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Embedded Package TechnologiesAustin CTEA May 2017 Mark Gerber

Director, Engineering/Tech Promotion‐Flip Chip/Adv. Interconnect

CT Chiu ‐ aEASIChien‐Fan Chen ‐ SESUB

ASE Global Inc.May  2017

© 2015 ASE Group. All rights reserved. 1ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

Contents

1

Interconnect Evolution & ApplicationsEmbedded Packaging Application and OptionsAdvantages of Embedded PackagingSESUB – OverviewaEASI – OverviewSummary

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Package Interconnect Evolution

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Die Embedding Applications & Options

Embedded Packaging

Power/Analog Devices

SiP Module

SolutionsBluetooth/Wifi

Modules

Substrate Based Embedding‐ Driver‐ Size/Performance

Hybrid Substrate/Lead‐frame Embedding ‐ Driver ‐ Power/Thermal/Performance

Fan Out Based Embedding (Chip First/Last)‐ Driver‐ Die Size/Performance

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uPower Module

IPM &SMPS

IGBT HousingModule

Embedded Inductor & Capacitors(<40V, <10A)

(e. g. Step-Down, Buck-Boost, LED Drivers & Battery Chargers)

Multichip as IGBT + Diode + HVIC + LVIC(<600V, <30A)

for AC/DC converter in white goods,Industrial motors Etc.

BGA / LGA Module

High Reliability / High Power Module(600V~1200V / 1200V~3500V, Upto 100Kw)

DC/DC Converter / DC-AC Inverter in automotive, (H)EV, Power Train etc.

IPM : Intelligent Power ModuleSMPS : Switching Mode Power Supply

Housing Module

DIP (Dual In-line PKG) IPM

4

Power Packaging Examples

Multichip modules(<220V, <20A)

for AC/DC converter in white goods,Industrial motors Etc.

Mid-Power Modules with Cu-clip & Al wedge bond

ChipChip

Mid-Power Module

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Benefits of Embedded Packaging

Miniaturization & Design Flexibility‐ Embedded chip enables more space for other components or shrinks overall solution‐ Design flexibility now shifts from 2D to 3D

Improved Thermal & Electrical Thermal Performance‐ Shorter interconnections reduce parasitics ‐minimizes distortion and power loss‐ Lower electrical & thermal resistivity in package improves power performance

Improved Reliability and mechanical stability‐ High mechanical system stability due to stable Cu interconnections.

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Electrical Considerations of Embedding

6

PIERS Proceedings, Moscow, Russia, August 2009

QFN Package Parasitic ExampleCircuit Parasitic Example

IEEE Power Electronics Magazine, 2015 Dec

Embedded Packaging Reduces Parasitics Through:‐ Shorter Connections (Example ‐ Wire Bond Elimination)‐ Shorter Distance Between Components‐ Passives closer to Chip Pads‐ Fewer Capacitance Areas

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Understanding Ohms Law for Packaging Ohm’s Law ‐ Power Loss = Current Squared x Resistance(Double the Current give you 4x the Power Loss)

Physical Explanation – The voltage difference along a wiredepends on the current – More current flowing withresistance mean more voltage (pressure of electricity ifyou like) is built up.

Practical Explanation – Power measuredin watts is equal to I x R along the path ofcircuit. If you keep resistance small, youminimize power loss as HEAT!!

**Physics Forum 2008

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Overview‐Embedded Package Solutions

SESUB‐ Semiconductor Embedded In Substrate

aEASI –Advanced Embedded Active System Integration

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SESUB – Semiconductor Embedded in Substrate

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What’s SESUB ?SESUB = Semiconductor Embedded in SUBstrate

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Product Portfolio Examples 

SESUB (Semiconductor Embedded in SUBstrate)

S‐SESUB (Simplified Semiconductor Embedded in SUBstrate)

4 Metal layers

Total thickness : 300 um typically

Core thickness : 115 um typically

Die thickness : 50um min.

IC ratio (die/substrate) : 15 ~70%

Production: Available

(Max 12x12 mm2 size experienced)

2 Metal layers / Cavity Core

Total thickness : 250um typically

Core thickness : 160 um typically

Die thickness : 100um Typically

IC ratio (die/substrate) : 30% max.

Production: Available

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SESUB Key Features

Die

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Application Space for SESUB – Some Examples

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aEASI – Power Embedding

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What’s a‐EASI ?

Leverages a Mature Organic Substrate Process Flow Modified to Meet High Power Applications Good Current Capability‐ ~60A (Integrated Power Stage Example), ~ 1.9W/mm2  300um thick Copper Heat Spreader/Electrical Pad (Back of Die) Copper Lines ~ 32um Thick for Low Resistivity Deep Full Filled Vias to Die ~ 130um Diam Ultra Low Resistivity Die Attach Interface

aEASI = Advanced Embedded Active System Integration

P1 Example‐Prod Start in 2014Thermal HS/

EMI Shield

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aEASI Product Examples

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aEASI Package Portfolio

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Deep Via (aspect ration ~1.1)Via on Die pad

(50um min in Via bottom)Thin Die (~50um)

Thick Cu (32um)Small via (Diameter = 70um)

A‐EASI Example Cross Section – Integrated Power Stage 

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aEASI Package to Die Interconnect Highlights

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aEASI P2

Bottom ViewAg SinteringPassives

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P2 BGA Reliability Summary  4.

0 m

m

4.0 mm

Bottom

Side View

22

Top

Key information   :  Size : 4.0X 4.0 +/‐ 0.1 mm , TH = 0.35 +/‐ 0.040 mm  Ball  count : 24 ( pitch: 0.5 mm) Blind Via : 0.085 mm T/S : 60/60  Cavity lead frame 

Test Description  Abbr Conditon  Readout  Result

PrecondioningAEC‐Q100 PC*

MSL3MSL Moisture soaking330℃/60%RH

Bake 125°C 24HrsMoisture Soak 168 Hrs3x Reflow (265°C+(0/‐5))

Pass 

100hrs  Pass 200hrs  Pass 500 Cycles Pass 1000 Cycles  Pass1500 Cycles  Pass1700 cycles Pass2000Cycles  Pass500 hrs Pass1000hrs  Pass1500hrs Pass2000hrs Pass

HTSTHTSTAEC‐Q100 Grade 0 150℃

"‐65~150℃

HAST AEC‐Q100

HAST 130℃/85%RH 33.3PSIA

TemperatureCyclingAEC‐Q100 Grade 0

TCT

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P2 QFN 5.

0 m

m

5.0 mm

Bottom

Side ViewTop

Key information   :  Size : 5.0X 5.0 +/‐ 0.1 mm , TH = 0.305 +/‐ 0.040 mm  Lead  count : 20 Pin (Lead pitch: 0.735/ 0.8mm) Blind Via : 0.06 mm T/S : 40/40  Laser marking on SM  Cavity lead frame  Passive/Active integrate on top is possible

Test Description  Abbr Conditon  Readout  ResultPrecondioning J‐A113/J‐020 PC*

MSL3 MSL Moisture soaking3 30℃/60%RH

Bake 125°C 24HrsMoisture Soak 168 Hrs3x Reflow (265°C+(0/‐5))

Pass 

100hrs  Pass 200hrs  Pass 500 Cycles Pass 1000 Cycles  Pass1500 Cycles  Pass1700 cycles Pass2000Cycles  Pass500 hrs Pass1000hrs  Pass

Temperature Cycling JESD22‐A104

TCT "‐65~150℃

HTST JESD22‐A103‐B

HTST 150℃

HAST J‐ESDD22‐A118

HAST 130℃/85%RH 33.3PSIA

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Electrical Performance Comparison

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Thermal Performance

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Summary Packaging interconnect technology has evolved and for the next level of minaturization

and performance enhancement, embedded packaging will be a key enabler.

Bluetooth/Wifi modules, Power Analog Devices and new SiP Modules are leveraging thistechnology to enable better size, electrical and thermal performance.

Embedding Package solutions such as SESUB and aEASI are available embedding solutionsthat have proven benefits for low and high power analog, digital and RF products.

ASE is the leader in System in Package/System in Module packaging and embedding package technology is a key tool to further enable the next generation of high performance products.

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