MAGNETICALLY ENHANCED MULTIPLE FREQUENCY CAPACITIVELY COUPLED PLASMAS: DYNAMICS AND STRATEGIES Yang Yang and Mark J. Kushner Iowa State University Department.
EFFECT OF BIAS VOLTAGE WAVEFORMS ON ION ENERGY DISTRIBUTIONS AND FLUOROCARBON PLASMA ETCH SELECTIVITY* Ankur Agarwal a) and Mark J. Kushner b) a) Department.
Ion Energy Distributions from a Permanent-Magnet Helicon Thruster Francis F. Chen, UCLA Low Temperature Plasma Physics Webinar, January 17, 2014.
ELECTRON AND ION ENERGY DISTRIBUTIONS IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS
