Report - OPC Roadmap: Performance Driven InnovationC2%A0CSPENCE... · NXE:3400 High-NA NA+45% 436 g-line 13,5, EUV 1985 1990 1995 2000 2005 2010 2015 2020 KrF(248nm) ArF(193nm) EUV (13,5nm)

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