Post on 02-Oct-2021
Dr. Chun-Min SUCMS / ITRI
Calibration and Measurementof Micro Liquid Flow
APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
77 3 Dec. 2011, Kobe, Japan
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Calibration and Measurement of Micro Liquid Flow
Chun-Min Su, Ph.D. CMS/ITRIDec. 03, 2011 @ Kobe, Japan
APMP 2011 TCFF Workshop
Copyright 2009 ITRI
Content
IntroductionMicro Flow Measurements Micro Liquid Flow Calibration
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APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
78 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI 3
nl/min l/min ml/min
Bio-Chip SystemsMicroarraysLab-on-a-ChipNano-Jet Tech
ChemistryMicro ReactorsSynthesis
Chip FabsEvaporatorsCoating Systems
Industrial Process TechnologyMixture ProcessesCooling SystemsGluing& Sealing Automation
Analytical Instruments (Bio/Med Tech)Pipetting / DispensingLiquid Chromatography & Mass Spectrometry
MedicalDrug Dosing (Disposable & Non-Disposable)Medical Compliance MonitoringDialysisAnesthesia
nl/min l/min ml/minnl/min l/min ml/min
Bio-Chip SystemsMicroarraysLab-on-a-ChipNano-Jet Tech
Bio-Chip SystemsMicroarraysLab-on-a-ChipNano-Jet Tech
ChemistryMicro ReactorsSynthesis
ChemistryMicro ReactorsSynthesis
Chip FabsEvaporatorsCoating Systems
Chip FabsEvaporatorsCoating Systems
Industrial Process TechnologyMixture ProcessesCooling SystemsGluing& Sealing Automation
Industrial Process TechnologyMixture ProcessesCooling SystemsGluing& Sealing Automation
Analytical Instruments (Bio/Med Tech)Pipetting / DispensingLiquid Chromatography & Mass Spectrometry
Analytical Instruments (Bio/Med Tech)Pipetting / DispensingLiquid Chromatography & Mass Spectrometry
MedicalDrug Dosing (Disposable & Non-Disposable)Medical Compliance MonitoringDialysisAnesthesia
MedicalDrug Dosing (Disposable & Non-Disposable)Medical Compliance MonitoringDialysisAnesthesia
Ranges of flow required for various areas and their applications Micro Liquid Flows
Copyright 2009 ITRI
Micronozzle (Aerospace)
Inkjet printers (Computer)Micro-pump (MEMS)
Lab-on-chip (Bio) Micro-array bio-chip (Bio) Portable Insulin Injector (Medical)
Microfluidics Applications
APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
79 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI
The science and engineering of systems in which fluid behavior differs from conventional flow theory primarily due to the small length scale of the system. A collective noun, that is defined as the control and movement of microscopic quantities of fluids.
Quantity ~ nL - pL
Characteristic length ~ several μm
Low Re laminar/creeping flows C.-M. Ho, 2001
Microfluidics
Copyright 2009 ITRI
Length Scales and Applications of Microfluidics
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APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
80 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI
Length Scale--Most physical quantities are scaled differently with dimension L
Surface Tension L (F=L )Skin Friction Force L2
Volume L3
Mass L3
Length L Area L2
Heat Transfer L2
Bone Strength L2
Basic Others
Example: Weight Lifting (The pressure on muscle is the same for different body size)
Darm Lbody (Arm size is proportional to individual body size)
(Contact Area)
(Cross-section)
(Heat Flux)
Size Effect
Copyright 2009 ITRI
Surface tension force (Line force) is dominate in nano scale and important in micro scale!!
Scaling Law
APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
81 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI
Dimensionless Parameters
Knudsen number (Kn)
Reynolds number (Re)
Turbulence
1200 ~ 1600
Laminar
Transition
2100
Convention
(Zeighami et al., 2000)
L
Copyright 2009 ITRI
Slip or Non-Slip?
Hydrophilic
Hydrophobic
Non-slip
slip
Kn
Kn
(Meinhart et al., 2001)
Boundary Conditions
APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
82 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI
Content
Introduction Micro Flow Measurements Micro Liquid Flow Calibration
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Copyright 2009 ITRI 12
Micro Flow Measurements Microflow sensors
MEMS technology driven Low energy consumption Capable of measuring ultra-low flowrates
L/min nL/min Two major types
ThermalConverts flow energy into electrical signals through heat transfer Majority: thermoresistive
Non-thermalTransforms mechanical variables into electrical signals Majority: differential pressure
Oosterbroek et al., 1999
Wu et al., 2000
APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
83 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI 13
Hot-film Flow Sensors
Tai, Y.C. et al., Caltech, USA, 2000
-T0)R(T)R(T0) 0
20x2 m
Copyright 2009 ITRI 14
Hot-Wire Flow Sensors
Jiang, F. et al., Caltech, USA, 1998.
Const. Temp. mode P=V2/RConst Current mode P=IV
P=(T-T0)(A+B 1/3)U =U00.108Re-0.089
Convention
Novelty
APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
84 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI 15
Thermal Dilution Flow Sensors
Similar to Supersonic Anememotry 1 heater + 2 thermal sensor Measurement principle:
Heater H and thermal detector T2: t2=Xm/(c+V)Heater H and thermal detector T1: t1=Xm/(c-V)
V=(L/t1-L/t2)/2; c=(L/t1+L/t2)/2
Copyright 2009 ITRI 16
Time-of-Flight Flow Sensors
Time
(a)
H+
H+ H+
H+ H+ H+
Flow
Ion generator pH sensor
Channel
t
Gen
erat
or s
igna
l
(b)
Time
(a)
H+
H+ H+
H+ H+ H+
Flow
Ion generator pH sensor
H+
H+ H+
H+ H+ H+
Flow
Ion generator pH sensor
Channel
t
Gen
erat
or s
igna
l
(b)
Transit-time method: V=L/ theat generator + thermal sensor ion generator + ion detector 1 or 2 sensor/detector
APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
85 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI 17
Oosterbroek et al., 1999
Capacitance
Piezoelectric/Piezoresistive
FrontBack
C = Q / (Ed)
Differential Pressure Flow Sensors
Copyright 2009 ITRI 18Tai and Ho et al., 1995
089.0Re1079.0uu2uw
Shear Stress (Drag Force) Flow Sensors
APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
86 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI 19
Enoksson, P. et al., Royal Institute of Technology, Sweden, 1996.
Coriolis-Principle F = Mt
2
maximum flow of 2.3 ml/min.
Resonant (Coriolis Force) Flow Sensors
Copyright 2009 ITRI 20
The dimension of the flow sensor is 9 mm x 9 mm x 1 mm
Yoon, H.J., et al., Ajou Univ., Korea, 2002.
Advantages: a simple structure, no heat generation, a rapid response and no pressure loss
Based on Faradays law
Micro Electromagnetic Flow Sensors
APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
87 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI 21
(MEMS) Ultrasonic Flow Sensors
Jagannathan H. et al. 2001, IEEE Symp. Ultrasonics Takamoto M. et al. 2001, Flow Meas. and Inst.
Copyright 2009 ITRI 22
Phonon quasi-momentum Momentum transfer
crystal vibration phonon transfer potential difference
Acoustic phonon in nanotube
Liquid moleculesJ
Acoustic phonon in nanotube
Liquid moleculesJ
Carbon Nanotube Flow Sensors
6 order of magnitude metering range!
APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
88 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI 23
Non-Invasive Micro Flow Measurements
Micro Laser Doppler Velocimetry ( LDV)
Micro Particle Image Velocimetry ( PIV)
Holographic Micro Particle Image Velocimetry
Optical Doppler Tomography (ODT)
Scalar Image Velocimetry (SIV)
Molecular Tagging Velocimetry (MTV)
3D Micro-Particle Tracking Velocimetry
Stereoscopic Micro Particle Image Velocimetry
1D
2D
3D
Copyright 2009 ITRI
Content
Introduction Micro Flow Measurements Micro Liquid Flow Calibration
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APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
89 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI
Gravimetric/Weighing method Volumetric method
Time-of-flightVelocity*cross-section
Comparison method Precision fluid delivery pump Reference standard flowmeter
Calibration Methods
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Marinozzi et al., 2005 Pan et al., 2004
0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1
-1.00 -0.50 0.00 0.50 1.00r/R
U/U
c
P1P2P3CFD_P1CFD_P2CFD_P3
Copyright 2009 ITRI
Micro Flow Calibration System in Taiwan (CMS/ITRI)
Capability 0.1 L/min to 10 mL/min U95 = 0.5 % to 3.0 %
Fluid: water Flow generation
pressurized tank (with automatic pressure controller)metering pump (e.g. syringe pump)
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APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
90 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI 27
System schematic Twin-beaker covered
with low volatility oil
Twin balance design
Gravimetric calibration Method: flying-start-and-finish with dynamic weighing
Micro Flow Calibration System in Taiwan (CMS/ITRI)
Copyright 2009 ITRI
Novel Water Flow Facility in France (LNE)
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Range extension to low flow rates (10 L/h down to 1 mL/h)
Overview1 Water production, 2 Supervision and flow generation, 3 Measuring instruments
Line 1 : 1 ml·h-1 to 10 ml·h-1
Line 2 : 10 ml·h-1 to 100 ml·h-1
Line 3 : 100 ml·h-1 to 1 000 ml·h-1
Line 4 : 1 000 ml·h-1 to 10 000 ml·h-1
Flow is generated using a pressurized tank (0.1 to10 bar) and is controlled tightly by a constant upstream pressure and the selection of a well designed capillary
A clean room with controlled ambient conditions T = 20 C +/- 2 C, RH = 55 % +/- 5 %, P = Patm + 20 Pa
The temperature around the weighting cell better than 0,3 C during 30 minutes
APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
91 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI 29
Water preparation equipment1 Nitrogen bubbling tank, 2 Heating and degassing tank,3 Stock tank
Particles filteredAvoid formation of bubbles by degassing Temperature of the fluid regulated
Flow generationwater flow controlled by two devices
10 liter tank (with compressed N2)Pressure stability better than 0,05% Situated in a thermostatic chamber
10 capillaries located after the flowmeter Inner diameter: 100 m to 325 Length: 1 m to 4 m immerged in a thermostatic bath
Novel Water Flow Facility in France (LNE)
Copyright 2009 ITRI 30
Flow measurement The equipment is separated in four individual lines
1 Heat exchangers 2 Capillaries in a thermostatic bath and associated valves 3 Mass measurement: line n 2 (10 mL·h-1 to 100 mL·h-1)
Novel Water Flow Facility in France (LNE)
APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
92 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI
Flow range (goal) 0.1 m3/h to 0.00005 m3/h (1.67 L/min to 0.83 mL/min)
Fluid (goal) Light oil, kerosene
Examples of needs Fuel blender Centralized fuel supply system Evaluation of fuel efficiency
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New Calibration Facility for Small Flow of Hydrocarbon Liquid in Japan (NMIJ/AIST)
Copyright 2009 ITRI
New Calibration Facility for Small Flow of Hydrocarbon Liquid in Japan (NMIJ/AIST)
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T P
T P
T P
T P
Flow generation section Test section
DUT Checkstandard
Weighing section
Storage tank
Pump
Heatexchanger
Header
Flowcontrolvalve
Bypass to storage tank
Gravimetric calibration Method: standing-start-and-finish with static weighing
APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
93 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI
Volumetric method (1) Time-of-flight (Caltec.)
Visual detection; 50 nL/min to 1500 nL/min
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Wu et al., MEMS flow sensors for nano-fluidic applications, Sensors and Actuators A: Physical, Vol. 89(1-2), 2001
Copyright 2009 ITRI
Volumetric method (2)
Time-of-flight (Applied Biosystems) Optical detection (refractive index); 1 nL/min to 1000 nL/min
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APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
94 3 Dec. 2011, Kobe, Japan
Copyright 2009 ITRI
Volumetric method (3) Air-piston calibrator of CMS/ITRI
gas-liquid interface detection 10 nL/min to 1 mL/mintime-of-flight
0
2
4
6
8
10
0 5 10 15 20 25 30 35 40
time (sec)
Vol
tage
(V
)
Node 1 Node 2
tt
tVQ
FlowOutlet
Imped./Volt.Converter
Multiplexer
Out 2 Out 1
FlowInlet
AC
+
-
Vout
R1Rx
R2
Cx
Equivalent circuit
Copyright 2009 ITRI 36
APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities
95 3 Dec. 2011, Kobe, Japan