mtech-vlsi
Lithography
Gyroscopes based on micromechanical systems, MEMS gyroscopes are miniaturized variant of Coriolis vibratory gyros (CVG). Miniaturization is that a vibrating.
Extreme UV (EUV) lithography 1.Overview, why EUV lithography? 2.EUV source (hot and dense plasma). 3.Optics (reflection mirrors). 4.Mask (absorber on mirrors).
MEMS and Microstructures in Aerospace Applications. Chapter 3. Mems Fabrication
Fin Fet Technology by SAMRA
Holographic printing
Mechanical Control
3 - Photoresist Technology
X-ray lithography: LIGA
IITK Recruitment Brochure 2015-16
Photonics Toolkit, Université Laval 2009 slide 1 Photonics in Florida Optics and Photonics Research at CREOL Pieter Kik, Asst.
