1 Resist Heating Dependence on Subfield Scheduling in 50kV Electron-beam Maskmaking S. Babin *, A.B. Kahng, I.I. Mandoiu, S. Muddu CSE & ECE Depts., University.
Mask-writing Strategies for Increased CD Accuracy and Throughput Calibrating Achievable Design Annual Review September 2003 Swamy V. Muddu, Andrew B. Kahng.
