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2.008 Design & Manufacturing || Spring 2004 Course Information.
MAE 268 / MATS 254 MEMS Materials, Fabrication and Applications Spring 2005 Time and Location: Thursdays, 5 – 6:20 pm, Room: Solis 111 Instructors: Prof.
MAE 268 / MATS 254 MEMS Materials, Fabrication and Applications Spring 2009 Time and Location: Tuesday & Thursday, 11-12:20 pm, Room: SSB 106 Instructors:
MAE 268 / MATS 254 MEMS Materials, Fabrication and Applications Spring 2005
Microelectromechanical Systems (MEMS) An introduction