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I:\litho\013\Roadmap info\ITRS 07-11 1 Lithography ITWG Report for ITRS 2000 Conference December 6, 2000 Hsinchu, Taiwan.

I:\litho\013\Roadmap info\ITRS 07-11 1 Lithography ITWG Report for ITRS 2000 Conference December 6, 2000 Hsinchu, Taiwan.

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