NONLINEAR DYNAMICS OF ATOMIC FORCE MICROSCOPY GIUSEPPE REGA S APIENZA U NIVERSITY OF R OME, I TALY D EPARTMENT OF S TRUCTURAL AND G EOTECHNICAL E NGINEERING.
Scanning probe microscopy (SPM) and lithography 1.Scanning tunneling microscopy. 2.Piezoelectric positioning. 3.Atomic force microscopy (AFM) overview.
