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© Digital Integrated Circuits2nd Interconnect
Digital Integrated Digital Integrated CircuitsCircuitsA Design PerspectiveA Design Perspective
Coping withCoping withInterconnectInterconnect
Jan M. RabaeyAnantha ChandrakasanBorivoje Nikolic
Revised from Digital Integrated Circuits, © Jan M. Rabaey
© Digital Integrated Circuits2nd Interconnect
Impact of Interconnect ParasiticsImpact of Interconnect Parasitics
• Reduce Robustness
• Affect Performance• Increase delay• Increase power dissipation
Classes of Parasitics
• Capacitive
• Resistive
• Inductive
© Digital Integrated Circuits2nd Interconnect
INTERCONNECTINTERCONNECT
© Digital Integrated Circuits2nd Interconnect
Capacitive Cross TalkCapacitive Cross Talk
X
YVX
CXY
CY
© Digital Integrated Circuits2nd Interconnect
Capacitive Cross TalkCapacitive Cross TalkDynamic NodeDynamic Node
3 x 1 m overlap: 0.19 V disturbance
CY
CXY
VDD
PDN
CLK
CLK
In1
In2
In3
Y
X
2.5 V
0 V
A non-related signal Y is routed in Metal 1 wire over the polysilicon gate of the inverter gate.
Assume that CY=6fF and CXY= (3*1*0.057+
2*3*0.054)=0.5fF
Combined with charge redistribution and clock-feed through effects, this might cause circuit failure.
© Digital Integrated Circuits2nd Interconnect
Wiring Capacitances (0.25Wiring Capacitances (0.25m CMOS)m CMOS)Rows represent the top plate, columns the bottom plate. Shaded row for fringing capacitance in aF/µm, unshaded for parallel plate capacitance (area capacitance) in aF/µm^2
smaller
40
95
85
85
85
115
© Digital Integrated Circuits2nd Interconnect
Capacitive Cross Talk: Driven NodeCapacitive Cross Talk: Driven Node
XY = RY(CXY+CY)
If the rise time is comparable or larger than the time constant,the peak value of disturbance is diminished. So we need toKeep time-constant smaller than rise time, that is to decrease eithercapacitance or resistance (keeper transistor in dynamic design).
0
0.5
0.45
0.4
0.35
0.3
0.25
0.2
0.15
0.1
0.05
010.80.6
t (nsec)
0.40.2
X
YVX
RYCXY
CY
tr↑
© Digital Integrated Circuits2nd Interconnect
Dealing with Capacitive Cross Dealing with Capacitive Cross TalkTalk Avoid floating nodes
Protect sensitive nodes
Make rise and fall times as large as possible (*?)
Do not run wires together for a long distance
Use shielding wires
Use shielding layers
© Digital Integrated Circuits2nd Interconnect
ShieldingShielding
GND
GND
Shieldingwire
Substrate (GND )
Shieldinglayer
VDD
Interleave every signal layer with a GND or VDD metal plane
© Digital Integrated Circuits2nd Interconnect
Cross Talk and PerformanceCross Talk and Performance
Cc
- When neighboring lines switch in opposite direction of victim line, delay increases
DELAY DEPENDENT UPON ACTIVITY IN NEIGHBORING WIRES
- Both terminals of capacitor are switched in opposite directions (0 Vdd, Vdd 0), Miller EffectMiller Effect
- Effective voltage is doubled and additional charge is needed (from Q=CV)
© Digital Integrated Circuits2nd Interconnect
Impact of Cross Talk on Delay Impact of Cross Talk on Delay
r is ratio between capacitance to neighbor and to GND
Activity on bus of different bits
© Digital Integrated Circuits2nd Interconnect
Encoding Data Avoids Worst-CaseEncoding Data Avoids Worst-CaseConditionsConditions
Encoder
Decoder
Bus
In
Out
It is possible to encode the data in such a way that the transitions that “victimize” delay are eliminated. This requires that the bus interface units include encode/decoder functions.
© Digital Integrated Circuits2nd Interconnect
Structured Predictable InterconnectStructured Predictable Interconnect
S
S SV V S
G
S
SV
G
VS
S SV V S
G
S
SV
G
V
Example: Dense Wire Fabric ([Sunil Kathri])Trade-off:• Cross-coupling capacitance 40x lower, 2% delay variation• Increase in area and overall capacitance Also widely used in FPGAs
V: VDD S: signal G: GND
© Digital Integrated Circuits2nd Interconnect
Interconnect ProjectionsInterconnect ProjectionsLow-k dielectricsLow-k dielectrics
Both delay and power are reduced by dropping interconnect capacitance
Types of low-k materials include: inorganic (SiO2), organic (Polyimides) and aerogels (ultra low-k)
The numbers below are on the conservative side of the NRTS roadmap
© Digital Integrated Circuits2nd Interconnect
Driving Large CapacitancesDriving Large Capacitances
V in Vout
CL
VDD
• Transistor Sizing• Cascaded Buffers
© Digital Integrated Circuits2nd Interconnect
Using Cascaded BuffersUsing Cascaded Buffers
CL = 20 pF
In Out
1 2 N
0.25 m processCin = 2.5 fFtp0 = 30 ps
F = CL/Cin = 8000fopt = 3.6 N = 7tp = 0.76 ns
(See Chapter 5)
© Digital Integrated Circuits2nd Interconnect
Delay as a Function of F and NDelay as a Function of F and N
101 3 5 7
Number of buffer stages N
9 11
10,000
1000
100
F = 100F = 1000
F = 10,000t p
/tp
0
© Digital Integrated Circuits2nd Interconnect
Output Driver DesignOutput Driver Design
Trade off Performance for Area and Energy
Given tpmax find N and f Area Energy
minminmin12
1
1
1
1...1 A
f
FA
f
fAfffA
NN
driver
22212
11
1...1 DD
LDDiDDi
Ndriver V
f
CVC
f
FVCfffE
To a first order analysis, this simply says that small sizing factor f causes large area and power consumption!!!
© Digital Integrated Circuits2nd Interconnect
Output Driver Design: design for right Output Driver Design: design for right speedspeed
Transistor Sizes for optimally-sized cascaded buffer tp = 0.76 ns
Transistor Sizes of redesigned cascaded buffer tp = 1.8 ns
0.25 m process, CL = 20 pF
Overall area of the later solution is 7 times smaller compared to the first one, while delay is increased by a factor of 2. Also, overall power dissipation of the load and buffer is reduced by 24%.
fopt = 3.6
fd = 20
© Digital Integrated Circuits2nd Interconnect
How to Design Large TransistorsHow to Design Large Transistors
G(ate)
S(ource)
D(rain)
Multiple
Contacts
small transistors in parallel
Reduces diffusion capacitanceReduces gate resistance
© Digital Integrated Circuits2nd Interconnect
Bonding Pad DesignBonding Pad DesignBonding Pad
Out
InVDD GND
100 m
GND
Out
Guard ring
© Digital Integrated Circuits2nd Interconnect
Guard ringGuard ring Guard rings are grounded p+ diffusions in a p-well and supply-connected n+ diffusions in an n-well that are used to collect injected minority carriers before they reach the base of the parasitic bipolar transistors.
They should be used surrounding the NMOS/PMOS transistors in the final stage of the output pad driver.
Used a lot in analog VLSI design.
© Digital Integrated Circuits2nd Interconnect
Chip PackagingChip Packaging
ChipL
L ´
Bonding wire
Mountingcavity
Leadframe
Pin
•Bond wires (~25m) are used to connect the package to the chip
• Pads are arranged in a frame around the chip
• Pads are relatively large (~100m in 0.25m technology)
•Many chips areas are ‘pad limited’
© Digital Integrated Circuits2nd Interconnect
Pad FramePad Frame
Layout Die Photo
© Digital Integrated Circuits2nd Interconnect
Tristate BuffersTristate Buffers Most of the driver circuits have been simple inverters.
Tristate buffers is a variant. Suppose that one device is sending information on the bus, all other transmitting devices should be disconnected from the bus. This can be achieved by putting the output buffers of those devices in an high-impedance state Z that effectively disconnects the gate from the output wire.
© Digital Integrated Circuits2nd Interconnect
Tristate BuffersTristate Buffers
InEn
En
VDD
Out
Out = In.En + Z.En
VDD
In
En
En
Out
Increased output drive
© Digital Integrated Circuits2nd Interconnect
INTERCONNECTINTERCONNECT
© Digital Integrated Circuits2nd Interconnect
Impact of ResistanceImpact of Resistance Impact of resistance is commonly seen
in power supply distribution: IR drop Voltage variations Delay increases
Power supply is distributed to minimize the IR drop and the change in current due to switching of gates
© Digital Integrated Circuits2nd Interconnect
IR Introduced NoiseIR Introduced Noise
M1
X
I
R9
RΔV
f pre
ΔV
VDD
VDD - ΔV
I
Ohmic voltage drop on the supply rails reduces the noise margins
A 2cm long, 1 µm wide Vdd or Gnd wire with 1mA current and sheet resistance of 0.05 Ohm/□ gives a voltage drop of 1V.
© Digital Integrated Circuits2nd Interconnect
Power DistributionPower Distribution Low-level distribution is in Metal 1
Power is ‘strapped’ in higher layers of metal.
The spacing is set by IR drop, electromigration, inductive effects
Always use multiple contacts on straps
© Digital Integrated Circuits2nd Interconnect
Power and Ground DistributionPower and Ground Distribution
GND
VDD
Logic
GND
VDD
Logic
GND
VDD
(a) Finger-shaped network (b) Network with multiple supply pins
© Digital Integrated Circuits2nd Interconnect
3 Metal Layer Approach (EV4)3 Metal Layer Approach (EV4)3rd “thick” metal layer added to the
technology for EV4 designPower supplied from two sides of the die via 3rd metal layer
2nd metal layer used to form power grid
90% of 3rd metal layer used for power/clock routing
Metal 3
Metal 2
Metal 1
Courtesy Compaq
© Digital Integrated Circuits2nd Interconnect
4 Metal Layers Approach (EV5)4 Metal Layers Approach (EV5)4th “thick” metal layer added to the
technology for EV5 designPower supplied from four sides of the die
Grid strapping done all in metal
90% of 3rd and 4th metals used for power/clock routing
Metal 3
Metal 2
Metal 1
Metal 4
Courtesy Compaq
© Digital Integrated Circuits2nd Interconnect
2 reference plane metal layers added to thetechnology for EV6 designSolid planes dedicated to Vdd/Vss
Significantly lowers resistance of gridLowers on-chip inductance
6 Metal Layer Approach – EV66 Metal Layer Approach – EV6
Metal 4
Metal 2Metal 1
RP2/Vdd
RP1/Vss
Metal 3
Courtesy Compaq
© Digital Integrated Circuits2nd Interconnect19
ASP DAC 2000
Power Dissipation TrendsPower Dissipation Trends
Power consumption is increasingPower consumption is increasing Better cooling technology neededBetter cooling technology needed
Supply current is increasing faster!Supply current is increasing faster!
OnOn--chip signal integrity will be a major chip signal integrity will be a major issueissue
Power and current distribution are criticalPower and current distribution are critical
Opportunities to slow power growthOpportunities to slow power growth Accelerate Accelerate VddVdd scalingscaling
Low Low κκ dielectrics & thinner (Cu) dielectrics & thinner (Cu) interconnectinterconnect
SOI circuit innovations SOI circuit innovations
Clock system designClock system design
micromicro--architecturearchitecture
Power Dissipation
020406080
100120140160
EV4 EV5 EV6 EV7 EV8
Po
we
r (W
)
0
0.5
1
1.5
2
2.5
3
3.5
Vol
tage
(V
)
Supply Current
0
20
40
60
80
100
120
140
EV4 EV5 EV6 EV7 EV8
Curr
ent (
A)
0
0.5
1
1.5
2
2.5
3
3.5
Vo
ltag
e (
V)
© Digital Integrated Circuits2nd Interconnect
Resistance and the Power Resistance and the Power Distribution Problem: sizingDistribution Problem: sizing
Source: Cadence
• Requires fast and accurate peak current predictionRequires fast and accurate peak current prediction• Heavily influenced by packaging technologyHeavily influenced by packaging technology
BeforeBefore AfterAfter
© Digital Integrated Circuits2nd Interconnect
Electromigration (1)Electromigration (1)
Limits dc-current to 1 mA/m
The current density in a metal wire is limited due to an effect called electromigration, which eventually causes the wire to break or to short-circuit to another wire.
Line open failure
© Digital Integrated Circuits2nd Interconnect
Electromigration (2)Electromigration (2)
Open failure in contact
Average current density and temperature are two main factors
© Digital Integrated Circuits2nd Interconnect
Resistivity and PerformanceResistivity and Performance
0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 50
0.5
1
1.5
2
2.5
time (nsec)
volta
ge
(V
)
x= L/10
x = L/4
x = L/2
x= L
0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 50
0.5
1
1.5
2
2.5
time (nsec)
volta
ge
(V
)
x= L/10
x = L/4
x = L/2
x= L
Diffused signal Diffused signal propagationpropagation
Delay ~ LDelay ~ L22
CN-1 CNC2
R1 R2
C1
Tr
Vin
RN-1 RN
The distributed rc-lineThe distributed rc-line
© Digital Integrated Circuits2nd Interconnect
Driving an RC-lineDriving an RC-line
Vi n
Rs Vo ut
(rw,cw,L)
© Digital Integrated Circuits2nd Interconnect
The Global Wire ProblemThe Global Wire ProblemChallenges No further improvements to be expected after the
introduction of Copper (superconducting, optical?)
Design solutions Use of fat wires Insert repeaters — but might become prohibitive (power,
area) Efficient chip floorplanning
Towards “communication-based” design How to deal with latency? Is synchronicity an absolute necessity?
© Digital Integrated Circuits2nd Interconnect
Interconnect Projections: CopperInterconnect Projections: Copper Copper is planned in full sub-0.25
m process flows and large-scale designs (IBM, Motorola, IEDM97)
Cu ~ 2.2 -cm vs. 3.5 for Al(Cu) 40% reduction in resistance
Electromigration improvement; 100X longer lifetime (IBM, IEDM97) Electromigration is a limiting factor
beyond 0.18 m if Al is used (HP, IEDM95)
Vias
© Digital Integrated Circuits2nd Interconnect
Interconnect:Interconnect:# of Wiring Layers# of Wiring Layers
# of metal layers is steadily increasing due to:
• Increasing die size and device count: we need more wires and longer wires to connect everything
• Rising need for a hierarchical wiring network; local wires with high density and global wires with low RC
substrate
poly
M1
M2
M3
M4
M5
M6
Tins
H
WS
= 2.2 -cm
0.25 m wiring stack
Minimum Widths (Relative)
0.0
0.5
1.0
1.5
2.0
2.5
3.0
3.5
M5
M4
M3
M2
M1
Poly
Minimum Spacing (Relative)
0.0
0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0
M5
M4
M3
M2
M1
Poly
© Digital Integrated Circuits2nd Interconnect
Diagonal WiringDiagonal Wiring
y
x
destination
Manhattan
source
diagonal
• 20+% Interconnect length reduction• Clock speed Signal integrity Power integrity • 15+% Smaller chips plus 30+% via reduction
Courtesy Cadence X-initiative
The main problem is that incorporating diagonal design in Design Automation tools is harder
© Digital Integrated Circuits2nd Interconnect
Reducing RC-delayReducing RC-delay
Repeater
Optimal number of wire segments for a long wire!
Lcrit=L / M
AS inverter chain, the optimum is achieved when the delay of each wire segment is equal to that of a repeater!
© Digital Integrated Circuits2nd Interconnect
Wire pipeliningWire pipelining
Reg-
ister
Reg-
ister
Reg-
ister
clk
• Even with repeater, wire delay may still be larger than the clock cycle
• To accommodate this delay with GHz clock, wire pipelining techniques can be used
© Digital Integrated Circuits2nd Interconnect
Delay in Transmission Gate NetworksDelay in Transmission Gate NetworksV 1 V i-1
C
2.5 2.5
0 0
V i V i+1
CC
2.5
0
V n-1 V n
CC
2.5
0
In
V 1 V i V i+1
C
V n-1 V n
CC
In
R eqR eq R eq R eq
CC
(a)
(b)
C
R eq R eq
C C
R eq
C C
R eq R eq
C C
R eq
C
In
m
(c)
© Digital Integrated Circuits2nd Interconnect
Delay OptimizationDelay Optimization
© Digital Integrated Circuits2nd Interconnect
Resistivity and PerformanceResistivity and Performance The signal delay in interconnect has been dominated by RC if the signal frequency is not too high.
In modern design, average length of global wires has been increasing.
At the same time, the average delay of individual gate goes down (since parasitics reduces).
This leads to a strange situation that it may take multiple clock cycles to transport a global signal to long distance.
Accurate synchronization becomes a big challenge (the timing issues we discussed before).