Chapter 2 Cmos Fabrication Technology and Design Rules
1.Introduction and application. 2.Ion implantation tools. 3.Dopant distribution. 4.Mask thickness and lateral distribution. 5.Effect of channeling. 6.Damage.
Low Temperature Characteristics of ZnO Photoluminescence Spectra Matthew Xia Columbia University Advisor: Dr. Karl Johnston.
1 Overview of Fabrication Processes of MOSFETs and Layout Design Rules.
