Post on 15-Apr-2017
Welcome to
Paper Presentation on
MEMS TECHNOLOGYBy
Chavan Mayuri Sanjay
Department of Electronics and Telecommunication EngineeringAnnasaheb Dange College of Engineering and Technology, Ashta
OUTLINE• MEMS Introduction• Sensor• Fabrication• MEMS manufacturing technology• Packaging• Advantages• Disadvantages• Application• Conclusion• Reference
INTRODUCTION
• MEMS is a acronym for micro-electro-mechanical system
• It is used to create tiny integrated devices
• Ability to scence, control and actuate
• MEMS is the promising technology in 21th century
WHY MEMS SENSOR?
• It measures physical quantity and convert into it into electronic signal
• Used to scence changing parameter
• Small in size
• Have lower power consumption
• More sensitivity to input variation
• Less invasive due to mass production
FABRICATION
Material used are: • Silicon
• Polymer • Metal
• Ceramic
Basic Process
Deposition Patterning Etching
MEMS MANUFACTURING TECHNOLOGY
• Bulk Micromachining
• Surface Micromachining
• LIGA
BULK MICROMACHINING• This technique involves removal of substrate material
• Bulk micromachining techniques are:
Wet etching
Dry etching
SURFACE MICROMACHINING• It enables fabrication of complex integrated structure
• Widely used technique is Polysilicon surface micromachining
• Structure thickness is smaller than 10 μm
LIGA• LIGA is a German acronym standing for lithographie,
galvanoformung (plating), and abformung (molding).
PACKAGING • Protect the sensor from external influences and
environmental effect
• Protect the environment from presence of the sensor
• Provide controlled interface between sensors
• Standard IC Packages: Ceramic Packages, Plastic Package, Metal Packages
ADVANTAGES
• Smaller package size
• Less power consumption
• Easy to integrate into system or modify
• Lighter weight
• Higher output signal
LIMITATIONS
• It is very small to trace out
• Expensive and Complex Packaging
APPLICATIONS
In medical science
• Pressure sensor
• Inertial sensor
• Sight for the blind
In marine science
CONTINUE….
Applications in marine military operation
Industrial Market
Communication
FUTURE SCOPE• Access to Foundries
• Design, Simulation and Modeling
• Packaging and Testing
• Standardization
• Education and Training
CONCLUSION• MEMS promises to be an effective technique of
producing sensors of high quality, at lower costs.
• Thus I can conclude that the MEMS can create a proactive computing world, connected computing nodes automatically, acquire and act on real-time data about a physical environment, helping to improve lives, promoting a better understanding of the world and enabling people to become more productive.
REFERENCE1. Microsensors , Muller, R.S., Howe, R.T., Senturia , S.D., Smith, R.L., and White, R.M. [Eds.], IEEE Press, New York, NY, 1991.
2. Micromechanics and MEMS: Classic and Seminal Paper to 1990, Trimmer, W.S., IEEE Press, New York, NY, 1997.
3. Journal of Micro-electro-mechanical-Systems(http://www.ieee.org/pub_preview/mems_toc.html)
4. Journal of Micromechanics and Microengineering(http://www.iop.org/Journals/jm)