Green IT International Symposium 2008 1
The Environment Activities
in the Japanese Semiconductor Industry
Chairman of the Semiconductor Board of JEITA
Masashi Muromachi
May 2008
Tokyo, Japan
Outline of the Establishment Activities
of Green Fab in Japan(1/2)
1.Greenhouse Gas Reduction
①CO2 Emission Reduction– Improvement of the energy efficiency in factory*Cooperation with 4 Electronic and Electrical related
Associations.
– Promoting SEMI-S23 Activity (the energy savings
standardization of the semiconductor manufacture
equipments).
②PFC Emission Reduction– Installation of abatement system into the existing equipments
*Government supports this installation of abatement system. – Reduction of PFC consumption by making the optimum
process condition
Green IT International Symposium 2008 22
2. Environmental Pollutant Reduction– Survey and compliance of the domestic and oversea
regulations (RoHS, REACH, Chemical Substance Law, etc.) and policy
3. Promotion of the Efficient Use of Resources– Promotion of the waste recycling in cooperation with the
dealer
・・・Sludge, Waste Plastic, Waste Solvent, Waste Acid, etc.
4. Introducing the advanced case of the concrete
activities in Japan1) Reduction of Steam Load in Oita Factory of Toshiba
2) Implementation of large-scale energy savings measures
at Sony Semiconductor Kyushu Kagoshima Plant
3) Publication and Promotion of SEMI-S23
4) Plant of HF Production from recovered Fluorine Compound
Green IT International Symposium 2008 3
Outline of the Establishment Activities
of Green Fab in Japan(2/2)
3
1. CO2 Emission Reduction
[Voluntary Target]
35% reduction in 2010 to 1990, based on the unit of real output
*Cooperation with 4 Electronic and Electrical related Associations
2. PFC Emission Reduction
[Voluntary Target]
10% reduction in 2010 to 1995
3. Efficient Use of Resources
[Waste Recycling Rate]
10% in 1990 → 95% at present → Aming at Zero Emission
Green IT International Symposium 2008 4
Effect Target of the Establishment
of Green Fab in Japan
4
Reduction of Steam Load in Oita Factory of Toshiba(FY06 Agency for Natural Resources and Energy Chairman’s Award: Energy Saving Grand Prize)
CR air
supply
AHU 加湿空気
UPW
UPW dropping system
The
air
<Airwasher>
The air
Humidified air
Water supply nozzle
New system of air humidification
Oblique
Honeycomb
Mfg. tools
15℃~25℃
Boiler
Cooling
tower
<Cooling water
line>
<UPW line>
Cooling water tank Filtered watertank
10℃~20℃
24.0℃
31.0℃31.0℃
30.0℃
33.0℃
Reduction amount of CO2 326t/y
Newly installed
UPW
system
CR
Exhausted
heat
Improved UPW heating system
Heat e
xch
an
ger
Hea
ting
Co
olin
g
Existing air humidification system
Steam
Humidifier
AHU
The
air
Boiler
Steam Humidifier
SteamMfg. tools Boiler
Cooling
tower
<Cooling water
line>
<UPW line>
Cooling water tankFiltered water
tank
31.0℃
30.0℃
33.0℃
Consumption of steam
UPW
system
CR
Exhausted
heat
Existing UPW heating system
Waste heat emitted in the air
Collected waste heat
CR air
supply
Utilization of fuels for steamed jet mist
Industrial water
Reduction amount of CO2 1,545t/y
Naturally evaporated UPW humidifies the air. This system
works without fuels
Adjusting water
temp. at 26℃ by
steam heat
Adjusting water
temp. at 26℃ by
steam heat
Heating
Reduction
amount of
steam
10℃~20℃
Green IT International Symposium 20085
CASE1
5(Offer : Toshiba Corp.)
Green IT International Symposium 2008
Implementation of large-scale energy saving measures at Sony
Semiconductor Kyushu Kagoshima Plant - where 30 years passed since its operation launch -
(FY05 Agency for Natural Resources and Energy Chairman’s Award: Energy Saving Grand Prize)
O-AHU
AHU
5℃
9℃
Cooling and Heating System Air-conditioning System
1. Adoption of high-efficiency equipment (Sony-customized)
inverter turbo chiller, pump, motor
2. Dual cold water distribution systems:
5℃⇒ 5℃ + 9℃
3. Introduction of the integrated controller:
Optimize the COP of cooling and heating
system
Reduction of cold water transport power
Points of Implementation & Operation
Adapt the 45 degree elbow pipesinstead of the traditional 90degree elbow pipes.
Clean room
Inverterturbochiller
Cooling
tower
Cooling
tower
Cooling
towerCooling
tower
Inverterturbochiller
Inverterturbochiller
Inverterturbochiller
Introduce high-efficiency equipment and optimize the entire system
[Old System]
[New System]
Reduction of energy
24,000 t-CO2/year (17%)
Open Air
Clean roomCooling
tower
Cooling
tower
O-AHU
Turbo
chiller
5℃
Turbo
chiller
AHU
hea
t st
ora
ge
tan
k
Effect by implementation
Open Air
6
CASE2
(Offer : Sony Corp.)
• What is SEMI-S23?
「a guide of consumption of energy, utilities and
materials used by semiconductor manufacturing
equipments」
・・・Exhaust, Vacuum, Cooling Water, UPW, Heat load, N2, etc.
• 90% of energy consumption in factory →Equipments
*Standardization of energy consumption
→ Controlling the energy of equipment
• Starting on the initiative of Japan
*Standard made by JEITA, SEMI and other related
associations
*Study of spec. begun by the equipment makers,
including ones in Europe and the U.S.
Publication and Promotion of SEMI-S23
Green IT International Symposium 2008 7
CASE3
7
Rotary kiln
(200℃ or less)
PP PP
HF
Absorption tower
Ca
SO
4
5%
-O
leu
m
Recovered CaF2
Ca
F2 HF
HF
5% -Oleum
Measurement tank
by-product
gypsum
Measurement tank
Fixed quantity supply machine
Metering pump
Mixture and reactive machine
FeederHF sol
Hot wind
ロータリーキルン(2mφ x12m)
無水フッ酸発生設備
石膏処理設備
HF生産能力=1,500トン/年2007年4月より稼働
CaF2+H2SO4→2HF+CaSO4
NEDO補助金事業で実用化開発(H17年度産業技術実用化開発補助事業)
Green IT International Symposium 2008 8
CASE4
[ Pilot Plant of HF Production ]
Plant of HF Production from recovered Fluorine Compound
(MORITA CHEMICAL INDUSTRIES CO., LTD.)
8
15th Annual Conference 2008 ISESH Date : in June 2008
• 22nd (Evening) : Welcome reception / Registration
• 23rd to 25th : General & Technical sessions
• 26th (Morning) : Technical Tour
Place
• Hotel Royton Sapporo (Hokkaido, Japan)
Topics
• PFC Emission Reduction
• Energy Conservation
• Chemical Management
• PFOS
• Waste & Water Management & Minimization
• LCA & Green IT
• Environment & Risk Management
• Legislation
• ESH Nano-Technology
• Others
Green IT International Symposium 2008 99
Green IT International Symposium 2008 10
・Achievement of the energy savings target by Green Fab
*CO2 Emission Reduction:▲35%(1990 → 2010)
・Cooperation with 4 Associations
*PFC Emission Reduction:▲10%(1995 → 2010)
・Three contributions to energy savings,
including Green Fab
*Improvement of energy efficiency in our factories
*Lowering the electrical power of our products
*Assisting energy savings of end products and
social systems
・Availability to the performance evolution of
end products and social systems.
・Growth of the semiconductor industry
for the healthy growth of our Green Society.
Today’s Message
10
Green IT International Symposium 2008 11
END
Thank you for your attention
11(Source : WSC)
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