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Transcript of Afm 2005
Materials Characterization Labwww.mri.psu.edu/mcl
250 MRLAugust 179:45 AMParticle Characterization
114 MRI BldgAugust 249:45 AMX-ray photoelectron spectroscopy (XPS/ESCA)
114 MRI BldgAugust 2411:00 AMAuger Electron Spectroscopy (AES)
541 Deike Bldg.July 279:45 AMChemical analysis (ICP, ICP-MS)
541 Deike Bldg.August 109:45 AMSmall angle x-ray scattering (SAXS)
114 MRI Bldg August 39:45 AMAtomic Force Microscopy (AFM)
250 MRL Bldg.July 209:45 AMOrientation imaging microscopy (OIM/EBSD)
114 MRI BldgJuly 1311:00 AMTEM sample preparation
114 MRI BldgJuly 139:45 AMFocused Ion Beam (FIB)
250 MRL Bldg.July 610:15 AMHigh temperature sintering lab (20 min lecture only)
250 MRL bldg.July 69:45 AMDielectric Characterization (25 min lecture only)
250 MRL Bldg.June 299:45 AMX-ray Diffraction (XRD)
541 Deike Bldg.June 2211:00 AMAnalytical SEM
541 Deike Bldg.June 229:45 AMScanning electron microscopy (SEM)
114 MRI BldgJune 159:45 AMTransmission Electron Microscopy (TEM/STEM)
250 MRL Bldg.June 89:45 AMThermal analysis (TGA, DTA, DSC)
LocationDateTimeTechnique
NOTE LOCATIONS: The MRI Bldg is in the Innovation Park near the Penn Stater Hotel; MRL Bldg. is on Hastings Road.More information: www.mri.psu.edu/mcl
Summer Characterization Open HousesSummer Characterization Open Houses
Materials Characterization Labwww.mri.psu.edu/mcl
BeaverStadium
Park Ave.
Park Ave.
Porter RoadPollock Road
University Drive
College Ave.
ShortlidgeR
oad North
Bur ro w
esR
oa d
00
00
00
00
00
00
00
00
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Centre Community
Hospital
E&ES Bldg:SEM
Hosler Bldg:SEM, ESEM, FE-SEM, EPMA, ICP, ICP-MS,BET, SAXS
MRI Bldg:XPS/ESCA, SIMS, TEM, HR-TEM, FE-Auger, AFM, XRD
Atherton Street
(322 Business)
MRL Bldg:SEM, XRD, OIM, DTA, DSC, TGA, FTIR, Raman, AFM, Powder, dielectric, prep, shop, IC, UV-Vis
Hastings Road
Penn StaterHotel
00
Materials Characterization Lab LocationsBldg TelephoneMRL 863-7844MRI 865-0337Hosler 865-1981E&ES 863-4225
Route 322
I-99 00
Steidle Bldg:Nanoindenter
Deike Bldg:
Materials Characterization Labwww.mri.psu.edu/mcl
Atomic Force MicroscopyVince Bojan
AFM / XPS / Auger / SIMS Analyst
August 3, 2005
Materials Characterization Labwww.mri.psu.edu/mcl
ACKNOWLEDGEMENTS
Jeff ShallenbergerRaafat Malek
Evangelos Manias
Materials Characterization Labwww.mri.psu.edu/mcl
OUTLINE
― an overview of the technique―discussion of MCL instrument capabilities― applications― AFM vs. SEM― how to get started ― resources― a brief lab tour / instrument demonstration
Materials Characterization Labwww.mri.psu.edu/mcl
Atomic Force Microscopy (AFM)is a subset of
“Scanning Probe Microscopies” (SPM)
The radius of this tip canvary from 1 angstrom (STM) to 1 micron
For AFM, tip radii range from1-20 nm.
A Practical Guide to Scanning Probe Microscopy, Howland & Benatar
Materials Characterization Labwww.mri.psu.edu/mcl
OTHER SCANNING PROBE MICROSCOPIES
• SCANNING TUNNELING MICROSCOPY (STM)• LATERAL FORCE MICROSCOPY (LFM)• MAGNETIC FORCE MICROSCOPY (MFM)• ELECTRIC FORCE MICROSCOPY (EFM)• CHEMICAL FORCE MICROSCOPY (CFM)• NEAR-FIELD SCANNING OPTICAL MICROSCOPY (SNOM OR
NSOM)• SCANNING CAPACITANCE MICROSCOPY (SCM)• BALLISTIC ELECTRON EMISSION MICROSCOPY (BEEM)• SCANNING THERMAL MICROSCOPY• PHOTON SCANNING TUNNELING MICROSCOPY• ELECTROCHEMICAL STM AND AFM• FORCE MODULATION MICROSCOPY• SURFACE POTENTIAL MICROSCOPY
Materials Characterization Labwww.mri.psu.edu/mcl
HISTORY
• SCANNING TUNNELING MICROSCOPE DEVELOPED BY BINNIG, ROHRER, GERBER AND WEIBEL AT IBM IN ZURICH
• 1982 NOBEL PRIZE IN PHYSICS FOR THE STM
• AFM DEVELOPED IN 1986 BY BINNIG, QUATE AND GERBER IN AN IBM / STANFORD COLLABORATION
Materials Characterization Labwww.mri.psu.edu/mcl
Scanning Tunneling Microscopy (STM) - G. Binnig, H. Rohrer, C. Gerber, E. Weibel, Phys. Rev. Lett. 1982, 49, 57.
COURTESY R. MALEK, MCL
Materials Characterization Labwww.mri.psu.edu/mcl
x,y-
scan
ner
z -
scan
ner
laser
mirror PSD
cantilever
sample
AB
CD
(A+B) - (C+D)(kept constant during scanning)
Drive voltage givesheight information
(constant deflection)
TYPICAL AFM LAYOUT
COURTESY R. MALEK
DI MULTIMODE
Materials Characterization Labwww.mri.psu.edu/mcl
MCL MICROSCOPES
DIGITAL INSTRUMENTSDIMENSION 3100 (MRI BLDG.)
LARGE SAMPLE CAPABILITY
DIGITAL INSTRUMENTSMULTIMODE (MRL BLDG.)
BETTER HI-MAGNIFICATION IMAGING
Materials Characterization Labwww.mri.psu.edu/mcl
10nm – 160 MICRONS
250nm – 100 MICRONSSCAN SIZE
AIR & LIQUIDAIR & LIQUIDSAMPLE ENVIRONMENT
5.5 MICRONS6.4 MICRONSVERTICAL FEATURE SIZE
12mm100 mmWIDTH
5mm11 mmHEIGHT
MULTIMODE(MRL)
DIMENSION 3100 (MRI)
Materials Characterization Labwww.mri.psu.edu/mcl
SAMPLE PREPARATIONCONDUCTIVE AND NON-CONDUCTIVE SAMPLESSURFACE CLEANING SOMETIMES NECESSARYSAMPLE MOUNTING MAY REQUIRE SOME EFFORT
VERTICAL RESOLUTION:DEPENDS ON INHERENT SCANNER RESOLUTION, ELECTRONIC RESOLUTION, COMBINED EFFECTS OF ELECTRICAL, MECHANICAL & ACOUSTIC NOISE…..TYPICALLY SUB ANGSTROM TO SEVERAL ANGSTROMS
LATERAL RESOLUTION:DEPENDS ON TIP RADIUS AND GEOMETRY, PIXEL DENSITY, TIP/SAMPLE INTERACTION FORCES, COMBINED ELECTRONIC, MECHANICAL, AND ACOUSTIC NOISE SOURCES, AND THE DEFINITION OF LATERAL RESOLUTION…..TYPICALLY A FEW TO 10S OF nm
Materials Characterization Labwww.mri.psu.edu/mcl
CONTACT VS. TAPPING MODEDIMENSION 3100 MICROSCOPE
BOTH METHODS SCAN THE SURFACE WITH A CONSTANT FORCE
Materials Characterization Labwww.mri.psu.edu/mcl
ADVANTAGES AND DISADVANTAGES OF CONTACT AND TAPPING MODES
CONTACTADVANTAGES•HIGH SCAN SPEEDS•VERY ROUGH SAMPLES CAN SOMETIMES BE SCANNED MORE EASILY
DISADVANTAGES•LATERAL FORCE DISTORTION•CAPILLARY FORCES FROM ADSORBED WATER CAN BE HIGH•HIGH LATERAL AND NORMAL FORCES CAN DAMAGE SOFT SAMPLES
TAPPINGADVANTAGES•HIGHER LATERAL RESOLUTION ON MOST SAMPLES•LOWER FORCES AND LESS DAMAGE TO SOFT SAMPLES IMAGED IN AIR•LATERAL FORCES VIRTUALLY ELIMINATED
DISADVANTAGES•SLOWER SCAN SPEEDS THAN CONTACT MODE
Materials Characterization Labwww.mri.psu.edu/mcl
Contact Mode Cantilever (Si3N4)
0.32
0.580.06
0.12
CANTILEVERS NOT DRAWN TO SCALE
COURTESY R. MALEK, MCL
Materials Characterization Labwww.mri.psu.edu/mcl
PIXEL HEIGHT DISTRIBUTION ANALYSIS
HIGHEST (YELLOW)
LOWEST (MAROON)
4.1 nm
7.5 nm
10 nm
Materials Characterization Labwww.mri.psu.edu/mcl
HOT-END SnO2 COATING ON A GLASS BEER BOTTLE
10 CTU 20 CTU 30 CTU
Materials Characterization Labwww.mri.psu.edu/mcl
PHASE IMAGING IN TAPPING MODE
phas
e
ExtenderElectronics
amplitude
phase
Materials Characterization Labwww.mri.psu.edu/mcl
K. E. Strawhecker and E. Manias, AFM of Poly(vinyl alcohol) Crystals Next to an Inorganic Surface8475 Macromolecules 2001, 34, 8475-8482
Materials Characterization Labwww.mri.psu.edu/mcl
MEASUREMENT OF INTERMOLECULAR FORCESVIA FORCE-DISTANCE CURVES
Materials Characterization Labwww.mri.psu.edu/mcl
CHEMICAL FORCE MICROSCOPY
C.B. Prater, P.G. Maivald, K.J. Kjoller, M.G. Heaton,“Probing Nano-Scale Forces with the Atomic Force Microscope”DI application note
F-D curve fora Si3N4 cantileverand mica surface as a function of pH
Materials Characterization Labwww.mri.psu.edu/mcl
TIP SHAPE ISSUES
TIP RADIUS AND GEOMETRY INFLUENCE LATERAL RESOLUTION, AND THE ABILITY TO FOLLOW SURFACE TOPOGRAPHY
Materials Characterization Labwww.mri.psu.edu/mcl
AFM VS. SEMAFM ADVANTAGES• QUANTITATIVE LATERAL AND VERTICAL MEASUREMENTS• NO NEED FOR SHARP EDGES OR SPECIAL SURFACE CHARACTERICTERISTICS TO
GENERATE GOOD TOPOGRAPHIC CONTRAST IN IMAGES• MEASUREMENTS PERFORMED IN AMBIENT AIR, LIQUID, VACUUM, OR OTHER
CONTROLLED ENVIRONMENTS• ELEVATIONS AND DEPRESSIONS ARE EASILY DISTINGUISHED• SAMPLE PREP CAN OFTEN BE NON-DESTRUCTIVE• ABILITY TO DISTINGUISH MATERIAL PROPERTY DIFFERENCES SUCH AS
STIFFNESS, ELASTICITY, COMPLIANCE, FRICTION, ADHESION, MAGNETIC FIELDS, CARRIER CONCENTRATION, TEMPERATURE DISTRIBUTION, SPREADING RESISTANCE, AND CONDUCTIVITY
SEM ADVANTAGES• QUALITATIVE ELEMENTAL INFORMATION VIA X-RAYS & BACKSCATTERED
ELECTRONS• ABILITY TO IMAGE UNDERCUTS OR CONVOLUTED STRUCTURES• LARGER DEPTH OF FIELD AND LATERAL SCAN RANGE• RELATIVELY FAST ACQUISITION OF IMAGES
Materials Characterization Labwww.mri.psu.edu/mcl
Images from DI Veeco Metrology application note “SEM and AFM: Complementary Techniques for High Resolution Surface Investigations”, by Russell, Batchelor, and Thornton.
Materials Characterization Labwww.mri.psu.edu/mcl
DATA PROCESSINGTYPICAL OPERATIONS INVOLVE:• Removing tilt, drift, scanner offsets and distortions• Altering contrast, brightness, colors• Magnify or reduce the vertical scale• Curvature or edge enhancement algorithms• Retouch areas of bad data• Filtering “environmental noise”• Introduce artificial light sources• Fourier Transform• 3-dimensional rendering• Low-Pass/High-Pass Filtering• Surface parameters such as roughness, skewness, or kurtosis• Cross sectional analyses• Bearing analyses
Materials Characterization Labwww.mri.psu.edu/mcl
COMMON IMAGE PROCESSING ALGORITHIMS CANINTRODUCE SIGNIFICANT DISTORTIONS INTO THE DATA
Materials Characterization Labwww.mri.psu.edu/mcl
RESOURCES
Veeco metrologyhttp://www.veeco.com/
MatSE 597Dhttp://zeus.plmsc.psu.edu/~manias/MatSc597/
Do a GOOGLE search on “scanning probe microscopy”
Materials Characterization Labwww.mri.psu.edu/mcl
SO HOW DO I GET AFM MEASUREMENTS MADE???
• CONTACT VINCE BOJAN ([email protected]) OR BOB HENGSTEBECK ([email protected] AT THE MRI BLDG. FOR THE DIMENSION 3100 LARGE-SAMPLE AFM.
• CONTACT DR. RAAFAT MALEK ([email protected]) FOR THE MULTIMODE AFM AT THE MRL BLDG.
• IF YOU HAVE JUST A FEW MEASUREMENTS, MCL STAFF MEMBERS CAN MAKE THE MEASUREMENTS FOR YOU, AND ALSO HELP YOU INTERPRET THE DATA
• IF YOU HAVE LOTS OF SAMPLES, YOU CAN BE TRAINED TO RUN THE MICROSCOPE YOURSELF
• AFTER TRAINING, RESERVE TIME ON THE AFM CALENDAR
• TRAINED, COMPETENT USERS GET ACCESS ON EVENINGS & WEEKENDS