Post on 24-Jan-2021
Transaction Information
ToolId SNK521ToolStatus Connected IdleLocation DresdenWaferSize 300 mmFabSection Clean
General Product Information
VendorSupplier DAINIPPON SCREEN MFG. CO., LTD.Model SCREEN SU3100 [MOL SW-CLEAN]Vintage 2011SerialNo 530L00321AAssetDescription SNK521-T DNS SU3100 Single Wafer
CleanSoftwareVersion 267102CIM GEMProcess DNS-SU3100-8ch_MoL-
SWC_SNK52x
Hardware Configuration (Fab)
SystemType Description Quantity StatusMain System SCREEN SU3100 1 OK Factory Interface FOUP 4 OK Handler System Indexer-Robot => Yaskawa XU-
RC350D-K011
Handler System Shuttle-Robot => Yaskawa XU-ACT070V-A00
1
Handler System Center-Robot => Yaskawa XU-RC625L-A02
1
Options SystemOthersOthers
Hardware Configuration (Subfab / Auxilliary Units)
Description Quantity StatusChemical Cabinet HT-H2SO4
1 OK
Chemical Cabinet ACT N-311
1 OK
Chemical Cabinet SSTA2
1 OK
Chemical Cabinet dHF
1 OK
Chemical Cabinet H2SO4
1 OK
Chemical Cabinet e-Folw
1 OK
DDI NH4OH 1 OK DDI H2O2 1 OK DDI H2O2 (for hot HT-SPM)
1 OK
DDI HF 1 OK DDI H2O2 (for SPM)
1 OK
Missing/Faulty Parts / Accesorries List
Description Quantitynone 0
Tool Pictures
general NONENo Picture
hardwarefab NONE
hardwarefab NONE
hardwarefab NONE
hardwarefab NONE
hardwarefab NONE
hardwarefab NONE
hardwarefab NONE
hardwarefab NONE
hardwarefab NONE
hardwarefab NONE
hardwarefab NONE
hardwarefab NONE
hardwarefab NONE
missingparts NONENo Picture
hardwaresubfab NONENo Picture
manufactureserial SNK521 Manufacturer Serial Number Plate
Additional Configuration Files
11 11
Spin POS. 1 2 3 4 5 6 7 8
Process Module HMP1 HMP2 HMP3 HMP4 HMP5 HMP6 HMP7 HMP8
Chamber configuration
Chamber material FM-PVC FM-PVC HALAR HALAR FM-PVC FM-PVC FM-PVC FM-PVC
FFU PTFE PTFE PTFE PTFE PTFE PTFE PTFE PTFE
Air/Liuid Separetion Box FM-PVC FM-PVC PTFE PTFE PTFE PTFE PTFE PTFE
Cup / Splash guard Shape (Type) Multi Cup Multi Cup Multi Cup Multi Cup Multi Cup Multi Cup Multi Cup Multi Cup
Material PTFE PTFE PTFE PTFE PTFE PTFE PTFE PTFE
Wafer Chuck Shape 6 Pin 6 Pin 6 Pin 6 Pin 6 Pin 6 Pin 6 Pin 6 Pin
Material ETFE-CB ETFE-CB ETFE-CB ETFE-CB PFA-CF PFA-CF PFA-CF PFA-CF
IPA measures
Shield Plate Shape Bevel Bevel Bevel Bevel Bevel Bevel Bevel Bevel
Material HT-PVC HT-PVC PCTFE PCTFE HT-PVC HT-PVC HT-PVC HT-PVC
Nozzle CO2-Water CO2-Water CO2-Water CO2-Water CO2-Water CO2-Water CO2-Water CO2-Water- - - - - - - -N2 N2 N2 N2 N2 N2 N2 N2
Scan Arm #1 Nozzle #1 No use No useCO2-Water
Fixed Nozzle
CO2-Water
Fixed NozzleNo use No use CO2-Water CO2-Water
Nozzle #2 No use No use - - No use No use W WNozzle #3 dHF dHF - - (DDI) - - - - - - - -
- - - - - - - -CO2-Water CO2-Water - - CO2-Water CO2-Water - -
Scan Arm #2 #1 Nanospray1 CO2-Water CO2-Water CO2-Water CO2-Water CO2-Water CO2-Water
SC1(DDI SC1(DDI
SC1 SC1 - -
- -SST-A2
BackupSST-A2 - - - -
#2 Cover Rinse SC1(DDI SC1(DDI
SC1 SC1
- -SST-A2
BackupSST-A2 - - - -
CO2-Water CO2-Water CO2-Water CO2-Water CO2-Water CO2-Water - -
Scan Arm #3 Nozzle #1 No use No use ACT N-311ACT N-311
BackupSPM SPM HT-SPM HT-SPM
Nozzle #2 - -SST-A2
BackupSST-A2 - - - -
Backside Nozzle #1: HF 49% (CC4 HF 49% (CC4
SC1(DDI) SC1(DDI) W W
#2: dHCL (DDI dHCL (DDISST-A2
BackupSST-A2 - - - -
#3: SC1(DDI SC1(DDI - - - - - -#4: - - - - - - - -#5: - - - - - - - -#6: CO2-Water CO2-Water CO2-Water CO2-Water CO2-Water CO2-Water CO2-Water CO2-Water
N2 N2 N2 N2 N2 N2 N2 N2
Facility
Drain Line #10: Reclaim applicable HF 49% (CC4 HF 49% (CC4 ACT N-311ACT N-311
Backup- - - -
HF drain HF drain Separetion Box Separetion Box Separetion Box Separetion Box - -
#20: Reclaim applicable - - SPM SPM - -
Separetion Box Separetion Box Separetion Box Separetion Box Separetion Box Separetion Box Separetion Box Separetion Box
#40: Air/Liquid Separation Box - - ACT N-311ACT N-311
Backup- -
SC1 drain SC1 drain SC1 drain SC1 drain - -
Acid drain
Rinse drain
Air/Liuid
Separetion Box
Acid drain
Rinse drain
Air/Liuid
Separetion Box
Solvent drain
Acid drain
Rinse drain
Air/Liuid
Separetion Box
Solvent drain
Acid drain
Rinse drain
Air/Liuid
Separetion Box
Acid drain
Rinse drain
Air/Liuid
Separetion Box
Acid drain
Rinse drain
Air/Liuid
Separetion Box
Acid drain
Rinse drain
Air/Liuid
Separetion Box
Acid drain
Rinse drain
Air/Liuid
Separetion Box
Exhaust Line Exhaust Switiching Box * *
Acid / Alkali Exhaust * * * * * *
Acid / Alkali / IPA Exhaust
Acid / Organic Exhaust * *
Organic Exhaust
DIW * * * * * * * *
Hot-DIW user facility * * * * * *
CO2-Water @ 0.1 ~ 1.0 MΩ・cm±15% * * * * * * * *
O3-WaterChemical
#1: dHF(1:20~100)
@ No Temp. Control* *
#2: SC1
H2O2:DIW = 1:20~100
NH4OH:DIW = 1:20~100
Hot-DIW
@ No Temp. Control
* * * *
# :
* *
# :
* *
Chemical Side Cabinet #1: HT-H2SO4 @ 185 * *
from user facility #2:
Chemical Cabinet #2 #1: ACT N-311 @ 40-80 * *
CC2 #2:
Chemical Cabinet #3 #1: SST-A2 @ 40-80 * *
CC3 #2:
Chemical Cabinet #4 #1: HF(49%) @ RT-30 * *
CC4 #2:
Chemical Cabinet #5 #1: H2SO4 @ 50-90 * *
CC5
Special Remark #1: SPM direct drain to facility * *
#2: Photo Ionizer Soft X-ray
#3: Fire Extinguisher
#4: Exhaust piping Materical : PP * *
#5:HT-SPM drain cooling unit * *#6:
#7:
Chemical DDI
from user facility
HF(5.1%)*1
NH4OH 29% *1
H2O2 31% *1
Filter
QCPY 30M 3S
0.03μm
*1: Chemical return
12 12
2-6. Ancillary units
2-6-1. Chemical cabinet
Cabinet CC 1 CC4 eFLOW
Chemical HF(49%) CO2-Water Body material FM-PVC S.S.304 S.S.304 FM-PVC FM-PVC FM-PVC S.S.304 S.S.304
Destination MPC7~8 ~ ~ MPC1~2 MPC5~6 MPC1~8
CSB #1:
#2:
#3:
Mixing tank Capacity 40Liter 40Liter 40Liter 20Liter 20Liter 180×350×410 180×350×410Material PTFE PTFE PTFE PTFE PTFE
Mixing valve or Measurement pump Fill Direct feed Direct feed Direct feed Direct feed Direct feed
Mixing ratio Premix Premix Premix Premix Premix
Process Temp. Temp. setting 185 50 40 RT-30 50-90Resistance raito
0.1~1.0M
ohm*cm
(Celsius degree) Accuracy (While Tank Is Idle) +/- 10 +/- 5 +/- 5 +/- 05 +/- 5 +/- 15%
Temperature Control Lamp heater * *
Electric Temp. Controller *
Resistance heater * *
Re-circulation Pump * * * * * * *
& Dispence FilterQCVZ ATM 4S
0.05μm
LDFVT1GPDL16
E71-K3
0.05μm
LDFVT1GPDL16
E71-K3
0.05μm
QCVZ ATM 4S
0.05μm
QCVZ ATM 4S
0.05μm
Functions Filter housing Disposable Disposable Disposable Disposable Disposable
Chemical reclaim * * *
Chemical Sampling * * * *
Concentration Monitor
Drain Functions Gravity * * * * * * * *
Drain Line #1: DIW * * * * * * * *
#2: Alkali
#3: Acid * * * *
#4: Organic solvent * * *
#5: IPA
Exhaust Line #1: Acid Exhaust * * * *
#2: Alkali Exhaust
#3: Organic solvent Exhaust * * *
#4: General *
N2 *
CO2 *
DIW * * * * * *
Hot-DIW user facility
Cooling Water *
Chemical flom Facility #1: H2SO4 (96%) * *
#2: HF(49%) *
#3:
#4:
#5:
#6:
Special Remark #1: Fire extinguisher
#2: Chemical discharge * * * * *
#3: Mixing tank N2 purge *
#4: DIW return * * * * *
#5: Chemical return
#6: CSU/Facility supply switching * *
#7:
#8: