Report - Varian, Inc. Vacuum Technologies...Rotary Vane Pumps 7 Varian, Inc. Vacuum Technologies Rotary Va ne Pumps DS 402 410 (14.5) 342 (20.5) 12.3 17.4 10-4 2 x 10-3 1 x 10-2 30 350 0.5/1

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