www.gaudisite.nl
Abstract
This tutorial describes the integrating value of software in
complex systems. The extensive use of software technology to
integrate other technologies has a signif- icant impact on the
product characteristics and on the product creation organi- zation
and process. This tutorial provides insight in the relation between
software and the system, and it provides insight in the
consequences for the product and the organization. Some
recommendations are provided to cope with these conse-
quences.
Distribution
This article or presentation is written as part of the Gaudí
project. The Gaudí project philosophy is to improve by obtaining
frequent feedback. Frequent feedback is pursued by an open creation
process. This document is published as intermediate or nearly
mature version to get feedback. Further distribution is allowed as
long as the document remains complete and unchanged.
October 28, 2018 status: concept version: 0.1
logo TBD
• The role of software in general
• Levels of abstraction
• Requirements perspective
• Conclusion
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Twinscan AT1100
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ASMLtwinscanPhoto
source
reticle
lens
wafer
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ASMLlithographyPrinciple
p
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ASMLstepperVsScanner
imaging alignment
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ASMLkeySpecifications
lin e
w id
m
100
1000
10
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Overlay budget (1999)
error RS
1 nm
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ASMLoverlayBudget
RS Chuck
Compartment
mirrors and IF's
ATHENA Measurement Accuracy
ATHENA Mounting Accuracy/Stability
LS setpoints
Lens Heating
Inaccurate Lens acceleration Feedforward
Wafer Expansion by Exposure
Wafer Expansion by input temperature
offset
coolplates)
Sound
Reticle Errors
Reticle Heating
Fiducial Calibration
TIS Measurement
Fiducial Stability
Fiducial Calibration
Metrology inaccuracy
Metrology Errors
HP Inaccuracy
Servo error
Chuck expansion
Chuck deformation
Illumination settings (NA )
T stability in LS lightpath
Lens Dynamics
P&T correction of Lens
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ASMLoverlayInfluenceDiagram
Exercise 1, 10 minutes
Make a 3 picture description (What, How, biggest challenge) of your
own system.
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Fab Context of Waferstepper
reticule logistics
reticule production
semiconductor design
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TSAITcontextWaferstepper
other players: equipments vendors system integrators lease
companies fab designers consultants mask makers resist makers wafer
makers OEM’s: laser intimate partners: lens business models of the
customer:
design houses foundries vertical integration
Limited number of customers; Many systems per customer
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INSEbusinessContext
managers business manager marketing manager product manager
operational manager project leader sales manager quality manager
logistics manager line manager technology manager
customer purchaser decision maker user operator maintainer
suppliers component manufacturer outsourced design
engineers system engineers experts manufacturing engineers customer
support
other government customer's customer banks, insurance
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Multitude of Disciplines
reflection
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Complexity of Waferstepper Context
managers business manager marketing manager product manager
operational manager project leader sales manager quality manager
logistics manager line manager technology manager
customer purchaser decision maker user operator maintainer
suppliers component manufacturer outsourced design
engineers system engineers experts manufacturing engineers customer
support
other government customer's customer banks, insurance
waferstepper
other players: equipments vendors system integrators lease
companies fab designers consultants mask makers resist makers wafer
makers OEM’s: laser intimate partners: lens
business models of the customer: design houses foundries vertical
integration
Limited number of customers; Many systems per customer
yield
value of performance
(MHz) CD control
key driver trade-off
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INSEcomplexity
component 1
component 4
component 3
component 2
realized
During integration numerous
problems become visible
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MSintegration
Exercise 2, 10 minutes
Make a 3 picture description (Application context, Value chain,
technologies) of your own system.
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Relative Contribution of SW
physics/chemistry, etc.
1970 2000
Tutorial Software as Integrating Technology in Complex Systems 18
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Control Hierarchy along Technology axis
sensor optical
Fe ed
legend
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RSWcontrolHierarchy
Characterization of disciplines
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RSWdisciplineCharacterization
10 0
10 1
10 6
10 5
10 4
10 3
10 2
nu m
s
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IALApyramid
100Wph
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ATpyramidExamples
components
subsystems
functions
frames motors sensors robot bolts nuts
air mounts PCBs ICs cables cabinets
OS computer disks monitor drivers
database user interface TCP/IP comms package
laser
illuminator
electronics infra
overlay CD control productivity
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ATlayers
SW implements functionality
determines emerging qualities
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TSAITlayers
Exercise 3, 10 minutes
Make a toplevel decomposition of the software in your system and
estimate the amount of software of the constituting parts
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System or Software?
to be used for
of the software
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VREQsystemOrSoftware
f de
ta ils
software requirements
system requirements
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VREQpyramid
software subsystem
operational choices synergy, tools, ...
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VREQsoftwareSubsystem
10 0
10 1
10 6
10 5
10 4
10 3
10 2
10 7
problems av
al an
ch e
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VREQdynamics
How many pages are in your Software Requirements
Specification?
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Block Diagram of a Waferstepper
laser light source
coordination
light
reticles
wafers
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FAIwaferstepperSubsystems
laser illumi-
nator lens
system
control
coordination
vertical
motion
hori-
zontal
motion
vertical
motion
hori-
zontal
motion
ethernet
VMEVME
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FAIcontrolHierarchy
performance requirements
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FAIcontrolFrequency
store
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FAIcontrolEvolution
loss of overview (150kloc fits in 1 mind, 2Mloc not)
(more than?) exponential increase of coupling
1:1 relation HW:SW becomes n:m relation
R e
lia b
ili ty
s
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FAIevolutionConsequences
Exercise 5, 10 minutes
Visualize the (SW) evolution of your system. What is your current
phase?
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Different Focus of Software and System
SW engineering focus qualities functionality maintainability
variability
concepts structure (generic) mechanisms
System engineering focus qualities productivity image quality
reliability
concerns integral design (quality, balance) system context
lifecycle operational processes
concepts domain requirements models
education principles heuristics analysis and synthesis
processes
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TSAITfocus
Registry
Application
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MVmechanismArchitecture
illuminatorlaser
sensor
NA
abberations
transmission
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TSAITphysicsView
NA abberations transmission
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TSAITphysicsAndSW
symptoms
SW is alpha tested before system integration
SW team uses own specification and design process
SW specification is in SW jargon or formalism
colocation per function, subsystem or quality
higher level processes are shared
continuous system integration
interaction between SW, HW and system engineers
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TSAITisolationSymptoms
Exercise 6, 5 minutes
What is the degree of integration or isolation of SW in your
organization?
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Different Mindsets and Characteristics
System
intangible abstract no goods flow costs "everything is
possible"
HW engineering tangible concrete goods flow costs & lead times
physics laws
product: sellable self-sustained entity operating in a broader
context
inherent performance
reliability
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