Electrochemical formation of Porous Silicon in Room Temperature Ionic Liquid O. Raz, D. Starosvetsky and Y. Ein-Eli. Introduction: Porous Silicon (PS)
Cross-sectional view of single wafer capacitive microphone.
PROTON BEAM APPLICATIONS FOR SILICON BULK MICROMACHINING P. Nenzi 1, F. Ambrosini 1, M. Balucani 3, G. Bazzano 1, A. Klyshko 3, F. Marracino 1, L. Picardi.
Electrochemical formation of Porous Silicon in Room Temperature Ionic Liquid
