keepthe plasma away from the torch injector to prevent it from melting.

    3. The outer tube extends through the load coil and is supplied with

    enough argon gas (the cool gas) to support the plasma and to prevent

    the torch from melting.

    The plasma is initially started without sample introduction, and then

    optimized for singly charged positive ion formation and low molecular(oxide) species.

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    The ICP

    Arcoolant flow

    Magnetic fields

    High temperature

    plasma -generatesions

    Sample aerosol in Arnebulizerflow

    ++

    ++

    + +

    ++

    Arauxiliary flow

    Load coil

    A very hot plasma of ionized argon

    and free electrons.

    Plasma sustained by a radio

    frequency (RF) induction coil

    Plasma constrained within a quartz

    torch

    The ICP is an argon plasma, constrained inside a quartz torch. It is

    inductively coupled, which means it is sustained by a 2 turn induction

    coil, supplied with a radio frequency (27 or 40 MHz) oscillating field. Thiscoil induces a powerful oscillating magnetic field inside the torch which

    oscillates ionized argon gas. The rapidly oscillating argon ions

    energetically collide with other argon atoms and cause ionization of those

    atoms. This process of ionization is self-sustaining with continuously

    applied RF to the load coil and continuously supplied argon into the torch.

    There are 3 argon flows in 3 concentric channels. The outer annulus

    carries most of the supplied argon (coolant gas). The central injector tube

    carries the argon sample aerosol. The annulus in between carries the

    auxiliary flow which controls the position of the plasma and prevents

    damage to the injector tube by the high temperature plasma.

    The sample aerosol punches a channel through the axis of the plasma

    and the ionization zone is positioned above the load coil, from whereanalyte ions can be easily sampled.

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    Processes in the plasma

    +

    Very fine aerosol droplets

    ensure high efficiency in 4

    key processes

    As a sample aerosol droplet passes through the plasma, the following fourprocesses occur rapidly:

    1) Solvent evaporates from the sample matrix.

    2) The sample matrix is vaporized.

    3) Vaporized sample is completely atomized.

    4) Analyte atoms are ionized.

    Introducing a very fine sample aerosol to the plasma ensures maximum

    efficiency in these important plasma processes. The end goal is the

    efficient production of single charged ions that can be sampled into the

    mass spectrometer.

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    Degree of ionization

    H0.1

    Li100

    Na100

    Ru96

    K100

    Rb100

    Cs100

    Fr

    Sr96(4)

    Ca99(1)

    Mg98

    Be75

    Tl100

    Ra

    Ba91(9)

    Ac

    Sc100

    Y98

    La90(10)

    Ti99

    Zr99

    Hf98

    Cr98

    Mo98

    W94

    Ta95

    Nb98

    V99

    Th100

    Fe96

    Re93

    Tc

    Mn95

    Ni91

    Au51

    Ir

    Co93

    Rh94

    Os78

    Ag93

    Cu90

    Pd93

    Pt62

    Nd99

    Ar0.04

    B58

    Hg38

    Zn75

    Cd85

    C5

    Si85

    In99

    Ga98

    Al96

    F9e-4

    N0.1

    Pb97

    Sn96

    Ge90

    O0.1

    Ne6e-6

    Cl0.9

    S14

    Bi92

    As52

    Sb78

    P33

    Ce98(2) Eu100 Tm91(9)

    U100

    Pa

    Pr90(10) Sm97(3)

    Gd93(7

    )

    Xe8.5

    Kr0.6

    AtPo

    Te65

    Se33

    Br5

    I29

    Rn

    Tb99

    Dy100

    Yb92(8)Er99Pm Ho

    Np Pu Am Cm Bk Cf Es Fm Md LwNo

    He

    Calculated values of degree of ioni zation of M+ and M+2

    (T=7500K, ne = 1e15cm

    -3

    ) *Houk 1986

    Lu

    M+

    M+ + Mx 100%

    The nebulizer gas flow is optimized to enable a relatively long sample

    residence time in the plasma to allow the aerosol solvent to be

    evaporated, analytes to vaporize, atomize and finally ionize. The ICPsource is highly efficient and enables 80% of elements to be more than

    75% ionized. Many of these elements are 100% ionized. The large

    majority of elements yield only singly-charged ions because their second

    ionization potential is too high to allow doubly-charged ions to form.

    However, some elements, such as the rare earth group, can form doubly-

    charged ions (typically < 3 % of the singly charged ion level). Even so, the

    predominance of singly charged ions is a significant factor in both thesensitivity of the method and the simplicity of the mass spectra.

    Ionization efficiency is element-specific. All elements do not ionize to the

    same extent. The first ionization potential is the energy required to releasethe first electron from the outermost orbit of an atoms electron shell. The

    periodic table of the elements is characterized in blocks and each block

    e.g. transition element group or the actinide group have broadly similarionization potentials within their group.

    Most elements are very efficiently ionized in the plasma. The most

    challenging are the halogens, phosphorus, sulphur, arsenic, selenium,

    mercury, which have ionization efficiencies ranging from around 50%,down to 1% or even less. In practice, F, Cl, noble gases, C, N, O are notreadily measured by ICP-MS.

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    In an argon plasma, 80% of elements are > 75% ionized

    Few oxide molecular ions

    - Worst case Ce, forms around 2% [CeO]+

    Most elements yield mainly singly charged ions

    - Worst case is Ba, at around 3% Ba++

    Plasma Ionization: Oxides, 1+ and 2+ Ions

    0

    20

    40

    60

    80

    100

    120

    5 6 7 8 9 10 11 12 13 14 15

    First ionization potential (eV)

    Degree

    of

    Ionization

    in

    the

    ICP

    (%)

    Everything present in the plasma (such as argon and oxygen) also give

    rise to peaks, and there are also combinations of these. The plasma

    properties are normally optimised to minimise these interferences andmaximise singly charged positive ion signal. Under normal operatingconditions, approximately 80%of elements are greater than 75% ionized.

    In ICP-MS, positive, singly charged analyte ions are the species measured

    by the mass spectrometer. The ICP is a very efficient ionization source for

    the great majority of elements. A few elements have doubly charged ionstoo, up to 3% of their ion population at worst.

    A small number of elements form oxide molecular ions in the plasma.Again, plasma conditions are optimized to keep this to a minimum. The

    worst element is Ce, which has an oxide contribution of 2%, relative to the

    Ce+ signal.

    The factors that control these contributions are:

    -type of nebulizer, spraychamber, torch and sampling interface design

    -sample uptake rate

    -nebulizer gas flow rate-distance from the plasma to the sampling cone.

    The last three can normally be optimized to produce satisfactorycharacteristics.

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    Components of an ICP-MS

    Sample introduction system

    ICP

    Interface

    Lens system

    Mass analyzer

    Vacuum system

    Detector

    The interface is the region where ions generated in the plasma areextracted and introduced to the mass spectrometer as an ion beam.

    The interface region, where ions are extracted from the plasma, is also the

    first stage of the 3-stage vacuum system. A vacuum of around 2 mbar is

    maintained between the interface cones, using a mechanical roughingpump.

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    The interface - sampling ions

    ICP at 1 atmosphere

    Vacuum between cones ~ 2x10-3

    bar (rotary pump)

    Supersonic gas and ion jet

    extracted by sample cone

    Ions admitted to mass

    spectrometer by skimmer cone

    Interface water cooled

    The job of the sampling interface is to sample the plasma-generated ions

    from the atmospheric pressure region of the plasma into the high vacuum

    region inside the mass spectrometer.

    The interface consists of a pair of metal cones with their apertures

    positioned sequentially. The region between the two cones is continuously

    evacuated of gas by a mechanical roughing pump. The region behind the

    second cone (the skimmer) is at lower pressure, generated by a

    turbomolecular vacuum pump.

    A nickel sampling cone, with a 1 mm orifice, is positioned in the plasma at

    the point of maximum ionization. Plasma gas and ions pass through theorifice, accelerating into the partial vacuum as a supersonic jet.

    A second (skimmer) cone has a smaller orifice and an even lower vacuum

    behind it. This skimmer cone samples ions (and gas) from the supersonic

    jet, which contains only gas and ions derived from the plasma.

    The whole configuration is designed to maximise the number of ions

    reaching the mass spectrometer, whilst minimising the gas load admittedwith the ions.

    Beyond the skimmer cone, ions continue as a narrow axial beam towardsthe electrostatic lenses.

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    The sampling interface

    Ions generated in the plasma are

    transported into the mass

    spectrometer

    Sample cone extracts ions

    from the plasma Skimmer cone admits ions to

    the mass spectrometer

    There is a region of the plasma, above the load coil, where the population

    of analyte ions is at its highest. The sampling interface is simply a pair of

    metal (nickel) cones, with a partial vacuum between them. The samplercone (outer) is placed in the high ionization region. The cone has a 1mm

    orifice, and gas and ions pass through the orifice, accelerated towards thesecond (skimmer) cone.

    There is an even higher vacuum behind the skimmer and ions are

    admitted to the mass spectrometer through the skimmer cones orifice.

    The interface is designed to admit as many ions as possible, of similarkinetic energy, with as little gas loading as possible.

    The whole interface is water cooled.

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    Components of an ICP-MS

    Sample introduction System ICP

    Interface

    Lens system

    Mass analyzer

    Vacuum system

    Detector

    Focusing: Once in the high vacuum region of the mass spectrometer, the

    sampled ions are accelerated and focused into the mass filter by a set of

    charged plates or ion lenses.

    The ion lenses are positioned immediately after the interface, allowing the

    ion beam extracted from the plasma to be focused and steered towards

    the quadrupole mass analyzer. The ion lenses are housed in the second

    stage of the 3-stage vacuum system, maintained by the first of 2 turbo-

    molecular pumps.

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    The lens system

    Three electrostatic lenses focusand steer the ion beam

    Immediately behind the interface Key design criteria

    - Low background

    - High transmission

    - Stable signal

    Various designs, e.g.:Photon-stop

    Chicane

    Reflecting fields

    Collision/reaction cells in thisregion

    DA

    Skimmer Cone

    Ion Lens

    Extraction

    Lens

    Slide Valve

    Increasing vacuum

    Ions are charged particles and are therefore affected by electrostatic fields. The

    positively charged ions of interest in ICP-MS are attracted towards a negative potential (voltage)and deflected away from a positive potential.

    The ion lenses are supplied with user- and software- adjustable voltages , whichexert forces of attraction and repulsion on the transmitted ions, focusing the beam for maximum

    performance by the mass analyzer (quadrupole). The sampled beam includes positive ions, neutral

    species, electrons and photons from the plasma. The positive ions are selected and focused by thelenses, whilst negative species are rejected and photons and neutrals are not influenced.

    The spectrometer detector is light-sensitive, so photons must be eliminated from

    the ion beam. The axis of the quadrupole is not in direct line of sight of the plasma so that photons

    are not transmitted to the detector and the job of the ion lenses is to ensure that the ion beam is

    efficiently transmitted from the interface into the mass analyzer. There are a number of methods of

    doing this. These include the use of a photon-stop, the use of chicane deflectors and the use ofreflecting fields.

    A photon-stop is simply a metal plate positioned in the centre of the path of the

    material entering the mass spectrometer from the interface. A lens or set of lenses allows the ionsto pass around this plate, while photons and neutrals collide with it and are lost. This method tends

    not to be very efficient (lower sensitivity) and results in the need to frequently clean the lens

    system. On the positive side, no strong negative fields are required to extract ions from the

    sampling interface, resulting in very low spectral contamination from material removed from thecones (good backgrounds and detection limits).

    A reflecting field (sometimes called an ion mirror) consists of a ring electrode

    that has a repelling positive charge applied to it and another electrode opposite it that has a large

    negative charge applied to it. The ions are repelled by the ring electrode and attracted by the

    opposite electrode. This makes the ions take a path through a 90 degree bend, while photons and

    neutrals pass straight on. This design has quite a high transmission efficiency (high sensitivity), but

    normally requires that ions are extracted from the interface with a strong negative extraction field,

    meaning that contaminant species from the cones can often be observed in the background

    spectrum (causing poor backgrounds and detection limits).Chicane lens designs utilize a pair of deflector plates to move the ion beam axis

    laterally, separating the ions from any transmitted photons and neutrals. This design is efficient

    (good sensitivity) and can be operated with extraction fields ranging from large negative potentialsto low positive potentials, offering high transmission and low backgrounds and detection limits.

    Additionally, on modern instruments, collision/reaction cells are positioned in theion lens part of the system for the removal of polyatomic interferences.

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    Components of an ICP-MS

    Sample introduction system ICP

    Interface

    Lens system

    Mass analyzer

    Vacuum system

    Detector

    Having created an ion beam and transported it through a vacuum

    chamber we now have to select ions of a particular isotope. In most

    designs of ICP-MS, this is achieved by passing the ion beam through aquadrupole mass analyzer which filters out ions of a specific mass tocharge ratio, to generate the mass spectrum.

    The quadrupole mass analyzer is positioned out of the line-of-sight and

    behind the ion lenses. The quadrupole is in the high vacuum region,

    evacuated by the second turbo-molecular pump.

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    Quadrupole design criteria

    Quadrupole design can be 4 cylindrical or hyperbolic rods

    Approx 80-230 mm in length and 9-12 mm in diameter

    Typically made from stainless steel or molybdenum

    Sometimes ceramic rods with gold coating used

    Rods matched to ceramic supports to maintain high precision alignment

    May include pre and post filters

    Quadrupole pre-filterpost-filter

    to detector

    A quadrupole essentially consists of four parallel cylindrical or hyperbolicrods.

    These rods are typically constructed from stainless steel or molybdenum.Sometimes, ceramic rods may be used which are coated in gold toprovide electrical conductivity.

    The rods are precisely fixed within the analyser.

    The operation of the quadrupole is enhanced using a pre- or post-filter.

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    Quadrupole mass filter

    +ve DC

    +ve RF

    -ve DC

    -ve RF

    +

    -

    t = 1 t = 2 t = 3 t = 4

    Having created an ion beam and transported it through a vacuum

    chamber we now have to select ions of a particular isotope. This is

    achieved by passing the ion beam through a quadrupole mass analyzerwhich filters out ions of a specific mass to charge ratio.

    A quadrupole consists of four rods, placed equidistant from each other.Taking an ions view of the quadrupole, there are two rods in the

    horizontal, x-plane, and two in the vertical, y-plane. The rods in the x-

    plane are supplied with a voltage +Vo. The rods in the y-plane are

    supplied with an equal and opposite voltage -Vo. The z-axis is the one

    along the axis of the rods. Opposite pairs of poles supplied with positiveand negative DC voltages and RF voltages 180o out of phase

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    Quadrupole mass filter - continued

    Ions traverse in a complex spiral motion One mass transmitted to the detector -

    all others collide with the quadrupole

    rods

    Scanning the voltages (along the scan

    line) transmits different masses in turn

    -+

    +

    + DC and RF

    - DC and RF +

    Ions already have forward velocity an travel into the space between the

    axis of the four rods and move in response to an applied electrical field.

    The force which moves them is proportional to the applied voltages. Thevoltage applied changes during the passage of the ion through the

    quadrupole. The oscillation of the ion in the changing conditions leads to

    ions being repeatedly pulled towards one rod, then another, such that, asthe RF and DC fields are oscillated, the ion adopts a corkscrew motion

    along the axis of the rods.

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    Quadrupole stability diagram

    DC

    Offset

    RF

    MM-1

    M+1

    Analyzer yields mass spectrum with peak

    width of 1 a.m.o.

    The amplitude of the applied voltages is automatically scanned and the magnitude of this, dictates

    whether the path of an ion of one fixed mass to charge ratio travels along a stable trajectory

    through the quadrupole. As the ion is accelerated e.g. to the left hand rod, the voltage changes

    and it is now pushed away and attracted to the top rod. As the ion moves towards the top rod, thevoltage reverses again and the ion moves to the right hand rod and so on, acquiring a spiraling

    forward trajectory. A given applied voltage will accelerate a light mass ion to high speed, but a

    heavy mass to a slower speed. If the ion is accelerated to a speed that is too fast or slow for the

    next voltage change to steer it back onto a stable path, it will hit the rods, lose its charge and be

    lost to the vacuum system. Since this acceleration process is mass dependent, only an ion of one

    particular mass to charge ratio will maintain a stable path through the quadrupole for a given

    applied voltage. Thus, by varying the applied voltages, a particular mass-to-charge ratio ion can beselected to transmit on a stable path through the quadrupole.

    The characteristics of a quadrupole can be described by using a diagram known

    as a quadrupole stability diagram. This diagram explains the correlation between the DC offset

    and the RF. The diagram shows the range of voltage values at which an ion of a particular mass to

    charge ratio will adopt a stable path through the mass filter. At voltages outside of this stability

    region, the ion will not pass through the quadrupole.Looking at the red area we can see that there are a large number of voltage combinations that willresult in ion transmission for mass M.

    Repeating the exercise with an adjacent mass at M-1 results in a similar transmission shape butwith lower voltage values at the apex of the area.

    Completing the exercise with ions of mass M+1 gives the green area.

    This means that there is a unique combination of voltages that will transmit mass M, whileexcluding ions of mass M-1 and M+1.

    Thus for a quadrupole to be used as a mass analyzer it has to be used under conditions that willisolate just the right combinations for all masses.

    The criteria used to isolate these conditions is that the ratio between U and Vp must remain

    constant. Thus the only voltage combinations of interest fall on the dotted line shown in the above

    diagram. This is known as the mass scan line. Changing the slope of the line and/or the DC offset

    potential at zero RF changes the intersection of the line with the ion stability curves. This change isreflected as an increase or decrease in the peak width (resolution) of the masses being scanned.

    With a quadrupole mass analyzer, a mass resolution of one amu or less can be easily achieved, up

    to several hundred mass units. For ICP-MS, it is only necessary to be able to scan from mass 2 to

    mass 250, as all naturally occurring isotopes and many currently identified non-natural isotopes liein this mass range.

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    Quadrupole resolution

    Standard Resolution

    High Resolution

    Changing the slope of the mass scan line (the ratio of DC offset to rf

    voltage) changes the intersection of the line with the transmission curves.

    This is reflected in the parameter known as Resolution.

    Most instruments typically give peak widths of ~0.7 amu in standardresolution mode.

    Some instruments quadrupole and DC/RF supplies have been designed

    to allow resolution switching under software control during analysis.

    Efficient peak separation can often be achieved at a peak width of 1 amu.

    Some isotopes are best measured at higher resolution, even though

    transmission of ions is reduced. To achieve maximum sensitivity for allelements, higher resolution is only used for elements which benefit from it.

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    Quadrupole mass spectra

    Mass spectrum contains one peak per isotope

    Some elements (Na, As, Bi) are monoisotopic (one isotope)

    Other elements have many more (e.g. Sn has 10)

    Most elements have fixed isotopic composition

    (exceptions include Pb and U)

    The quadrupole mass spectra can be easily interpreted and elements can

    be identified by their characteristic masses and isotopic fingerprints. Some

    elements (Na, As, Bi) are monoisotopic (one isotope), while otherelements have many more isotopes (e.g. Sn has 10). Most elements have

    fixed isotopic composition (exceptions include Pb and U), meaning that

    their concentrations can be measures using any of their isotopes. Isotopic

    ratio measurement can provide a good element identification method and

    can provide interesting geological information as long-timescale geologicalprocesses often fractionate different isotopes of an element.

    The sensitivity of an element is dictated by its ionisation efficiency, its

    mass (high masses transmitted more efficiently than low) and its isotopic

    splitting pattern (the lower the abundance of an isotope, the lower itssensitivity).

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    Components of an ICP-MS

    Sample introduction system

    ICP Interface

    Lens system

    Mass analyzer

    Vacuum system

    Detector

    For ions to be successfully transmitted through the ion lenses and

    quadrupole, they must not collide with gas particles. For this reason, the

    entire mass spectrometer must be kept under high vacuum. This is donewith the vacuum system. This section describes typical vacuum systems.

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    Vacuum systemThree-stage differential pumping

    3 chamber differential vacuum system

    -Accommodation of plasma gas loading

    1st stage (interface between cones)

    Rotary pump ~ 1.5 torr

    2nd stage (ion optics)

    Turbomolecular pump ~ 10-4 torr

    3rd stage (mass analyzer and detector)

    Turbo molecular pump ~ 10-6 torr

    For optimum results, the quadrupole analyser needs to operate at

    pressures below 10-6mbar. To achieve this is it necessary to utilise a 3

    stage differential pumping system.

    The 3 stages achieve a final vacuum below 10-6 Torr at the quadrupoleand detector.

    The 3-chamber differential vacuum system accommodates the gasloading from the ICP source.

    ICP-MS instruments have a 3-stage vacuum system, designed to achieve

    good performance in ion transmission, abundance sensitivity, lowbackground and instrument reliability.

    The expansion chamber has a pressure of ~2mbar. This is reduced in the

    intermediate chamber to ~10-4 mbar. At this pressure the mean free path

    of species in the plasma gas is sufficiently long for the ions to pass

    through to the quadrupole without being lost by collisions with residual gasspecies in the vacuum system

    The pressure in the intermediate chamber is limited by the quantity of gasintroduced through the skimmer cone. The amount of gas reaching the

    aperture between the intermediate and analyzer chambers is much

    reduced and therefore the analyzer pressure is reduced still further, toaround 10-6 to 10-7 mbar.

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    X Series ICP-MS vacuum systemThree-stage differential pumping via split flow turbo pump

    Advanced split flow turbo-

    molecular pumping

    Single rotary pump

    Improved reliability and reducedcost of ownership

    Upgrade to CCT without changeto pumping configuration

    Some latest generation instruments, such as Thermos XSeriesII, include

    traditional 3-stage pumping but using a novel pumping design. A split-flowturbo pump backed by a rotary pump pumps the analyser. The same

    rotary pump also evacuates the interface region. This means that the

    instrument only uses two pumps. The pumping performance of this

    configuration is excellent and this single pump design results in improvedreliability and reduced cost of ownership there is less heat output into

    the laboratory and this can be reduced even further since the rotary pump

    can be sited remotely.

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    Components of an ICP-MS

    Sample introduction system

    ICP Interface

    Lens system

    Mass analyzer

    Vacuum system

    Detector

    Ions transmitted through the quadrupole are finally detected using a dualmode detector which has linearity over nine orders of magnitude.

    The detector is behind the quadrupole mass analyzer.

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    Ion detection

    Most instruments use discrete dynode

    multiplier detectors. Ion strikes first dynode, releases electrons

    Electrons are accelerated by voltage applied

    to the multiplier and strike next dynode,

    releasing more electrons

    End result is a large electron cascade (pulse)

    at the multiplier exit, for each incident ion

    The discrete dynode detector is also known as an active film multiplier. It

    is positioned off-axis from the quadrupole to minimize continuum

    background. Ions emerging from the quadrupole strike the first dynode.Electrons are liberated by the impact, which are accelerated towards the

    next dynode by a potential difference between dynodes. These electrons

    impact the next dynode and more electrons are liberated. The process is

    repeated down the detector, generating an electron pulse, which is

    captured at the anode at the end of the dynode chain. The multiplier

    electronics count the pulses over an integration period, leading to a countrate for the isotope being measured.

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    The detector cross calibration

    Ion counting up to ~4x106

    cpsAnalogue mode up to 2x109 cps

    Modes accurately cross-calibrated

    Simultaneous

    ppt to ppm analysis

    Ba at 7ppm

    Analog si gnal

    PC signa l

    Na: blank to 300 ppm Cr: blank to 100 ppb

    In order to achieve a continuous, and wide, dynamic range, a secondmode of counting analog counting is used. This essentially measures

    the ion current part way down the dynode chain on the detector. Themagnitude of the current is proportional to the concentration of the analyte

    in the sample. The pulse counting and analog acquisition modes operate

    simultaneously. It is important to have an accurate conversion factor

    between the two modes of operation to ensure continuity over the

    complete dynamic range. This is achieved by performing a pulse counting

    and analog detector cross-calibration. This is a calibration record thatautomatically converts analog counts to equivalent pulse counts.

    The detector cross calibration is a mass dependent numerical factor which

    scales up the low sensitivity analog signal by the correct amount to match

    the pulse counting mode sensitivity. In this way, a single, continuouslinear calibration can be achieved from low ppt to high ppm levels.

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    Pulse counting & analog linearity

    ICPS

    Concentration

    ppt ppb ppm

    Pulse counting detector

    Analog detector

    0.1ppt 10ppt 1ppb 100ppb 10ppm 1000ppm

    Concentration

    0.000001

    0.0001

    0.01

    1

    100

    10,000

    Response (ICPS)

    Most simultaneous detectors are designed to detect and count ion signals

    from

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    ICP Ion optics and mass

    spectrometerIon detection

    ICP-MS in a nutshell

    Sampling

    interfaceSample intro

    Most elements possible (around 80)

    Elemental and isotopic information given

    Concentration range ppq (pg/L) to mid-ppm (100s mg/L) Rapid analysis 2-6 minutes per sample

    Good precision ~2% RSDs

    To summarize, ICP-MS comprises five steps:

    1) Sample introduction as an aerosol and droplet size filtering;

    2) Sample droplet desolvation, vaporization, atomization and ionization ina high temperature plasma;

    3) Sampling of the ions from atmospheric pressure into the high vacuumof the mass spectrometer;

    4) Focusing and transmission of the ions by the lens system, which alsodecouples the ions from electrons, neutrals and photons;

    5) Mass separation (element/isotope selection) in the quadrupole; and

    6) Detection with an electron multiplier

    This powerful technique allows sensitive detection of upto 80 elements

    and provides both elemental and isotopic information. Detectable

    concentrations range from ppq to hundreds of ppm (thousands on

    some instruments). Modern instruments also allow multi-element

    analyses in timescales of 2-6 minutes per sample with excellentprecision of typically between 1 and 5 % RSD.