The top documents tagged [selectivity high]

15 Communication

15 Communication

12 views
EFFECT OF BIAS VOLTAGE WAVEFORMS ON ION ENERGY DISTRIBUTIONS AND FLUOROCARBON PLASMA ETCH SELECTIVITY* Ankur Agarwal a) and Mark J. Kushner b) a) Department.

EFFECT OF BIAS VOLTAGE WAVEFORMS ON ION ENERGY DISTRIBUTIONS AND FLUOROCARBON PLASMA ETCH SELECTIVITY* Ankur Agarwal a) and Mark J. Kushner b) a) Department.

215 views
Languages
Pages
Legal

Copyright © 2022 FDOCUMENTS