Cryopump 8 TM150 - PHPK Technologiesphpk.com/pdf/TM150-ANSI-v36.pdf · 2111 Builders Place |...

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Transcript of Cryopump 8 TM150 - PHPK Technologiesphpk.com/pdf/TM150-ANSI-v36.pdf · 2111 Builders Place |...

Specifications

Weight

41 lbs.(18.6 kg)

System Flange

ANSI

OD

11"

ID

7.68"

BC

9.5"

Bolt Holes

8 ea 0.875" DIA

O-Ring

8.25" ID × 0.103" thick Viton(supplied)

Crossover

155 Torr Liters

Cooldown Time

60 min to 20K w/CBST3.0 Compressor

Pumping Speed

1,700 Liters/sec.

2,500 Liters/sec.

4,500 Liters/sec.

1,400 Liters/sec.

Type

N2

H2

H2O

Ar

Capacity at 5 ×10-6 Torr

10 std Liters

1,100 std Liters

Throughputat 20K

11 Torr Liters/sec.870 scc/min.

Interfaces

Operating Orientation Any

Purge Tube Integral

Instrumentation Silicon diode standard Hydrogen vapor bulb thermometer optional

© 2016 PHPK Technologies

2111 Builders Place | Columbus OH 43204 | t: (614) 486 4750 | f: (614) 486 4950 | info@phpk.comwww.phpk.com

Roughing Flange ISO KF25

Accessory Flange KF25

Purge Tube ½" Ultra-Seal fitting. Viton O-ring Includes blank and 0.33" bored tailpieces

Pressure Relief 5 psig poppet valve with ISO KF40 flange

Helium Connections ½" Aeroquip fittings

Electrical Diode, 6-pin twist lock connector Refrigerator drive motor, 5-pin twist lock connector

(Performance data based on 60-HZ operation)

Cryopump 8" TM150 (ANSI)

8" TM150 (ANSI)

© 2016 PHPK Technologies

2111 Builders Place | Columbus OH 43204 | t: (614) 486 4750 | f: (614) 486 4950 | info@phpk.comwww.phpk.com

INSTRUMENTFEED-THRU

8" DIA

8"

9 9/16"

7 15/32"

7 11/16" ID4 15/32"

1 7/8"

7/8" DIA HOLESON 9 1/2" BC

3"

11" ODO-RING GROOVE8.252" ID x 0.1205" WIDE x 0.077" D

12 1/4"

1/2" GHeINLET

1/2"

1 1/2"

ELECTRICALCONNECTOR

KF25 AUXPORT

PURGE TUBE

5 PSIG RELIEFVALVE WITHKF40 FLANGE

KF25PUMP-OUT PORT

INSTRUMENTFEED-THRU

1/2" GHeOUTLET

Cryopump 8" TM150 (ANSI)