8(A)-1 An AVT-105 Lecture Series No. 235 organised by the Applied Vehicle Technology Panel MEMS...
Transcript of 8(A)-1 An AVT-105 Lecture Series No. 235 organised by the Applied Vehicle Technology Panel MEMS...
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8(A)-1
An AVT-105 Lecture Series No. 235 organised by the
Applied Vehicle Technology Panel
MEMS Aerospace ApplicationsLes Applications Aerospatiales des
MEMS
Ayman El-FatatryBAE SYSTEMS
Advanced Technology Centre, UK
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Micro Opto-Electro-Mechanical Systems
MOEMS
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Lecture Outline
• Introduction to the Series
• The Presenter
• Microsystems (Definitions)
• Applications
• The BRAMMS Report
• Principals & Configurations
• COTS & Products
• Optical Systems
• Optical switching
• Displays
• Markets and Opportunities
• Trends and RoadMaps
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Aims of the Lecture Series
• Introduction to MST/MEMS• Focus on specific applications & devices
• COTS MEMS• Programmes and Initiatives
• Discussion• Support
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Acknowledgements
• BAE SYSTEMS
• MoD
• WEAG
• NEXUS
• NATO
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MEMS / MST
Definitions !
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A plethora of Acronyms !
• MST: European for Micro-System Technology (sensing + processing + actuation)
• MEMS: American for Micro-Electro-Mechanical-Systems (electrical + mechanical + IC compatible processing)
• Micromachines: Japanese for miniaturised factories / robots
• Also: MOEMS / MEMtronics / ASIMS and μSystems
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Microelectronics = planar
Microengineering = 3-d sculpting
Differences between Micro-Electronics & Micro-Engineering
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1000
Feature Sizemicrons
BOTTOM UP
0.1
0.001
Micro, Nano and MNTMicro, Nano and MNT
- - PositioningPositioning - -
10
100
1
2000 2005 2010 2015
Microsystems TechnologyMicrosystems Technology
MicroelectronicsMicroelectronics / NanoelectronicsNanoelectronicsMicroelectronicsMicroelectronics / NanoelectronicsNanoelectronics
Molecular ScienceMolecular Science &&TechnologyTechnology
Molecular ScienceMolecular Science &&TechnologyTechnology
Micro-Nano TechnologyMicro-Nano TechnologyMicro-Nano TechnologyMicro-Nano Technology
TOP DOWN
0.01NanoNano TechnologyTechnology
Courtesy RALCourtesy RAL
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Microtechnology is the fabrication of millimetre sized devices with micron and nano-sized rules by bulk deposition and patterning millions of atoms in any part.
Micro-Nano-Technologyis the use of the properties of micro and or nano-technology in micro and macro applications for further shrinking, integration and miniaturisation of sensing & actuating functions and for microsystems.
Nano-Technology (Molecular T)is the building up of structures or materials in an atom-for-atom specific way; every atom counts Theoretically anything could be built
Micro, Nano and MNTMicro, Nano and MNT
- - What is whatWhat is what - -
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Advanced fabrication techniques• Development of etching and bonding techniques• Introduction of new equipment
Facilitating the next steps in MEMS technologyto provide improved design flexibility for future devices
These proposed structures will lead to new or improved devices, eg miniature pneumaticsthrusters, fuzing elements, actuators, motors etcPresent 2 1/2 D deep etch is
limited to ‘extrusion’ in 3rd dimension
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Advanced fabrication progressSome first attempts at profile control
Isotropic etch
Sequentiallithography
Deep reactive ion etch
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Nanotechnology - (yet another) Definition“A process for manipulating smallest natural structures (atoms & molecules) where Quantum mechanics rules.”
TOP DOWN MICRO-ENGINEERING
BOTTOM UP NANO-ENGINEERING
From micro
to
Nano
lithography
Molecular self-assembly
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Smaller sizeLighterCheaperLower powerHigher reliabilityIncreased levels of integration(on board electronics, self test)Multi-functional (accel, yaw, temp and pressure)
Potential Advantages of Micro-Engineered Devices
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The BRAMMS Project
A study of MEMS and Defence Applications
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Western European Union (WEU)Western European Armaments Organisation (WEAO)
Research Cell (WRC)
B.R.A.M.M.S.B.R.A.M.M.S.
BBroad RRequirements for AAdvanced MMilitary
MMicro-SSystems
A collaborative study for RTP 2.30
Partners
UK :BAE SYSTEMSSmiths Industries AerospaceCLRC - RAL
FR :Thales (Sextant Avionique)Thales (Thomson-CSF Optronique)CEA-Leti
NL :TNO-FEL
I :Alenia DifesaAlenia Radar Systems
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Military MEMS/MST ; Main Military MEMS/MST ; Main ApplicationsApplications
LAND SEA AIR SPACE
•Smart & Competent Munitions.•Gun Launched Munitions•Communication Systems•Soldier / Combatant Equipment•Surveillance Systems
•Torpedo Control•Communication Systems•Platform Stabilisation& Control Systems
•Aircraft PlatformControl Systems•Avionics & FlightControl•Equipment Monitoring& Failure Prediction•Communication Systems•Combat Systems
•Guidance &Control•CommunicationSystems
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MOEMS Applications
Principle Defence ApplicationsSwitches For aerospace comms networks
Displays Head up displays, vehicle displays
Adaptive optics Beam optimisation
Shutter arrays Protection, imagers and eyes
Tunable filters Demodulators in Health monitoring systems
Smart apertures Multifunctional vehicle apertures
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Objectives of the NEXUS Association
• To promote the uptake of microsystemstechnology, and nanotechnology “MNT” in support of European industry
• To provide opportunities for professional networking
• To generate and disseminate up-to-date marketing, technical, and emerging technology information.
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WORLDWIDE MEMBERSHIP(Who’s who and regular participants)
82 954 208
52
6
4
Today ’s total = 1306
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ACTIVITIES
• Task Forces
Priority topics within NEXUS are dealt with by the following Task Forces.
Market Analysis Aimed at establishing and predicting market size for existing and new applications. New report to be published in Mar ’02 entitled “NEXUS MST Market Analysis 2000-2005”
Roadmap Aimed at predicting technological and application trends. Updated Roadmap will be published in Q4 02
Long-term view Aimed at predicting trends in the period 2010-2020, including the enabling effects of nano-technologues. Review to be published in Apr ‘02
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The total MST market 2000-2005, compared to the results of the first market analysis
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MOEMS Applications
Principle Commercial ApplicationsSwitches For telecommunication routeing
Displays Head up displays, vehicle displays
Shutter arrays Switching
Tunable filters WDM / Broadband systems
Waveguides Biomedical / diagnostics
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Evolution of optical systems & related MST/ MEMS technologies
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Nilometer !Optical measurements