The top documents tagged [bpsg deposition methods]

Comparison of 100 torr and 200 torr bpsg layer deposited using sub atmospheric chemical vapour deposition (sacvd) process

Comparison of 100 torr and 200 torr bpsg layer deposited using sub atmospheric chemical vapour deposition (sacvd) process

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Comparison of 100 torr and 200 torr bpsg layer deposited using sub atmospheric chemical vapour deposition (sacvd) process

Comparison of 100 torr and 200 torr bpsg layer deposited using sub atmospheric chemical vapour deposition (sacvd) process

163 views
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