1.Introduction and application. 2.Ion implantation tools. 3.Dopant distribution. 4.Mask thickness and lateral distribution. 5.Effect of channeling. 6.Damage.
Mitigation of fast particles from laser- produced Sn plasma for an extreme ultraviolet lithography source Y.Tao and M.S.Tillack [email protected] University.
Mechanisms of ultra-smoothing induced by ion beam erosion Randall L. Headrick, University of Vermont, DMR-0348354 Ion erosion of solid surfaces is known.
MMFW Madison, Wisconsin 6 May 2011 D.J. Den Hartog, R. M. Magee, S.T.A. Kumar, V.V. Mirnov (University of Wisconsin–Madison) D. Craig (Wheaton College)
Ion energization during magnetic reconnection in MST RFP
