Micro Electro Mechanical Systems (MEMS) - Lecture 06
%%Chapter 13 MEMS Slides 110407
MEMS Sensing in Textiles
R. Barry Johnson, D.Sc. Research Professor Physics Department (A-145) Alabama A&M University P.O. Box 1268 Normal, Alabama 35762 256.372.8148 [email protected].
MEMS_and_Sensor_Trends_Smaller_Faster_and_Available_to_the_Mass_Market.pdf
Surface micromachining and Process flow part 1 Identify the basic steps of a generic surface micromachining process Identify the critical requirements.
Surface micromachining and Process flow part 1
