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Transcript of An Introduction to ICP MS
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The world leader in serving science
From first principles:
An introduction to the
ICP-MS technique
This presentation describes the history of how ICP-MS was developed,
gives the characteristics of modern ICP-MS instruments and explains the
theory of how ICP-MS works.
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Design requirements for new analytical massspectrometer March 1971
Courtesy of Kym Jarvis, National Environmental Research Centre (NERC) Facility, UK
The story of ICP-MS begins back in 1971 at the University of Surrey, UK.
Environmental and geological scientists were looking for a new analytical
mass spectrometer to help characterize their samples. Their initial designrequirements were quite modest by todays standards. They wanted to be
able to analyze between 4 and 6 samples per hour (10-15 minutes per
sample) and detect all metallic elements from lithium to uranium mass
range from 6 to 238 amu. They were searching for detection limits of
around 100 ppb - considerably below the possible detection level of the
early optical ICP instruments around in those days - and they would be
happy with precision of around 25% RSD. They were interested in
elemental concentrations, but also isotopic information (mostly given asratios), which was another reason for looking at mass spectrometry.
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Some development landmarks
Alan Gray, Applied Research Laboratories
(1974, 1975)DC plasma
3000-6000K
Sufficient to ionise elements
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First DCP - 1971
Alan Gray, Applied Research Laboratories
This slide shows a photograph of the Alan Grays first DCP-MS instrument
in around 1971. The DCP-MS proved that a plasma source mass
spectrometer could be a useful and successful tool for inorganic analysisand detection limits looked reasonably promising. The source did limit the
techniques element coverage and there was a need for a higher energyionisation method.
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Development landmarks
Decision to replace DC plasma with Inductively Coupled Plasma
(ICP) Parallel developments in UK (Uni of Surrey and VG now
Thermo), USA (Iowa State Uni) and Canada (Sciex)
First spectra obtained by Alan Gray & Alan Date at Uni of Surrey
in 1981
First commercial instruments ordered in 1983 (VG/Thermo and
PE/Sciex)
This lead to a decision to replace the DC plasma with an inductively
coupled plasma (ICP), since this excitation source was known to be able
to produce more energetic plasmas, capable of ionizing more elements toa higher degree. At about this time (~1980), parallel developments for an
ICP-MS began in the UK with Alan Grays group at the University of
Surrey, in the USA with Sam Houks group at Iowa State University, and in
Canada with Don Douglass group at the University of Toronto.
Associations were formed between Grays group and a company called
VG (now part of Thermo), and Douglass group and a company called
Sciex (now a joint-venture with PerkinElmer Instruments). The race wason to produce a commercial product!
The first commercial instruments shipped at around the same time in 1983from both VG (Thermo) and Sciex.
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Early development: Experimental instruments
Vertical Plasma instrument
Uni of Surrey
c.a. 1980
Angel Plasma instrument
Uni of Surrey
c.a. 1981
These two photos show some early experimental ICP-MS instruments
from Grays group. The left photo shows a vertical plasma instrument from
around 1980 and the right hand photo shows the so-called Angel plasmainstrument. These were experiments in ion sampling from the plasma.
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Towards commercialization
NERC research instrument
Uni of Surrey/VG (Thermo)
early 1980s
Prototype PQ instrument atBGS Grays Inn Road
VG (Thermo), early 1980s
These photos show some prototype instruments slightly closer to the
finished commercial product from VG (Thermo). The instrument on the left
is still functioning in Kym Jarviss lab at the NERC facility in the UK. Theinstrument on the right is a prototype supplied to the British Geological
Survey. These prototypes paved the way towards the first VG commercialinstrument.
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Finally a product! And another
Thermo (VG) commercialize the
first PlasmaQuad ICP-MS1983
1990 PQ 2 ICP-MS Launched
Sensitivity increased, stability
improved, ease-of-use improved
Finally in 1983 VG (Thermo) launched the PlasmaQuad instrument. This
was a successful product that was installed in many research facilities. It
had limited application to the routine analysis market since it requiredsome expertise to use.
In 1990 VG launched the PlasmaQuad 2 which was a refinement of the
original PlasmaQuad that was repackaged in an easier to use format. In
addition, some of the performance characteristics, such as sensitivity and
stability were improved. This platform was incredibly successful and reallybegan to find its way into routine labs.
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And anotherand another
PQ 3 ICP-MS Launched
Huge ease-of-use improvements,
sensitivity improvements, compact
design, all computer-controlled,cool plasma capability
1994
1997
VG PQ ExCell ICP-MS Launched
1st PQ with Collision CellTechnology, new software platform
Collision/Reaction Cell Technology for
ICP-MS invented
1999
By 1994, the demand for routine usage of the technique had grown. The
VG response was the PQ 3, a compact ICP-MS that was under complete
PC control. This allowed much greater automation and made it mucheasier to use. Some performance enhancements were also added,
including cool plasma that allowed the measurement of several elements
that were previously impossible due to high backgrounds or gas-based
interferences. PQ 3 instruments also shipped under brand names such as
Fisons Instruments and TJA Solutions, as VG was acquired by first
Fisons and then Thermo Electron Corporation as part of the ThermoJarrell Ash (TJA) group.
By 1997, there had been a new technological development in ICP-MS:
the introduction of collision/reaction cells. This new technology provided
an instrumental method of removing polyatomic interferences one of the
longstanding problems for the technique. In 1997, collision reaction cell
technology for ICP-MS was invented by GVI (previously Micromass, now
Thermo) and in 1999 the VG PQ ExCell was launched. This was the first
collision cell PQ and was based on the PQ 3 platform. The collision cell
opened up new applications and enabled the analysis of previously
challenging or impossible analytes and sample types. A new softwareplatform also simplified the use of the system.
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And another 25 years of improvements!
X Series ICP-MS Launched
Super-compact design for ease of use
and low maintenance, 2nd Generation
Collision Cell with KED, newsoftware, fastest ever analysis
20
00
20
05
2001
Xi / Environmental Interface Launched
XSeriesII ICP-MS Launched
Xt and Xs interfaces ultimate matrix
tolerance,-Extraction, 3rd Generation
Collision Cell lowest ever DLs and
freedom from interference
In 2000, we launched the environmental interface (later known as the Xi interface); a
cone set with special properties to aid routine environmental analysis. This enabled the
measurement analytes typically found at high concentrations in environmental samples,
while still allowing ppt level measurements of toxic analytes. It also improved theinstruments tolerance to highly concentrated matrices by reducing drift and polyatomicinterferences.
In 2001, the X Series ICP-MS was launched. This heralded the modern age of ICP-MS. It
was a super-compact bench-top system that redefined the ease-of-use and maintenance
of the technique and massively improved the speed of analysis by incorporating
productivity enhancing design features and software functionality. Performance was also
improved with the release of our improved 2nd generation collision cell technologydesigned for kinetic energy discrimination.
In 2005 Thermo launched the new XSeriesII. This builds on the ideas in the X Series and
gives the customer more productivity, more practicality and more performance. The key
innovations include developments in interface technology (the Xt and Xs interfaces),
designed for even better tolerance to high matrices; a new optics design (PI extraction),
producing the lowest ever detection limits and; our 3rd generation of collision cell
technology, providing the simplest, most effective interference removal technologyavailable.
More than ever before, this latest generation of ICP-MS provides overlap with Optical ICP
characteristics, but also produces detection limits at the ppt-level and below withexcellent freedom from interference.
So where has the modern technique of ICP-MS got to? We are now able to analyze
samples for up to 75 elements for many sample types in timescales of between 2 and 6
minutes per sample (10-30 samples per hour), with detection limits in the ppq to ppt
range for most elements and RSDs of around 1-5%. CRC technology also removes many
of the old problems with interference. Modern ICP-MS has more than surpassed theexpectations of Alan Grays group in the early 1970s.
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Key features of modern ICP-MS
A quantitative elementalanalysis technique
Accommodates a broadrange of samples andmatrices
Nearly all elements inperiodic table
Excellent sensitivity
Wide linear dynamic range
Enough history. Now onto some characteristics.
ICP-MS has many unique features which make it attractive as a techniquefor quantitative trace element analysis.
ICP-MS is capable of accommodating a broad range of sample types.
Although in its basic form, ICP-MS analyses materials as a solution, it can
be successfully coupled to laser (enabling direct analysis of solids) or
gases (for example by hydride generation). More recently, ICP-MS has
been coupled with techniques such as HPLC and GC to providespeciation analysis of certain elements.
The technique is applicable to nearly all elements in the periodic table, so
that all commonly occurring elements can typically be measured in oneanalysis.
ICP-MS is a highly sensitive technique, providing the analyst with
determinations down to sub ppt levels, lower than most other analytical
techniques. This sensitivity is very well complemented by its very widedynamic range.
As environmental regulations and process control require ever-increasing
sensitivity, ICP-MS continues to become the analytical technique of choicein a wide variety of application areas.
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ICPIon optics and mass
spectrometerIon detection
What is ICP-MS?
Instrument comprises five basic steps:
Generating an aerosol of the sample
Ionizing sample in the ICP source
Extracting ions in the sampling interface
Separating ions by mass
Detecting ions, calculating the concentrations
Sampling
interface.
Sample intro
We will now move onto the theory of how ICP-MS works.
The technique can be simplified in five main stages or processes.
Although ICP-OES and ICP-MS use the same kind of plasma source, the
steps towards the analytical outcome are quite different. The sample
introduction stages are essentially the same in both ICP-OES and ICP-
MS. The sample is introduced into the instrument by nebulization into afine aerosol which is then carried into the plasma to generate excitation.
In ICP-OES the excitation and relaxation processes occurring in theplasma produce light emitted from the elements of interest. In ICP-MS the
goal of the plasma is to remove electrons from the analyte atoms and
generate ions. The ICP conditions are optimized to achieve this as
efficiently as possible, trying to minimize the formation of multiply-chargedand molecular ions.
These positive ions are sampled from the plasma through a sampling
interface and directed into the mass spectrometer, where they are
separated according to mass (strictly mass to charge ratio), beforereaching the instrument detector.
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ICP-MS: characteristic mass spectrum
Simple spectra (primarily M+ions)
- Simple interpretation
Very high signal tobackground
- Low detection limits
ICP-MS Spectrum - Vanadium (51V)ICP-AES Spectrum - Vanadium 10 mg/L
Many emission lines
High continuum background
The mass spectra of all elements contain a small number of peaks. Even
ifall elements in the Periodic Table were present in the sample there
would only be 211 peaks in the mass spectrum. Every element (with theexception of indium) has at least one isotope that is at a unique mass. The
peak position along the mass scale (x axis) identifies the isotope present
(ie provides qualitative analysis) and the peak intensity (y axis) is
proportional to the concentration. Quantitative analysis is obtained by
analyzing standards of known concentration for each of the isotopes of
interest and comparing the peak intensities of the standards and samples.
Mass spectra tend to be much less complex and far more predictable than
optical spectra. For example, the mass spectrum for vanadium comprises
two peaks - one isotope at mass 51 and a small peak at mass 50 is
extremely simple compared to the rather complex ICP optical emissionspectrum comprising many lines, and begins to illustrate why ICP-MS is
often less troubled by interferences than ICP-OES and other atomic
spectroscopy methods. You will also notice that optical spectra often have
quite high continuum backgrounds, whereas the mass spectrum is often
characterized by low backgrounds, yielding ppt detection limits for mostelements.
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Location of ICP-MS components
This simplified schematic of an ICP-MS will be used to explain the
positions, functions and relationship between the key components of the
system. The following slides will then deal with each area in turn, followingthe journey of the sample through the ICP-MS:
Sample introduction system (spray chamber and nebulizer)
ICP (torch and power supply)
Mass spectrometer Interface
Lens system (ion optics)
Mass analyzer
Vacuum system (Mechanical and turbomolecular pumps)Detector
Data handling and system controller
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Components of an ICP-MS
Sample introduction system
ICP
Interface
Lens system
Mass analyzer
Vacuum system
Detector
The first area to look at is the sample introduction components.
For the purposes of this workshop we will consider only solution samples.
However, it is possible to directly sample solid samples (for example usinglaser ablation) and gases (for example by hydride generation).
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Sample introduction
Most common samples are aqueoussolutions
Sample delivery by peristaltic pump
Fine (
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Sample introduction - nebulizer types
Pneumatic nebulizers
Concentric
Excellent sensitivity and stability
~ 1 ml/min uptake rate
Micro concentric
Low flow nebulizers
< 0.1 mL/min uptake rate for micro samples, organics or radioactive samples
PTFE, PFA or PVDF for excellent corrosion resistance
Low blank levels - ideal for semiconductor labs
Parallel path or cross flow
Heavier matrix, higher TDS samples or particulate matter
The job of the nebulizer is to generate a fine aerosol of the sample. It does
this by contacting the flow of liquid sample with a high velocity stream of
argon gas at its tip. The gas makes the liquid break up into small dropletswhich are carried into the spraychamber by the gas stream. A number ofdesigns of nebulizer are available:
Glass concentric nebulizer
Advantage: stable aerosol; easy setup; widely available
Disadvantages: will not tolerate high total dissolved solids (TDS) oraggressive acids (e.g.HF)
Other nebulizers are available for use in different applications e.g. Inertnebulizers such as the concentric Burgener and polyimide types
Inert nebulizer
Advantages: can tolerate aggressive acids and high TDS
Disadvantages: less stable, less sensitive.
Inert low flow nebulizers such as the PFA-50 are also available
Advantages: HF resistant; useful for small sample volumes; contaminationfree (ideal for semiconductor applications)
Disadvantages: will not tolerate high TDS.
Applications using high TDS samples or very fine particulates, emulsified
samples and colloidal materials can be successful, using suitablenebulizers such as cross-flow or parallel path designs.
Micro-volume samples, organic matrices, radioactive samples are all
ideally suited to the range of micro-concentric nebulizers, includingcorrosion-resistant designs.
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Sample introduction droplet size
Fine (
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Sample introduction spraychamber cooling
Spraychamber cooling to ~ 2oC 5oC
Water-jacket or Peltier device
Less solvent to plasma
Stable plasma
Lower moleculars (oxides)
Spraychamber cooling to 15oC
Removal of organic solvents
Performance can also be improved by cooling of the spraychamber.
Cooling removes most of the sample solvent (water), making processes in
the plasma even more efficient, enhancing sensitivity for most elements.Eliminating solvent also reduces some solvent-derived interferences and
reduces oxide formation, again simplifying spectra even further. Cooling
also tends to improve long-term stability as the processes occurring in the
chamber are under temperature control and are therefore not sensitive to
lab temperature changes. The chamber can be cooled using water jacketor using a Pelter device (electrothermal cooling).
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Components of an ICP-MS
Sample introduction system
ICP
Interface
Lens system
Mass analyzer
Vacuum system
Detector
Once the sample aerosol is generated, it is introduced to the inductively
coupled plasma (ICP). The plasma is a very high temperature (6000-
10000 Kelvin) environment of atoms, ions and electrons. At thesetemperatures many elements make the transition from the atomic to
the ionic state since there is sufficient energy to completely remove
their outer shell electron. A very useful characteristic of the argon ICP
is that the great majority of the elements form mainly singly-charged
positive ions. This helps to generate a simple mass spectrum evenwhen lots of elements are present in the sample.
The inductively coupled plasma source consists of two primarycomponents.
1. RF generator
2. Torch assembly
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RF generator
Solid state generator
RF generator frequency is typically 27 MHz or 40 MHz
27 MHz provides higher sensitivity with ICP-MS
RF power is typically 0.6 - 1.5 kW
Water-cooled copper load coil
Coupling efficiency 70-75%
Actual power from generator that reaches the plasma
Most instruments use solid state RF generators that operate at either 27
or 40 MHz. The load coil carries this oscillating RF energy from the
generator to the area around the end of the torch and is often made fromcopper and is usually water-cooled. Most of the energy produced by thegenerator reaches the plasma, so coupling efficiency is quite high.
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Matching networks
Compensates for changes in impedance Impedance A materials resistance to the flow of an electric
current
Hence compensates for changes in sample matrix or solventvolatility
Crystal controlled Frequency locked at 27.12 MHz or 40.68 MHz
Uses servo-driven capacitors
Free running Frequency at ~40 MHz
Electronic tuning of frequency changes (impedance) due tomatrix/solvent
Most instruments use a matching network to control the impedance of the
plasma. Plasma impedance changes are the content of the plasma
changes (e.g. when the plasma contains air of a sample). As theimpedance changes, the plasma energy must continue to be balanced to
maintain a stable plasma. This is the job of the matching network. This is
normally performed by some motor driven capacitors that adjust the drive
impedance dynamically as the plasma impedance changes.
An alternative design is the so-called free-running generator which adjustsimpedance by shifting the RF frequency.
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The ICP-MS torch
Torch consists of three
concentric tubes
One piece or demountable
types available
Torch Is mounted horizontally
(axially)
Approx 10-20 mm from
interface
Gas flows optimized for M+ ion
formation and low molecular
(oxide) species
Most elements achieve their first ionization potential at a temperature of
approximately 7,000 K. This temperature is achieved at approximately
12-14 mm from the first turn of the load coil.The torch comprises three concentric quartz tubes, mounted axially (the
end of the torch faces the sample cone, separated by 10-20mm).
1. The inner tube (the torch injector) is used to direct the nebulizedsample into the plasma.
2. The next tube, supplying argon gas (the auxiliary gas), serves to keepthe plasma away from the torch injector to prevent it from melting.
3. The outer tube extends through the load coil and is supplied with
enough argon gas (the cool gas) to support the plasma and to prevent
the torch from melting.
The plasma is initially started without sample introduction, and then
optimized for singly charged positive ion formation and low molecular(oxide) species.
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The ICP
Arcoolant flow
Magnetic fields
High temperature
plasma -generatesions
Sample aerosol in Arnebulizerflow
++
++
+ +
++
Arauxiliary flow
Load coil
A very hot plasma of ionized argon
and free electrons.
Plasma sustained by a radio
frequency (RF) induction coil
Plasma constrained within a quartz
torch
The ICP is an argon plasma, constrained inside a quartz torch. It is
inductively coupled, which means it is sustained by a 2 turn induction
coil, supplied with a radio frequency (27 or 40 MHz) oscillating field. Thiscoil induces a powerful oscillating magnetic field inside the torch which
oscillates ionized argon gas. The rapidly oscillating argon ions
energetically collide with other argon atoms and cause ionization of those
atoms. This process of ionization is self-sustaining with continuously
applied RF to the load coil and continuously supplied argon into the torch.
There are 3 argon flows in 3 concentric channels. The outer annulus
carries most of the supplied argon (coolant gas). The central injector tube
carries the argon sample aerosol. The annulus in between carries the
auxiliary flow which controls the position of the plasma and prevents
damage to the injector tube by the high temperature plasma.
The sample aerosol punches a channel through the axis of the plasma
and the ionization zone is positioned above the load coil, from whereanalyte ions can be easily sampled.
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Processes in the plasma
+
Very fine aerosol droplets
ensure high efficiency in 4
key processes
As a sample aerosol droplet passes through the plasma, the following fourprocesses occur rapidly:
1) Solvent evaporates from the sample matrix.
2) The sample matrix is vaporized.
3) Vaporized sample is completely atomized.
4) Analyte atoms are ionized.
Introducing a very fine sample aerosol to the plasma ensures maximum
efficiency in these important plasma processes. The end goal is the
efficient production of single charged ions that can be sampled into the
mass spectrometer.
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Degree of ionization
H0.1
Li100
Na100
Ru96
K100
Rb100
Cs100
Fr
Sr96(4)
Ca99(1)
Mg98
Be75
Tl100
Ra
Ba91(9)
Ac
Sc100
Y98
La90(10)
Ti99
Zr99
Hf98
Cr98
Mo98
W94
Ta95
Nb98
V99
Th100
Fe96
Re93
Tc
Mn95
Ni91
Au51
Ir
Co93
Rh94
Os78
Ag93
Cu90
Pd93
Pt62
Nd99
Ar0.04
B58
Hg38
Zn75
Cd85
C5
Si85
In99
Ga98
Al96
F9e-4
N0.1
Pb97
Sn96
Ge90
O0.1
Ne6e-6
Cl0.9
S14
Bi92
As52
Sb78
P33
Ce98(2) Eu100 Tm91(9)
U100
Pa
Pr90(10) Sm97(3)
Gd93(7
)
Xe8.5
Kr0.6
AtPo
Te65
Se33
Br5
I29
Rn
Tb99
Dy100
Yb92(8)Er99Pm Ho
Np Pu Am Cm Bk Cf Es Fm Md LwNo
He
Calculated values of degree of ioni zation of M+ and M+2
(T=7500K, ne = 1e15cm
-3
) *Houk 1986
Lu
M+
M+ + Mx 100%
The nebulizer gas flow is optimized to enable a relatively long sample
residence time in the plasma to allow the aerosol solvent to be
evaporated, analytes to vaporize, atomize and finally ionize. The ICPsource is highly efficient and enables 80% of elements to be more than
75% ionized. Many of these elements are 100% ionized. The large
majority of elements yield only singly-charged ions because their second
ionization potential is too high to allow doubly-charged ions to form.
However, some elements, such as the rare earth group, can form doubly-
charged ions (typically < 3 % of the singly charged ion level). Even so, the
predominance of singly charged ions is a significant factor in both thesensitivity of the method and the simplicity of the mass spectra.
Ionization efficiency is element-specific. All elements do not ionize to the
same extent. The first ionization potential is the energy required to releasethe first electron from the outermost orbit of an atoms electron shell. The
periodic table of the elements is characterized in blocks and each block
e.g. transition element group or the actinide group have broadly similarionization potentials within their group.
Most elements are very efficiently ionized in the plasma. The most
challenging are the halogens, phosphorus, sulphur, arsenic, selenium,
mercury, which have ionization efficiencies ranging from around 50%,down to 1% or even less. In practice, F, Cl, noble gases, C, N, O are notreadily measured by ICP-MS.
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In an argon plasma, 80% of elements are > 75% ionized
Few oxide molecular ions
- Worst case Ce, forms around 2% [CeO]+
Most elements yield mainly singly charged ions
- Worst case is Ba, at around 3% Ba++
Plasma Ionization: Oxides, 1+ and 2+ Ions
0
20
40
60
80
100
120
5 6 7 8 9 10 11 12 13 14 15
First ionization potential (eV)
Degree
of
Ionization
in
the
ICP
(%)
Everything present in the plasma (such as argon and oxygen) also give
rise to peaks, and there are also combinations of these. The plasma
properties are normally optimised to minimise these interferences andmaximise singly charged positive ion signal. Under normal operatingconditions, approximately 80%of elements are greater than 75% ionized.
In ICP-MS, positive, singly charged analyte ions are the species measured
by the mass spectrometer. The ICP is a very efficient ionization source for
the great majority of elements. A few elements have doubly charged ionstoo, up to 3% of their ion population at worst.
A small number of elements form oxide molecular ions in the plasma.Again, plasma conditions are optimized to keep this to a minimum. The
worst element is Ce, which has an oxide contribution of 2%, relative to the
Ce+ signal.
The factors that control these contributions are:
-type of nebulizer, spraychamber, torch and sampling interface design
-sample uptake rate
-nebulizer gas flow rate-distance from the plasma to the sampling cone.
The last three can normally be optimized to produce satisfactorycharacteristics.
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Components of an ICP-MS
Sample introduction system
ICP
Interface
Lens system
Mass analyzer
Vacuum system
Detector
The interface is the region where ions generated in the plasma areextracted and introduced to the mass spectrometer as an ion beam.
The interface region, where ions are extracted from the plasma, is also the
first stage of the 3-stage vacuum system. A vacuum of around 2 mbar is
maintained between the interface cones, using a mechanical roughingpump.
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The interface - sampling ions
ICP at 1 atmosphere
Vacuum between cones ~ 2x10-3
bar (rotary pump)
Supersonic gas and ion jet
extracted by sample cone
Ions admitted to mass
spectrometer by skimmer cone
Interface water cooled
The job of the sampling interface is to sample the plasma-generated ions
from the atmospheric pressure region of the plasma into the high vacuum
region inside the mass spectrometer.
The interface consists of a pair of metal cones with their apertures
positioned sequentially. The region between the two cones is continuously
evacuated of gas by a mechanical roughing pump. The region behind the
second cone (the skimmer) is at lower pressure, generated by a
turbomolecular vacuum pump.
A nickel sampling cone, with a 1 mm orifice, is positioned in the plasma at
the point of maximum ionization. Plasma gas and ions pass through theorifice, accelerating into the partial vacuum as a supersonic jet.
A second (skimmer) cone has a smaller orifice and an even lower vacuum
behind it. This skimmer cone samples ions (and gas) from the supersonic
jet, which contains only gas and ions derived from the plasma.
The whole configuration is designed to maximise the number of ions
reaching the mass spectrometer, whilst minimising the gas load admittedwith the ions.
Beyond the skimmer cone, ions continue as a narrow axial beam towardsthe electrostatic lenses.
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The sampling interface
Ions generated in the plasma are
transported into the mass
spectrometer
Sample cone extracts ions
from the plasma Skimmer cone admits ions to
the mass spectrometer
There is a region of the plasma, above the load coil, where the population
of analyte ions is at its highest. The sampling interface is simply a pair of
metal (nickel) cones, with a partial vacuum between them. The samplercone (outer) is placed in the high ionization region. The cone has a 1mm
orifice, and gas and ions pass through the orifice, accelerated towards thesecond (skimmer) cone.
There is an even higher vacuum behind the skimmer and ions are
admitted to the mass spectrometer through the skimmer cones orifice.
The interface is designed to admit as many ions as possible, of similarkinetic energy, with as little gas loading as possible.
The whole interface is water cooled.
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Components of an ICP-MS
Sample introduction System ICP
Interface
Lens system
Mass analyzer
Vacuum system
Detector
Focusing: Once in the high vacuum region of the mass spectrometer, the
sampled ions are accelerated and focused into the mass filter by a set of
charged plates or ion lenses.
The ion lenses are positioned immediately after the interface, allowing the
ion beam extracted from the plasma to be focused and steered towards
the quadrupole mass analyzer. The ion lenses are housed in the second
stage of the 3-stage vacuum system, maintained by the first of 2 turbo-
molecular pumps.
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The lens system
Three electrostatic lenses focusand steer the ion beam
Immediately behind the interface Key design criteria
- Low background
- High transmission
- Stable signal
Various designs, e.g.:Photon-stop
Chicane
Reflecting fields
Collision/reaction cells in thisregion
DA
Skimmer Cone
Ion Lens
Extraction
Lens
Slide Valve
Increasing vacuum
Ions are charged particles and are therefore affected by electrostatic fields. The
positively charged ions of interest in ICP-MS are attracted towards a negative potential (voltage)and deflected away from a positive potential.
The ion lenses are supplied with user- and software- adjustable voltages , whichexert forces of attraction and repulsion on the transmitted ions, focusing the beam for maximum
performance by the mass analyzer (quadrupole). The sampled beam includes positive ions, neutral
species, electrons and photons from the plasma. The positive ions are selected and focused by thelenses, whilst negative species are rejected and photons and neutrals are not influenced.
The spectrometer detector is light-sensitive, so photons must be eliminated from
the ion beam. The axis of the quadrupole is not in direct line of sight of the plasma so that photons
are not transmitted to the detector and the job of the ion lenses is to ensure that the ion beam is
efficiently transmitted from the interface into the mass analyzer. There are a number of methods of
doing this. These include the use of a photon-stop, the use of chicane deflectors and the use ofreflecting fields.
A photon-stop is simply a metal plate positioned in the centre of the path of the
material entering the mass spectrometer from the interface. A lens or set of lenses allows the ionsto pass around this plate, while photons and neutrals collide with it and are lost. This method tends
not to be very efficient (lower sensitivity) and results in the need to frequently clean the lens
system. On the positive side, no strong negative fields are required to extract ions from the
sampling interface, resulting in very low spectral contamination from material removed from thecones (good backgrounds and detection limits).
A reflecting field (sometimes called an ion mirror) consists of a ring electrode
that has a repelling positive charge applied to it and another electrode opposite it that has a large
negative charge applied to it. The ions are repelled by the ring electrode and attracted by the
opposite electrode. This makes the ions take a path through a 90 degree bend, while photons and
neutrals pass straight on. This design has quite a high transmission efficiency (high sensitivity), but
normally requires that ions are extracted from the interface with a strong negative extraction field,
meaning that contaminant species from the cones can often be observed in the background
spectrum (causing poor backgrounds and detection limits).Chicane lens designs utilize a pair of deflector plates to move the ion beam axis
laterally, separating the ions from any transmitted photons and neutrals. This design is efficient
(good sensitivity) and can be operated with extraction fields ranging from large negative potentialsto low positive potentials, offering high transmission and low backgrounds and detection limits.
Additionally, on modern instruments, collision/reaction cells are positioned in theion lens part of the system for the removal of polyatomic interferences.
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Components of an ICP-MS
Sample introduction system ICP
Interface
Lens system
Mass analyzer
Vacuum system
Detector
Having created an ion beam and transported it through a vacuum
chamber we now have to select ions of a particular isotope. In most
designs of ICP-MS, this is achieved by passing the ion beam through aquadrupole mass analyzer which filters out ions of a specific mass tocharge ratio, to generate the mass spectrum.
The quadrupole mass analyzer is positioned out of the line-of-sight and
behind the ion lenses. The quadrupole is in the high vacuum region,
evacuated by the second turbo-molecular pump.
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Quadrupole design criteria
Quadrupole design can be 4 cylindrical or hyperbolic rods
Approx 80-230 mm in length and 9-12 mm in diameter
Typically made from stainless steel or molybdenum
Sometimes ceramic rods with gold coating used
Rods matched to ceramic supports to maintain high precision alignment
May include pre and post filters
Quadrupole pre-filterpost-filter
to detector
A quadrupole essentially consists of four parallel cylindrical or hyperbolicrods.
These rods are typically constructed from stainless steel or molybdenum.Sometimes, ceramic rods may be used which are coated in gold toprovide electrical conductivity.
The rods are precisely fixed within the analyser.
The operation of the quadrupole is enhanced using a pre- or post-filter.
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Quadrupole mass filter
+ve DC
+ve RF
-ve DC
-ve RF
+
-
t = 1 t = 2 t = 3 t = 4
Having created an ion beam and transported it through a vacuum
chamber we now have to select ions of a particular isotope. This is
achieved by passing the ion beam through a quadrupole mass analyzerwhich filters out ions of a specific mass to charge ratio.
A quadrupole consists of four rods, placed equidistant from each other.Taking an ions view of the quadrupole, there are two rods in the
horizontal, x-plane, and two in the vertical, y-plane. The rods in the x-
plane are supplied with a voltage +Vo. The rods in the y-plane are
supplied with an equal and opposite voltage -Vo. The z-axis is the one
along the axis of the rods. Opposite pairs of poles supplied with positiveand negative DC voltages and RF voltages 180o out of phase
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Quadrupole mass filter - continued
Ions traverse in a complex spiral motion One mass transmitted to the detector -
all others collide with the quadrupole
rods
Scanning the voltages (along the scan
line) transmits different masses in turn
-+
+
+ DC and RF
- DC and RF +
Ions already have forward velocity an travel into the space between the
axis of the four rods and move in response to an applied electrical field.
The force which moves them is proportional to the applied voltages. Thevoltage applied changes during the passage of the ion through the
quadrupole. The oscillation of the ion in the changing conditions leads to
ions being repeatedly pulled towards one rod, then another, such that, asthe RF and DC fields are oscillated, the ion adopts a corkscrew motion
along the axis of the rods.
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Quadrupole stability diagram
DC
Offset
RF
MM-1
M+1
Analyzer yields mass spectrum with peak
width of 1 a.m.o.
The amplitude of the applied voltages is automatically scanned and the magnitude of this, dictates
whether the path of an ion of one fixed mass to charge ratio travels along a stable trajectory
through the quadrupole. As the ion is accelerated e.g. to the left hand rod, the voltage changes
and it is now pushed away and attracted to the top rod. As the ion moves towards the top rod, thevoltage reverses again and the ion moves to the right hand rod and so on, acquiring a spiraling
forward trajectory. A given applied voltage will accelerate a light mass ion to high speed, but a
heavy mass to a slower speed. If the ion is accelerated to a speed that is too fast or slow for the
next voltage change to steer it back onto a stable path, it will hit the rods, lose its charge and be
lost to the vacuum system. Since this acceleration process is mass dependent, only an ion of one
particular mass to charge ratio will maintain a stable path through the quadrupole for a given
applied voltage. Thus, by varying the applied voltages, a particular mass-to-charge ratio ion can beselected to transmit on a stable path through the quadrupole.
The characteristics of a quadrupole can be described by using a diagram known
as a quadrupole stability diagram. This diagram explains the correlation between the DC offset
and the RF. The diagram shows the range of voltage values at which an ion of a particular mass to
charge ratio will adopt a stable path through the mass filter. At voltages outside of this stability
region, the ion will not pass through the quadrupole.Looking at the red area we can see that there are a large number of voltage combinations that willresult in ion transmission for mass M.
Repeating the exercise with an adjacent mass at M-1 results in a similar transmission shape butwith lower voltage values at the apex of the area.
Completing the exercise with ions of mass M+1 gives the green area.
This means that there is a unique combination of voltages that will transmit mass M, whileexcluding ions of mass M-1 and M+1.
Thus for a quadrupole to be used as a mass analyzer it has to be used under conditions that willisolate just the right combinations for all masses.
The criteria used to isolate these conditions is that the ratio between U and Vp must remain
constant. Thus the only voltage combinations of interest fall on the dotted line shown in the above
diagram. This is known as the mass scan line. Changing the slope of the line and/or the DC offset
potential at zero RF changes the intersection of the line with the ion stability curves. This change isreflected as an increase or decrease in the peak width (resolution) of the masses being scanned.
With a quadrupole mass analyzer, a mass resolution of one amu or less can be easily achieved, up
to several hundred mass units. For ICP-MS, it is only necessary to be able to scan from mass 2 to
mass 250, as all naturally occurring isotopes and many currently identified non-natural isotopes liein this mass range.
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Quadrupole resolution
Standard Resolution
High Resolution
Changing the slope of the mass scan line (the ratio of DC offset to rf
voltage) changes the intersection of the line with the transmission curves.
This is reflected in the parameter known as Resolution.
Most instruments typically give peak widths of ~0.7 amu in standardresolution mode.
Some instruments quadrupole and DC/RF supplies have been designed
to allow resolution switching under software control during analysis.
Efficient peak separation can often be achieved at a peak width of 1 amu.
Some isotopes are best measured at higher resolution, even though
transmission of ions is reduced. To achieve maximum sensitivity for allelements, higher resolution is only used for elements which benefit from it.
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Quadrupole mass spectra
Mass spectrum contains one peak per isotope
Some elements (Na, As, Bi) are monoisotopic (one isotope)
Other elements have many more (e.g. Sn has 10)
Most elements have fixed isotopic composition
(exceptions include Pb and U)
The quadrupole mass spectra can be easily interpreted and elements can
be identified by their characteristic masses and isotopic fingerprints. Some
elements (Na, As, Bi) are monoisotopic (one isotope), while otherelements have many more isotopes (e.g. Sn has 10). Most elements have
fixed isotopic composition (exceptions include Pb and U), meaning that
their concentrations can be measures using any of their isotopes. Isotopic
ratio measurement can provide a good element identification method and
can provide interesting geological information as long-timescale geologicalprocesses often fractionate different isotopes of an element.
The sensitivity of an element is dictated by its ionisation efficiency, its
mass (high masses transmitted more efficiently than low) and its isotopic
splitting pattern (the lower the abundance of an isotope, the lower itssensitivity).
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Components of an ICP-MS
Sample introduction system
ICP Interface
Lens system
Mass analyzer
Vacuum system
Detector
For ions to be successfully transmitted through the ion lenses and
quadrupole, they must not collide with gas particles. For this reason, the
entire mass spectrometer must be kept under high vacuum. This is donewith the vacuum system. This section describes typical vacuum systems.
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Vacuum systemThree-stage differential pumping
3 chamber differential vacuum system
-Accommodation of plasma gas loading
1st stage (interface between cones)
Rotary pump ~ 1.5 torr
2nd stage (ion optics)
Turbomolecular pump ~ 10-4 torr
3rd stage (mass analyzer and detector)
Turbo molecular pump ~ 10-6 torr
For optimum results, the quadrupole analyser needs to operate at
pressures below 10-6mbar. To achieve this is it necessary to utilise a 3
stage differential pumping system.
The 3 stages achieve a final vacuum below 10-6 Torr at the quadrupoleand detector.
The 3-chamber differential vacuum system accommodates the gasloading from the ICP source.
ICP-MS instruments have a 3-stage vacuum system, designed to achieve
good performance in ion transmission, abundance sensitivity, lowbackground and instrument reliability.
The expansion chamber has a pressure of ~2mbar. This is reduced in the
intermediate chamber to ~10-4 mbar. At this pressure the mean free path
of species in the plasma gas is sufficiently long for the ions to pass
through to the quadrupole without being lost by collisions with residual gasspecies in the vacuum system
The pressure in the intermediate chamber is limited by the quantity of gasintroduced through the skimmer cone. The amount of gas reaching the
aperture between the intermediate and analyzer chambers is much
reduced and therefore the analyzer pressure is reduced still further, toaround 10-6 to 10-7 mbar.
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X Series ICP-MS vacuum systemThree-stage differential pumping via split flow turbo pump
Advanced split flow turbo-
molecular pumping
Single rotary pump
Improved reliability and reducedcost of ownership
Upgrade to CCT without changeto pumping configuration
Some latest generation instruments, such as Thermos XSeriesII, include
traditional 3-stage pumping but using a novel pumping design. A split-flowturbo pump backed by a rotary pump pumps the analyser. The same
rotary pump also evacuates the interface region. This means that the
instrument only uses two pumps. The pumping performance of this
configuration is excellent and this single pump design results in improvedreliability and reduced cost of ownership there is less heat output into
the laboratory and this can be reduced even further since the rotary pump
can be sited remotely.
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Components of an ICP-MS
Sample introduction system
ICP Interface
Lens system
Mass analyzer
Vacuum system
Detector
Ions transmitted through the quadrupole are finally detected using a dualmode detector which has linearity over nine orders of magnitude.
The detector is behind the quadrupole mass analyzer.
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Ion detection
Most instruments use discrete dynode
multiplier detectors. Ion strikes first dynode, releases electrons
Electrons are accelerated by voltage applied
to the multiplier and strike next dynode,
releasing more electrons
End result is a large electron cascade (pulse)
at the multiplier exit, for each incident ion
The discrete dynode detector is also known as an active film multiplier. It
is positioned off-axis from the quadrupole to minimize continuum
background. Ions emerging from the quadrupole strike the first dynode.Electrons are liberated by the impact, which are accelerated towards the
next dynode by a potential difference between dynodes. These electrons
impact the next dynode and more electrons are liberated. The process is
repeated down the detector, generating an electron pulse, which is
captured at the anode at the end of the dynode chain. The multiplier
electronics count the pulses over an integration period, leading to a countrate for the isotope being measured.
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The detector cross calibration
Ion counting up to ~4x106
cpsAnalogue mode up to 2x109 cps
Modes accurately cross-calibrated
Simultaneous
ppt to ppm analysis
Ba at 7ppm
Analog si gnal
PC signa l
Na: blank to 300 ppm Cr: blank to 100 ppb
In order to achieve a continuous, and wide, dynamic range, a secondmode of counting analog counting is used. This essentially measures
the ion current part way down the dynode chain on the detector. Themagnitude of the current is proportional to the concentration of the analyte
in the sample. The pulse counting and analog acquisition modes operate
simultaneously. It is important to have an accurate conversion factor
between the two modes of operation to ensure continuity over the
complete dynamic range. This is achieved by performing a pulse counting
and analog detector cross-calibration. This is a calibration record thatautomatically converts analog counts to equivalent pulse counts.
The detector cross calibration is a mass dependent numerical factor which
scales up the low sensitivity analog signal by the correct amount to match
the pulse counting mode sensitivity. In this way, a single, continuouslinear calibration can be achieved from low ppt to high ppm levels.
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Pulse counting & analog linearity
ICPS
Concentration
ppt ppb ppm
Pulse counting detector
Analog detector
0.1ppt 10ppt 1ppb 100ppb 10ppm 1000ppm
Concentration
0.000001
0.0001
0.01
1
100
10,000
Response (ICPS)
Most simultaneous detectors are designed to detect and count ion signals
from
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ICP Ion optics and mass
spectrometerIon detection
ICP-MS in a nutshell
Sampling
interfaceSample intro
Most elements possible (around 80)
Elemental and isotopic information given
Concentration range ppq (pg/L) to mid-ppm (100s mg/L) Rapid analysis 2-6 minutes per sample
Good precision ~2% RSDs
To summarize, ICP-MS comprises five steps:
1) Sample introduction as an aerosol and droplet size filtering;
2) Sample droplet desolvation, vaporization, atomization and ionization ina high temperature plasma;
3) Sampling of the ions from atmospheric pressure into the high vacuumof the mass spectrometer;
4) Focusing and transmission of the ions by the lens system, which alsodecouples the ions from electrons, neutrals and photons;
5) Mass separation (element/isotope selection) in the quadrupole; and
6) Detection with an electron multiplier
This powerful technique allows sensitive detection of upto 80 elements
and provides both elemental and isotopic information. Detectable
concentrations range from ppq to hundreds of ppm (thousands on
some instruments). Modern instruments also allow multi-element
analyses in timescales of 2-6 minutes per sample with excellentprecision of typically between 1 and 5 % RSD.